JPS63302429A - Focus error detector - Google Patents
Focus error detectorInfo
- Publication number
- JPS63302429A JPS63302429A JP13815387A JP13815387A JPS63302429A JP S63302429 A JPS63302429 A JP S63302429A JP 13815387 A JP13815387 A JP 13815387A JP 13815387 A JP13815387 A JP 13815387A JP S63302429 A JPS63302429 A JP S63302429A
- Authority
- JP
- Japan
- Prior art keywords
- focus error
- light
- light receiving
- reflected light
- detection device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000035945 sensitivity Effects 0.000 claims abstract description 5
- 238000001514 detection method Methods 0.000 claims description 27
- 230000003287 optical effect Effects 0.000 abstract description 21
- 238000006073 displacement reaction Methods 0.000 abstract description 4
- 238000010586 diagram Methods 0.000 description 5
- 238000000926 separation method Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 230000010287 polarization Effects 0.000 description 2
- 241001057181 Orcus Species 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Landscapes
- Automatic Focus Adjustment (AREA)
- Optical Recording Or Reproduction (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
この発明は、情報の記録・再生が光学的に行われる記録
媒体のフォーカス誤差検出装置に関し、もう少し詳しく
いうと、記録媒体からの反射光を2分割し、この分割さ
れた反射光を1対の分割形光検出器の各中央部に照射し
、中央部をはさんだ左右の受光部からの検出信号により
、フォーカス誤差信号およびフォーカス誤差量を得るフ
ォーカス誤差検出装置に関するものである。[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a focus error detection device for a recording medium in which information is recorded and reproduced optically. The reflected light is divided into two parts, and the divided reflected light is irradiated onto the central part of each of a pair of split type photodetectors, and the focus error signal and focus error amount are determined by the detection signals from the left and right light receiving parts sandwiching the central part. The present invention relates to a focus error detection device to be obtained.
第4図は、例えば特開昭57−18032号公報、特開
昭58−208946号公報などに記載されたようなフ
ーコ一方式と呼ばれる従来のフォーカス誤差検出装置に
示し、記録再生用の光ビームを放射する半導体レーザな
どの発光源からの照射光fE)を透過するとともに後述
する記録媒体(8)からの反射光(川を反射するビーム
スプリッタ(4)、照射光(E)を平行光にするととも
に反射光(R)を集光させるコリメータレンズ(5)、
平行な照射光(匂および反射光(R)の偏向面を回転さ
せる1/4波長板(6) 、 1/4波長板(6)を透
過した照射光<E)を集光するとともに反射光(川を平
行光にする対物レンズ(7)を経て集光された照射光(
E)が光ディスクなどの記録媒体(8)に照射されて光
学的に情報が記録再生されるようになっている。FIG. 4 shows a conventional focus error detection device called a Foucault type as described in, for example, JP-A-57-18032, JP-A-58-208,946, etc., and a light beam for recording and reproducing. A beam splitter (4) that transmits the irradiated light (fE) from a light emitting source such as a semiconductor laser that emits light, and also converts the irradiated light (E) into parallel light from the recording medium (8), which will be described later. a collimator lens (5) that condenses the reflected light (R);
A 1/4 wavelength plate (6) that rotates the plane of polarization of the parallel irradiated light (odor and reflected light (R), irradiated light < E that has passed through the 1/4 wavelength plate (6)) and condenses the reflected light. (The irradiation light is focused through the objective lens (7) that makes the river parallel light (
E) is irradiated onto a recording medium (8) such as an optical disk, so that information is optically recorded and reproduced.
光分割器(9)は、対物レンズ(7)、】/4波長板(
6)、コリメータレンズ(5)およびビームスプリッタ
(4)を介して入射される記録媒体(8)からの反射光
(R)を2つの反射光R1とR2に分割する。この光分
割器(9)はフーコープリズムとも呼ばれ、2つの矩形
屈折面(9a)および(9b)が鈍角の稜線(9C)で
互いに接した立体形状をなし、稜線(9c)が反射光(
R)の光軸(蜀を垂直に横切るように配置されている。The light splitter (9) includes an objective lens (7), a ]/4 wavelength plate (
6), splitting the reflected light (R) from the recording medium (8) incident through the collimator lens (5) and beam splitter (4) into two reflected lights R1 and R2. This light splitter (9) is also called a Foucault prism, and has a three-dimensional shape in which two rectangular refractive surfaces (9a) and (9b) are in contact with each other at an obtuse ridgeline (9C), and the ridgeline (9c) is a focal point for the reflected light (
R)'s optical axis (located perpendicularly across Shu).
分割形光検出器(10)は分割された反射光R1および
R2をそれぞれ検出するものであり、光軸(A)に垂直
な平面内に配列された4つの受光部(11)〜(14)
からなっている。また、受光部(11)〜(14)の各
受光面は、光軸(A)および稜線(9c)の双方に垂直
な矢印、X’(X)方向に一列に配置されており、光軸
図および矢印(3)方向に適正に位置決めされている。The split photodetector (10) detects the split reflected lights R1 and R2, and has four light receiving parts (11) to (14) arranged in a plane perpendicular to the optical axis (A).
It consists of In addition, the light receiving surfaces of the light receiving sections (11) to (14) are arranged in a line in the arrow X' (X) direction perpendicular to both the optical axis (A) and the ridge line (9c), and are aligned along the optical axis. It is properly positioned in the figure and in the direction of arrow (3).
そして、1対の受光部(11)と(12)が一方の反射
光(R1)を検出する2分割光検出器をなし、もう1対
の受光部(13)と(14)が他方の反射光(R2)を
検出する2分割光検出器を形成している。通常、これら
2分割光検出器は、後述するように、それぞれ2分割ピ
ンフォトダイオードからなっている。(Sl)〜(S4
)は各受光部(11)〜(14)により得られる検出信
号であり、適宜の演算処理回路に入力されてフォーカス
サー〆等に用いられる。One pair of light receiving sections (11) and (12) form a two-split photodetector that detects one reflected light (R1), and the other pair of light receiving sections (13) and (14) form a two-split photodetector that detects the other reflected light (R1). A two-split photodetector is formed to detect light (R2). Usually, these two-split photodetectors each consist of a two-split pin photodiode, as will be described later. (Sl) ~ (S4
) are detection signals obtained by each of the light receiving sections (11) to (14), which are input to an appropriate arithmetic processing circuit and used for a focus sensor, etc.
以上の構成により、情報の記録再生を行う場合、発光源
(3)から放射される照射光(E)は、ビームスプリッ
タ(4)を通り、コリメータレンズ(5)で平行光とな
り、1/4波長板(6)で偏向面が回転され、対物レン
ズ(7)で集光されて記録媒体(8)に照射される。With the above configuration, when recording and reproducing information, the irradiation light (E) emitted from the light emitting source (3) passes through the beam splitter (4), becomes parallel light at the collimator lens (5), and becomes 1/4 The polarization plane is rotated by the wavelength plate (6), and the light is focused by the objective lens (7) and irradiated onto the recording medium (8).
そして、記録媒体(8)で反射された反射光(R)は、
対物レンズ(7)、1/4波長板(6)およびコリメー
タレンズ(5)を介して所定の収束角で集光され、ビー
ムスプリッタ(4)で反射され、さらK、光分割器(9
)で2つの反射光(R1)と(R2)に分割されて分割
形光検出器(10)に照射される。The reflected light (R) reflected by the recording medium (8) is
The light is focused at a predetermined convergence angle through the objective lens (7), the quarter-wave plate (6), and the collimator lens (5), is reflected by the beam splitter (4), and is further condensed by the beam splitter (9).
) is split into two reflected lights (R1) and (R2) and irradiated onto a split photodetector (10).
第4図ではフォーカス誤差検知方式として″7−コー法
”が用いられており、フォーカス誤差の発生に応じて光
検出器(10)に照射される光スポットは、受光部(1
1)あるいは受光部(12)に犬ぎく照射される。In FIG. 4, the "7-Co method" is used as a focus error detection method, and the light spot irradiated on the photodetector (10) in response to the occurrence of a focus error is
1) Alternatively, the light receiving section (12) is irradiated with a sharp intensity.
このとき、各反射光(R1)および(R2)を受光した
受光部(11)〜(14)は、そf+ぞれの受光量に応
じた連流、すなわち検出信号(Sl)〜(S4)を発生
する。演算処理回路は、これら検出信号(Sl)〜(S
4)に基づいて、外側の受光部(11)、(14)の各
検出信号(Sl)および(S4)の和と、内側の受光部
(12LNa)の各検出信号(S2)と(S3)の和と
の差を演算する式、
F=(S1+S4’)−(S2+S3) (1)
によりフォーカス誤差信号(Flを求める。At this time, the light receiving sections (11) to (14) that have received each of the reflected lights (R1) and (R2) send continuous signals corresponding to the respective received light amounts, that is, detection signals (Sl) to (S4). occurs. The arithmetic processing circuit processes these detection signals (Sl) to (S
4), the sum of the detection signals (Sl) and (S4) of the outer light receiving sections (11) and (14), and the detection signals (S2) and (S3) of the inner light receiving section (12LNa). The formula for calculating the difference between the sum of F=(S1+S4')-(S2+S3) (1)
Find the focus error signal (Fl).
第4図のフォーカス誤差検出装置に用いられる従来の分
割形光検出器(10)の受光面は、第5図に示すように
、記録媒体(8)と対物レンズ(7)との距離が適正に
調整され、反射光(R1)が合焦スポット(Pl)とな
って照射された状態を示している。As shown in FIG. 5, the light-receiving surface of the conventional split-type photodetector (10) used in the focus error detection device shown in FIG. 4 has an appropriate distance between the recording medium (8) and the objective lens (7). This shows a state in which the reflected light (R1) is irradiated as a focused spot (Pl).
第5図において、1対の受光部(11)および(12)
を形成する2分割ピンフォトダイオード(1)は、もう
1対の受光部(13)、(14)を形成する2分割ピン
フォトダイオードとともに分割形光検出器(lO)を形
成している。分離帯(2)は受光部(11)および(1
2)の各受光面を分割する部分であり、その幅(d)は
約lOμmである。また、第5図は、光検出器(10)
に照射される光スポットの位Hに対して、受光部(11
)、(12)から■検出信号(Sl)。In FIG. 5, a pair of light receiving sections (11) and (12)
The two-split pin photodiode (1) forming the split-pin photodiode (1) forms a split-type photodetector (lO) together with the two-split pin photodiode forming another pair of light receiving sections (13) and (14). The separation strip (2) is connected to the light receiving section (11) and (1
2), which divides each light-receiving surface, and its width (d) is about 10 μm. In addition, FIG. 5 shows a photodetector (10)
The light receiving part (11
), (12) to ■detection signal (Sl).
(S2)がどのように変化するかを示している。(S2) shows how it changes.
第7図は、記録媒体である光ディスク(8)を示し、基
板(8a)、案内溝(8b)、記録層(8C)からなっ
ている。光ディスク(8)は記録・再生・消去を実現す
るために、通常、案内溝(8b)と称される鼓状トラッ
クをあらかじめ情報記録媒体上に形成しておき、この上
に記録材料を塗布または蒸着して形成した光デイスク構
造が考えられている。FIG. 7 shows an optical disk (8) which is a recording medium, and is composed of a substrate (8a), a guide groove (8b), and a recording layer (8C). In order to realize recording, reproduction, and erasing of an optical disk (8), a drum-shaped track called a guide groove (8b) is usually formed on the information recording medium in advance, and a recording material is coated or Optical disk structures formed by vapor deposition have been considered.
従来のフォーカス誤差検出装置は以上のように構成され
ているので、各受光部(xB、(tz)[および(13
)、(14)〕間の分離帯(2)の偏(d)が10μm
程度しかないので、フォーカス誤差信号(′F″)が、
各反射光(R1)、 (R2)のスポット位置の変位に
対して過敏に変動し、フォーカス誤差信号(Flがフォ
ーカス誤差量に対して線形に変化する範囲が狭くなり、
フォーカス誤差信号(刺における初期オフの問題点があ
った。Since the conventional focus error detection device is configured as described above, each light receiving section (xB, (tz) [and (13
), (14)] the deviation (d) of the separation zone (2) is 10 μm
Since the focus error signal ('F'') is
It fluctuates sensitively to the displacement of the spot position of each reflected light (R1) and (R2), and the range in which the focus error signal (Fl) changes linearly with the focus error amount becomes narrower.
There was a problem with the focus error signal (initial off in the spine).
また、光スポットが光ディスク(8)の案内溝(8b)
を横断して移動するときK、光ディスク(8)からの反
射光は、この案内溝(8b)が凹凸の位相溝となってい
るため回折の影響をうけ、特にフォーカス誤差信号(F
l中に不要な外乱が生じる。このため、ランダムアクセ
スにおいてフォーカスサーボが不安定になるという第2
の問題点もあった。Also, the light spot is located at the guide groove (8b) of the optical disc (8).
When moving across K, the reflected light from the optical disk (8) is affected by diffraction because the guide groove (8b) is a concave and convex phase groove, and is particularly affected by the focus error signal (F
Unnecessary disturbances occur during the process. For this reason, the second problem is that the focus servo becomes unstable during random access.
There were also problems.
この発明は上記のような問題点を解決するためになされ
たもので、フォーカス誤差量に対してフォーカス誤差信
号が線形に変化する範囲を広げ、また、光デイスク上の
光スポットが案内溝横断時に生じる外乱信号を軽減し、
フォーカスサーボの引き込みおよび追従制御を容易とし
、フォーカスサーボを安定に行うことができるフォーカ
ス誤差検出装置を得ることを目的とする。This invention was made to solve the above-mentioned problems, and it widens the range in which the focus error signal changes linearly with respect to the amount of focus error, and also increases the range in which the light spot on the optical disk crosses the guide groove. Reduce the generated disturbance signal,
It is an object of the present invention to provide a focus error detection device that facilitates focus servo pull-in and follow-up control and can stably perform focus servo.
この発明に係るフォーカス誤差検出装置は、1対の分割
形光検出器を、1対の3分割光検出器とし、各3分割光
検出器の中央に位置する受光部の幅を、光検出器に照射
される光スポットの径と同等か、それ以下の大きさとし
たものである。In the focus error detection device according to the present invention, the pair of split-type photodetectors is a pair of three-split photodetectors, and the width of the light-receiving part located at the center of each three-split photodetector is determined by the width of the photodetector. The diameter of the light spot is equal to or smaller than the diameter of the light spot irradiated on the surface.
この発明においては、反射光のスポット位置の変位に対
する検出信号の変動が比較的小さく、ジャスト7オーカ
ス時には光検出器の感度が小さくなっているため、フォ
ーカス誤差信号にあられれる外乱信号が減少し、フォー
カス誤差信号がフォーカス誤差量に対して直線的に変化
する範囲が拡大する。In this invention, the fluctuation of the detection signal with respect to the displacement of the spot position of the reflected light is relatively small, and the sensitivity of the photodetector is small at the time of just 7 orcus, so the disturbance signal that is included in the focus error signal is reduced. The range in which the focus error signal changes linearly with respect to the focus error amount is expanded.
第1図はこの発明の一実施例を示し、分割形光検出器を
なす3分割光検出器(1)は、受光部(11)。FIG. 1 shows an embodiment of the present invention, in which a three-split photodetector (1) forming a split type photodetector has a light receiving section (11).
(12)および(30)からなり、受光部(3o)は、
受光部(11)および(12)の間に位置し、その幅(
5)は反射光(R1)iよる合焦スボッ) (Z)の径
(匂より大きくなく設定されている。(12) and (30), and the light receiving part (3o) is
It is located between the light receiving parts (11) and (12), and its width (
5) is set to be no larger than the diameter of the focusing lens (Z) by the reflected light (R1).
この3分割光検出器(1)は、その1対をもって第4図
における分割形光検出器(1o)に代わるものであり、
その他は第4図に示したと同様にしてフォーカス誤差検
出装置が構成される。This three-split photodetector (1) replaces the split-type photodetector (1o) in FIG. 4 with its one pair,
The focus error detection device is otherwise constructed in the same manner as shown in FIG.
各受光部(11’)、(30)、(12)間の分離帯(
100)(101)の幅内においては、第2図に示すよ
うに、受光部−1)、(30)、(12)それぞれの検
出信号(Sl)、S2)、S3)が矢印(3)方向の変
位に対して直線的に変化する。また、分離帯(100)
、 (IOI )の分割線の中心では、各検出信号(
Sl”l、(S2)および(S3)が、各受光部(11
)、(30)、(12)の最大光電流の約1/2を出力
するように設定されている。Separation strip (
Within the width of 100) (101), as shown in FIG. Changes linearly with directional displacement. Also, separation strip (100)
, (IOI), each detection signal (
Sl"l, (S2) and (S3) are each light receiving section (11
), (30), and (12) are set to output approximately 1/2 of the maximum photocurrent.
7オ一カス誤差信号は、両端の受光部(11)、(12
)の差動出力として求められる。The 7-occasion error signal is transmitted from the light receiving sections (11) and (12) at both ends.
) is determined as the differential output of
次に動作について説明する。第4図、第5図に示した反
射光(R1)の合焦スボッ)(Pi’)が受光部(30
)の中心部に照射されると、受光部(3o)の幅(W)
が合焦スポット径(L)より大きくないため、各受光部
(11)、(12)には反射光(R1)がほとんど受光
されない。また、フォーカス誤差が生じてスポット位置
が第4図で矢印間方向に変位しても、受光部(3o)に
照射される面積が大きく、受光部(11)または(12
)に照射される面積は比較的小さい。従って、フォーカ
ス誤差!−! Ic #するフォーカス誤差信号(F)
の特性は、第3図に実線で示すように、破線で示す従来
装置の特性と比較して直線性を有する部分の傾きが緩く
なる。さらに、光ディスク(8)上で光スポットが案内
溝(8b)を横断しても、合焦スポットな受光部(11
)はまたは(12)にはほとんど受光されないので、フ
ォーカス誤差信号に重畳する外乱も極減する。Next, the operation will be explained. The focusing point (Pi') of the reflected light (R1) shown in FIGS. 4 and 5 is
), the width (W) of the light receiving part (3o)
is not larger than the in-focus spot diameter (L), almost no reflected light (R1) is received by each of the light receiving sections (11) and (12). Furthermore, even if a focus error occurs and the spot position is displaced in the direction between the arrows in FIG.
) is relatively small. Hence the focus error! -! Ic # focus error signal (F)
As shown by the solid line in FIG. 3, the characteristic of , as shown by the solid line in FIG. 3, has a gentle slope in the linear portion compared to the characteristic of the conventional device shown by the broken line. Furthermore, even if the light spot crosses the guide groove (8b) on the optical disc (8), the light receiving part (11
) or (12), the disturbance superimposed on the focus error signal is also extremely reduced.
また、3つの受光部の和信号から再生信号も得ることが
できる。Furthermore, a reproduced signal can also be obtained from the sum signal of the three light receiving sections.
なお、上記実施例では受光部(30)の幅が合焦スポッ
ト径りよりも大きくない場合について説明したが、種々
の仕様変更に伴い、反射光(川の波長(λ)および収束
角(α)が異なるので、受光部(30)の幅(W)は、
合焦スポット径り以下で、w4z、44λ/ sinα
を満たす値ならばよい。In addition, in the above embodiment, the case where the width of the light receiving part (30) is not larger than the focal spot diameter was explained, but due to various specification changes, the reflected light (wavelength (λ) and convergence angle (α) ) are different, the width (W) of the light receiving part (30) is
Any value satisfying w4z, 44λ/sinα and less than the in-focus spot diameter is sufficient.
また、記録媒体(8)が光ディスクの場合を例にとった
が、自動焦点カメラ等のフォーカス誤差検出装置にも適
用でき、同等の効果を奏することは言うまでもない。Moreover, although the case where the recording medium (8) is an optical disk is taken as an example, it goes without saying that it can also be applied to a focus error detection device such as an autofocus camera, and the same effect can be achieved.
以上のように、この発明によれば3分割光検出器の中央
部に位置する受光部の幅を前記光検出器に照射される光
スポットの径と同等かあるいはそれ以下としたので、フ
ォーカス誤差信号がフォーカス誤差量に対して直線的に
変化する範囲が拡大し、ジャストフォーカス時にフォー
カス誤差信号にあられれる外乱信号が減少するので、フ
ォーカスサーボを安定、かつ、容易に行うことができる
効果がある。As described above, according to the present invention, the width of the light receiving part located at the center of the three-split photodetector is made equal to or smaller than the diameter of the light spot irradiated to the photodetector, so that the focus error The range in which the signal changes linearly with respect to the focus error amount is expanded, and the disturbance signal that appears on the focus error signal when just focusing is reduced, so the focus servo can be performed stably and easily. .
第1図はこの発明の一実施例の要部正面図、第2図は当
該実施例における検出信号線図、第3図は同じくフォー
カス誤差信号の特性比較線図、第4図は従来のフォーカ
ス誤差検出装置の要部平面図、第5図は第4図のものの
2分割光検出器の受光面を示す説明図、第6図は第4図
における2分側光検出器の特性図、第X図は同じ(光デ
ィスクの断面図である。
(1)・・3分割光検出器、(8)・・記録媒体、(9
)・・光分割器、(In、(12)、(30)”・受光
部、(R1)、(R2)−”反射光、(81)、(S2
)、(83)・・検出信号。
なお、各図中、同一符号は同−又は相当部分を示す。FIG. 1 is a front view of essential parts of an embodiment of the present invention, FIG. 2 is a detection signal diagram in the embodiment, FIG. 3 is a characteristic comparison diagram of focus error signals, and FIG. 4 is a conventional focus 5 is an explanatory diagram showing the light-receiving surface of the 2-split photodetector in FIG. 4; FIG. 6 is a characteristic diagram of the 2-split photodetector in FIG. 4; The X diagram is the same (cross-sectional view of the optical disk).
)...Light splitter, (In, (12), (30)"-Light receiving section, (R1), (R2)-"Reflected light, (81), (S2
), (83)...detection signal. In each figure, the same reference numerals indicate the same or corresponding parts.
Claims (3)
光検出器の各中央部に前記2分割された反射光のそれぞ
れを照射し、前記分割形光検出器の中央部をはさんだ左
右の受光部から出力される各検出信号に基づいてフォー
カス誤差信号およびフォーカス誤差量を得るフォーカス
誤差検出装置において、 前記分割形光検出器が3分割光検出器でなり、しかも、
中央部に位置する受光部の幅(W)を前記反射光の合焦
スポット径よりも大きくなく設定したことを特徴とする
フォーカス誤差検出装置。(1) Divide the reflected light from the recording medium into two parts, irradiate each of the two divided reflected lights onto the central part of a pair of split-type photodetectors, and In a focus error detection device that obtains a focus error signal and a focus error amount based on detection signals output from left and right light receiving sections sandwiched between each other, the split photodetector is a three-split photodetector, and further,
A focus error detection device characterized in that the width (W) of the light receiving section located at the center is set not larger than the focused spot diameter of the reflected light.
器の分割線に平行な方向の反射光の収束角をαとし、か
つ、前記反射光の波長をλとして、W≦2.44×(λ
/sinα)を満たしている特許請求の範囲第1項記載
のフォーカス誤差検出装置。(2) The width (W) of the light-receiving part in the center is defined as W, where α is the convergence angle of the reflected light in the direction parallel to the dividing line of the three-split photodetector, and λ is the wavelength of the reflected light. ≦2.44×(λ
The focus error detection device according to claim 1, which satisfies the following: /sin α).
が前記分割線の垂直な方向に対して直線的に変化し、か
つ、前記分割線の中心において各々の受光面の感度が前
記受光面上の感度の約半分になるように設定されている
特許請求の範囲第1項記載のフォーカス誤差検出装置。(3) In the three-split photodetector, the detector sensitivity changes linearly within the dividing line with respect to a direction perpendicular to the dividing line, and the sensitivity of each light-receiving surface changes at the center of the dividing line. The focus error detection device according to claim 1, wherein the focus error detection device is set to be approximately half the sensitivity on the light receiving surface.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13815387A JPS63302429A (en) | 1987-06-03 | 1987-06-03 | Focus error detector |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13815387A JPS63302429A (en) | 1987-06-03 | 1987-06-03 | Focus error detector |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS63302429A true JPS63302429A (en) | 1988-12-09 |
Family
ID=15215257
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13815387A Pending JPS63302429A (en) | 1987-06-03 | 1987-06-03 | Focus error detector |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS63302429A (en) |
-
1987
- 1987-06-03 JP JP13815387A patent/JPS63302429A/en active Pending
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