JPS63318260A - Surface working method - Google Patents

Abstract

PURPOSE:To maintain working accuracy in a workpiece with high accuracy for a long time by automatically breaking in a working plate and an elastic emery cloth on the basis of early breaking-in requirements in the beginning of working and during-working breaking-in requirements on the way of continuous working. CONSTITUTION:When the surface of a workpiece supported by a working plate is surface worked by an elastic emery cloth, the working plate and elastic emery cloth are broken in on the basis of early breaking-in requirements A before the beginning of working. Next, the workpiece is sequentially successively surface worked, and on the way of continuous working the working plate and elastic emery cloth are automatically broken in under the requirements F1 in working to restrain any change in the surface condition due to the irregular deformation and loading of working plate and elastic emery cloth. As a result, the working accuracy in the workpiece can be maintained with high accuracy for a long time to increase the cycle of usage of working plate and elastic emery cloth.

Description

Detailed Description of the Invention (Industrial Field of Application) The present invention provides
The present invention relates to a surface processing method in which a surface is processed using an elastic polishing cloth.

(Prior art) Conventionally, when processing the surface of a workpiece with high precision, the workpiece is supported by adhesion or suction on the lower surface of a pressure plate,
There is a method in which the surface of the workpiece is treated with two elastic polishing cloths by rotating the lower surface plate and the pressure plate while the workpiece is pressed against an elastic polishing cloth placed on the lower surface plate.

In such a surface processing method, the pressure plate is finished with high precision by lapping or the like before the start of processing, thereby performing high precision surface processing.

(Problems to be Solved by the Invention) On the other hand, in the conventional surface processing method described above, even if the pressure plate is modified by lapping etc. before starting processing, high Accurate surface processing is possible, but as the number of processing cycles increases, the processing accuracy decreases over time due to uneven deformation of the pressure plate and elastic polishing cloth over time, as shown by the characteristic χ in Figure 5. This will result in a decline in terms of performance. For this reason, when the machining accuracy deteriorates, it is necessary to replace or repair the pressure plate and elastic polishing cloth, making it difficult to maintain high accuracy and achieving uniform precision. There was a problem that the usage cycle was short.

Therefore, an object of the present invention is to solve the above-mentioned problems by making it possible to modify the pressure plate and the elastic polishing cloth even during processing.

(Means for Solving the Problems) The surface processing method of the present invention treats the surface of a workpiece supported by a pressure plate with an elastic polishing cloth. Based on these conditions, the pressure plate and the elastic polishing cloth are automatically smoothed during continuous processing based on the processing conditions. Therefore, during continuous processing, Also, uneven deformation of the pressure plate and the elastic polishing cloth is suppressed.

(Example) An embodiment of the present invention will be described below based on the drawings.

FIGS. 1 and 2 respectively show the main parts of a surface processing apparatus for carrying out the present invention, with FIG. 1 showing the surface processing apparatus during smoothing, and FIG. 2 showing the surface processing apparatus.

In both figures, l is a lower surface plate, the lower leg @1 is rotatable in the direction of the arrow in the figure by a driving device, and an elastic polishing cloth 2 made of elastic cloth is placed on the upper plane. Lower surface plate 1
Above is the shoes I! ! 13 is arranged to be rotatable in the direction of the arrow in the figure and movable up and down by a drive device, and a pressure plate 4 is provided on the lower plane of the upper surface plate 3. Each drive device of the upper surface plate 3 and the lower surface plate L is driven by a control device, and the control device performs smoothing and surface adjustment of the pressure plate 3 and elastic polishing cloth 2) and surface processing of the workpiece 5. It has become.

When performing break-in, press the pressure plate 3 as shown in Figure 1.
This is done by rotating the elastic polishing cloth 2 while applying a predetermined pressure, and during surface processing, as shown in Fig. 2,
A workpiece 5 is supported on the lower surface of the pressure plate 4 by adhesion or suction, and by applying a predetermined pressure to the workpiece 5 and rotating it, the surface of the workpiece 5 is processed by the elastic polishing cloth 2. .

Next, a method for surface processing the workpiece will be explained.

When the apparatus is driven, first, before starting processing, the pressure plate 4 and the elastic polishing cloth 2 are smoothed out as shown by the solid line a in FIG. 4, for example, based on the initial break-in conditions. , is performed for a predetermined period of time (seconds) while changing the break-in pressure. These initial run-in conditions are as shown in A in FIG.
d.

The break-in pressure, the change in break-in pressure, and the break-in time are set in advance according to four conditions, such as when both are replaced, e, and when the device is restarted after stopping without both being replaced. However, in the breaking-in process before the start of processing, detailed adjustments can be made depending on the conditions of the pressure plate 4 and the elastic polishing cloth 2.

In addition to the four types of conditions mentioned above, the initial run-in conditions can be handled in more detail by adding conditions such as the connected machining cycle, machining pressure, machining time and temperature, and other conditions. It is also possible to set the conditions by arbitrarily adding them.

When the smoothing before starting processing is completed, the process moves to the surface processing process. In this step, as shown in FIG. 2, the workpiece 5 is supported by the pressurizing plate 4 and the workpiece 5 and the elastic polishing cloth 2 are rotated, and the surface of the workpiece 5 is processed for the -th time. When this is completed, the surface of the next workpiece 5 is processed in the same manner, and the surface processing is performed continuously until a predetermined continuous cycle is reached, and smoothing is performed during this continuous processing.

The break-in conditions during continuous machining are as follows in this example.

As shown in FIG. 3, two running-in conditions (■) and (2) are set. The break-in condition (2) is set for each 10 cycle during the continuous processing cycle, and is carried out at a pressure and time as shown by f in FIG. 4, for example. The running-in condition is
It is set every 50 cycles during continuous cycles, and is performed, for example, as shown at f2 in FIG. 4. These conditions can be arbitrarily set depending on the characteristics of the workpiece 5, the number of cycles, etc., and can be arbitrarily set by taking into account other machining pressure, machining time, temperature, etc., similar to the initial run-in conditions. can.

Therefore, even during continuous machining, smoothing is performed periodically, so changes in surface condition due to uneven deformation or clogging of the pressure plate and elastic polishing cloth are suppressed, and the machining accuracy of the pressurized object is improved. can be kept constant for a long time with high precision, increasing the usage cycle of processed plates and elastic polishing cloths.

As a result of tests conducted by the present inventors, for example, as shown in characteristic y in FIG. 5, the processing accuracy could be maintained approximately constant.

Note that the present invention is not limited to the multi-processing method of the above embodiment, but can also be applied to a single-wafer processing method.

(Effects of the Invention) As explained above, according to the present invention, the pressure plate and the elastic polishing cloth are By automatically leveling the workpiece, the processing accuracy of the workpiece can be kept constant for a long time with high precision, making it possible to perform processing with higher precision than conventional methods. The usage cycle of the cloth can be significantly extended, and the accuracy of the workpiece can be managed automatically, making it possible to maintain a constant quality of the workpiece.

[Brief explanation of drawings]

Figures 1 to 5 relate to an embodiment of the present invention, in which Figure 1 is a cross-sectional view of the main part of the apparatus during running-in, Figure 2 is a cross-sectional view of the main part of the apparatus during processing, and Figure 3 is a cross-sectional view of the main part of the apparatus during processing. The diagram is! FIG. 4 is a diagram showing concretely the break-in conditions, and FIG. 5 is a characteristic diagram showing the relationship between machining accuracy and machining cycle. 2... Elastic polishing cloth 4... Pressure plate 5... Workpiece A... Initial break-in condition Fs, Fs... Break-in condition during processing Patent applicant Kyushu Electronic Metals Co., Ltd. Patent application Representative of Osaka Titanium Manufacturing Co., Ltd. Patent attorney Masazumi Mori Figure 5

Claims (3)

[Claims] (1) In a surface processing method in which the surface of a workpiece supported by a pressure plate is treated with an elastic abrasive cloth, initial run-in conditions are used before the start of processing, and during continuous processing, run-in conditions are applied during processing. A surface processing method characterized by automatically leveling the pressure plate and the elastic polishing cloth, respectively, based on conditions. (2) The surface processing method according to claim 1, wherein the initial break-in condition is a condition that takes into account the time of replacing the pressure plate and the elastic polishing cloth and the time of restarting the operation. (3) The surface processing method according to claim 1, wherein the initial break-in condition and the break-in condition during processing are conditions that take into account processing cycle, processing pressure, processing time, and temperature.