JPS6331532U - - Google Patents

Info

Publication number
JPS6331532U
JPS6331532U JP12638486U JP12638486U JPS6331532U JP S6331532 U JPS6331532 U JP S6331532U JP 12638486 U JP12638486 U JP 12638486U JP 12638486 U JP12638486 U JP 12638486U JP S6331532 U JPS6331532 U JP S6331532U
Authority
JP
Japan
Prior art keywords
wafer chuck
cup
annular wall
inner tank
tank
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12638486U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0249708Y2 (US20030199744A1-20031023-C00003.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986126384U priority Critical patent/JPH0249708Y2/ja
Publication of JPS6331532U publication Critical patent/JPS6331532U/ja
Application granted granted Critical
Publication of JPH0249708Y2 publication Critical patent/JPH0249708Y2/ja
Expired legal-status Critical Current

Links

JP1986126384U 1986-08-18 1986-08-18 Expired JPH0249708Y2 (US20030199744A1-20031023-C00003.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986126384U JPH0249708Y2 (US20030199744A1-20031023-C00003.png) 1986-08-18 1986-08-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986126384U JPH0249708Y2 (US20030199744A1-20031023-C00003.png) 1986-08-18 1986-08-18

Publications (2)

Publication Number Publication Date
JPS6331532U true JPS6331532U (US20030199744A1-20031023-C00003.png) 1988-03-01
JPH0249708Y2 JPH0249708Y2 (US20030199744A1-20031023-C00003.png) 1990-12-27

Family

ID=31020139

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986126384U Expired JPH0249708Y2 (US20030199744A1-20031023-C00003.png) 1986-08-18 1986-08-18

Country Status (1)

Country Link
JP (1) JPH0249708Y2 (US20030199744A1-20031023-C00003.png)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01228129A (ja) * 1988-03-09 1989-09-12 Tokyo Electron Ltd 液処理方法
JP2003297801A (ja) * 2002-03-28 2003-10-17 Shibaura Mechatronics Corp スピン処理装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6151732U (US20030199744A1-20031023-C00003.png) * 1984-09-10 1986-04-07

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5767841A (en) * 1980-10-16 1982-04-24 Kano Hajime Sizing device used for calibrating device for measuring device of mass and concentration of dust

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6151732U (US20030199744A1-20031023-C00003.png) * 1984-09-10 1986-04-07

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01228129A (ja) * 1988-03-09 1989-09-12 Tokyo Electron Ltd 液処理方法
JP2003297801A (ja) * 2002-03-28 2003-10-17 Shibaura Mechatronics Corp スピン処理装置

Also Published As

Publication number Publication date
JPH0249708Y2 (US20030199744A1-20031023-C00003.png) 1990-12-27

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