JPS63295092A - レ−ザ加工装置用の排煙装置 - Google Patents
レ−ザ加工装置用の排煙装置Info
- Publication number
- JPS63295092A JPS63295092A JP62128881A JP12888187A JPS63295092A JP S63295092 A JPS63295092 A JP S63295092A JP 62128881 A JP62128881 A JP 62128881A JP 12888187 A JP12888187 A JP 12888187A JP S63295092 A JPS63295092 A JP S63295092A
- Authority
- JP
- Japan
- Prior art keywords
- processing
- exhaust
- concentration
- detection means
- chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000006227 byproduct Substances 0.000 claims abstract description 35
- RWSOTUBLDIXVET-UHFFFAOYSA-N Dihydrogen sulfide Chemical compound S RWSOTUBLDIXVET-UHFFFAOYSA-N 0.000 claims abstract description 18
- 229910000037 hydrogen sulfide Inorganic materials 0.000 claims abstract description 18
- 239000007789 gas Substances 0.000 claims description 30
- 238000001514 detection method Methods 0.000 claims description 21
- 239000000779 smoke Substances 0.000 claims description 20
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 claims description 16
- 239000000428 dust Substances 0.000 claims description 13
- 229910002092 carbon dioxide Inorganic materials 0.000 claims description 8
- 239000001569 carbon dioxide Substances 0.000 claims description 8
- 238000000034 method Methods 0.000 claims description 7
- 229930195733 hydrocarbon Natural products 0.000 claims description 6
- 150000002430 hydrocarbons Chemical class 0.000 claims description 6
- 230000001678 irradiating effect Effects 0.000 claims description 4
- 239000004215 Carbon black (E152) Substances 0.000 claims description 3
- 238000010521 absorption reaction Methods 0.000 abstract description 5
- 238000003754 machining Methods 0.000 abstract description 4
- 238000006073 displacement reaction Methods 0.000 abstract description 2
- 230000015556 catabolic process Effects 0.000 abstract 1
- 238000006731 degradation reaction Methods 0.000 abstract 1
- 238000005086 pumping Methods 0.000 abstract 1
- 239000004744 fabric Substances 0.000 description 23
- 238000009423 ventilation Methods 0.000 description 10
- 230000007423 decrease Effects 0.000 description 5
- 238000011144 upstream manufacturing Methods 0.000 description 5
- 238000011109 contamination Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 210000002268 wool Anatomy 0.000 description 3
- 238000004458 analytical method Methods 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 235000021120 animal protein Nutrition 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000010985 leather Substances 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 239000004071 soot Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/14—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/14—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
- B23K26/1462—Nozzles; Features related to nozzles
- B23K26/1494—Maintenance of nozzles
Landscapes
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Laser Beam Processing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62128881A JPS63295092A (ja) | 1987-05-26 | 1987-05-26 | レ−ザ加工装置用の排煙装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62128881A JPS63295092A (ja) | 1987-05-26 | 1987-05-26 | レ−ザ加工装置用の排煙装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63295092A true JPS63295092A (ja) | 1988-12-01 |
| JPH033553B2 JPH033553B2 (enrdf_load_stackoverflow) | 1991-01-18 |
Family
ID=14995663
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62128881A Granted JPS63295092A (ja) | 1987-05-26 | 1987-05-26 | レ−ザ加工装置用の排煙装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63295092A (enrdf_load_stackoverflow) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04262888A (ja) * | 1991-02-15 | 1992-09-18 | Olympus Optical Co Ltd | レーザ加工方法および装置 |
| JP2009172654A (ja) * | 2008-01-25 | 2009-08-06 | Fuji Electric Holdings Co Ltd | レーザ加工装置 |
| JP2014217862A (ja) * | 2013-05-09 | 2014-11-20 | 大日本印刷株式会社 | レーザ加工煙清浄装置、レーザ加工装置 |
| CN109773334A (zh) * | 2019-02-25 | 2019-05-21 | 京东方科技集团股份有限公司 | 切割微粒的去除装置及切割方法 |
| JPWO2019082972A1 (ja) * | 2017-10-25 | 2020-11-26 | 株式会社ニコン | 加工装置、及び、移動体の製造方法 |
-
1987
- 1987-05-26 JP JP62128881A patent/JPS63295092A/ja active Granted
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04262888A (ja) * | 1991-02-15 | 1992-09-18 | Olympus Optical Co Ltd | レーザ加工方法および装置 |
| JP2009172654A (ja) * | 2008-01-25 | 2009-08-06 | Fuji Electric Holdings Co Ltd | レーザ加工装置 |
| JP2014217862A (ja) * | 2013-05-09 | 2014-11-20 | 大日本印刷株式会社 | レーザ加工煙清浄装置、レーザ加工装置 |
| JPWO2019082972A1 (ja) * | 2017-10-25 | 2020-11-26 | 株式会社ニコン | 加工装置、及び、移動体の製造方法 |
| US12208469B2 (en) | 2017-10-25 | 2025-01-28 | Nikon Corporation | Processing apparatus and method using irradiation apparatus having a partition member |
| CN109773334A (zh) * | 2019-02-25 | 2019-05-21 | 京东方科技集团股份有限公司 | 切割微粒的去除装置及切割方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH033553B2 (enrdf_load_stackoverflow) | 1991-01-18 |
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