JPS61155368U - - Google Patents

Info

Publication number
JPS61155368U
JPS61155368U JP3724885U JP3724885U JPS61155368U JP S61155368 U JPS61155368 U JP S61155368U JP 3724885 U JP3724885 U JP 3724885U JP 3724885 U JP3724885 U JP 3724885U JP S61155368 U JPS61155368 U JP S61155368U
Authority
JP
Japan
Prior art keywords
container
vacuum
processing apparatus
sectional
rotated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3724885U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3724885U priority Critical patent/JPS61155368U/ja
Publication of JPS61155368U publication Critical patent/JPS61155368U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP3724885U 1985-03-14 1985-03-14 Pending JPS61155368U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3724885U JPS61155368U (enrdf_load_stackoverflow) 1985-03-14 1985-03-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3724885U JPS61155368U (enrdf_load_stackoverflow) 1985-03-14 1985-03-14

Publications (1)

Publication Number Publication Date
JPS61155368U true JPS61155368U (enrdf_load_stackoverflow) 1986-09-26

Family

ID=30543161

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3724885U Pending JPS61155368U (enrdf_load_stackoverflow) 1985-03-14 1985-03-14

Country Status (1)

Country Link
JP (1) JPS61155368U (enrdf_load_stackoverflow)

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