JPS6330757A - Ultrasonic flaw detection test - Google Patents

Ultrasonic flaw detection test

Info

Publication number
JPS6330757A
JPS6330757A JP61172731A JP17273186A JPS6330757A JP S6330757 A JPS6330757 A JP S6330757A JP 61172731 A JP61172731 A JP 61172731A JP 17273186 A JP17273186 A JP 17273186A JP S6330757 A JPS6330757 A JP S6330757A
Authority
JP
Japan
Prior art keywords
ultrasonic probe
flaw detection
ultrasonic
measuring apparatus
ultrasonic flaw
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP61172731A
Other languages
Japanese (ja)
Inventor
Hideki Kobayashi
小林 英喜
Shinichi Yamaguchi
新一 山口
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP61172731A priority Critical patent/JPS6330757A/en
Publication of JPS6330757A publication Critical patent/JPS6330757A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To simultaneously perform the detection of a flaw part and the location of the position thereof, by fixing either one of an ultrasonic probe and a body to be inspected to a coordinates measuring apparatus and moving the other one with respect to said coordinates measuring apparatus and detecting the flaw of the body to be inspected by the ultrasonic probe. CONSTITUTION:Either one of an ultrasonic probe and a body to be inspected is fixed to a coordinates measuring apparatus and the other one is fixed on a moving side with respect to the coordinates measuring apparatus and the ultrasonic probe is contacted with the body to be inspected to be relatively moved to perform flaw detection. As the coordinates measuring apparatus, an apparatus for electrically outputting coordinates of a moving body moving along machine axes consisting of an X-axis, a Y-axis and a Z-axis is used. For example, the ultrasonic probe is mounted to the three-dimensional coordinates measuring apparatus to perform the flaw detection of plate-shaped silicon nitride and coordinates data are detected and plotted to accurately display the position of the flaw part with respect to a reference point. Since either one of the ultrasonic probe and the body to be detection of the flaw and the location of the position thereof can be accurately performed.

Description

【発明の詳細な説明】 [発明の目的] 本発明は超音波探傷試験法に係り、特に欠陥部の検出と
その位置の評定を同時に行うことを可能とし、併せてム
ラなく確実に探傷できるようにした超音波探傷試験法に
関する。
[Detailed Description of the Invention] [Object of the Invention] The present invention relates to an ultrasonic flaw detection test method, and in particular, it makes it possible to detect a defective part and evaluate its position at the same time, and also to ensure that flaw detection is performed evenly and reliably. Regarding the ultrasonic flaw detection testing method.

(従来の技術) 従来から例えばセラミックス焼結体のボアや異物等の内
部欠陥を検出する方法として超音波探傷試験法が用いら
れている。
(Prior Art) Ultrasonic testing has conventionally been used as a method for detecting internal defects such as bores and foreign objects in ceramic sintered bodies.

この方法は、超音波探傷装置の超音波探触子(トランス
ジューサ)をセラミックス焼結体の表面に接触させつつ
移動させて欠陥部から反則してくる反則波により欠陥の
存在とその大ぎさとを検出する方法であり、その位置の
評定はスケールにより行われている。
In this method, the ultrasonic probe (transducer) of an ultrasonic flaw detection device is moved while in contact with the surface of the ceramic sintered body, and the presence and size of the defect is detected using a repulsive wave that comes from the defective part. It is a method of detection, and its position is evaluated using a scale.

(発明が解決しようとする問題点) しかしながら、このような従来の方法では、欠陥部の位
置の評定をスケールにより行うため、試験に時間と手数
がかかるうえに、精密な欠陥位置の評定ができないとい
う問題がめった。
(Problems to be Solved by the Invention) However, in such conventional methods, the position of the defective part is evaluated using a scale, which requires time and effort for testing, and it is not possible to accurately evaluate the position of the defective part. This problem happened very often.

さらに超音波探触子の操作を手操作で行っているため被
検体の表面をムラなく確実に探傷することが困難である
という問題があった。
Furthermore, since the ultrasonic probe is operated manually, there is a problem in that it is difficult to detect flaws evenly and reliably on the surface of the object.

本発明はこのような従来の難点を解消すべくなされたも
ので、欠陥部の検出とその位置の評定を同時に行うこと
を可能とし、併せて探傷をムラなく行うことを可能とし
た超音波探傷試験法を提供することを目的としている。
The present invention has been made in order to solve these conventional difficulties, and is an ultrasonic flaw detection method that makes it possible to detect defects and evaluate their positions at the same time, and also makes it possible to perform flaw detection evenly. The purpose is to provide test methods.

[発明の構成] (問題点を解決するための手段) 本発明の超音波探傷試験法は、超音波探傷装置の超音波
探触子を被検体の表面に沿って移動させ、被検体中の欠
陥を検出する方法において、前記超音波探傷装置の超音
波探触子および被検体のいずれか一方を座標測定装置に
対して固定させ、他方をこの座標測定装置の移動側に固
定させて、前記超音波探傷装置の超音波探触子を被検体
に接触させつつ相対移動させて欠陥部の検出とその位置
の評定とを同時に行うことを特徴としている。
[Structure of the Invention] (Means for Solving the Problems) The ultrasonic flaw detection testing method of the present invention moves an ultrasonic probe of an ultrasonic flaw detection device along the surface of a test object, In the method for detecting defects, one of the ultrasonic probe and the object of the ultrasonic flaw detection device is fixed to the coordinate measuring device, the other is fixed to the moving side of the coordinate measuring device, and the A feature of this method is that the ultrasonic probe of the ultrasonic flaw detection device is brought into contact with the object and moved relative to the object to detect the defect and evaluate its position at the same time.

本発明に使用する座標測定装置は、例えばX軸およびY
軸、またはX軸、Y@およびY軸からなる機械軸を有し
、これらの軸に沿って移動する移動体の座標を電気信号
で出力する機能をもつ2次元または3次元の座標測定装
置が適している。なお本発明においては、被検体を座標
測定装置に対して固定し超音波探傷装置の超音波探触子
を移動させるようにするが、逆に超音波探傷装置の超音
波探触子を座標測定装置に対して固定し被検体側を移動
させてもよい。
The coordinate measuring device used in the present invention is, for example, an X-axis and a Y-axis.
A two-dimensional or three-dimensional coordinate measuring device that has mechanical axes consisting of an axis or an Are suitable. Note that in the present invention, the object to be examined is fixed to the coordinate measuring device and the ultrasonic probe of the ultrasonic flaw detection device is moved; however, conversely, the ultrasonic probe of the ultrasonic flaw detecting device is It may be fixed to the apparatus and moved on the subject side.

なお欠陥部の位置データは、フロッピィディスクのよう
な記憶装置に記憶させておくと、保管およびプロッタに
よる欠陥部の再現等に便利である。
Note that it is convenient to store the position data of the defective portion in a storage device such as a floppy disk for storage and reproduction of the defective portion using a plotter.

(作用) 本発明においては、被検体を超音波探傷試験する際、超
音波探傷装置の超音波探触子と被検体とが座標測定装置
により相対移動され、超音波探触子が欠陥部を検出した
とき同時にその座標上の位置を検出することができる。
(Function) In the present invention, when performing an ultrasonic flaw detection test on a test object, the ultrasonic probe of the ultrasonic flaw detection device and the test object are relatively moved by the coordinate measuring device, and the ultrasonic probe detects the defective part. When detected, the position on the coordinates can be detected at the same time.

したがって別に欠陥の位置を評定する作業が不要となる
。また座標測定装置は被検体上を超音波探触子によりス
キャンさせることができるので、被検体表面をよりこま
かいスキャンニングピッチでムラなく確実に探傷するこ
とができる。
Therefore, there is no need to separately evaluate the position of the defect. Further, since the coordinate measuring device can scan the object with an ultrasonic probe, the surface of the object can be detected evenly and reliably at a finer scanning pitch.

(実施例) 以下本発明の実施例について説明する。(Example) Examples of the present invention will be described below.

実施例 窒化ケイ素扮末   ioo重量部 イツトリア粉末    5 〃 アルミナ粉末     2 〃 からなる混合粉末を用いてこれを1800’Cで3時間
、圧力40MPAで加圧焼結して140mmX 140
HX15mmの平板状窒化ケイ素焼結体を製造した。
Example Silicon nitride powder: ioo parts by weight A mixed powder consisting of 5 parts by weight of ittria powder and 2 parts by weight of alumina powder was pressure sintered at 1800'C for 3 hours at a pressure of 40MPa to form a 140mm x 140mm powder.
A flat silicon nitride sintered body with a HX of 15 mm was manufactured.

次にこの窒化ケイ素焼結体を、あらかじめ感度校正(キ
ャリブレーション)を行なった3次元座標測定装置に取
り付けた超音波探触子により表面を0.1mmピッチで
スキャンし、検出された座標データを記憶装置(フロッ
ピーディスク)へ記憶させlこ。
Next, the surface of this silicon nitride sintered body was scanned at a pitch of 0.1 mm using an ultrasonic probe attached to a three-dimensional coordinate measuring device whose sensitivity had been calibrated in advance, and the detected coordinate data was recorded. Save it to a storage device (floppy disk).

第1図はこの座標データの出力であり、第2図はこの座
標データに基いてプロットした欠陥部の位置である。な
お図において*は欠陥部の位置を示し、Oは基準点に設
けた孔を示す。
FIG. 1 shows the output of this coordinate data, and FIG. 2 shows the position of the defective part plotted based on this coordinate data. In the figure, * indicates the position of the defective part, and O indicates the hole provided at the reference point.

これらの図から、欠陥部の位置が正確に記録されている
ことがわかる。
From these figures, it can be seen that the position of the defective part is accurately recorded.

なお、感度校正は、たとえば直径0.2〜0.02mv
のタングステン線を複数本、等間隔に埋設したセラミッ
クス焼結体を用いて行なう。
Note that the sensitivity calibration is performed using, for example, a diameter of 0.2 to 0.02 mv.
This is done using a ceramic sintered body in which multiple tungsten wires are embedded at equal intervals.

[発明の効果] 以上の実施例からも明らかなように、本発明によれば、
欠陥の検出と位置の評定を同時に行うことができ、超音
波探傷試験法の手数を大幅に軽減することができる。ま
た実施例に示すように、座標上の位置データを記憶装置
に記憶させておけば、これを平面上にプロットして欠陥
部の位置や大きざを視覚的に再現させることができ、欠
陥の原因の解明および対策に有効に利用することができ
る。
[Effect of the invention] As is clear from the above examples, according to the present invention,
Defect detection and position evaluation can be performed at the same time, and the labor involved in ultrasonic flaw detection testing can be significantly reduced. Furthermore, as shown in the example, if the coordinate position data is stored in a storage device, the position and size of the defect can be visually reproduced by plotting it on a plane. It can be effectively used to clarify the cause and take countermeasures.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明により得られた欠陥部の座標上の位置デ
ータを示す表、第2図はこの座標データをプロットした
図である。 O・・・・・・・・・基準点 6゜ 伊 r 4      袴 4        # 舛 #    ぐ 美 #      p 襲    # #  “4 舛 J  舛  2 第2図 6゜ 甚 =4 1X 丼 共  共 丼 繋 # 4 舛 ネ
FIG. 1 is a table showing coordinate position data of defective parts obtained according to the present invention, and FIG. 2 is a diagram plotting this coordinate data. O・・・・・・・・・Reference point 6゜ir 4 Hakama 4 # Masu # Gumi # p Attack # # “4 Masu J Masu 2 Fig. 2 6゜ Jin = 4 1X Don joint Joint # 4 Masune

Claims (3)

【特許請求の範囲】[Claims] (1)超音波探傷装置の超音波探触子を被検体の表面に
沿って移動させ、被検体中の欠陥を検出する方法におい
て、前記超音波探傷装置の超音波探触子および被検体の
いずれか一方を座標測定装置に対して固定させ、他方を
この座標測定装置の移動側に固定させて、前記超音波探
傷装置の超音波探触子を被検体に接触させつつ相対移動
させて欠陥部の検出とその位置の評定とを行うことを特
徴とする超音波探傷試験法。
(1) In a method of detecting defects in a test object by moving an ultrasonic probe of the ultrasonic test device along the surface of the test object, the ultrasonic probe of the ultrasonic test device and the Either one is fixed to the coordinate measuring device and the other is fixed to the moving side of the coordinate measuring device, and the ultrasonic probe of the ultrasonic flaw detection device is moved relative to the object while being in contact with the object to detect defects. An ultrasonic flaw detection testing method characterized by detecting parts and evaluating their positions.
(2)被検体が、セラミックス焼結体である特許請求の
範囲第1項記載の超音波探傷試験法。
(2) The ultrasonic flaw detection testing method according to claim 1, wherein the test object is a ceramic sintered body.
(3)評定された欠陥部の位置データが、記憶装置に記
憶される特許請求の範囲第1項または第2項記載の超音
波探傷方法。
(3) The ultrasonic flaw detection method according to claim 1 or 2, wherein the evaluated position data of the defective portion is stored in a storage device.
JP61172731A 1986-07-24 1986-07-24 Ultrasonic flaw detection test Pending JPS6330757A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61172731A JPS6330757A (en) 1986-07-24 1986-07-24 Ultrasonic flaw detection test

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61172731A JPS6330757A (en) 1986-07-24 1986-07-24 Ultrasonic flaw detection test

Publications (1)

Publication Number Publication Date
JPS6330757A true JPS6330757A (en) 1988-02-09

Family

ID=15947273

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61172731A Pending JPS6330757A (en) 1986-07-24 1986-07-24 Ultrasonic flaw detection test

Country Status (1)

Country Link
JP (1) JPS6330757A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003088296A1 (en) * 2002-04-17 2003-10-23 Nippon Electric Glass Co., Ltd. Cathode ray tube-use glass panel and inspection method therefore and inspection device therefor

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52123290A (en) * 1976-04-09 1977-10-17 Hitachi Ltd Defect length measuring device
JPS546594A (en) * 1977-06-17 1979-01-18 Mitsubishi Electric Corp Numerical value controlling ultrasonic flaw detecting system
JPS59221662A (en) * 1983-05-31 1984-12-13 Toshiba Corp Testing method of ultrasonic flaw detection

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52123290A (en) * 1976-04-09 1977-10-17 Hitachi Ltd Defect length measuring device
JPS546594A (en) * 1977-06-17 1979-01-18 Mitsubishi Electric Corp Numerical value controlling ultrasonic flaw detecting system
JPS59221662A (en) * 1983-05-31 1984-12-13 Toshiba Corp Testing method of ultrasonic flaw detection

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003088296A1 (en) * 2002-04-17 2003-10-23 Nippon Electric Glass Co., Ltd. Cathode ray tube-use glass panel and inspection method therefore and inspection device therefor

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