JPS6329932U - - Google Patents
Info
- Publication number
- JPS6329932U JPS6329932U JP12331586U JP12331586U JPS6329932U JP S6329932 U JPS6329932 U JP S6329932U JP 12331586 U JP12331586 U JP 12331586U JP 12331586 U JP12331586 U JP 12331586U JP S6329932 U JPS6329932 U JP S6329932U
- Authority
- JP
- Japan
- Prior art keywords
- load section
- electrodes
- plasma
- capacitor
- matching device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000003990 capacitor Substances 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
- Drying Of Semiconductors (AREA)
Description
第１図は本考案の一実施例であるプラズマ装置
の電源回路を示す回路図、第２図は従来例である
。
１……高周波電源、２……整合装置、３……負
荷部、６……容量。
FIG. 1 is a circuit diagram showing a power supply circuit of a plasma device which is an embodiment of the present invention, and FIG. 2 is a conventional example. 1... High frequency power supply, 2... Matching device, 3... Load section, 6... Capacity.
Claims (1)
発生可能な負荷部と、該負荷部にコイルを可変容
量とを組み合わせた整合装置を介して接続した高
周波電源とから成るプラズマ装置において、前記
整合装置の前記負荷部側の可変容量と前記負荷部
との間に容量を設けたことを特徴とするプラズマ
装置。 A plasma device comprising a load section having electrodes in a vacuum container and capable of generating plasma between the electrodes, and a high frequency power source connected to the load section via a matching device combining a coil and a variable capacitance. A plasma device characterized in that a capacitor is provided between a variable capacitor on the load section side of the matching device and the load section.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12331586U JPS6329932U (en) | 1986-08-13 | 1986-08-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12331586U JPS6329932U (en) | 1986-08-13 | 1986-08-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6329932U true JPS6329932U (en) | 1988-02-27 |
Family
ID=31014304
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12331586U Pending JPS6329932U (en) | 1986-08-13 | 1986-08-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6329932U (en) |
-
1986
- 1986-08-13 JP JP12331586U patent/JPS6329932U/ja active Pending