JPS63318501A - Production of color separation filter - Google Patents
Production of color separation filterInfo
- Publication number
- JPS63318501A JPS63318501A JP62154748A JP15474887A JPS63318501A JP S63318501 A JPS63318501 A JP S63318501A JP 62154748 A JP62154748 A JP 62154748A JP 15474887 A JP15474887 A JP 15474887A JP S63318501 A JPS63318501 A JP S63318501A
- Authority
- JP
- Japan
- Prior art keywords
- cyan
- film
- element film
- yellow
- thickness
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title description 10
- 238000000926 separation method Methods 0.000 title description 2
- 238000004043 dyeing Methods 0.000 abstract description 24
- 239000000463 material Substances 0.000 abstract description 19
- 239000000758 substrate Substances 0.000 abstract description 7
- 239000011521 glass Substances 0.000 abstract description 6
- 230000003595 spectral effect Effects 0.000 abstract description 5
- 239000007788 liquid Substances 0.000 abstract description 2
- 230000002093 peripheral effect Effects 0.000 abstract 1
- 238000000034 method Methods 0.000 description 8
- 230000000694 effects Effects 0.000 description 3
- 230000001681 protective effect Effects 0.000 description 3
- 238000009825 accumulation Methods 0.000 description 2
- 206010047571 Visual impairment Diseases 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 230000007261 regionalization Effects 0.000 description 1
- 239000012192 staining solution Substances 0.000 description 1
Landscapes
- Optical Filters (AREA)
- Color Television Image Signal Generators (AREA)
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
本発明は単板式固体カラーカメラに用いることのできる
色分離フィルタ（以下、色フィルタと略す）の製造方法
に関するものである。DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to a method of manufacturing a color separation filter (hereinafter abbreviated as color filter) that can be used in a single-plate solid-state color camera.
従来の技術
近年、単板式カラー固体カメラの中で、フィ〒ルド蓄積
モードカラー固体撮像素子を用いたものは、低残像で優
れた特性を有し、好評を得ている。BACKGROUND OF THE INVENTION In recent years, among single-chip color solid-state cameras, those using field accumulation mode color solid-state imaging devices have been well received due to their low afterimage and excellent characteristics.
出願人は既に、良好な色再現性および画質を得ることが
できるフィールド蓄積モードカラー固体撮像素子用の色
フィルタを、特願昭６２−３３８７９号で提案した。The applicant has already proposed, in Japanese Patent Application No. 33879/1983, a color filter for a field accumulation mode color solid-state image pickup device that can provide good color reproducibility and image quality.
以下、この既提案の色フィルタについて説明する。This already proposed color filter will be explained below.
第２図ａに色フィルタの基本色配置例の平面図を示す。FIG. 2a shows a plan view of an example of basic color arrangement of color filters.
色配置は４行２列を基本構成とし、たとえば、その１列
をマゼンタ要素（Ｍｇ）、シアン要素（Ｃｙ）、マゼン
タ要素（Ｍｇ）、黄要素（Ｙｅ）、同２列を緑要素（Ｇ
）、黄要素（Ｙｅ）。The basic color arrangement is 4 rows and 2 columns, for example, one column is magenta element (Mg), cyan element (Cy), magenta element (Mg), yellow element (Ye), and the second column is green element (G
), yellow element (Ye).
緑要素（Ｇ）、シアン要素（Ｃｙ）で、各々、構成する
。第２図すに同図ａの２列部のＢ−Ｂ！に沿った断面図
を示す。第２図すで、■はシアン要素、２は黄要素、３
は中間膜、４は保護膜、５は透明ガラス基板である。こ
れらの図かられかるようにシアン要素１と黄要素２０重
ね合わせ部が緑要素となる。この色フィルタの場合、シ
アン要素において、置型素上のシアン要素膜が他部、す
なわち、単独のシアン要素部分の膜厚と比較して薄い。Each is composed of a green element (G) and a cyan element (Cy). In Figure 2, B-B in the second row of Figure a! A cross-sectional view along the line is shown. In Figure 2, ■ is a cyan element, 2 is a yellow element, and 3 is a cyan element.
4 is an intermediate film, 4 is a protective film, and 5 is a transparent glass substrate. As can be seen from these figures, the overlapping portion of cyan element 1 and yellow element 20 becomes a green element. In the case of this color filter, in the cyan element, the cyan element film on the stationary element is thinner than the other part, that is, the film thickness of the single cyan element part.
発明が解決しようとする問題点
しかしながら、色フイルタ作製時において、上記したシ
アン要素の構造を実現するためには所望のシアン外環特
性を得るために、同シアン要素膜を厚（する必要があり
、したがって、その厚みを確保するために、孔を形成す
る置型素も厚（形成しなければならない。ところが、置
型素形成によって、凹凸差が大きくなった表面に、緑要
素形成のためのシアン膜を塗布し、同腹を高精度に膜厚
制御することは困難であり、そのため、このシアン膜厚
が色フイルタ面内、同一ウニバー′内でばらつき、分光
特性もばらつ（ことになり、歩留りが低下する。Problems to be Solved by the Invention However, when producing color filters, in order to realize the structure of the cyan element described above, it is necessary to increase the thickness of the cyan element film in order to obtain the desired cyan outer ring characteristics. Therefore, in order to ensure the thickness, the mold element that forms the holes must also be formed thickly. It is difficult to control the thickness of the cyan film with high precision, and as a result, the thickness of the cyan film varies within the surface of the color filter and within the same uniform bar, and the spectral characteristics also vary. descend.
本発明は上記問題点を排除し、シアン要素の厚さを制御
することのできる色フィルタの製造方法を提供するもの
である。The present invention eliminates the above-mentioned problems and provides a method of manufacturing a color filter in which the thickness of the cyan element can be controlled.
問題点を解決するための手段
上記問題点を解決するために、本発明の色フイルタ製造
方法では、黄要素膜・を選択形成する工程、前記黄要素
膜外の他部に第１のシアン要素膜を形成して両面を同厚
にして平坦化する工程および前記黄要素膜上の一部およ
び前記第１のシアン要素膜上に第２のシアン要素膜を形
成する工程を有している。Means for Solving the Problems In order to solve the above problems, the color filter manufacturing method of the present invention includes a step of selectively forming a yellow element film, and a step of selectively forming a first cyan element outside the yellow element film. The method includes a step of forming a film and flattening both sides to have the same thickness, and a step of forming a second cyan element film on a part of the yellow element film and on the first cyan element film.
作用
この製造方法により、シアン要素の厚さを制御すること
ができ、製造歩留りが向上できる。Effect: This manufacturing method allows control of the thickness of the cyan element and improves manufacturing yield.
実施例
以下、本発明の実施例について、図面を参照しながら説
明する。第１図ａ −ｄに本実施例における工程順断面
図を示す。EXAMPLES Hereinafter, examples of the present invention will be described with reference to the drawings. FIGS. 1a to 1d show cross-sectional views in the order of steps in this embodiment.
まず、第１図ａのように、透明ガラス基板５上に”中間
膜３．黄要素膜２．中間膜３および、図示はしないが１
列目のマゼンタ要素膜、おのおの、所定の厚さに形成し
、シアン要素形成部分には開孔を残す。次に、染色材料
を透明ガラス基板５上に前記開孔を完全に埋める厚さで
塗布し、ガラス基板側から紫外光により露光し、現像す
る。この処理過程で、ガラス基板上に形成されたマゼン
タ要素膜ならびに黄要素膜は紫外光を透過させないので
、同図すに示すように、それらの各色要素以外の部分に
第１の染色材料６が開孔周辺の黄要素膜２と同じ厚さに
形成される。この方法では、マスクを使わず、第１の染
色材料６が形成され、その結果基板表面が平坦化される
ことになる。通常、平坦化された面に染色材料を塗布し
、その膜厚を高精度に制御することは容易であるため、
次に同図Ｃのように、この第１の染色材料６を形成した
後、さらに染色材料７を塗布し、黄要素膜２上の膜厚Ｔ
ｏと他部の膜厚ＴＣｙとの比を設計値通りに形成するこ
とができる。パターン形成は、通常のマスク露光法によ
り第２の染色材料７を、シアン要素部および緑要素部に
残せばよい。First, as shown in FIG.
Each magenta element film in the row is formed to a predetermined thickness, and an opening is left in the cyan element forming portion. Next, a dyeing material is applied onto the transparent glass substrate 5 to a thickness that completely fills the openings, exposed to ultraviolet light from the glass substrate side, and developed. In this treatment process, the magenta element film and yellow element film formed on the glass substrate do not transmit ultraviolet light, so as shown in the figure, the first dyeing material 6 is applied to areas other than those color elements. It is formed to have the same thickness as the yellow element film 2 around the opening. In this method, a first dyeing material 6 is formed without using a mask, resulting in a planarization of the substrate surface. Normally, it is easy to apply dyeing material to a flattened surface and control the film thickness with high precision.
Next, as shown in FIG.
o and the film thickness TCy of other parts can be formed as the designed value. For pattern formation, the second dyeing material 7 may be left on the cyan element portion and the green element portion using a normal mask exposure method.
第１および第２の染色材料６，７は所定の染色濃度に調
合されたシアン染色液を用いる。As the first and second dyeing materials 6 and 7, a cyan dyeing liquid prepared to a predetermined dyeing concentration is used.
最後に、同図ｄのように、保護膜４が形成される。Finally, a protective film 4 is formed as shown in FIG.
本実施例によれば、マゼンタ要素、置型素形成後、染色
材料を用いて、シアン要素部に第１のシアン要素膜６を
形成し、これを周辺の黄要素膜２と同膜厚にすることに
よって、両膜表面を平坦化し、さらに、その平坦化され
た表面に染色材料を用いて、第２のシアン要素膜７を形
成することにより、シアン要素部と緑要素部との各シア
ン要素膜が高精度に塗布できる。According to this embodiment, after the magenta element and the mold element are formed, the first cyan element film 6 is formed in the cyan element part using a dyeing material, and the first cyan element film 6 is made to have the same film thickness as the surrounding yellow element film 2. By flattening both film surfaces, and further forming a second cyan element film 7 using a dyeing material on the flattened surfaces, each of the cyan elements in the cyan element part and the green element part is The film can be applied with high precision.
その結果、置型素上の染色材料と他部のそれにおける膜
厚比を設計通りにでき、染色濃度が適度に調合されたシ
アン染色液を用いて、理想的なシアンおよび緑の分光特
性が容易に実現でき、しかも製造ロット間あるいは１チ
ツプの色フイルタ面内で分光特性がばらつくことはない
。本実施例では、第１の染色材料の形成において、マス
クを用いずいわゆる光選択性露光法を用い、その後第１
および第２の染色材料を同時に染色したが、これは工程
作業の効率化を図ったものである。As a result, the film thickness ratio between the dyeing material on the mold and that on other parts can be adjusted as designed, and ideal cyan and green spectral characteristics can be easily obtained using a cyan staining solution with an appropriate dyeing concentration. Moreover, the spectral characteristics do not vary between manufacturing lots or within the surface of one color filter chip. In this example, in forming the first dyeing material, a so-called photo-selective exposure method was used without using a mask, and then the first dyeing material was formed using a so-called photo-selective exposure method without using a mask.
The first dyeing material and the second dyeing material were dyed at the same time, but this was done to improve the efficiency of the process.
発明の効果
本発明の色フィルタの製造方法によれば、黄要素膜を選
択形成する工程、前記黄要素膜の他部に第１のシアン要
素膜を形成して平坦化する工程および前記黄要素膜上の
一部および前記第１のシアン要素膜上に第２のシアン要
素を形成する工程とを有することにより、シアン要素お
よび線要素を形成するためのシアン要素膜が高精度に形
成でき、したがって、シアン要素およびシアン要素と置
型素との重ね合わせで作られる線要素の分光特性は製造
ロット間、同一ウニバー内および１チツプの色フイルタ
面内でばらつかず、その実用的効果は大なるものがある
。Effects of the Invention According to the method for manufacturing a color filter of the present invention, there is a step of selectively forming a yellow element film, a step of forming and flattening a first cyan element film on the other part of the yellow element film, and a step of forming the first cyan element film on the other part of the yellow element film. By having a step of forming a second cyan element on a part of the film and the first cyan element film, a cyan element film for forming cyan elements and line elements can be formed with high precision, Therefore, the spectral characteristics of the cyan element and the line element created by superimposing the cyan element and the fixed element do not vary between manufacturing lots, within the same uniform bar, or within the color filter surface of one chip, and its practical effects are great. There is something.
第１図ａ−ｄは本発明実施例の色フイルタ製造工程順断
面図、第２図ａは従来の色フイルタ基本色配置平面図、
同図すはその断面図である。
１・・・・・・シアン要素、２・・・・・・置型素、３
・・・・・・中間膜、４・・・・・・保護膜、５・・・
・・・透明ガラス基板、６・・・・・・第１の染色材料
、７・・・・・・第２の染色材料。
代理人の氏名 弁理士 中尾敏男 ほか１名ｌ−シアン
Ｖ−焦1A to 1D are cross-sectional views of the color filter manufacturing process according to the embodiment of the present invention, and FIG. 2A is a plan view of the basic color arrangement of a conventional color filter.
The same figure is a sectional view thereof. 1... cyan element, 2... place type element, 3
...Intermediate film, 4...Protective film, 5...
. . . Transparent glass substrate, 6 . . . First dyeing material, 7 . . . Second dyeing material. Name of agent: Patent attorney Toshio Nakao and 1 other person l-Xian V-Jiao
Claims (1)
第１のシアン要素膜を形成して、両膜面を同厚にして平
坦化する工程および前記黄要素膜上の一部および前記第
１のシアン要素膜上に第２のシアン要素膜を形成する工
程を有することを特徴とする色分離フィルタの製造方法
。A step of selectively forming a yellow element film, a step of forming a first cyan element film on another part outside the yellow element film and flattening both film surfaces with the same thickness, and a part on the yellow element film. and forming a second cyan element film on the first cyan element film.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62154748A JPS63318501A (en) | 1987-06-22 | 1987-06-22 | Production of color separation filter |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62154748A JPS63318501A (en) | 1987-06-22 | 1987-06-22 | Production of color separation filter |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63318501A true JPS63318501A (en) | 1988-12-27 |
Family
ID=15591048
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62154748A Pending JPS63318501A (en) | 1987-06-22 | 1987-06-22 | Production of color separation filter |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63318501A (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5895703A (en) * | 1981-12-02 | 1983-06-07 | Toppan Printing Co Ltd | Color separating filter |
| JPS58184109A (en) * | 1982-04-21 | 1983-10-27 | Nec Corp | Color filter |
-
1987
- 1987-06-22 JP JP62154748A patent/JPS63318501A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5895703A (en) * | 1981-12-02 | 1983-06-07 | Toppan Printing Co Ltd | Color separating filter |
| JPS58184109A (en) * | 1982-04-21 | 1983-10-27 | Nec Corp | Color filter |
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