JPS6329943U - - Google Patents
Info
- Publication number
- JPS6329943U JPS6329943U JP12412386U JP12412386U JPS6329943U JP S6329943 U JPS6329943 U JP S6329943U JP 12412386 U JP12412386 U JP 12412386U JP 12412386 U JP12412386 U JP 12412386U JP S6329943 U JPS6329943 U JP S6329943U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor
- arm
- transfer device
- semiconductor wafer
- semiconductor support
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 12
- 238000000034 method Methods 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Specific Conveyance Elements (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12412386U JPS6329943U (enExample) | 1986-08-13 | 1986-08-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12412386U JPS6329943U (enExample) | 1986-08-13 | 1986-08-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6329943U true JPS6329943U (enExample) | 1988-02-27 |
Family
ID=31015848
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12412386U Pending JPS6329943U (enExample) | 1986-08-13 | 1986-08-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6329943U (enExample) |
-
1986
- 1986-08-13 JP JP12412386U patent/JPS6329943U/ja active Pending
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