JPS6329942U - - Google Patents

Info

Publication number
JPS6329942U
JPS6329942U JP12332386U JP12332386U JPS6329942U JP S6329942 U JPS6329942 U JP S6329942U JP 12332386 U JP12332386 U JP 12332386U JP 12332386 U JP12332386 U JP 12332386U JP S6329942 U JPS6329942 U JP S6329942U
Authority
JP
Japan
Prior art keywords
wafer
vacuum
exhaust system
semiconductor manufacturing
evaporation source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12332386U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12332386U priority Critical patent/JPS6329942U/ja
Publication of JPS6329942U publication Critical patent/JPS6329942U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP12332386U 1986-08-13 1986-08-13 Pending JPS6329942U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12332386U JPS6329942U (enrdf_load_stackoverflow) 1986-08-13 1986-08-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12332386U JPS6329942U (enrdf_load_stackoverflow) 1986-08-13 1986-08-13

Publications (1)

Publication Number Publication Date
JPS6329942U true JPS6329942U (enrdf_load_stackoverflow) 1988-02-27

Family

ID=31014320

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12332386U Pending JPS6329942U (enrdf_load_stackoverflow) 1986-08-13 1986-08-13

Country Status (1)

Country Link
JP (1) JPS6329942U (enrdf_load_stackoverflow)

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