JPS633142U - - Google Patents
Info
- Publication number
- JPS633142U JPS633142U JP9741386U JP9741386U JPS633142U JP S633142 U JPS633142 U JP S633142U JP 9741386 U JP9741386 U JP 9741386U JP 9741386 U JP9741386 U JP 9741386U JP S633142 U JPS633142 U JP S633142U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- processing head
- wafer
- wafer processing
- view
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 5
- 238000007664 blowing Methods 0.000 claims 1
- 238000000034 method Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9741386U JPS633142U (enExample) | 1986-06-25 | 1986-06-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9741386U JPS633142U (enExample) | 1986-06-25 | 1986-06-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS633142U true JPS633142U (enExample) | 1988-01-11 |
Family
ID=30964308
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9741386U Pending JPS633142U (enExample) | 1986-06-25 | 1986-06-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS633142U (enExample) |
-
1986
- 1986-06-25 JP JP9741386U patent/JPS633142U/ja active Pending