JPS63298104A - Constitution of optical probe for measuring configuration of side surface - Google Patents
Constitution of optical probe for measuring configuration of side surfaceInfo
- Publication number
- JPS63298104A JPS63298104A JP13419787A JP13419787A JPS63298104A JP S63298104 A JPS63298104 A JP S63298104A JP 13419787 A JP13419787 A JP 13419787A JP 13419787 A JP13419787 A JP 13419787A JP S63298104 A JPS63298104 A JP S63298104A
- Authority
- JP
- Japan
- Prior art keywords
- light
- optical system
- image
- light beam
- mirror
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003287 optical effect Effects 0.000 title claims abstract description 52
- 239000000523 sample Substances 0.000 title abstract description 12
- 238000001514 detection method Methods 0.000 claims description 32
- 238000003384 imaging method Methods 0.000 claims description 31
- 238000005259 measurement Methods 0.000 claims description 7
- 230000000694 effects Effects 0.000 description 3
- 239000003365 glass fiber Substances 0.000 description 1
- 230000003760 hair shine Effects 0.000 description 1
- 235000012054 meals Nutrition 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Abstract
Description
【発明の詳細な説明】
（産業上の利用分野）
本発明は、３次元形状計測機器等に用いる非接触の光学
的距離検出プローブに係わり、特に、物体側面や穴の側
面の形状を計測するのに好適な、側面形状計測器用先触
針の構成に関する。DETAILED DESCRIPTION OF THE INVENTION (Industrial Application Field) The present invention relates to a non-contact optical distance detection probe used in three-dimensional shape measuring instruments, etc., and particularly for measuring the shape of the side surface of an object or the side surface of a hole. The present invention relates to a structure of a tip needle for a side profile measuring instrument, which is suitable for use in the present invention.
（従来技術）
３次元形状計測機用の距離検出プローブとしては、もっ
ばら接触型のプローブが使用されている。(Prior Art) Contact type probes are mostly used as distance detection probes for three-dimensional shape measuring machines.
接触型のプローブでは変形あるいは破壊されてしまうよ
うな対象物の形状計測を可能にするためや計測速度の向
上のため、近年、対象物の表面に光ビームを投射して、
−輝点を生成し、それを光ビーム投射方向と異なった方
向から観測し、３角測量の原理に基づいて、光ビーム投
射方向への距離情報を確定する方式の先触針の開発が試
みられている。第４図にこの先触針基本構成を示す。光
ビーム源Ｓから発生された光ビームＢは対象物Ｏに照射
されて輝点Ｔが形成される。輝点Ｔからの光は撮像レン
ズＬを通過した後、像位置検出素子Ｐ上に輝点の像■を
形成する。対象物○が対象物０゜の位置に移動すると像
位置検出素子Ｐ上に形成される輝点像Ｉも輝点像１′の
位置に移動する。輝点像の位置は対象物までの距離に比
例するので、像位置検出素子Ｐ上の輝点像Ｉ （１’）
の位置から求めることができる。In recent years, in order to make it possible to measure the shape of objects that would otherwise be deformed or destroyed using contact-type probes, and to improve measurement speed, a light beam is projected onto the surface of the object.
- An attempt was made to develop a tip probe that generates a bright spot, observes it from a direction different from the light beam projection direction, and determines distance information in the light beam projection direction based on the principle of triangulation. It is being Figure 4 shows the basic configuration of this tip needle. A light beam B generated from a light beam source S is irradiated onto an object O to form a bright spot T. After the light from the bright spot T passes through the imaging lens L, it forms an image (2) of the bright spot on the image position detection element P. When the object ◯ moves to the position of the object 0°, the bright spot image I formed on the image position detection element P also moves to the position of the bright spot image 1'. Since the position of the bright spot image is proportional to the distance to the object, the bright spot image I (1') on the image position detection element P
It can be found from the position of
（発明が解決しようとする問題点）
この従来から試みられている光学的距離検出先触針は、
外形が大きかったり、距離検出方向が、距離検出装置の
長手方向であったりして、凹んだ部分の側面や穴の内側
の形状等の計測には不向きであった。このため、従来か
らの先触針では、その適用範囲が割合に平坦な表面形状
の測定に限定されていた。(Problems to be solved by the invention) This optical distance detection tip stylus that has been tried in the past is
Since the external shape is large and the distance detection direction is the longitudinal direction of the distance detection device, it is not suitable for measuring the side surface of a recessed part or the shape of the inside of a hole. For this reason, the range of application of conventional tip probes has been limited to the measurement of relatively flat surface shapes.
（問題を解決するための手段）
上記の問題点を解決し、先触針により凹んだ部分の側面
や穴の内側形状の計測を可能とするために本発明におい
ては、結像光学系の光軸に交差する方向に光ビームを投
射すること、結像光学系を通過した光を像位置検出素子
の上へ折り返し反射する鏡光学系を結像光学系と像位置
検出素子との間に設置したことを特徴とする。(Means for Solving the Problems) In order to solve the above problems and make it possible to measure the side surface of the recessed part or the inner shape of the hole using the tip needle, the present invention uses the light of the imaging optical system. A mirror optical system is installed between the imaging optical system and the image position detection element to project a light beam in a direction that intersects the axis, and to reflect the light that has passed through the imaging optical system back onto the image position detection element. It is characterized by what it did.
（作用）
結像光学系の光軸に交差する方向に光ビームが投射され
、かつ結像光学系を通過した光が鏡光学系により折り返
されて像位置検出素子上に結像されるので、光ビーム発
生手段および結像光学系を同一筒体内に配置することが
でき、この筒体の軸と交差する方向の距離情報を得るこ
とができる。(Function) A light beam is projected in a direction intersecting the optical axis of the imaging optical system, and the light that has passed through the imaging optical system is reflected by the mirror optical system and imaged on the image position detection element. The light beam generating means and the imaging optical system can be arranged in the same cylinder, and distance information in a direction intersecting the axis of the cylinder can be obtained.
（発明の効果）
本発明によれば、光ビーム発生手段、結像光学系および
像位置検出手段を同一筒体内に配置することができ、こ
の筒体の軸と交差する方向の距離検出が可能となる。従
って、凹んだ部分の側面や穴の内側の形状等の計測も容
易に可能となる。(Effects of the Invention) According to the present invention, the light beam generating means, the imaging optical system, and the image position detecting means can be arranged in the same cylinder, and it is possible to detect the distance in the direction intersecting the axis of the cylinder. becomes. Therefore, it becomes possible to easily measure the shape of the side surface of the recessed part, the inside of the hole, etc.
（実施例）
以下、本発明を実施例に基づいて詳細に説明する。第１
図、に本発明に基づいた側面形状計測用光触針の一例を
示した。光ビーム源Ｓ１光ビーム投射レンズＬ８、光ビ
ーム投射鏡ＭＢより構成される光ビーム投射手段Ｂ、に
より光ビームＢが、撮像レンズＬの光軸に交差する方向
へ投射され、対象物表面に輝点Ｔ（Ｔ’）が生成される
。輝点Ｔ（Ｔ′）からの光は、撮像レンズＬを通過した
後、鏡Ｍ１およびＭ２により折り返し反射され、像位置
検出素子Ｐ上に輝点の像Ｉ（Ｉ’）を形成する。(Examples) Hereinafter, the present invention will be explained in detail based on Examples. 1st
An example of an optical stylus for side profile measurement based on the present invention is shown in FIG. A light beam B is projected in a direction intersecting the optical axis of the imaging lens L by a light beam projection means B composed of a light beam source S1, a light beam projection lens L8, and a light beam projection mirror MB, and shines on the surface of the object. A point T (T') is generated. After passing through the imaging lens L, the light from the bright spot T (T') is reflected back by the mirrors M1 and M2, and forms an image I (I') of the bright spot on the image position detection element P.
もし、鏡Ｍ１を配置しない場合には、輝点の像は、１ｖ
（Ｉｖ’）に結像され、この位置に像位置検出素子を配
置したのでは、先触針装置の距離検出方向の幅が大きく
なり、穴の内側面形状計測には適さない。この障害は第
１図に示したように、撮像レンズＬと像位置検出素子Ｐ
との間に、撮像レンズを通過した光が、像位置検出素子
上に投影されるように鏡光学系（Ｍｌ、Ｍ２）を配置す
ることによって解決される。これにより、先触針装置の
距離検出方向の大きさを著しく小さくすることができ、
穴の内側面形状等の計測も可能な先触針を実現できる。If mirror M1 is not placed, the image of the bright spot is 1v
If the image is formed at (Iv') and the image position detection element is disposed at this position, the width of the tip needle device in the distance detection direction becomes large, making it unsuitable for measuring the shape of the inner surface of the hole. As shown in Fig. 1, this failure occurs between the imaging lens L and the image position detection element P.
This problem is solved by arranging a mirror optical system (Ml, M2) so that the light passing through the imaging lens is projected onto the image position detection element. As a result, the size of the tip needle device in the distance detection direction can be significantly reduced.
It is possible to realize a tipping needle that can also measure the shape of the inner surface of a hole.
第２図には、本発明に基づいて構成された側面形状計測
用光触針の実施例の一つであり、像位置検出素子Ｐと撮
像レンズＬとの間に配置された鏡Ｍ、の効果により、第
１図と同様に先触針の距離検出方向への大きさを小さく
構成できる。それに加え、光ビームＢの投射方向が、撮
像レンズＬの光軸ＡＬと直交する方向に選択されている
。また、像位置検出素子Ｐは、鏡Ｍ１に対して撮像レン
ズＬの光軸の鏡像として形成される撮像レンズＬの仮想
的な光軸に対して、垂直となるように配置されている。FIG. 2 shows one embodiment of the optical stylus for side surface shape measurement constructed based on the present invention, and shows a mirror M disposed between an image position detection element P and an imaging lens L. As a result, the size of the tip probe in the distance detection direction can be made smaller as in FIG. 1. In addition, the projection direction of the light beam B is selected to be perpendicular to the optical axis AL of the imaging lens L. Moreover, the image position detection element P is arranged so as to be perpendicular to the virtual optical axis of the imaging lens L, which is formed as a mirror image of the optical axis of the imaging lens L with respect to the mirror M1.
このような配置とするとにより、第１図で述べた効果、
すなわち先触針の距離検出方向への大きさを小さく構成
できることに加え、物体表面までの距離と、像位置検出
素子上での輝点像の検出位置との関係を線形的（正比例
）関係とするこ〆ができる。通常の配置では、像位置検
出素子上での輝点像の検出位置との関係は、直線的（正
比例関係）とはならず、単位距離変化に対する像位置検
出素子上での輝点像の位置変化は、一定とはならず距離
により変化し、正比例関係とはならない。距離により、
検出分解能が変化するため、しばしば不都合を生ずる。With this arrangement, the effects described in Figure 1,
In other words, in addition to making it possible to reduce the size of the tip needle in the distance detection direction, the relationship between the distance to the object surface and the detection position of the bright spot image on the image position detection element can be made linear (directly proportional). You can finish the meal. In a normal arrangement, the relationship between the detected position of the bright spot image on the image position detection element is not linear (direct proportional relationship), and the position of the bright spot image on the image position detection element with respect to a unit distance change. The change is not constant, but changes depending on the distance, and is not directly proportional. Depending on the distance
This often causes inconveniences because the detection resolution changes.
第２図の配置とずることにより、この不都合を排除でき
る。By changing the arrangement from that shown in FIG. 2, this inconvenience can be eliminated.
第３図は、第１図、第２図の構成に加え、撮像レンズＬ
と対象物との間にも鏡光学系Ｍｏを配置した本発明に基
づく側面形状計測用光触針の構成例である。鏡Ｍ。は、
撮像レンズが、鏡Ｍ。に対称な位置に存在するのと等価
な効果を生ずるように作用する。従って、この鏡Ｍｏを
配置した構成を採用することにより、先触針の距離検出
方向の大きさをより一層小さくでき、より小径の穴の側
面などの計測に適した先触針を実現できる。更に、光ビ
ーム投影手段を構成するのに、グラスファイバー等によ
る光ガイドを用いることにより、光ビーム投射手段もよ
り小型化できる構成になっている。Figure 3 shows the configuration of the imaging lens L in addition to the configurations of Figures 1 and 2.
This is an example of the configuration of an optical stylus for side surface shape measurement based on the present invention, in which a mirror optical system Mo is also arranged between the object and the object. Mirror M. teeth,
The imaging lens is Mirror M. It acts so as to produce an effect equivalent to being located at a symmetrical position. Therefore, by adopting a configuration in which this mirror Mo is arranged, the size of the tip probe in the distance detection direction can be further reduced, and a tip probe suitable for measuring the side surface of a hole with a smaller diameter can be realized. Furthermore, by using a light guide made of glass fiber or the like to construct the light beam projection means, the light beam projection means can also be made more compact.
第１図は、本発明に基づいて構成された側面形状計測用
光触針の構成の一実施例を示す光学平面図、
第２図は、本発明に基づき構成された側面形状計測用光
触針であり、光ビーム投射方向を結像光学系の光軸に垂
直に、また、結像光学系中の鏡を結像光学系のと光軸と
平行にした実施例を示す光学平面図、
第３図は、結像光学系と対象物との間にも鏡光学系を配
置した実施例を示す光学平面図、および第４図は、従来
から最も多く試みられている先触針の基本構成を示す光
学平面図。
（符号の説明）
Ｓ・・・・・・光ビーム発射装置、
Ｂｐ・・・・・・光ビーム投射手段、Ｂ・・・・・・光
ビーム、Ｌ・・・・・・撮像レンズ、Ｐ・・・・・・像
位置検出手段、０．０′・・・・・・対象物表面、Ｔ、
Ｔ’・・・・・・輝点、■、■′・・・・・・像位置検
出手段上の輝点像、Ｍｏ、 Ｍｌ、Ｍ２・・・・・・鏡
、Ｆ・・・・・・光ビームガイド、ＭＢ・・・・・・光
ビーム投射鏡、
ＡＬ・・・・・・撮像レンズ光軸。
第２図
第３図FIG. 1 is an optical plan view showing an example of the configuration of an optical stylus for side surface shape measurement constructed based on the present invention, and FIG. an optical plan view showing an embodiment in which the light beam projection direction is perpendicular to the optical axis of the imaging optical system, and the mirror in the imaging optical system is parallel to the optical axis of the imaging optical system; Fig. 3 is an optical plan view showing an embodiment in which a mirror optical system is also arranged between the imaging optical system and the object, and Fig. 4 is the basics of the tip stylus, which has been tried most often in the past. FIG. 2 is an optical plan view showing the configuration. (Explanation of symbols) S...Light beam emitting device, Bp...Light beam projection means, B...Light beam, L...Imaging lens, P ....Image position detection means, 0.0'...Target surface, T,
T'... Bright spot, ■, ■'... Bright spot image on image position detection means, Mo, Ml, M2... Mirror, F...・Light beam guide, MB...Light beam projection mirror, AL...Imaging lens optical axis. Figure 2 Figure 3
Claims (3)
へ光ビームを投射する手段、前記結像光学系の像側に設
けられた像位置検出素子、および前記結像光学系と前記
像位置検出素子との間に設置され、前記結像光学系を通
過した光を前記像位置検出素子の上へ折り返し反射する
鏡光学系からなる側面形状計測用光触針の構成。(1) An imaging optical system, means for projecting a light beam in a direction intersecting the optical axis of the imaging optical system, an image position detection element provided on the image side of the imaging optical system, and the imaging optical system and the image position detection element, and includes a mirror optical system that reflects the light that has passed through the imaging optical system back onto the image position detection element.
垂直であることを特徴とする特許請求の範囲第（１）項
記載の側面形状計測用光触針の構成。(2) The structure of the optical stylus for side surface shape measurement according to claim (1), wherein the light beam projection direction is perpendicular to the optical axis of the imaging optical system.
行であることを特徴とする特許請求の範囲第（１）項記
載の側面形状計測用光触針の構成。(3) The configuration of the optical stylus for measuring side surface shape according to claim (1), wherein the mirror surface of the mirror optical system is parallel to the optical axis of the imaging optical system.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62134197A JP2584630B2 (en) | 1987-05-29 | 1987-05-29 | Configuration of optical stylus for side profile measurement |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62134197A JP2584630B2 (en) | 1987-05-29 | 1987-05-29 | Configuration of optical stylus for side profile measurement |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63298104A true JPS63298104A (en) | 1988-12-05 |
| JP2584630B2 JP2584630B2 (en) | 1997-02-26 |
Family
ID=15122699
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62134197A Expired - Lifetime JP2584630B2 (en) | 1987-05-29 | 1987-05-29 | Configuration of optical stylus for side profile measurement |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2584630B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009139176A (en) * | 2007-12-05 | 2009-06-25 | Nikon Corp | Measuring device and its method |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56168104A (en) * | 1980-05-28 | 1981-12-24 | Rikagaku Kenkyusho | Detector for mark position |
| JPS60218008A (en) * | 1984-04-13 | 1985-10-31 | Toshiba Corp | Three-dimensional measuring instrument |
| JPS6130705A (en) * | 1984-07-24 | 1986-02-13 | Rikagaku Kenkyusho | Optical probe apparatus |
| JPS61275616A (en) * | 1985-05-31 | 1986-12-05 | Eisuke Obata | Measuring instrument for tunnel section |
| JPS6266110A (en) * | 1985-09-19 | 1987-03-25 | Rikagaku Kenkyusho | Optical distance detecting device |
-
1987
- 1987-05-29 JP JP62134197A patent/JP2584630B2/en not_active Expired - Lifetime
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56168104A (en) * | 1980-05-28 | 1981-12-24 | Rikagaku Kenkyusho | Detector for mark position |
| JPS60218008A (en) * | 1984-04-13 | 1985-10-31 | Toshiba Corp | Three-dimensional measuring instrument |
| JPS6130705A (en) * | 1984-07-24 | 1986-02-13 | Rikagaku Kenkyusho | Optical probe apparatus |
| JPS61275616A (en) * | 1985-05-31 | 1986-12-05 | Eisuke Obata | Measuring instrument for tunnel section |
| JPS6266110A (en) * | 1985-09-19 | 1987-03-25 | Rikagaku Kenkyusho | Optical distance detecting device |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009139176A (en) * | 2007-12-05 | 2009-06-25 | Nikon Corp | Measuring device and its method |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2584630B2 (en) | 1997-02-26 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH0652171B2 (en) | Optical non-contact position measuring device | |
| JP3000819B2 (en) | Three-dimensional measurement probe and shape measurement method | |
| JP2011017615A (en) | Pipe inner-surface shape measuring apparatus and method by white light interferometry | |
| EP0234562A2 (en) | Displacement sensor | |
| TW201009287A (en) | Optical multi-axis linear displacement measurement system and a method thereof | |
| JP3310945B2 (en) | Non-contact surface shape measurement method | |
| JP2771546B2 (en) | Hole inner surface measuring device | |
| JP2618377B2 (en) | Apparatus with F-theta corrected telecentric objective for non-contact measurement | |
| JPS63298104A (en) | Constitution of optical probe for measuring configuration of side surface | |
| JPH10339616A (en) | Device and method for measuring object shape without any contact | |
| JP3261451B2 (en) | Cantilever for detecting frictional force | |
| JPS6055211A (en) | Contactless three-dimensional measuring device | |
| JPH03289504A (en) | Bubble measuring apparatus | |
| JP4442843B2 (en) | Refractive index measuring device for test lens | |
| JPS6266111A (en) | Optical distance detecting device | |
| JPS6126812A (en) | Detecting device for distance | |
| JP2000018935A (en) | Surface roughness shape detector | |
| JPS6130705A (en) | Optical probe apparatus | |
| JPS63138204A (en) | Shape measuring method | |
| JP4020216B2 (en) | Non-contact position sensor | |
| JP2023521452A (en) | Non-contact dimension measuring device with micrometer resolution | |
| JPH0769149B2 (en) | Shape measuring device | |
| JPH0288144U (en) | ||
| JPS63263411A (en) | Optical distance detector | |
| JPS63298113A (en) | Structure of image forming optical system of optical range detector |