JPS6331014A - Manufacture for magnetic head - Google Patents

Abstract

PURPOSE:To improve a productivity and a yield by butting heating and melting a low melting point glass layer formed by sputtering and evaporating the low melting point glass to a core half body and joining two core half bodies. CONSTITUTION:A groove, which comes to be a winding window 5, is provided at the back. At the whole surface of a substrate 1, an amorphous magnetic alloy film 2 and a protecting film 3 are formed. This is the compound substance of a core half body. On the other hand, the compound substance of the core half body without a groove for the winding window is also formed, in the same way, the low melting point glass is sputtered and evaporated, and the grinding for setting the track width of a gap is executed. On respective track forming surfaces of these different compound substances, a low melting point glass is sputtered and evaporated to a prescribed film thickness and a gap regulating film 8 to determine the gap width is formed. Butting and heating are executed so that the gap regulating film can be faced, the low melting point glass is melted and the compound substance is joined. The joining body is cut in the A direction of an arrow and a magnetic head core is obtained.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to manufacturing a magnetic head using an amorphous magnetic alloy for a magnetic layer.

[Conventional technology]

In recent years, as magnetic recording and reproducing devices have become more densely recorded, improvements in magnetic recording media and magnetic heads have been made. As an example, it has been proposed to use an amorphous magnetic alloy for the magnetic layer, which makes it possible to create a magnetic head with excellent magnetic properties such as ablation rate and excellent mechanical properties. ing.

Such a magnetic head has a magnetic layer made of an amorphous magnetic alloy and an S layer formed on the base by sputtering or vapor deposition.
It is formed by forming a protective film such as tOt to form a core half, and then joining the two core halves with low melting point glass, and a head gap is formed at this joint. Ru.

In addition, when joining two core halves, first place a bulk of low melting point glass on each core half and heat it in an electric furnace to melt the low melting point glass and place it on the RL film. make low melting point glass. After that, the low melting point glass is solidified by cooling, and the surface of the low melting point glass is polished to a flat surface.Next, the two core halves are stacked so that the surfaces of the low melting point glasses are in contact with each other, and the core halves are again heated. Each low melting point glass is melted by heating in a furnace. Thereafter, the low melting point glass is solidified by cooling. This joins the two core halves.

[Problem that the invention seeks to solve]

However, when the two core halves were joined in this manner, the following problem occurred.

(1) Low melting point glass requires 4
It is heated to a high temperature of 50°C to 470°C for about 20 minutes. This heating temperature is close to the crystallization temperature (500°C to 530°C) of the amorphous magnetic alloy thin film (amorphous magnetic alloy thin film) of each core half. When joining bodies, the amorphous alloy thin film is heated to near its crystallization temperature, and when low-melting glass is attached to the core halves, the two core halves to which this has been attached are bonded together. It will also be heated twice.

As a result, the amorphous magnetic alloy thin film is heated to 400°C or higher, near its crystallization temperature, for a long time, about 60 minutes, including the superheating and cooling period before and after melting the low-melting glass, and its magnetic The characteristics will deteriorate. To give an example, this heating increases the coercive force from 0.2 to 0.
．． 50. from 1 to 20, l, and in some cases several 0.
deteriorates to

(2) When the bulk of low melting point glass melts, bubbles are generated near the interface between the protective film of the core half and the low melting point glass, and when the low melting point glass solidifies, bubbles with a diameter of about 5 to 50 μm are generated. remains. Therefore, when the sliding surface is polished, these bubbles appear on the medium sliding surface of the magnetic head, creating many small dents on the medium sliding surface and causing scratches on the recording medium. This makes it undesirable as a magnetic head, resulting in a problem of lower yield.

(3) Molten low melting point glass has poor wettability with protective films such as S + Ot, so it is filled between the two core halves to bond them together. When using glass, when the low melting point glass melts,
A large amount of low melting point glass escapes from between the two core halves, and the space between these two core halves cannot be completely filled. A very large amount of low melting glass is used, nearly 100 times the amount required. According to this, low melting point glass is sufficiently filled between the two core halves to firmly bond them, but most of the molten low melting point glass used is in the winding window provided in the core half. It will flow in, and work will be required to remove it. For this reason, there was a problem in that the productivity of this magnetic head was low.

(4) As mentioned above, when joining two core halves,
The low melting point glass is melted and then cooled to solidify the low melting point glass, but residual thermal stress is generated in the low melting point glass as it is cooled. However, as explained in (3) above, when a very large amount of low melting point glass is used, the residual thermal stress becomes very large, and moreover, compared to low melting point glass, the heat of the core half body is Since the expansion coefficient is small, the base body of the core half will be distorted. For this reason, it takes a long time to polish the gap forming surface, and the accuracy of the head gap width deteriorates, causing problems in productivity and yield.

SUMMARY OF THE INVENTION An object of the present invention is to provide a method for manufacturing a magnetic head that eliminates the problems of the prior art, has excellent magnetic properties, and improves productivity and yield.

[Means for solving problems]

In order to achieve the above object, the present invention provides two core halves by sputtering or vapor depositing a low melting point glass, and then heating and melting the formed low melting point glass layers against each other.
This is to join two core halves together.

〔Example〕

Embodiments of the present invention will be described below with reference to the drawings.

FIG. 1 is a process diagram showing an embodiment of the method for manufacturing a magnetic head according to the present invention, in which 1 is a base, 2 is an amorphous magnetic alloy thin film, 3 is a retainer, 4 is a gap forming surface, and 5 is a wire-wound window,
6 is a track groove, 7 is a low melting point glass, and 8 is a gap regulating film.

Here, a case will be described in which a large number of core halves are formed on a single base.

That is, in FIG. 1 (8), the base 1 has an arrow A.
A large number of U-shaped grooves are provided in the direction, and the tops of the peaks between these grooves are all ground flat in the same plane.

Further, this base body 1 is provided with grooves that will later become winding wires 5 in a direction perpendicular to the direction of these grooves (arrow A). An amorphous magnetic alloy thin film 2. of CON b Z , for example, is deposited on the entire surface of the substrate 1 by sputtering or the like.
Furthermore, a protective film 3 of S, O, etc. is formed thereon.

This is a composite of core halves, with a substrate 1 on the surface.
A U-shaped track groove 6 is formed for each U-shaped groove, and the tops of the peaks between the track grooves 6 are all polished flat within the same plane to form a gap forming surface. In this polymer, from the center of the track groove 6 to the adjacent track groove 6
One core half extends up to the center of the core, and in the figure, four core halves are integrated.

Low-melting glass is sputtered or vapor-deposited over the entire surface of this composite so that the track grooves 6 are sufficiently embedded and the glass is slightly thicker than the depth of the track grooves 6.

1) is a composite body on which a low melting point glass layer is formed, cut in a direction perpendicular to the direction of the arrow in FIG. 1 fal. After that, in Figure 1 (bl),
In order to set the track width of the gap to a predetermined value, the surface of the composite is polished to a point ut line.

On the other hand, a core half composite body having the same structure as that shown in FIG. Alternatively, it is deposited by vapor deposition and polished to set the track width of the gap as shown in FIG. 1 (G).

The polished surfaces of these composites are called track-forming surfaces;
A low melting point glass is sputtered or vapor deposited to a predetermined thickness on each track forming surface of these different composites to form a gap regulating film 8 that determines the gap width. Then, these different composites are brought into contact with each other with their gap regulating films facing each other and heated. This heating causes
The low melting glass melts and the composites are joined together.

FIG. 1 (el shows the state in which two complexes are joined.

By cutting this bonded body along the two-point line a passing through the center of the low melting point glass N7 in the direction of the arrow, a magnetic head core is obtained. In Figure 0, four magnetic head cores are obtained from this bonded body. A magnetic head core obtained by cutting this joined body and finished is shown in FIG. 2. By applying an S wire to this through a winding window 5, a magnetic head is completed.

In this embodiment, the low melting point glass is sputtered or evaporated. Although the temperature during sputtering cannot be measured due to the influence of the plasma, since the temperature immediately after sputtering is around 200° C., it is thought that the temperature remains approximately at this temperature during sputtering as well. Further, the temperature during vapor deposition of the low melting point glass is 150° C. or lower. Therefore, even if a low melting point glass layer is formed by sputtering or vapor deposition, the amorphous magnetic alloy thin film of the core half is only heated to a temperature sufficiently lower than its crystallization temperature; Even if it takes a long time, the magnetic properties of the amorphous magnetic alloy thin film are not affected at all.

In addition, when the core halves with the low melting point glass layer formed in this way are butted together and joined together, the amorphous magnetic alloy thin film is heated to near its crystallization temperature in order to heat and melt the melting point glass layer. However, since this heating period is short, the deterioration of the magnetic properties of the amorphous magnetic alloy thin film is slight. That is, the heating period for the amorphous magnetic alloy thin film to reach near the crystallization temperature is approximately half that of the conventional technology in the case of the above example, and therefore the amorphous magnetic alloy thin film maintains almost the best magnetic properties. . In fact, the coercive force hardly changed.

In the above embodiment, the low melting point glass is formed on the protective film by sputtering or vapor deposition, but according to this,
The low melting point glass is deposited almost uniformly on the surface of the protective film. For this reason, the amount of low melting point glass used is approximately several times the volume of the portion of the core half that must be filled, which can be significantly reduced compared to the above-mentioned conventional technology. As a result, even when the two core halves are joined together, the winding window is not clogged with low melting point glass, and there is no need to remove the low melting point glass that has flowed into the winding window as in the prior art. becomes. Additionally, the amount of low-melting point glass used is significantly reduced.
The residual thermal stress generated in the low melting point glass after the core halves are joined is small, and the distortion and warpage of the base of the core halves is significantly reduced. This facilitates polishing of the gap forming surface and processing for accurately setting the track width of the gap.

Furthermore, since the low melting point glass changes directly from the gas phase to the solid phase and is formed on the protective film without melting, air bubbles will not be generated near the interface between the protective film and the low melting point glass. For this reason, the medium sliding surface of the formed magnetic head becomes an extremely smooth surface.

It goes without saying that the present invention is applicable not only to the above magnetic head but also to other magnetic heads that use an amorphous TM alloy in the magnetic layer.

〔Effect of the invention〕

As explained above, according to the present invention, the high temperature heating time for joining the core halves can be significantly reduced, the deterioration of the magnetic properties of the amorphous Wm alloy thin film can be prevented, and the magnetic properties of the magnetic head can be reduced. In addition, the amount of low-melting point glass used to join the core halves can be significantly reduced, preventing clogging of the low-melting point glass in the winding window and distortion of the core halves. This greatly reduces the manufacturing process and greatly improves the productivity of the magnetic head.Furthermore, it prevents the generation of air bubbles when bonding the low melting point glass to the core half, which improves the media sliding surface of the magnetic head. The magnetic head becomes extremely smooth, and the yield of the magnetic head is greatly increased.

[Brief explanation of drawings]

FIG. 1 is a process diagram showing an embodiment of a method for manufacturing a magnetic head according to the present invention, and FIG. 2 is a perspective view showing a head core according to this embodiment. DESCRIPTION OF SYMBOLS 1... Substrate, 2... Amorphous magnetic alloy thin film, 3...
Protective film, 4... Gap forming surface, 5... Winding window, 7
...Low melting point glass. Figure 1 (a) (b) Figure 1 (C) Figure 2

Claims (1)

[Claims] In a method for manufacturing a magnetic head in which two core halves are joined using an amorphous magnetic alloy thin film as a magnetic layer, a low melting point glass layer is formed on each of the core halves by sputtering or vapor deposition. A method of manufacturing a magnetic head, characterized in that the two core halves are joined by forming a core half, then heating and melting the low melting point glass layers against each other.