JPS633200Y2 - - Google Patents

Info

Publication number
JPS633200Y2
JPS633200Y2 JP1981053948U JP5394881U JPS633200Y2 JP S633200 Y2 JPS633200 Y2 JP S633200Y2 JP 1981053948 U JP1981053948 U JP 1981053948U JP 5394881 U JP5394881 U JP 5394881U JP S633200 Y2 JPS633200 Y2 JP S633200Y2
Authority
JP
Japan
Prior art keywords
tube
cooled
container
insulating
cooling liquid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1981053948U
Other languages
English (en)
Japanese (ja)
Other versions
JPS57166398U (cs
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1981053948U priority Critical patent/JPS633200Y2/ja
Publication of JPS57166398U publication Critical patent/JPS57166398U/ja
Application granted granted Critical
Publication of JPS633200Y2 publication Critical patent/JPS633200Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Particle Accelerators (AREA)
  • Cooling Or The Like Of Electrical Apparatus (AREA)
JP1981053948U 1981-04-14 1981-04-14 Expired JPS633200Y2 (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1981053948U JPS633200Y2 (cs) 1981-04-14 1981-04-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1981053948U JPS633200Y2 (cs) 1981-04-14 1981-04-14

Publications (2)

Publication Number Publication Date
JPS57166398U JPS57166398U (cs) 1982-10-20
JPS633200Y2 true JPS633200Y2 (cs) 1988-01-26

Family

ID=29850561

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1981053948U Expired JPS633200Y2 (cs) 1981-04-14 1981-04-14

Country Status (1)

Country Link
JP (1) JPS633200Y2 (cs)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5434513B2 (cs) * 1972-11-27 1979-10-27
JPS5434676A (en) * 1977-08-23 1979-03-14 Fujitsu Ltd Vapor growth method and apparatus for high-purity semiconductor layer

Also Published As

Publication number Publication date
JPS57166398U (cs) 1982-10-20

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