JPS63309812A - Inclinometer - Google Patents

Inclinometer

Info

Publication number
JPS63309812A
JPS63309812A JP14417487A JP14417487A JPS63309812A JP S63309812 A JPS63309812 A JP S63309812A JP 14417487 A JP14417487 A JP 14417487A JP 14417487 A JP14417487 A JP 14417487A JP S63309812 A JPS63309812 A JP S63309812A
Authority
JP
Japan
Prior art keywords
light beam
reflector
reflected
incident
angle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14417487A
Other languages
Japanese (ja)
Inventor
Yoshifumi Matsushita
松下 嘉文
Shungo Tsuboi
俊吾 坪井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP14417487A priority Critical patent/JPS63309812A/en
Publication of JPS63309812A publication Critical patent/JPS63309812A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To obtain a small-sized, inexpensive sensor with improved measurement accuracy by allowing a photodetecting element which detects the intensity of a light beam reflected by plural reflectors provided so that they are horizontal at all times. CONSTITUTION:An incident light beam 22 emitted by a light source 26 is stopped down by a slit 25 narrowly and incident on a 1st reflector 20 to become a 1st reflected light beam 23 which varies in intensity according to the dependency of the reflection factor on the angle of incidence. Then the light beam 23 is incident on a 2nd reflector 21 and reflected for the 2nd time to become a 2nd reflected light beam 24. At this point of time, the light beam 24 becomes parallel to the light beam 22 and this relation is maintained even when a body 30 to be measured slants. The light beam 24 is, therefore, made incident on the photodetecting element 28 at a constant angle at all times and converted here into an electric signal. Then the deviation from the electric signal at a reference angle is calibrated to detect the tilt angle of the body 30 to be measured continuously. Further, the deviation signal based upon the reference angle is supplied to equipment and an operation terminal is operates so as to cancel the deviation, thereby controlling the attitude to the body 30 to be measured.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 この発明は、建築、産業用ロボット、飛行機。[Detailed description of the invention] [Industrial application field] This invention is applicable to architecture, industrial robots, and airplanes.

自動車、船舶等の水平検出の際用いられる傾斜センサー
に関するものである。
This invention relates to an inclination sensor used for horizontal detection of automobiles, ships, etc.

〔従来の技術〕[Conventional technology]

第3図は例えば大食豊明監修1センサ実用事典”P14
8フジ会テクノシステム(1986)に記載された従来
の傾斜センサーを示す原理図であり、図において(1)
は反射体、(2)は反射体(1)に入射される入射光線
、(3)は入射光線(2)が反射体(1)で反射された
ときの第1次反射光線、(4)は光源からの入射光線(
2)を細く絞るためのスリン) 、 (5)は第1次反
射光線(3)の位置を検出するための位置検出素子であ
る。
Figure 3 is an example of "1 Sensor Practical Encyclopedia" supervised by Toyoaki Oshiki, p.
8. This is a principle diagram showing the conventional tilt sensor described in Fujikai Techno System (1986), and in the figure (1)
is the reflector, (2) is the incident ray that enters the reflector (1), (3) is the primary reflected ray when the incident ray (2) is reflected by the reflector (1), (4) is the incident ray from the light source (
(2) is a position detection element for detecting the position of the primary reflected light beam (3).

第4図は第3図の原理図を用いた傾斜センサーの構成図
であり、(7)は発光ダイオード(LED )、レーザ
ダイオード(LD)等の発光素子からなる光源、(8)
は被測定体(9)に取り付けられるケースで、このケー
ス(8)内に光源(7)、位置検出素子(6)および支
点(10)Kより常に水平に維持されている反射体(1
)が収納されている。
FIG. 4 is a configuration diagram of a tilt sensor using the principle diagram of FIG.
is a case that is attached to the object to be measured (9), and inside this case (8) are a light source (7), a position detection element (6), and a reflector (10) that is always maintained horizontally with respect to the fulcrum (10) K.
) are stored.

灰に、動作について説明する。被測定体(9)が傾斜し
た場合でも反射体(1)は常に水平を維持するので、入
射光線(2)の反射体(1)に対する入射角度が変化す
る。それに応じて第3図に示すように第1次反射光線(
3)の反射角度も変化するので、第1次反射光線(3)
の位置検出素子(6)への入射位置が変化する。この位
置の変化量の大きさから被測定体(9)の傾斜角度が求
められる。
Explain the operation to Ash. Even when the object to be measured (9) is tilted, the reflector (1) always remains horizontal, so the angle of incidence of the incident light beam (2) on the reflector (1) changes. Accordingly, as shown in Fig. 3, the primary reflected ray (
Since the reflection angle of 3) also changes, the primary reflected ray (3)
The position of incidence on the position detection element (6) changes. The inclination angle of the object to be measured (9) can be determined from the magnitude of this change in position.

〔発明が解決しようとする問題点〕[Problem that the invention seeks to solve]

従来の傾斜センサーは以上のように構成されているので
、測定精度を上げるためには反射体(1)と位置検出素
子(6)との間隔(L)を大きくする必要があり、また
それに伴なって位置検出素子(6)も大形なものを用い
なければならず、傾斜センサーの全体が大きくなるとい
った問題点があった。
Since the conventional tilt sensor is configured as described above, in order to improve measurement accuracy, it is necessary to increase the distance (L) between the reflector (1) and the position detection element (6), and accordingly Therefore, a large position detection element (6) must be used, which poses a problem in that the entire tilt sensor becomes large.

この発明は上記のような問題点を解消するためになされ
たもので、測定精旋を向上させ、かつ小形化ができると
ともに、安価な傾斜センサーを得ることを目的とする。
The present invention has been made to solve the above-mentioned problems, and aims to provide an inexpensive tilt sensor that improves measurement precision, can be made smaller, and is also inexpensive.

〔問題点を解決するための手段〕[Means for solving problems]

この発明に係る傾斜センサーは、傾斜する被測定体に取
り付けられるケースと、このケース内に ゛取り付けら
れている光源と、ケース内に互いに常に水平になるよう
に設けられ光源からの光を反射する複数の反射体と、ケ
ース内に取り付けられ反射体で反射された反射光線の光
の強度を検知する受光素子とを備えたものである。
The inclination sensor according to the present invention includes a case attached to a tilting object to be measured, a light source installed in the case, and a light source installed in the case so as to be always parallel to each other to reflect light from the light source. It is equipped with a plurality of reflectors and a light-receiving element that is attached inside the case and detects the intensity of the reflected light beam reflected by the reflectors.

〔作 用〕[For production]

この発明における傾斜センサーは、反射体に入射した入
射光線が複数の反射体で反射したとき、その入射角度に
よって反射光線の強度が変化し、その強度を受光素子が
検知し、そこで電気信号に変換され、その電気信号を処
理することによって被測定体の傾斜角度を求めることが
できる。
In the tilt sensor of this invention, when an incident light beam that enters a reflector is reflected by multiple reflectors, the intensity of the reflected light changes depending on the angle of incidence, and the light receiving element detects the intensity, which converts it into an electrical signal. By processing the electrical signals, the inclination angle of the object to be measured can be determined.

〔実施例〕〔Example〕

以下、この発明の実施例を図について説明する。 Embodiments of the present invention will be described below with reference to the drawings.

第1図はこの発明の一実施例を示す構成図であり、(2
0)はガラス板からなる第1の反射体、(21)は第1
の反射体(20)と平行に設けられた第2の反射体、(
22)は第1の反射体(20)に入射される入射光線、
(23)は第1の反射体(20)で反射された第一次反
射光線、(24)は第2の反射体(21)で反射された
第二次反射光線、(25)は入射光線(22)を細く絞
るためのスリット、(26)は発光ダイオード(LED
)、レーザダイオード(LD)等の発光素子からなる光
源、(27)は第1の反射体(20)、第2の反射体(
21)を常に水平に支えるための支点、(28)は第二
次反射光線(24)を受光するフォトダイオード、(2
9)は被測定体(30)に取り付けられるケースで、こ
のケース(29)内には上記各部材(20)、(21)
、(25)。
FIG. 1 is a block diagram showing an embodiment of the present invention, (2
0) is the first reflector made of a glass plate, and (21) is the first reflector.
A second reflector provided parallel to the reflector (20) of (
22) is the incident light beam incident on the first reflector (20);
(23) is the primary reflected ray reflected by the first reflector (20), (24) is the secondary reflected ray reflected by the second reflector (21), and (25) is the incident ray (22) is a slit for narrowing the light, (26) is a light emitting diode (LED).
), a light source consisting of a light emitting element such as a laser diode (LD), (27) is a first reflector (20), a second reflector (
21) is always supported horizontally, (28) is a photodiode that receives the secondary reflected light beam (24), and (28) is a photodiode that receives the secondary reflected light beam (24).
9) is a case that is attached to the object to be measured (30), and inside this case (29) are the above-mentioned members (20) and (21).
, (25).

(26L(28)が窒素ガス封入下、収納されている。(26L (28) is stored under nitrogen gas.

第2図はガラス表面からの反射率の入射角依存性を表わ
した図であり、図中Rsは入射光の電気ベクトルで入射
面に垂直な成分の反射率、Rpは入射光の電気ベクトル
で入射面に平行な成分の反射率である。ここで入射面と
は入射光と境界面の法線とからなる面をいう。両方の成
分を平均したものが普通に扱う光の強度になる。
Figure 2 is a diagram showing the dependence of the reflectance from the glass surface on the angle of incidence, where Rs is the electric vector of the incident light and the reflectance of the component perpendicular to the plane of incidence, and Rp is the electric vector of the incident light. This is the reflectance of the component parallel to the plane of incidence. Here, the plane of incidence refers to a plane consisting of the incident light and the normal to the boundary surface. The average of both components is the intensity of light that is commonly used.

上記のように構成された傾斜センサーにおいては、光源
(26)から発せられた入射光線(22)はスリン) 
(25)で細く絞られ、第1の反射体(20)に入射し
、第2図による反射率の入射角依存性に従って強度変化
した第一次反射光線(23)になる。
In the tilt sensor configured as described above, the incident light beam (22) emitted from the light source (26) is
(25), enters the first reflector (20), and becomes a primary reflected light beam (23) whose intensity changes according to the dependence of the reflectance on the angle of incidence as shown in FIG.

次いで、この第一次反射光線(23)は第2の反射体(
21)に入射し2回目の反射を行ない第二次反射光線(
24)となる。この時点で第二次反射光線(24)は入
射光線(22)と平行光線となっておす、この関係は被
測定体(30)が傾いた場合にも常に成り立っている。
This primary reflected ray (23) then passes through a second reflector (
21) and undergoes a second reflection, resulting in the second reflected ray (
24). At this point, the secondary reflected light beam (24) becomes parallel to the incident light beam (22), and this relationship always holds even when the object to be measured (30) is tilted.

したがって、第二次反射光線(24)は受光素子(28
)に対して常に一定角度で入射し、ここで電気信号に変
換される。そして、基準角度における電気信号からの偏
りを角度に対して較正しておけば、被測定体(30)の
傾斜角度を連続的に検知することができる。また、基準
角度からの偏差信号を機器に接続し、偏差を打消すよう
に操作端を動作させることにより被測定体(30)に対
する姿勢制御を行なうことができる。
Therefore, the secondary reflected light beam (24) is transmitted to the light receiving element (28).
) at a constant angle, where it is converted into an electrical signal. If the deviation from the electrical signal at the reference angle is calibrated with respect to the angle, the inclination angle of the object to be measured (30) can be continuously detected. Furthermore, by connecting a deviation signal from the reference angle to the device and operating the operating end to cancel the deviation, the attitude of the object to be measured (30) can be controlled.

なお、上記実施例では第1の反射体(20)、第2の反
射体(21)で入射光線(22)は反射され、光強度変
化は2乗比に拡大され、かつ第1の反射体(20)と第
2の反射体(21)とは平行に配設されているので、受
光素子(28)に対しる第二次反射光線(24)の入射
角度が常に一定となり、傾斜測定精度は向上する。
Note that in the above embodiment, the incident light beam (22) is reflected by the first reflector (20) and the second reflector (21), and the change in light intensity is magnified to a square ratio, and the first reflector (20) and the second reflector (21) (20) and the second reflector (21) are arranged in parallel, so the angle of incidence of the secondary reflected light beam (24) on the light receiving element (28) is always constant, making the tilt measurement accurate. will improve.

また、上記実施例では入射光線(22)、第一次反射光
線(23)の第1および第2の反射体(20)。
Also, in the above embodiment, the first and second reflectors (20) for the incident light beam (22) and the primary reflected light beam (23).

(21)に対する入射角度を第2図から解るように反射
率が著しく変化する70°以上に設定し、かつRp酸成
分みを受光素子(28)が検知するようになっているの
で、傾斜測定精度はさらに向上する。
As can be seen from Figure 2, the angle of incidence on (21) is set to 70° or more, at which the reflectance changes significantly, and the light receiving element (28) detects only the Rp acid component, so it is possible to measure the inclination. Accuracy is further improved.

さらに、ケース(29)内は劣化防止のため電果ガスが
封入されているので、光源(26)、受光素子(28)
のキャップは外した状態で使用されており、光源(26
)と第1の反射体(20)との距離、第2の反射体(2
1)と受光素子(28)との距離は小さくすることがで
き、傾斜センサー全体の形状を小さくすることができる
Furthermore, the inside of the case (29) is filled with electrical gas to prevent deterioration, so the light source (26) and light receiving element (28)
It is used with the cap removed, and the light source (26
) and the first reflector (20), the distance between the second reflector (20)
The distance between 1) and the light receiving element (28) can be reduced, and the overall shape of the tilt sensor can be reduced.

〔発明の効果〕〔Effect of the invention〕

以上のように、この発明の傾斜センサーは、互いに常に
水平になるように設けられた複数の反射体で反射された
反射光線の光強度を受光素子が検知するようになってい
るので、反射率変化を増幅させ、かつ受光素子に常に一
定角度で反射光線が入射され測定精度が向上しかつ小形
化ができるという効果がある。
As described above, in the tilt sensor of the present invention, the light receiving element detects the light intensity of the reflected light rays reflected by the plurality of reflectors provided so as to be always horizontal to each other, so the reflectance This has the effect of amplifying changes and allowing the reflected light to always be incident on the light receiving element at a constant angle, improving measurement accuracy and making it possible to downsize.

【図面の簡単な説明】[Brief explanation of drawings]

第1図はこの発明の一実施例による傾斜センサ−を示す
構成図、第2図は、この発明の詳細な説明するためのガ
ラスの反射率の入射角依存性を示す図、第3図は従来の
傾斜センサーの一例を示す原理図、第4図は従来の傾斜
センサーの一例を示す構成図である。 図において、(20)は第1の反射体、(21)は第2
の反射体、(26)は光源、(28)は受光素子、(2
9)はケース、(30)は被測定体である。 なお、各図中、同一符号は同一または相当部分を示す。 30:ネ皮タII4定イ本 人射山ψ
FIG. 1 is a block diagram showing a tilt sensor according to an embodiment of the present invention, FIG. 2 is a diagram showing the dependence of the reflectance of glass on the angle of incidence for explaining the invention in detail, and FIG. FIG. 4 is a principle diagram showing an example of a conventional tilt sensor. FIG. 4 is a configuration diagram showing an example of a conventional tilt sensor. In the figure, (20) is the first reflector, and (21) is the second reflector.
reflector, (26) is a light source, (28) is a light receiving element, (2
9) is a case, and (30) is an object to be measured. In each figure, the same reference numerals indicate the same or corresponding parts. 30: Nederata II 4 Sadai Himself Shooting Mountain ψ

Claims (1)

【特許請求の範囲】[Claims] 傾斜する被測定体に取り付けられるケースと、このケー
ス内に取り付けられている光源と、前記ケース内に互い
に常に水平になるように設けられ前記光源からの光を反
射する複数の反射体と、前記ケース内に取り付けられ前
記反射体で反射された反射光線の光の強度を検知する受
光素子とを備えていることを特徴とする傾斜センサー。
a case attached to an inclined object to be measured; a light source attached in the case; a plurality of reflectors provided in the case so as to be always horizontal to each other and reflect light from the light sources; A tilt sensor comprising: a light-receiving element that is mounted inside a case and detects the intensity of the reflected light beam reflected by the reflector.
JP14417487A 1987-06-11 1987-06-11 Inclinometer Pending JPS63309812A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14417487A JPS63309812A (en) 1987-06-11 1987-06-11 Inclinometer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14417487A JPS63309812A (en) 1987-06-11 1987-06-11 Inclinometer

Publications (1)

Publication Number Publication Date
JPS63309812A true JPS63309812A (en) 1988-12-16

Family

ID=15355928

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14417487A Pending JPS63309812A (en) 1987-06-11 1987-06-11 Inclinometer

Country Status (1)

Country Link
JP (1) JPS63309812A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4993162A (en) * 1987-07-24 1991-02-19 Kern & Co. Ltd. Apparatus for measuring inclinations of a component

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4993162A (en) * 1987-07-24 1991-02-19 Kern & Co. Ltd. Apparatus for measuring inclinations of a component

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