JPS63307137A - Production of glass preform for optical fiber - Google Patents
Production of glass preform for optical fiberInfo
- Publication number
- JPS63307137A JPS63307137A JP14108187A JP14108187A JPS63307137A JP S63307137 A JPS63307137 A JP S63307137A JP 14108187 A JP14108187 A JP 14108187A JP 14108187 A JP14108187 A JP 14108187A JP S63307137 A JPS63307137 A JP S63307137A
- Authority
- JP
- Japan
- Prior art keywords
- gas
- nozzle
- burner
- raw material
- glass
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011521 glass Substances 0.000 title claims abstract description 35
- 239000013307 optical fiber Substances 0.000 title claims description 14
- 238000004519 manufacturing process Methods 0.000 title claims description 9
- 239000002994 raw material Substances 0.000 claims abstract description 23
- 239000000654 additive Substances 0.000 claims abstract description 6
- 238000010438 heat treatment Methods 0.000 claims abstract description 5
- 238000009835 boiling Methods 0.000 claims abstract description 3
- 238000000034 method Methods 0.000 claims description 6
- 238000010574 gas phase reaction Methods 0.000 claims description 3
- 239000007789 gas Substances 0.000 abstract description 30
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 abstract description 8
- 239000011261 inert gas Substances 0.000 abstract description 5
- 229910052786 argon Inorganic materials 0.000 abstract description 4
- 229910006113 GeCl4 Inorganic materials 0.000 abstract description 3
- IEXRMSFAVATTJX-UHFFFAOYSA-N tetrachlorogermane Chemical compound Cl[Ge](Cl)(Cl)Cl IEXRMSFAVATTJX-UHFFFAOYSA-N 0.000 abstract description 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 abstract description 2
- 239000001257 hydrogen Substances 0.000 abstract description 2
- 229910052739 hydrogen Inorganic materials 0.000 abstract description 2
- 239000001301 oxygen Substances 0.000 abstract description 2
- 229910052760 oxygen Inorganic materials 0.000 abstract description 2
- 229910003910 SiCl4 Inorganic materials 0.000 abstract 2
- FDNAPBUWERUEDA-UHFFFAOYSA-N silicon tetrachloride Chemical compound Cl[Si](Cl)(Cl)Cl FDNAPBUWERUEDA-UHFFFAOYSA-N 0.000 abstract 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 abstract 1
- 239000000567 combustion gas Substances 0.000 abstract 1
- 230000008016 vaporization Effects 0.000 abstract 1
- 239000000463 material Substances 0.000 description 7
- 238000002485 combustion reaction Methods 0.000 description 3
- 239000000126 substance Substances 0.000 description 2
- 229910003074 TiCl4 Inorganic materials 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 125000004435 hydrogen atom Chemical class [H]* 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000007711 solidification Methods 0.000 description 1
- 230000008023 solidification Effects 0.000 description 1
- 230000002194 synthesizing effect Effects 0.000 description 1
- XJDNKRIXUMDJCW-UHFFFAOYSA-J titanium tetrachloride Chemical compound Cl[Ti](Cl)(Cl)Cl XJDNKRIXUMDJCW-UHFFFAOYSA-J 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/012—Manufacture of preforms for drawing fibres or filaments
- C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
- C03B37/01413—Reactant delivery systems
- C03B37/0142—Reactant deposition burners
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2207/00—Glass deposition burners
- C03B2207/04—Multi-nested ports
- C03B2207/06—Concentric circular ports
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2207/00—Glass deposition burners
- C03B2207/20—Specific substances in specified ports, e.g. all gas flows specified
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2207/00—Glass deposition burners
- C03B2207/20—Specific substances in specified ports, e.g. all gas flows specified
- C03B2207/26—Multiple ports for glass precursor
- C03B2207/28—Multiple ports for glass precursor for different glass precursors, reactants or modifiers
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2207/00—Glass deposition burners
- C03B2207/30—For glass precursor of non-standard type, e.g. solid SiH3F
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2207/00—Glass deposition burners
- C03B2207/46—Comprising performance enhancing means, e.g. electrostatic charge or built-in heater
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Life Sciences & Earth Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Manufacture, Treatment Of Glass Fibers (AREA)
Abstract
Description
【発明の詳細な説明】
〔技術分野〕
本発明は、加炭加水分解用バーナを用いた気相反応によ
る光ファイバ用ガラス母材の製造方法に関するものであ
る。DETAILED DESCRIPTION OF THE INVENTION [Technical Field] The present invention relates to a method for producing a glass preform for an optical fiber by a gas phase reaction using a carbohydrolysis burner.
従来より、光ファイバ用ガラス母材の製造方法としてV
AD法がよく知られている。この方法は多重管バーナを
用いて、気化された原料あるいはGeCl4等の添加物
を可燃性ガス、助燃性ガスあるいは不活性ガスと共に前
記多重管バーナの所定のノズルに導き、該ノズルの前方
で気相反応させてガラス微粒子を合成し、これを回転す
る支持棒上に堆積させることによって光ファイバ用ガラ
ス母材を製造するものである。Conventionally, V
The AD method is well known. This method uses a multi-tube burner to guide vaporized raw materials or additives such as GeCl4 together with combustible gas, combustion assisting gas, or inert gas to a predetermined nozzle of the multi-tube burner, and then air is introduced in front of the nozzle. A glass preform for optical fibers is manufactured by synthesizing glass particles through a phase reaction and depositing them on a rotating support rod.
ところで通常使用される原料および添加物としては、5
iC14、GeC1a 、TiCl4、POCl2等が
あるが、これらの物質は室温では通常液体または固体で
ある。そこで従来から他の気体を用いて強制的に気化さ
せた後、この濃度を一定に保持し前記バーナノズルに送
給するシステムが採られている。By the way, commonly used raw materials and additives include 5
These substances include iC14, GeC1a, TiCl4, POCl2, etc., and these substances are usually liquid or solid at room temperature. Therefore, conventionally, a system has been adopted in which the gas is forcibly vaporized using another gas, and then the concentration is maintained constant and the vapor is fed to the burner nozzle.
それ故、バーナに連通ずる配管系はヒータ等により加温
されガラス原料(以下添加物も含めガラス原料と称する
)の液化や固化を防いでいる。Therefore, the piping system communicating with the burner is heated by a heater or the like to prevent the glass raw material (hereinafter referred to as glass raw material including additives) from liquefying or solidifying.
前述した従来の光ファイバ用ガラス母材の製造方法にお
いては、配管の継手部分やバーナノズル、とりわけガラ
ス原料用の中心部のノズルでは加熱効率が悪く、これら
の箇所でガラス原料ガスの液化や固化が起こることがあ
った。その結果長期にわたってガラス母材の製造を続け
ているとガラス原料ガス用のノズルが詰まる等の現象が
起こり、一定量のガラス原料の送給ができず品質の安定
した光ファイバ用ガラス母材を製造できないという問題
があった。In the conventional manufacturing method of glass base material for optical fibers described above, heating efficiency is poor at the piping joints, burner nozzles, and especially the nozzle in the center for glass raw material, and the glass raw material gas tends to liquefy or solidify at these locations. Something happened. As a result, if glass base material is manufactured for a long period of time, phenomena such as clogging of the nozzle for glass raw material gas may occur, making it impossible to feed a certain amount of glass raw material, resulting in a stable quality glass base material for optical fibers. There was a problem that it could not be manufactured.
この解決手段として、例えば特開昭6O−16i34B
号公報に記載の如く、バーナノズルの各隔壁内に中空部
を設け、この中にノズル加熱用の熱媒体を封入しておく
等の提案もなされているが、この方法だとバーナが複雑
化しかつ大型化してしまうという問題があった。As a means of solving this problem, for example,
As described in the above publication, a proposal has been made to provide a hollow part in each partition wall of the burner nozzle and seal a heat medium for heating the nozzle in the hollow part, but this method makes the burner complicated and There was a problem that it became large.
前記問題に鑑み本発明の目的は、従来のバーナに簡単な
改良を加えるだけで容易にガラス原料ガスの液化、固化
を防止でき、もって長期にわたって品質の安定した光フ
ァイバ用ガラス母材を製造できる光ファイバ用ガラス母
材の製造方法を提供することにある。In view of the above problems, an object of the present invention is to easily prevent liquefaction and solidification of glass raw material gas by simply making improvements to conventional burners, and thereby to produce a glass base material for optical fibers with stable quality over a long period of time. An object of the present invention is to provide a method for manufacturing a glass preform for optical fiber.
前記目的を達成すべく本発明は、気相反応により光ファ
イバ用ガラス母材を製造する方法において、沸点が室温
より高い上記ガラス母材の原料あるいは添加物を原料供
給装置によって加熱気化させガラス原料ガスとしてバー
ナノズルに送給すると共に、該ガラス原料ガスが送給さ
れるバーナノズルの基端部を加熱することを特徴とする
ものである。In order to achieve the above object, the present invention provides a method for manufacturing a glass preform for optical fibers by a gas phase reaction, in which raw materials or additives for the glass preform having a boiling point higher than room temperature are heated and vaporized by a raw material supply device to produce a glass raw material. It is characterized in that it is fed as a gas to the burner nozzle and that the base end of the burner nozzle to which the frit gas is fed is heated.
本発明の実施例を図を参照して詳細に説明する。 Embodiments of the present invention will be described in detail with reference to the drawings.
第1図は本発明の光ファイバ用ガラス母材の製造方法に
て使用するバーナの一実施例を示している。FIG. 1 shows an embodiment of a burner used in the method of manufacturing a glass preform for optical fiber according to the present invention.
本図が示すように本発明に使用するバーナ1はガラス原
料ガスが2つのノズルから流れる構造のバーナであって
、これは中心ノズル2からガラス原料ガスである5iC
14と可燃性ガスである水素とをそれぞれ流し、順次外
側に向かって第2ノズル3からはアルゴン等からなる不
活性ガスを流し、第3ノズル4からガラス原料ガスであ
る5iC1nとGeCl4とに助燃性ガスである酸素を
加えて流し、第4ノズル5には例えばアルゴン等の不活
性ガスからなるその他のガスを流すようになっていて、
ガラス原料ガスを流す各ノズル、すなわちガラス原料と
可燃性ガスを流す中心ノズル2及びガラス原料ガスと助
燃性ガスを流す第3ノズル4の基端部には各々ヒータ6
が装着されており、該各ヒータ6は図示しない温度調節
器に接続されていて所望の温度になるように制御される
。As shown in this figure, the burner 1 used in the present invention has a structure in which frit gas flows from two nozzles.
14 and hydrogen, which is a combustible gas, are flowed respectively, and an inert gas such as argon is sequentially flowed outward from the second nozzle 3, and auxiliary combustion is performed on the glass raw material gas 5iC1n and GeCl4 from the third nozzle 4. Oxygen, which is a reactive gas, is added and flowed through the fourth nozzle 5, and another gas consisting of an inert gas such as argon is flowed through the fourth nozzle 5.
A heater 6 is installed at the base end of each nozzle through which the frit gas flows, that is, the central nozzle 2 through which the frit gas and combustible gas flow, and the third nozzle 4 through which the frit gas and combustion auxiliary gas flow.
Each heater 6 is connected to a temperature controller (not shown) and is controlled to a desired temperature.
前記第1図において全ノズルの基端部をヒータで覆って
もよいが、ヒータの大型化を防ぐ意味で最小限前述した
ガラス原料ガス用のノズル基端部のみヒータで加熱する
のがより好ましい。In FIG. 1, the base ends of all the nozzles may be covered with a heater, but in order to prevent the heater from increasing in size, it is more preferable to heat only the base end of the frit gas nozzle described above with the heater. .
また本発明は前記実施例に示す構造のバーナに限定され
るものではなく、種々の構造のバーナに適用できること
はいうまでもない。Furthermore, it goes without saying that the present invention is not limited to the burner structure shown in the embodiments described above, but can be applied to burners of various structures.
前述の如きバーナ1を使用して光ファイバ用ガラス母材
の製造したところ、ガラス原料ガスを供給する各ノズル
2及び4には結露が全く見られず、長期にわたってノズ
ル目詰まりが発生しなかった。When a glass base material for optical fiber was manufactured using the burner 1 as described above, no condensation was observed at all in the nozzles 2 and 4 for supplying frit gas, and no nozzle clogging occurred for a long period of time. .
その結果品質の安定した光ファイバ用ガラス母材を長期
にわたって製造することができた。As a result, we were able to manufacture a glass base material for optical fibers with stable quality over a long period of time.
前述の如く本発明によれば、バーナに極めて簡単な改良
を加えるだけで、ガラス原料ガスの液化や固化を防止で
き、もって長期にわたって品質の安定した光ファイバ用
ガラス母材を製造することができる。As described above, according to the present invention, by making extremely simple improvements to the burner, it is possible to prevent the glass raw material gas from liquefying or solidifying, thereby making it possible to produce a glass base material for optical fibers with stable quality over a long period of time. .
第1図は本発明に使用するバーナの一実施例をを示す縦
断面図である。FIG. 1 is a longitudinal sectional view showing one embodiment of a burner used in the present invention.
Claims (1)
において、沸点が室温より高い上記ガラス母材の原料あ
るいは添加物を原料供給装置によって加熱気化させガラ
ス原料ガスとしてバーナノズルに送給すると共に、該ガ
ラス原料ガスが送給されるバーナノズルの基端部を加熱
することを特徴とする光ファイバ用ガラス母材の製造方
法。In a method for manufacturing a glass preform for optical fibers by a gas phase reaction, raw materials or additives for the glass preform having a boiling point higher than room temperature are heated and vaporized by a raw material supply device and fed to a burner nozzle as a glass raw material gas, and the A method for producing a glass preform for optical fibers, which comprises heating the base end of a burner nozzle to which frit gas is fed.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14108187A JPS63307137A (en) | 1987-06-05 | 1987-06-05 | Production of glass preform for optical fiber |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14108187A JPS63307137A (en) | 1987-06-05 | 1987-06-05 | Production of glass preform for optical fiber |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS63307137A true JPS63307137A (en) | 1988-12-14 |
Family
ID=15283768
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14108187A Pending JPS63307137A (en) | 1987-06-05 | 1987-06-05 | Production of glass preform for optical fiber |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS63307137A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5942020A (en) * | 1996-01-11 | 1999-08-24 | Tensor Machinery Limited | Apparatus for evacuating air from curing area of UV lamps for fiber-like substrates |
JP2002338287A (en) * | 2001-05-18 | 2002-11-27 | Furukawa Electric Co Ltd:The | Device and method for manufacturing optical fiber preform |
EP2762456A4 (en) * | 2011-09-29 | 2015-06-03 | Sumitomo Electric Industries | Methods for manufacturing glass fine particle deposit and glass base material |
-
1987
- 1987-06-05 JP JP14108187A patent/JPS63307137A/en active Pending
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5942020A (en) * | 1996-01-11 | 1999-08-24 | Tensor Machinery Limited | Apparatus for evacuating air from curing area of UV lamps for fiber-like substrates |
JP2002338287A (en) * | 2001-05-18 | 2002-11-27 | Furukawa Electric Co Ltd:The | Device and method for manufacturing optical fiber preform |
EP2762456A4 (en) * | 2011-09-29 | 2015-06-03 | Sumitomo Electric Industries | Methods for manufacturing glass fine particle deposit and glass base material |
US9630872B2 (en) | 2011-09-29 | 2017-04-25 | Sumitomo Electric Industries, Ltd. | Method for manufacturing glass-fine-particle-deposited body and method for manufacturing glass base material |
US10604439B2 (en) | 2011-09-29 | 2020-03-31 | Sumitomo Electric Industries, Ltd. | Method for manufacturing glass-fine-particle-deposited body and method for manufacturing glass base material |
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