JPS63314445A - Energy absorption factor measuring apparatus - Google Patents
Energy absorption factor measuring apparatusInfo
- Publication number
- JPS63314445A JPS63314445A JP62149113A JP14911387A JPS63314445A JP S63314445 A JPS63314445 A JP S63314445A JP 62149113 A JP62149113 A JP 62149113A JP 14911387 A JP14911387 A JP 14911387A JP S63314445 A JPS63314445 A JP S63314445A
- Authority
- JP
- Japan
- Prior art keywords
- sample
- energy absorption
- absorption rate
- power meter
- meter head
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010521 absorption reaction Methods 0.000 title claims abstract description 31
- 238000005259 measurement Methods 0.000 claims description 10
- 239000000463 material Substances 0.000 claims description 3
- 230000002238 attenuated effect Effects 0.000 abstract description 2
- 230000005540 biological transmission Effects 0.000 abstract 1
- 230000000052 comparative effect Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- FAPWRFPIFSIZLT-UHFFFAOYSA-M Sodium chloride Chemical compound [Na+].[Cl-] FAPWRFPIFSIZLT-UHFFFAOYSA-M 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 229910004613 CdTe Inorganic materials 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910005540 GaP Inorganic materials 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 150000004820 halides Chemical class 0.000 description 1
- WPYVAWXEWQSOGY-UHFFFAOYSA-N indium antimonide Chemical compound [Sb]#[In] WPYVAWXEWQSOGY-UHFFFAOYSA-N 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 102200108303 rs730881994 Human genes 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000011780 sodium chloride Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/255—Details, e.g. use of specially adapted sources, lighting or optical systems
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/59—Transmissivity
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、レーザ用光学部品、その他各種製品のエネル
ギ吸収率測定装置に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to an energy absorption rate measuring device for laser optical components and various other products.
従来は、第２図囚に示すように、レーザ光１を測定対象
（サンプル）２に照射し、該サンプル２に吸収されるエ
ネルギによって上昇する該サンプル２の温度変化率、あ
るいはレーザ光１を遮断する際のサンプル２の温度変化
率を熱電対１’ｌＪ、ｔば、φ・（Ｌｌｍの銅−フンス
タンタン）３で検知し、またサンプ／Ｌ／２を透過した
レーザ光による出、力をパワーメータヘッド４で測定し
、これらの検知信号、測定信号をデータロガ５に入力し
て、下に示すニュートンの熱平衡式を用いてサンプル２
のエネルギ吸収率αを算定していた。Conventionally, as shown in FIG. The rate of temperature change of sample 2 at the time of interruption was detected by thermocouple 1'lJ, tb, φ. is measured with the power meter head 4, these detection signals and measurement signals are input to the data logger 5, and sample 2 is measured using Newton's thermal equilibrium equation shown below.
The energy absorption rate α was calculated.
Ｔ
（ａ）レーザ照射時二Ｃｍ−＝ＰＡ−ｈ（Ｔ−Ｔφ）ｔ
Ｔ
（ｂ） Ｖ−ザ遮断時＝〇口ｌ−１＝ｈ（Ｔ−Ｔφ）（
ｉｔ
ここで、Ｔ：温度、ｔ：時間。T (a) During laser irradiation 2 Cm-=PA-h(T-Tφ)t T (b) When V-laser is cut off=〇口l-1=h(T-Tφ)(
it where T: temperature, t: time.
Ｃ：サンプルの比熱。C: Specific heat of sample.
ｍ：サンプルの質址。m: Pawn of sample.
Ｔφ：サンプルの周囲温度。Tφ: ambient temperature of the sample.
ｈ：サンプルの熱伝達係数。h: Heat transfer coefficient of sample.
ＰＡ：サンプルに吸収されるレーザ
光エネルギ
（ｅ、） （ｂ）式よシ
となシ、レーザ光のサンプル透過光出力をＰ。とすると
、
ＰＡ
エネルギ吸収率α＝＝−Ｘ１００
となり、Ｎ個の平均エネルギ吸収率αは、±（αの分散
）（％）
と算出される。PA: Laser light energy absorbed by the sample (e,) According to equation (b), the sample-transmitted light output of the laser light is P. Then, PA energy absorption rate α==-X100, and the N average energy absorption rate α is calculated as ±(dispersion of α) (%).
なお、第２図（４）において、６はデータロガ５で算出
されたエネルギ吸収率αを記録するためのレコーダであ
り、またレーザ光１は図示省略のレーザ光源から照射さ
れ、レーザ光１の遮断は図示省略のシャッタによシ行わ
れる。In addition, in FIG. 2 (4), 6 is a recorder for recording the energy absorption rate α calculated by the data logger 5, and the laser beam 1 is irradiated from a laser light source (not shown), and the laser beam 1 is blocked. This is performed by a shutter (not shown).
ところで、上記の従来技術においては、サンプル２を通
過したレーザ光１は、パワーメータヘッド４で処理され
るが、該パワーメータヘッド４はレーザ光１の反射を小
さくするため、第２図囚のａ部の拡大図である第２図の
）に示すように、表面に溝加工が施され、またアルマイ
ト処理（黒染め）が施されていた。By the way, in the above-mentioned conventional technology, the laser beam 1 that has passed through the sample 2 is processed by the power meter head 4, but in order to reduce the reflection of the laser beam 1, the power meter head 4 is configured as shown in FIG. As shown in Figure 2), which is an enlarged view of part a, the surface was grooved and anodized (black dyed).
しかし、パワーメータヘッド４はレーザ光１を完全に吸
収するものではなく、５〜１０％程度の反射率を持ち、
しかも第２図の）のような溝加工が施されているため、
パワ−メータヘッド４０角度をどのように調節しても、
散乱反射光７が生じていた。この反射光７の一部は再び
サンプ／Ｉ／２を照射し、前記ニュートンの熱平衡式に
よるサンプルのエネルギ吸収率の測定精度を著しく低下
させていた。However, the power meter head 4 does not completely absorb the laser beam 1, but has a reflectance of about 5 to 10%.
Moreover, because it has grooves as shown in Figure 2),
No matter how you adjust the power meter head 40 angle,
Scattered reflected light 7 was generated. A part of this reflected light 7 irradiated the sump/I/2 again, significantly reducing the accuracy of measuring the energy absorption rate of the sample using Newton's thermal equilibrium equation.
上記の反射光７の影響を小さくするため、従来は、第２
図囚に示すように遮蔽板（中心に開口を有する円板）８
を設置し、反射光７を遮断していた。しかし、サンプｌ
ｖ２はそれぞれ異なる焦点距離を有するレンズである場
合が多く、このような場合、サンプ／Ｌ／２透過後のレ
ーザ光１をパワーメータヘッド４に導くために各サンプ
ル２の焦点距離に適したコリメータレンズ？の設置を行
わねばならず、セツティングに多大の時間を要していた
。In order to reduce the influence of the above reflected light 7, conventionally, the second
As shown in the figure, a shielding plate (a circular plate with an opening in the center) 8
was installed to block reflected light 7. However, the sample l
V2 are often lenses with different focal lengths, and in such cases, a collimator suitable for the focal length of each sample 2 is used to guide the laser beam 1 after passing through the sump/L/2 to the power meter head 4. lens? This required a great deal of time to set up.
本発明は、このような問題を解決し、正確なエネルギ吸
収率を容易に求めることのできるエネルギ吸収率測定装
置を提案するものである。The present invention solves these problems and proposes an energy absorption rate measuring device that can easily determine an accurate energy absorption rate.
本発明は、上記問題を従来のパワーメータヘッドの代シ
に金属球（積分球）を用い、透過後のレーザ光を該球内
に導き、該球内部にてレーザ光を散乱 減衰させサン
プルへの反射光をなくすことによシ解決するものである
。The present invention solves the above problem by using a metal sphere (integrating sphere) in place of the conventional power meter head, guiding the transmitted laser beam into the sphere, scattering and attenuating the laser beam inside the sphere, and directing it to the sample. This is solved by eliminating the reflected light.
すなわち本発明は、レーザ光源、シャッタ、測定対象の
端部へ取付けられる熱電対、測定対象の透過光を受け該
透過光による出力を測定するパワーメーターヘッド、前
記Ｐ８９Ｌ対ト／＜ワーメータヘッドからの信号を入力
するデータロガ、該データロガで得られたエネルギ吸収
率を記録するレコーダを備えたエネルギ吸収率測定装置
において、前記パワーメータヘッドとして積分球を用い
ることを特徴とするエネルギ吸収率測定装置に関するも
のである。That is, the present invention includes a laser light source, a shutter, a thermocouple attached to the end of the object to be measured, a power meter head that receives transmitted light from the object to be measured and measures the output due to the transmitted light, and a power meter head from the P89L power meter head. The present invention relates to an energy absorption rate measuring device comprising a data logger that inputs a signal, and a recorder that records the energy absorption rate obtained by the data logger, wherein an integrating sphere is used as the power meter head. It is something.
本発明における積分球としては、概略球形の中空状のも
ので、内面に金、銀、銅、アルミニワム等の赤外光を反
射する材料を蒸着、メッキ等により塗工したものが使用
される。また、この積分球は、測定対象（サンプ／Ｌ／
）透過光を該積分球内部ＶＣ導＜アパーチャと、該アパ
ーチャから入４．１シた光を受けてこの透過光による出
方を測定すると共に該光を拡散反射させるための円錐形
のターゲットとを有し、該ターゲットの表面は上記材料
と同材料にて塗工処理されている。The integrating sphere used in the present invention is a hollow, approximately spherical sphere whose inner surface is coated with a material that reflects infrared light, such as gold, silver, copper, or aluminum, by vapor deposition, plating, or the like. Also, this integrating sphere can be used to measure objects (sump/L/
) A VC aperture for guiding the transmitted light inside the integrating sphere, and a conical target for receiving the light entering from the aperture, measuring the output of the transmitted light, and diffusing and reflecting the light. The surface of the target is coated with the same material as above.
更に、本発明では測定対象をＺ軸上を移動させる手段、
例えばサンプルホルダを移動させるレール等を設けるこ
とができる。Furthermore, in the present invention, means for moving the measurement target on the Z axis,
For example, a rail or the like for moving the sample holder can be provided.
本発明では、サンプル透過後のレーザ光はアパーチャか
ら積分球内部に入射し、該球内のターゲットで受光され
、該光による出力が測定させると共に、拡散され、該球
内で多重反射を繰返し、完全に減衰される。従って、サ
ンプルの温度雰囲気を安定に保ち、エネルギ吸収率の測
定精度を向上させることができる。In the present invention, the laser beam after passing through the sample enters the interior of the integrating sphere from the aperture, is received by a target within the sphere, and the output of the light is measured and diffused, and undergoes multiple reflections within the sphere, fully attenuated. Therefore, the temperature atmosphere of the sample can be kept stable, and the measurement accuracy of energy absorption rate can be improved.
また本発明によれば、種々の焦点距離のレンズを測定対
象とする場合、該測定対象透過後のレーザ光を積分球へ
導くためＫは、単に該測定対象をＺ軸方向に移動させる
だけで充分であシ、従来の遮蔽板とコリメータレンズを
使用する場合に比し、セツティング時間を大幅に短縮す
ることができる。Furthermore, according to the present invention, when lenses with various focal lengths are to be measured, K can be adjusted by simply moving the measuring object in the Z-axis direction in order to guide the laser beam that has passed through the measuring object to the integrating sphere. This is sufficient, and the setting time can be significantly reduced compared to the case of using a conventional shielding plate and collimator lens.
第１図は本発明装置の一実施態様例を示す図である。 FIG. 1 is a diagram showing an embodiment of the apparatus of the present invention.
第１図において、Ｖ−ザ光１はサンプルホルダ１０に保
持された測定対象（サンプＡ／）２に照射され、該サン
プル２を通過する間に一部が吸収エネルギとして吸収さ
れる。In FIG. 1, V-the light 1 is irradiated onto a measurement object (sump A/) 2 held in a sample holder 10, and while passing through the sample 2, a portion is absorbed as absorbed energy.
この吸収エネμギは、サンプル２を伝わる熱量と周囲へ
逃げる。Ａ％量との平衡にょシサンプル２の側面に到達
し、ここにセットされた熱電対３でサンプル２の温度変
化として測定される。This absorbed energy μ is the amount of heat transmitted through the sample 2 and escapes to the surroundings. Equilibrium with the A% amount reaches the side of the sample 2, and the temperature change of the sample 2 is measured by the thermocouple 3 set there.
一方、サンプル２を透過したレーザ光は、積分球１１の
アパーチャ１３から該環１１内へ入射し、ターゲット１
２に受光されて、透過出力が測定されると共に拡散し、
該環１１内で図示するように多重反射を繰返して完全に
減衰する。On the other hand, the laser beam that has passed through the sample 2 enters the ring 11 through the aperture 13 of the integrating sphere 11, and enters the target 1.
2, the transmitted power is measured, and the light is diffused.
As shown in the figure, multiple reflections are repeated within the ring 11 to completely attenuate the light.
上記の熱電対３とこのターゲット１２での測定信号は前
記した従来の場合と同様にデータロガ５（図示省略）へ
入力され、前記のニュートンの熱平衡式に従ってサンプ
ル２のエネルギ吸収率αが算出され、レコーダ（図示省
略）に記録される。The measurement signals from the thermocouple 3 and this target 12 are input to the data logger 5 (not shown) in the same manner as in the conventional case, and the energy absorption rate α of the sample 2 is calculated according to Newton's thermal equilibrium equation. It is recorded on a recorder (not shown).
また、第１図中の１４は２軸レールであシ、サンプル２
がレンズである場合、その焦点距離に適するようサンプ
ルホルダ１ｏを該レール１４上を矢印方向に移動させる
。In addition, 14 in Fig. 1 is a two-axis rail, and sample 2
When is a lens, the sample holder 1o is moved in the direction of the arrow on the rail 14 to suit its focal length.
第１図の態様により、φ１５、ｓｏｏｗのＣＯ２レーザ
光を用いサンプルのエネルギ吸収率を測定した。その結
果を第５図囚に示す（本発明例）。According to the embodiment shown in FIG. 1, the energy absorption rate of the sample was measured using a CO2 laser beam having a diameter of 15 mm and so on. The results are shown in Figure 5 (example of the present invention).
比較のため、上記と同じレーザ光にて上記と同じサンプ
ルのエネルギ吸収率を第２図囚、（ト））の態様で測定
し、この結果を第３図の）に示す（比較例）。For comparison, the energy absorption rate of the same sample as above was measured using the same laser beam as above in the manner shown in (g)) in Fig. 2, and the results are shown in (g) in Fig. 3 (comparative example).
第５図（４）、■）から明らかなように、本発明例では
温度曲線はなめらかで、散乱反射光の影響がなく、吸収
率αもα２０±α０１％と精度が向上しているのに対し
、従来例では散乱反射光によりレーザ照射・遮断時に温
度の急な変化が見られ、吸収率αはα２０士ｌ］、１％
程度であり、信頼度が低かった。As is clear from Fig. 5 (4), ■), in the example of the present invention, the temperature curve is smooth, there is no influence of scattered reflected light, and the absorption rate α is α20 ± α01%, which improves the accuracy. On the other hand, in the conventional example, a sudden change in temperature was observed when the laser was irradiated and cut off due to scattered reflected light, and the absorption rate α was 1%
The reliability was low.
また、第１図及び第２図（４）、（Ｂ）の態様で、上記
と同じＶ−ザ光にて、上記と同じサンプルのエネルギ吸
収率を日々測定した結果を、第４図（ロ）（本発明例）
と第４図の）（従来例）とに示す。In addition, the results of daily measurement of the energy absorption rate of the same sample as above using the same V-za light in the manner shown in Fig. 1 and Fig. 2 (4) and (B) are shown in Fig. 4 (Ro). ) (Example of the present invention)
and (conventional example) in Fig. 4.
第４図（Ａ、） 、 （Ｂ）から明らかなように、本発
明例では散乱反射光の影響がなく、サンプルのエネルギ
吸収率のルミ］定値は安定している（σ＝±α０１％）
のに対し、比較例では散乱反射光の影響がコリメータレ
ンズや遮蔽板のセット位置あるいはパワーメータヘッド
の角度によシ大きく変化し、またこれらのセット位置や
角度の管理が困難であり、測定毎にサンプルのエネルギ
吸収率の測定値が変化していた（σ＝（Ｌ１％）。As is clear from Fig. 4 (A,) and (B), in the example of the present invention, there is no influence of scattered reflected light, and the constant value of the energy absorption rate of the sample is stable (σ = ± α01%).
On the other hand, in the comparative example, the influence of scattered reflected light changes greatly depending on the set position of the collimator lens and shielding plate, or the angle of the power meter head, and it is difficult to manage these set positions and angles, making it difficult for each measurement. The measured value of the energy absorption rate of the sample was changing (σ=(L1%)).
本発明装置によれば、測定対象のエネルギ吸収率の測定
精度を高めることができるばかシでなく、測定機器や測
定対象のセツティング時間を短縮することができる。Ｇ
ｅ、 Ｓｉ、 Ｚｎ５ｅ、 ＣｄＴｅ。According to the apparatus of the present invention, it is not only possible to improve the measurement accuracy of the energy absorption rate of the object to be measured, but also to shorten the time required to set up the measuring equipment and the object to be measured. G
e, Si, Zn5e, CdTe.
ＩｎＳｂ、 ＧａＡｓ、 ＧａＰ等の半導体やＮａＣ１
，ＫＯＡ、ＫＢｒ等のアルカリハライド系、 ｋｔ、
Ｃｕ、 Ｍｏ 等の金属を用いたＣｏ、 ｃｏ、、
Ｉ！、ＹＡＧ等の赤外レーザ用光学部品（窓１部分反射
鏡、偏光板、全反射鏡等）の重要特性であるエネルギ吸
収率測定装置として効果的である。Semiconductors such as InSb, GaAs, GaP and NaCl
, KOA, KBr and other alkali halides, kt,
Co, co, using metals such as Cu, Mo, etc.
I! It is effective as a device for measuring energy absorption rate, which is an important characteristic of optical components for infrared lasers such as , YAG, etc. (window partial reflection mirror, polarizing plate, total reflection mirror, etc.).
第１図は本発明装置の一実施態様例を示す図、第２図（
ト）は従来技術を示す図、第２図の）は第２図囚のａ部
の拡大図、第３図（ト）、＠及び第４図（４）、 ＣＢ
）は本発明の具体例及び比較例で得られた結果を示す図
表で、第３図（ト）及び第４図囚が本発明例を、第３図
（Ｂ）及び第４図の）が比較例を示している。FIG. 1 is a diagram showing an example of an embodiment of the device of the present invention, and FIG. 2 (
g) is a diagram showing the prior art, Fig. 2) is an enlarged view of part a of Fig. 2, Fig. 3 (g), @, and Fig. 4 (4), CB
) is a chart showing the results obtained in specific examples of the present invention and comparative examples, where Figures 3 (G) and 4 (G) show the results of the present invention, and Figures 3 (B) and 4) A comparative example is shown.
Claims (4)
られる熱電対、測定対象の透過光を受け該透過光による
出力を測定するパワーメーターヘッド、前記熱電対とパ
ワーメータヘッドからの信号を入力するデータロガ、該
データロガで得られたエネルギ吸収率を記録するレコー
ダを備えたエネルギ吸収率測定装置において、前記パワ
ーメータヘッドとして積分球を用いることを特徴とする
エネルギ吸収率測定装置。(1) A laser light source, a shutter, a thermocouple attached to the end of the object to be measured, a power meter head that receives transmitted light from the object and measures the output of the transmitted light, and inputs signals from the thermocouple and power meter head. What is claimed is: 1. An energy absorption rate measuring device comprising a data logger that records the energy absorption rate obtained by the data logger and a recorder that records the energy absorption rate obtained by the data logger, characterized in that an integrating sphere is used as the power meter head.
光を内部に導くためのアパーチャと、内部に導かれた透
過光を受ける円錐形のターゲットを備えたものである特
許請求の範囲（１）に記載のエネルギ吸収率測定装置。(2) The integrating sphere is approximately spherical and hollow, and is equipped with an aperture for guiding the transmitted light of the measurement object into the interior, and a conical target that receives the transmitted light guided inside. The energy absorption rate measuring device according to range (1).
工したものである特許請求の範囲（１）又は（２）に記
載のエネルギ吸収率測定装置。(3) The energy absorption rate measuring device according to claim (1) or (2), wherein the integrating sphere has an inner surface coated with a material that reflects infrared light.
請求の範囲（１）、（２）又は（３）に記載のエネルギ
吸収率測定装置。(4) The energy absorption rate measuring device according to claim (1), (2) or (3), comprising means for moving the measurement target on the Z-axis.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62149113A JPS63314445A (en) | 1987-06-17 | 1987-06-17 | Energy absorption factor measuring apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62149113A JPS63314445A (en) | 1987-06-17 | 1987-06-17 | Energy absorption factor measuring apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63314445A true JPS63314445A (en) | 1988-12-22 |
Family
ID=15467995
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62149113A Pending JPS63314445A (en) | 1987-06-17 | 1987-06-17 | Energy absorption factor measuring apparatus |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63314445A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5760890A (en) * | 1995-07-13 | 1998-06-02 | Byk-Gardner Gmbh | Device for measuring optical characteristic quantities of transparent materials |
| WO2020226552A1 (en) * | 2019-05-07 | 2020-11-12 | Scienta Omicron Ab | Holding device for a sample and a system for heating a sample using such a holding device |
-
1987
- 1987-06-17 JP JP62149113A patent/JPS63314445A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5760890A (en) * | 1995-07-13 | 1998-06-02 | Byk-Gardner Gmbh | Device for measuring optical characteristic quantities of transparent materials |
| WO2020226552A1 (en) * | 2019-05-07 | 2020-11-12 | Scienta Omicron Ab | Holding device for a sample and a system for heating a sample using such a holding device |
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