JPS6330305A - Cooling device for ozone generator - Google Patents
Cooling device for ozone generatorInfo
- Publication number
- JPS6330305A JPS6330305A JP17410686A JP17410686A JPS6330305A JP S6330305 A JPS6330305 A JP S6330305A JP 17410686 A JP17410686 A JP 17410686A JP 17410686 A JP17410686 A JP 17410686A JP S6330305 A JPS6330305 A JP S6330305A
- Authority
- JP
- Japan
- Prior art keywords
- cooling water
- cooling
- ozone generator
- circuit
- heat
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 title claims abstract description 44
- 238000001816 cooling Methods 0.000 title claims abstract description 41
- 239000000498 cooling water Substances 0.000 claims abstract description 78
- 239000002826 coolant Substances 0.000 claims abstract description 26
- 238000005057 refrigeration Methods 0.000 claims description 16
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 7
- 238000009833 condensation Methods 0.000 claims description 3
- 230000005494 condensation Effects 0.000 claims description 3
- 238000001514 detection method Methods 0.000 claims description 3
- 239000008400 supply water Substances 0.000 claims 1
- 239000007789 gas Substances 0.000 abstract description 14
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 abstract description 2
- 239000001301 oxygen Substances 0.000 abstract description 2
- 229910052760 oxygen Inorganic materials 0.000 abstract description 2
- 239000002994 raw material Substances 0.000 description 7
- 239000003507 refrigerant Substances 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 238000001035 drying Methods 0.000 description 3
- 230000005611 electricity Effects 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Landscapes
- Oxygen, Ozone, And Oxides In General (AREA)
Abstract
Description
【発明の詳細な説明】
[産業上の利用分野コ
この発明は、高電圧を印加せしめられることにより無声
放電法によってオゾンを発生させるオゾン発生装置のた
めの冷却装置に関するものである。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] This invention relates to a cooling device for an ozone generator that generates ozone by a silent discharge method by applying a high voltage.
[従来の技術]
第2図は例えばカタログ[三菱電機(株)SE−H24
8−C]に示された従来のオゾン発生装置用冷却装置を
示すシステム構成図である。この第2図において、1は
原料ガス乾m設備であり。[Prior art] Figure 2 is shown in the catalog [Mitsubishi Electric Corporation SE-H24].
8-C] is a system configuration diagram showing a conventional cooling device for an ozone generator. In this FIG. 2, 1 is a raw material gas drying equipment.
2はオゾン発生器、3はオゾン発生器2に高電圧を印加
するための電源設備、4はポンプ、5は熱交換器として
の蒸発器で、これらのオゾン発生器2、ポンプ4および
蒸発器5をそれぞれ環状に接続して冷却媒体循環回路C
1を構成している。2 is an ozone generator, 3 is a power supply equipment for applying high voltage to the ozone generator 2, 4 is a pump, and 5 is an evaporator as a heat exchanger, and these ozone generator 2, pump 4, and evaporator 5 are connected in an annular manner to form a cooling medium circulation circuit C.
1.
また、6は圧縮機、7は熱交換器としての凝縮器、8は
膨張弁で、これらの圧縮機6.凝縮器7゜膨張弁8.蒸
発器5をそれぞれ環状に接続して冷凍装置C2を構成し
ている。Further, 6 is a compressor, 7 is a condenser as a heat exchanger, and 8 is an expansion valve. Condenser 7° Expansion valve 8. The evaporators 5 are connected in an annular manner to form a refrigeration system C2.
さらに、9は冷却水ポンプ、1oはクーリングタワーで
、これらの凝縮器7.冷却水ポンプ9゜クーリングタワ
ー10をそれぞれ環状に接続して冷却水回路C3を構成
している。Furthermore, 9 is a cooling water pump, 1o is a cooling tower, and these condensers 7. The cooling water pump 9° and the cooling tower 10 are connected in a ring to form a cooling water circuit C3.
なお、11は原料ガス供給ライン、12はオゾン化ガス
供給ライン、13はクーリングタワー10に水を補給す
るための補給水供給ラインである。Note that 11 is a raw material gas supply line, 12 is an ozonized gas supply line, and 13 is a makeup water supply line for replenishing water to the cooling tower 10.
次に動作について説明する。原料ガス供給ライン11を
通じ供給される原料ガスは、ガス乾燥設備1により、オ
ゾン発生が安定で効率良く行なえる十分低い露点まで乾
燥され、オゾン発生器2に至る。ここで、電源設備3よ
り供給される高電圧により、オゾン発生器2内で無声放
電により原料ガス中の酸素がオゾン化され、オゾン化ガ
スとしてオゾン化ガス供給ライン12を通じ系外へ取り
出される
ところでこのオゾン発生時において、その投入される電
力の90%以上は熱損失として発生するため、かかる発
生熱を除去し、オゾン発生器2を低温度に維持すること
は、オゾン発生効率を高めるうえで必要であることが知
られている。しかるに上記発生熱は、ポンプ4によりオ
ゾン発生器2に供給される冷却媒体により除去され、高
温となった冷却媒体は蒸発器5により吸熱され、冷却さ
れて、再びオゾン発生器2に至る。Next, the operation will be explained. The raw material gas supplied through the raw material gas supply line 11 is dried by the gas drying equipment 1 to a sufficiently low dew point at which ozone generation can be performed stably and efficiently, and then reaches the ozone generator 2. Here, due to the high voltage supplied from the power supply equipment 3, oxygen in the raw material gas is ozonized by silent discharge in the ozone generator 2, and is taken out of the system as an ozonized gas through the ozonized gas supply line 12. When generating ozone, more than 90% of the input power is generated as heat loss, so removing this generated heat and maintaining the ozone generator 2 at a low temperature is an effective way to increase ozone generation efficiency. known to be necessary. However, the generated heat is removed by the cooling medium supplied to the ozone generator 2 by the pump 4, and the high-temperature cooling medium is absorbed by the evaporator 5, cooled, and reaches the ozone generator 2 again.
一方、蒸発器5において、冷却媒体の熱は圧縮機6.凝
縮器7.膨張弁8.蒸発器5により構成された冷凍装置
C2内を循環する冷媒に熱伝達される。蒸発器5を経た
冷媒は圧縮機6に吸引され、高温高圧となって凝縮器7
に入る。ここで冷却水・ポンプ9によりクーリングタワ
ー10で冷却された冷却水が凝縮器7に供給され、高温
高圧の冷媒と冷却水とが熱交換し、冷媒は冷却されて凝
縮液化し、膨張弁8に入る。冷媒は膨張弁8により減圧
され低温低圧となって再び蒸発器5に入り、かかるサイ
クルを繰り返す。On the other hand, in the evaporator 5, the heat of the cooling medium is transferred to the compressor 6. Condenser7. Expansion valve8. Heat is transferred to the refrigerant circulating within the refrigeration system C2 configured by the evaporator 5. The refrigerant that has passed through the evaporator 5 is sucked into the compressor 6, becomes high temperature and high pressure, and is transferred to the condenser 7.
to go into. Here, the cooling water cooled by the cooling tower 10 is supplied by the cooling water/pump 9 to the condenser 7, where the high-temperature, high-pressure refrigerant and the cooling water exchange heat, and the refrigerant is cooled, condensed, and liquefied, and then sent to the expansion valve 8. enter. The refrigerant is depressurized by the expansion valve 8, becomes low temperature and low pressure, enters the evaporator 5 again, and repeats this cycle.
[発明が解決しようとする問題点]
しかしながら、従来のオゾン発生装置用冷却装置は以上
にように構成されているので、例えばクーリングタワー
で冷却される冷却水の水温が十分低い場合においても、
冷凍装置を構成する圧縮機は常時駆動させておく必要が
あり、このため電力。[Problems to be Solved by the Invention] However, since the conventional cooling device for an ozone generator is configured as described above, for example, even when the temperature of the cooling water cooled by the cooling tower is sufficiently low,
The compressor that makes up the refrigeration system must be kept running at all times, which requires electricity.
消費の無駄が生じるなどの問題点があった。There were problems such as wasteful consumption.
この発明は上記のような問題点を解消するためになされ
たもので、冷却水の水温が低い場合、冷凍装置を駆動さ
せることなくオゾン発生器の冷却を可能としたオゾン発
生装置用冷却装置を得ることを目的とする。This invention was made to solve the above-mentioned problems, and provides a cooling device for an ozone generator that can cool the ozone generator without driving the refrigeration device when the temperature of the cooling water is low. The purpose is to obtain.
[問題点を解決するための手段] この発明に係るオゾン発生装置用冷却装置は。[Means for solving problems] A cooling device for an ozone generator according to the present invention is a cooling device for an ozone generator.
高電圧を印加せしぬられることにより無声原電によりオ
ゾンを発生させるオゾン発生装置を冷却するためのオゾ
ン発生装置用冷却装置において、上記オゾン発生装置と
熱交換器との間で冷却媒体を循環させる冷却媒体循環回
路と、上記熱交換器で上記冷却媒体のもつ熱を吸収する
冷凍装置と、同冷凍装置の凝縮熱を熱交換により除去す
るための冷却水回路とをそなえ、同冷却水回路中の冷却
水を上記冷却媒体循環回路の冷却用として使用すべく上
記冷却水回路から切替弁を介して分岐し上記の冷却水回
路と冷却媒体循環回路とを連係接続する補助冷却水回路
を設けるとともに、上記冷却水の温度を検出する冷却水
温検出器と、同冷却・水温検出器からの検出信号を受け
て上記冷却水の温度が所定値以下のときに上記冷却水を
上記補助冷却水回路へ供給すべく上記切替弁を切り替え
且つ上記冷凍装置の作動を停止させる制御器とを設けた
ものである。In an ozone generator cooling device for cooling an ozone generator that generates ozone by a silent power source by applying a high voltage and being wetted, a cooling medium is circulated between the ozone generator and the heat exchanger. A cooling medium circulation circuit, a refrigeration system for absorbing the heat of the cooling medium by the heat exchanger, and a cooling water circuit for removing the condensation heat of the refrigeration system by heat exchange. In order to use the cooling water for cooling the cooling medium circulation circuit, an auxiliary cooling water circuit is provided which branches off from the cooling water circuit via a switching valve and connects the cooling water circuit and the cooling medium circulation circuit. , a cooling water temperature detector that detects the temperature of the cooling water, and a cooling water temperature detector that receives a detection signal from the cooling/water temperature detector and sends the cooling water to the auxiliary cooling water circuit when the temperature of the cooling water is below a predetermined value. A controller is provided for switching the switching valve to supply the refrigeration system and stopping the operation of the refrigeration system.
[作 用]
この発明におけるオゾン発生装置用冷却装置では、冷却
水温度が設定温度以下になった場合、制部器からの指令
により、切替弁を切り替えて冷却水を補助冷却水回路側
へ供給する。これによりこの冷却水が冷却媒体循環回路
の冷却用として使用される。そして、このとき制御器か
らの指令により冷凍装置の作動が停止せしめられる。[Function] In the cooling device for an ozone generator according to the present invention, when the cooling water temperature becomes lower than the set temperature, the switching valve is switched and the cooling water is supplied to the auxiliary cooling water circuit side by a command from the controller. do. This cooling water is thereby used for cooling the cooling medium circulation circuit. At this time, the operation of the refrigeration system is stopped by a command from the controller.
[発明の実施例]
以下、この発明の一実施例を図について説明する。第1
図この発明の一実施例としてのオゾン発生装置用冷却装
置を示すシステム構成図であるが、この第1図において
、1は原料ガス乾燥設備であり、2はオゾン発生器、3
はオゾン発生器2に高電圧を印加するための電源設備、
4はポンプ、5は熱交換器としての蒸発器で、これらの
オゾン発生器2とポンプ4および蒸発器5をそれぞれ環
状に接続して冷却媒体循環回路C1を構成している。[Embodiment of the Invention] Hereinafter, an embodiment of the present invention will be described with reference to the drawings. 1st
FIG. 1 is a system configuration diagram showing a cooling device for an ozone generator as an embodiment of the present invention. In FIG. 1, 1 is a raw material gas drying equipment, 2 is an ozone generator, and 3
is power supply equipment for applying high voltage to the ozone generator 2,
4 is a pump, and 5 is an evaporator as a heat exchanger. These ozone generator 2, pump 4, and evaporator 5 are each connected in a ring to form a coolant circulation circuit C1.
また、6は圧縮機、7は熱交換器としての凝縮器、8は
膨張弁で、これらの圧縮@e、凝縮量7゜膨張弁8.蒸
発器5をそれぞれ環状に接続して冷凍装@C2を構成し
ている。Further, 6 is a compressor, 7 is a condenser as a heat exchanger, and 8 is an expansion valve. The evaporators 5 are connected in an annular manner to form a refrigeration system @C2.
さらに、9は冷却水ポンプ、10はクーリングタワーで
、これらの凝縮器7.冷却水ポンプ9゜クーリングタワ
ー10をそれぞれ環状に接続して冷却水回路C3を構成
している。Furthermore, 9 is a cooling water pump, 10 is a cooling tower, and these condensers 7. The cooling water pump 9° and the cooling tower 10 are connected in a ring to form a cooling water circuit C3.
なお、11は原料ガス供給ライン、12はオゾン化ガス
供給ライン、13はクーリングタワー10に水を補給す
るための補給水供給ラインである。Note that 11 is a raw material gas supply line, 12 is an ozonized gas supply line, and 13 is a makeup water supply line for replenishing water to the cooling tower 10.
また、14は冷却媒体循環回路C1に設けられた他の熱
交換器、15は冷却水流路を冷凍装置C2を構成する凝
縮器8側または補助冷却水回路C4を経た熱交換器14
側に切り替えるための切替弁、16は冷却水回路C3に
設けられ冷却水温度を検出するための冷却水温検出器で
ある。17は制御器で、この制御器17は冷却水温検出
器16からの検出信号を受けて冷却水温度が所定値以下
のときに冷却水を補助冷却水回路C4へ供給すべく切替
弁15を切り替えるとともに冷凍装置C2を構成する圧
縮機6の作動を停止させるものである。Further, 14 is another heat exchanger provided in the coolant circulation circuit C1, and 15 is a heat exchanger 14 whose cooling water flow path is connected to the condenser 8 side constituting the refrigeration system C2 or through the auxiliary cooling water circuit C4.
A switching valve 16 for switching to the side is a cooling water temperature detector provided in the cooling water circuit C3 to detect the cooling water temperature. Reference numeral 17 denotes a controller, which receives a detection signal from the cooling water temperature detector 16 and switches the switching valve 15 to supply cooling water to the auxiliary cooling water circuit C4 when the cooling water temperature is below a predetermined value. At the same time, the operation of the compressor 6 constituting the refrigeration system C2 is stopped.
次に動作について説明する。第1図において、符号1〜
13で示す機器類は従来のものと全く同じ機能を有する
ものであるので、その動作は前述のとおりであり、した
がってその動作説明は省略する。Next, the operation will be explained. In FIG. 1, symbols 1 to
Since the equipment indicated by 13 has exactly the same functions as the conventional equipment, its operation is as described above, and therefore a description of its operation will be omitted.
さて、冷却水温が所定値よりも高い通常時は、クーリン
グタワー10.冷却水ポンプ9.凝縮器8が環状につな
がるように切替弁15が切り替わっている。従ってこの
場合は第2図に示した従来と同様の動作をなす。Now, during normal times when the cooling water temperature is higher than a predetermined value, cooling tower 10. Cooling water pump9. The switching valve 15 is switched so that the condenser 8 is connected in an annular manner. Therefore, in this case, the operation is similar to the conventional one shown in FIG.
次に冷却水温検出器16により、冷却水温度が設定温度
以下になったことが検出されると、制御器17からの制
御信号により切替弁15が作動し、冷却水が補助冷却水
回路C4側へ供給されるようになる。即ちクーリングタ
ワー10.冷却水ポンプ9.切替弁15.熱交換器14
を環状にて構成する回路を循環する流路を構成するよう
に、切替弁15が切り替わる。この時、オゾン発生器2
で発生した熱は、熱交換器14にて冷却媒体と冷却水と
が熱交換されることにより除去される。そしてこのよう
にして冷却された冷却媒体は再びオゾン発生器2に至る
。Next, when the cooling water temperature detector 16 detects that the cooling water temperature has become lower than the set temperature, the switching valve 15 is activated by a control signal from the controller 17, and the cooling water is transferred to the auxiliary cooling water circuit C4 side. will be supplied to That is, cooling tower 10. Cooling water pump9. Switching valve 15. Heat exchanger 14
The switching valve 15 is switched so as to configure a flow path that circulates through a circuit configured in an annular shape. At this time, ozone generator 2
The heat generated is removed by heat exchange between the cooling medium and the cooling water in the heat exchanger 14. The coolant thus cooled reaches the ozone generator 2 again.
一方、冷凍装置C2を構成する圧縮機6は制御器17か
らの制御信号を受けて切替弁15の作動と同時に停止す
るようになっている。On the other hand, the compressor 6 constituting the refrigeration system C2 receives a control signal from the controller 17 and is stopped at the same time as the switching valve 15 is activated.
なお、上記実施例では、冷却水回路C3にクーリングタ
ワー10を設けたものを示したが、クーリングタワーの
代わりに、外部系より直接冷却水を供給するように構成
されたものでもよく、この場合も上記実施例と同様の効
果を奏する。In the above embodiment, the cooling water circuit C3 is provided with the cooling tower 10, but instead of the cooling tower, it may be configured to directly supply cooling water from an external system, and in this case, the above-mentioned The same effects as in the embodiment are achieved.
また、冷却媒体として冷却水と同種の水を使用する場合
は、熱交換器14の代わりに切替弁を設け、冷却水温が
所定値以下のときに冷却媒体循環回路C1内に直接冷却
水を供給するようにしてもよい。In addition, when using the same type of water as the cooling water as the cooling medium, a switching valve is provided in place of the heat exchanger 14, and cooling water is supplied directly into the cooling medium circulation circuit C1 when the cooling water temperature is below a predetermined value. You may also do so.
[発明の効果]
以上のようにこの発明によれば、冷却水温度が低い場合
、冷却水回路中の冷却水にてオゾン発生器を冷却できる
ように構成したので、冷凍装置を常時駆動させる必要が
なく、これにより安価な消費エネルギーコストでの運・
用が可能となる等、優れた効果がある。[Effects of the Invention] As described above, according to the present invention, when the cooling water temperature is low, the ozone generator is cooled by the cooling water in the cooling water circuit, so there is no need to constantly drive the refrigeration system. This allows for low energy consumption costs.
It has excellent effects, such as making it possible to use
第1図はこの発明の一実施例としてのオゾン発生装置用
冷却装置を示すシステム構成図、第2図は従来のオゾン
発生装置用冷却装置を示すシステム構成図である。
図において、2−オゾン発生器、3−電源設備、4−ポ
ンプ、5−熱交換器としての蒸発器、6−圧縮機、7−
凝縮器、8−膨張弁、9−冷却水ポンプ、10−クーリ
ングタワー、14−熱交換器、15−切替弁、16−冷
却水温検出器、17−制御器、C1−冷却媒体循環回路
、C2−冷凍装置、C3−冷却水回路、C4−補助冷却
水回路。
なお、図中、同一符号は同一、又は相当部分を示す。FIG. 1 is a system configuration diagram showing a cooling device for an ozone generator as an embodiment of the present invention, and FIG. 2 is a system configuration diagram showing a conventional cooling device for an ozone generator. In the figure, 2 - ozone generator, 3 - power supply equipment, 4 - pump, 5 - evaporator as heat exchanger, 6 - compressor, 7 -
Condenser, 8-Expansion valve, 9-Cooling water pump, 10-Cooling tower, 14-Heat exchanger, 15-Switching valve, 16-Cooling water temperature detector, 17-Controller, C1-Cooling medium circulation circuit, C2- Refrigeration system, C3-cooling water circuit, C4-auxiliary cooling water circuit. In addition, in the figures, the same reference numerals indicate the same or equivalent parts.
Claims (2)
よりオゾンを発生させるオゾン発生装置を冷却するため
のオゾン発生装置用冷却装置において、上記オゾン発生
装置と熱交換器との間で冷却媒体を循環させる冷却媒体
循環回路と、上記熱交換器で上記冷却媒体のもつ熱を吸
収する冷凍装置と、同冷凍装置の凝縮熱を熱交換により
除去するための冷却水回路とをそなえ、同冷却水回路中
の冷却水を上記冷却媒体循環回路の冷却用として使用す
べく上記冷却水回路から切替弁を介して分岐し上記の冷
却水回路と冷却媒体循環回路とを連係接続する補助冷却
水回路が設けられるとともに、上記冷却水の温度を検出
する冷却水温検出器と、同冷却水温検出器からの検出信
号を受けて上記冷却水の温度が所定値以下のときに上記
冷却水を上記補助冷却水回路へ供給すべく上記切替弁を
切り替え且つ上記冷凍装置の作動を停止させる制御器と
が設けられたことを特徴とするオゾン発生装置用冷却装
置。(1) In an ozone generator cooling device for cooling an ozone generator that generates ozone by silent discharge when a high voltage is applied, a cooling medium is circulated between the ozone generator and the heat exchanger. A cooling water circuit for removing the condensation heat of the cooling system by heat exchange, a cooling system for absorbing the heat of the cooling medium by the heat exchanger, and a cooling water circuit for removing the condensation heat of the cooling system by heat exchange. In order to use the cooling water inside for cooling the cooling medium circulation circuit, an auxiliary cooling water circuit is provided which branches from the cooling water circuit via a switching valve and interconnects the cooling water circuit and the cooling medium circulation circuit. and a cooling water temperature detector that detects the temperature of the cooling water, and a cooling water temperature detector that receives a detection signal from the cooling water temperature detector and supplies the cooling water to the auxiliary cooling water circuit when the temperature of the cooling water is below a predetermined value. A cooling device for an ozone generator, characterized in that a controller is provided for switching the switching valve to supply water to the ozone generator and stopping the operation of the refrigeration device.
、この他の熱交換器で上記冷却媒体の熱を上記冷却水を
介して吸収すべく、上記補助冷却水回路が上記冷却水回
路から上記切替弁を介して分岐し上記他の熱交換器に接
続されていることを特徴とする特許請求の範囲第1項記
載のオゾン発生装置用冷却装置。(2) Another heat exchanger is interposed in the cooling medium circulation circuit, and the auxiliary cooling water circuit cools the cooling medium so that the heat of the cooling medium is absorbed by the other heat exchanger via the cooling water. 2. The cooling device for an ozone generator according to claim 1, wherein the cooling device is branched from the water circuit via the switching valve and connected to the other heat exchanger.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17410686A JPS6330305A (en) | 1986-07-22 | 1986-07-22 | Cooling device for ozone generator |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17410686A JPS6330305A (en) | 1986-07-22 | 1986-07-22 | Cooling device for ozone generator |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6330305A true JPS6330305A (en) | 1988-02-09 |
Family
ID=15972752
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP17410686A Pending JPS6330305A (en) | 1986-07-22 | 1986-07-22 | Cooling device for ozone generator |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6330305A (en) |
-
1986
- 1986-07-22 JP JP17410686A patent/JPS6330305A/en active Pending
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US10030646B2 (en) | Gas compressor | |
KR100718447B1 (en) | Temperature control device of liquid cooling device | |
JP3954498B2 (en) | Waste heat utilization system, waste heat utilization method, and semiconductor manufacturing equipment | |
JPH06152173A (en) | Device for cooling electronic apparatus and its control method | |
US4627924A (en) | Process and apparatus for the recovery of energy from an ozone production unit | |
JPS6330305A (en) | Cooling device for ozone generator | |
JPH02146475A (en) | Dryer | |
JP3851764B2 (en) | Absorption refrigerator | |
KR960038307A (en) | Low Temperature Showcase | |
JP3821286B2 (en) | Refrigeration system combining absorption type and compression type and its operating method | |
JP2019138524A (en) | Cooler | |
JPH09199648A (en) | Antifreezing method of water cooling inverter | |
CN218722615U (en) | Energy-saving heat exchanger | |
JPH0829011A (en) | Heat pump system | |
JPS62142813A (en) | Power generating engine utilizing solar heat | |
JPH04251170A (en) | Refrigerating device and operation method thereof in cogeneration system | |
JP2003222429A (en) | Refrigeration unit used in cogeneration system | |
JPH01234761A (en) | Double-effect multi-stage pressure type absorption type refrigerator and system therefor | |
KR100198920B1 (en) | Refrigeration cycle apparatus | |
JP2016183674A (en) | Gas compressor | |
JP2677876B2 (en) | Absorption refrigerator capacity control device | |
KR0136049Y1 (en) | Absorption room cooler | |
JPH04161056A (en) | Superconducting power plant and operating method thereof | |
JPH03129268A (en) | Absorption refrigerator using engine heat | |
JPH01217160A (en) | Cooler |