JPS63305143A - Continuous vacuum treatment apparatus - Google Patents

Abstract

PURPOSE:To prevent an object to be treated from coming into contact with the side walls of a slit seal part, by providing a device for preventing the object from meandering on the upstream side of a preliminary vacuum chamber having said slit seal. CONSTITUTION:A flexible object F to be treated fed from a delivery shaft 8 is fed through a guide roll 9 to a roll guider 27, where the conveying rail of the object F is detected with a detector 29 and the detected signal is sent to a controlling means and energizes an actuator 28 so that the guider 27 may be actuated about point C to prevent the object F from meandering. The object is fed through a slit formed between a seal block 15 supported by an upper case 13 and a lower case 14 to an upstream side preliminary vacuum chamber 2, and fed through guide rolls 25 and 26 to a vacuum treatment chamber 1, wherei it is subjected to plasma treatment. This object F is passed to a downstream side preliminary vacuum chamber 3 similar in structure to the vacuum chamber 2 and a guide roll 10 and wound around a winding shaft 11.

Description

Detailed Description of the Invention [Industrial Application Field] The present invention relates to plastic molded products such as PET films,
The present invention relates to an apparatus for continuously processing objects such as natural or synthetic fibers or painted steel plates in a vacuum state, such as plasma processing or vapor deposition.

[Conventional technology]

This type of vacuum continuous processing equipment is disclosed in Japanese Patent Application Laid-Open No. 57-30733.
Roll-type sealing devices have become common, as described in 2006, and sealing is performed by pressing the object to be processed with a pair of rolls.

[Problem that the invention seeks to solve]

In the above-mentioned conventional technology, since the object to be processed is sealed while being crimped with an integral roll, the object to be processed is crimped as a result, which has an adverse effect on the properties of the object after being processed. In addition, a ripple member along the roll axis is used as a seal between the rotating roll and the case, but since it does not have a negative effect on the processed material, lubricants such as oil cannot be used, so the ripple part Abrasion particles on the sides or rolls are generated.

There was a problem with it getting onto the things he was treating.

Therefore, it was unsuitable for high-grade processing objects such as transparent conductive films.

The purpose of the present invention is to perform continuous vacuum processing without pressing the workpiece, and without dust such as abrasion particles being deposited on the workpiece, and to prevent the meandering of the workpiece that occurs during transport of the workpiece. An object of the present invention is to provide a vacuum continuous processing apparatus equipped with a device for preventing the above problems.

(Means for solving the problem) The above object is achieved by equipping the front part of the sealing device with a slip-type sealing device and a device to prevent meandering of the processed material, which keeps the conveyance trajectory of the processed material constant at all times. .

[Effect]

When transporting the workpiece, a control means uses a signal from a detector that detects the transport trajectory of the workpiece to control a workpiece meandering prevention device installed in front of the detector so that the workpiece always follows a constant trajectory. do. As a result, the object to be processed is transported without meandering.

〔Example〕

Hereinafter, one implementation of the present invention will be explained with reference to the drawings.

In FIGS. 1 and 2, 1 is a vacuum process in which a flexible workpiece F such as a plastic film, for example, a PET film, is continuously plasma-treated in a vacuum state, and 2 is a vacuum process on the front side of the vacuum processing chamber 1 A plurality of pre-vacuum chambers 3 are arranged at the rear of the vacuum processing chamber 1, and a vacuum pump 4 connected to the vacuum processing chamber generates a pressure of about 10-8 torr. It is evacuated via the exhaust conduit 5 to maintain the vacuum pressure.

The preliminary vacuum chambers 2 and 3 are connected to a vacuum pump 6.
Therefore, the vacuum pressure in the vacuum processing chamber 1 is slightly higher,
The vacuum is then evacuated via the exhaust conduit 7 so as to maintain a vacuum that is gradually reduced from atmospheric pressure.

The workpiece F to be processed is sent out from an unwinding shaft 8, and its tension is controlled by a guide roll 9.

Thereafter, the workpiece F is transferred to the preliminary vacuum chamber 2 through a roll guider 27 that controls the conveyance direction of the workpiece and prevents meandering.
It is then sent to a hospital where it is treated with plasma. The operating mechanism of the roll guider 27 will be described below, with a detailed view of the roll guider 27 shown in FIG. 3 and a parent view A of FIG. 1 shown in FIG. 4. The transport trajectory of the object to be processed F is detected by a photoelectric or pneumatic detector 29 behind the roll guider 27, and a signal from the detector 29 operates an actuator 28 for operating the roll guider via a control means.

The control means and actuator 28 for the roll guider 27 are set in advance so that the roll guider 27 operates in a direction to remove deviations in the transport direction of the workpiece. As a result, the roll guider 27 operates around the zero point in conjunction with the operation of the actuator 28, thereby preventing the object F from meandering.

The plasma-treated workpiece F then passes through a rear preliminary vacuum 3, passes through a guide roll 10 that controls the tension in the rear preliminary vacuum chamber, and is wound onto a winding shaft 11.

12 is a driving DC motor for conveying the workpiece, and by detecting the tension of the guide rolls 9 and 10,
To transport a workpiece without wrinkles and adjust the transport speed appropriately.

5, 6, and 7 show the main parts of the sealing device constituting the preliminary vacuum chambers 2 and 3, and FIG. 6 is a cross section taken along line B-B in FIG. The diagram is C-C in Figure 5.
FIG. 13 is the upper case, 14 is the lower case, 15
is a seal block guided and supported by the upper case 13, and the workpiece F is transported between the slits formed by the lower case 14 and the seal block 15 without contacting them. 16
is a handle, and by rotating it, the reducer 17. Gear 18. 22 is an LM guide that moves the column 21 and the seal block 15, which are integrally formed with the seal block through a ball screw 19 and a nut 20, in the vertical direction according to the thickness of the workpiece;
5 in the vertical direction. 23 is an O-ring, which seals between the upper case 13 and the seal block 15.

The O-ring 23 moves the seal block 15 in the vertical direction (
2), a sufficiently elastic material is used to seal between the upper case 13 and the seal block 15. The space between the upper case 13 and the side of the seal block 15 *24 is made as small as possible (for example, 30 microns) so that the seal block 15 can move up and down smoothly and the amount of air leakage is small. The guide roll 25 is a guide roll that guides the object to be processed, and the height of the outer circumferential surface of the guide roll 25 is set higher than the lower case 14 so that the seal surface of the lower case 14 and the object to be processed do not come into contact. In normal use, the positions of the guide roll 25 and the seal block 15 are determined so that the distance between the workpiece F and the seal block 15 and the distance between the workpiece F and the case are both 0.1 m. The guide roll 26 wraps the workpiece around the guide roll 25 at a large angle to prevent the workpiece from vibrating at the sealed portion and coming into contact with the wall surface. The pre-vacuum chamber 2 or 3 consists of sealing devices facing each other and is evacuated by a vacuum pump 6 via an evacuation conduit 7.

【Effect of the invention〕

According to the present invention, it is possible to prevent meandering during conveyance of the processed material, so that the processed material always passes through a fixed location of the slit-shaped seal portion, and as a result, the processed material comes into contact with the side wall of the slit-shaped sealed portion. It becomes possible to prevent

[Brief explanation of the drawing]

The drawings are explanatory diagrams of an embodiment of the vacuum continuous processing apparatus according to the present invention, in which Fig. 1 is a longitudinal cross-sectional view of the vacuum continuous processing apparatus, Fig. 2 is a plan view of Fig. 1, and Fig. 3 is a detailed view of the roll guider. Figure, 4th
The figure is A homeland in Figure 1, Figure 5 is a vertical cross-sectional view of the sealing device,
Figure 6 is a cross-sectional view of β-5 in Figure 5, and Figure 7 is a cross-sectional view of O-5 in Figure 5.
0 is a sectional view. F...Object to be processed, 13...Upper case, 14...Lower case. 15... Seal block, 25... Guide roll. 26... Tension imparting roll, 27... Roll guider, 28... Actuator. ,7

Claims (1)

[Claims] 1. At least one pre-vacuum chamber is provided at the front and rear sides of the vacuum processing chamber. The pre-vacuum chamber has a slit-shaped sealing device that transports the workpiece and seals the vacuum processing chamber from the outside of the processing chamber. 1. A continuous vacuum processing apparatus, characterized in that a guide means for guiding a workpiece is provided at the front and rear of the apparatus, or on one side thereof, and a meandering prevention device for the workpiece is provided in front of the preliminary vacuum chamber.