JPS63315902A - ワ−ク位置ずれ検知装置 - Google Patents

ワ−ク位置ずれ検知装置

Info

Publication number
JPS63315902A
JPS63315902A JP15265087A JP15265087A JPS63315902A JP S63315902 A JPS63315902 A JP S63315902A JP 15265087 A JP15265087 A JP 15265087A JP 15265087 A JP15265087 A JP 15265087A JP S63315902 A JPS63315902 A JP S63315902A
Authority
JP
Japan
Prior art keywords
workpiece
movement
detection
data
detection points
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15265087A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0525281B2 (enrdf_load_stackoverflow
Inventor
Noriyuki Uchiumi
典之 内海
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Tokico Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokico Ltd filed Critical Tokico Ltd
Priority to JP15265087A priority Critical patent/JPS63315902A/ja
Publication of JPS63315902A publication Critical patent/JPS63315902A/ja
Publication of JPH0525281B2 publication Critical patent/JPH0525281B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
JP15265087A 1987-06-19 1987-06-19 ワ−ク位置ずれ検知装置 Granted JPS63315902A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15265087A JPS63315902A (ja) 1987-06-19 1987-06-19 ワ−ク位置ずれ検知装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15265087A JPS63315902A (ja) 1987-06-19 1987-06-19 ワ−ク位置ずれ検知装置

Publications (2)

Publication Number Publication Date
JPS63315902A true JPS63315902A (ja) 1988-12-23
JPH0525281B2 JPH0525281B2 (enrdf_load_stackoverflow) 1993-04-12

Family

ID=15545060

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15265087A Granted JPS63315902A (ja) 1987-06-19 1987-06-19 ワ−ク位置ずれ検知装置

Country Status (1)

Country Link
JP (1) JPS63315902A (enrdf_load_stackoverflow)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5793205A (en) * 1980-11-29 1982-06-10 Toshiba Corp Measuring device for width dimension
JPS6135481A (ja) * 1984-07-27 1986-02-19 セイコーエプソン株式会社 投射型表示装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5793205A (en) * 1980-11-29 1982-06-10 Toshiba Corp Measuring device for width dimension
JPS6135481A (ja) * 1984-07-27 1986-02-19 セイコーエプソン株式会社 投射型表示装置

Also Published As

Publication number Publication date
JPH0525281B2 (enrdf_load_stackoverflow) 1993-04-12

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