JPS63290911A - Angular speed sensor - Google Patents
Angular speed sensorInfo
- Publication number
- JPS63290911A JPS63290911A JP62126206A JP12620687A JPS63290911A JP S63290911 A JPS63290911 A JP S63290911A JP 62126206 A JP62126206 A JP 62126206A JP 12620687 A JP12620687 A JP 12620687A JP S63290911 A JPS63290911 A JP S63290911A
- Authority
- JP
- Japan
- Prior art keywords
- bimorph element
- electrode
- piezoelectric bimorph
- driving
- detection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001514 detection method Methods 0.000 abstract description 9
- 230000008878 coupling Effects 0.000 abstract description 7
- 238000010168 coupling process Methods 0.000 abstract description 7
- 238000005859 coupling reaction Methods 0.000 abstract description 7
- 239000004020 conductor Substances 0.000 abstract description 6
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 abstract description 3
- 239000000853 adhesive Substances 0.000 description 3
- 230000001070 adhesive effect Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 2
- 230000003321 amplification Effects 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
Landscapes
- Gyroscopes (AREA)
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
本発明はジャイロスコープなどに用いる角速度センサに
関するものである。DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to an angular velocity sensor used in gyroscopes and the like.
従来の技術
従来の角速度センサは、通常第２図に示すようにワイア
２８を直接検知用圧電バイモルフ２１から引き出すか、
第３図に示すように、ワイア２８を接着剤３１で接着し
ていた。尚、同図において２２．２６は接合部材、２４
は駆動用圧電バイモルフ素子、２７は結合部材、２９は
リードピン、２ ・＼−ゾ
３０はベースである。BACKGROUND OF THE INVENTION Conventional angular velocity sensors usually have a wire 28 drawn out directly from a sensing piezoelectric bimorph 21 as shown in FIG.
As shown in FIG. 3, the wire 28 was bonded with an adhesive 31. In addition, in the same figure, 22.26 is a joining member, 24
2 is a driving piezoelectric bimorph element, 27 is a coupling member, 29 is a lead pin, and 2.\-zo 30 is a base.
発明が解決しようとする問題点
第２図に示すようなワイア配線では、検知用圧電バイモ
ルフ素子２１には、振動の節になる点がない。従って、
必ずワイア２８は検知用バイモルフ素子２１との結合点
で振動しているので、長期的な使用において断線の恐れ
があり、また、ワイア２８は振動しているので、摩擦に
より電荷が発生しノイズとなることがある。Problems to be Solved by the Invention In the wire wiring as shown in FIG. 2, the detection piezoelectric bimorph element 21 does not have a point that becomes a node of vibration. Therefore,
Since the wire 28 always vibrates at the connection point with the detection bimorph element 21, there is a risk of the wire breaking during long-term use.Also, since the wire 28 vibrates, friction generates an electric charge, causing noise and noise. It may happen.
一方、第３図に示すような、ワイア配線を行なえば、確
かに結合部材２６での振幅は無視しうるが、ワイア２８
を駆動用バイモルフ２４の゛側面に接着するという複雑
な作業を供ない、結果的に高価な角速度センサとなる。On the other hand, if wire wiring is performed as shown in FIG. 3, the amplitude at the coupling member 26 can be ignored, but the
The angular velocity sensor requires a complicated work of adhering to the side surface of the drive bimorph 24, resulting in an expensive angular velocity sensor.
本発明はこのような問題点を解決できる角速度センサを
提供せんとするものである。The present invention aims to provide an angular velocity sensor that can solve these problems.
問題点を解決するための手段
本発明の角速度センサは駆動用圧電バイモルフ素子と検
知用圧電バイモルフ素子を有し、上記駆動用バイモルフ
素子の電極の一部が上記検知用圧３ ・（−
電バイモルフ素子の信号線として用いるものである。Means for Solving the Problems The angular velocity sensor of the present invention has a driving piezoelectric bimorph element and a sensing piezoelectric bimorph element, and a part of the electrode of the driving bimorph element is connected to the sensing pressure 3. It is used as a signal line for an element.
作用
上記構成により、ワイアの断線の危険性及びワイアの接
着作業が軽減される。Effect: The above configuration reduces the risk of wire breakage and the wire bonding work.
実施例
第１図は、本発明の角速度センサの一実施例を示す斜視
図である。第１図において、４は駆動用圧電バイモルフ
素子であり、結合部材６と電気的及び機械的に結合して
いる電極をグランド電極としており、対向面にはそれぞ
れ一対の有効面積の等しい信号線５２Ｌ 、６ｂ 、６
０がある。信号線６は、それぞれ接合部材２上に設けた
導電体３を介して、それぞれ検知用圧電バイモルフ素子
１の電極と電気的に結合している。尚、同図において、
２は結合部材、７は金属弾性部材、８はワイア、９はリ
ードピン、１０はベース、１１は導電性接着剤、１２は
検知軸である。Embodiment FIG. 1 is a perspective view showing an embodiment of the angular velocity sensor of the present invention. In FIG. 1, reference numeral 4 denotes a piezoelectric bimorph element for driving, and the electrode electrically and mechanically connected to the coupling member 6 is used as a ground electrode. , 6b , 6
There is 0. The signal lines 6 are electrically coupled to the electrodes of the detection piezoelectric bimorph element 1 via conductors 3 provided on the bonding members 2, respectively. In addition, in the same figure,
2 is a coupling member, 7 is a metal elastic member, 8 is a wire, 9 is a lead pin, 10 is a base, 11 is a conductive adhesive, and 12 is a detection shaft.
以下では、左右対称として、片側だけについて述べる。In the following, only one side will be described as bilaterally symmetrical.
６はワイア８を介してそれぞれリードピン９に電気的に
結合しているが、ワイアボンディングの自動化はワイア
８を駆動用バイモルフ素子４の側面に接着し、かつ、同
ワイア８の先端をリードピン９にはんだ付けをする作業
の自動化に比べると、はるかに容易である。また、駆動
用圧電バイモルフ素子４の振動によシ、信号線６には、
電荷が発生するがそれぞれ電極としての有効面積を等し
くしているので、発生電荷は等しいから信号処理におい
て、差動的の増幅をすることで駆動によシ信号線に発生
するノイズを軽減することができる。6 are electrically connected to lead pins 9 via wires 8. Automated wire bonding involves bonding the wires 8 to the side surfaces of the drive bimorph element 4 and connecting the tips of the wires 8 to the lead pins 9. This is much easier than automating the soldering process. Also, due to the vibration of the driving piezoelectric bimorph element 4, the signal line 6
Charge is generated, but since the effective area of each electrode is the same, the generated charges are equal, so in signal processing, differential amplification is used to reduce noise generated in the signal line during drive. Can be done.
なお本実施例では、導電体３は接合部材２の表面にある
が、接合部材２の内部にうめ込むこともできる。また、
各電極と導電体とは導電性接着剤１１を用いているが、
いかなる結合方法をとってもか１わない。In this embodiment, the conductor 3 is on the surface of the joining member 2, but it can also be embedded inside the joining member 2. Also,
Conductive adhesive 11 is used for each electrode and conductor,
It doesn't matter what method of connection you use.
発明の効果
以上本発明によれば、駆動用バイモルフ素子の電極を検
知用圧電バイモルフ素子の信号線として用いることで、
リード線の断線の危険性及びり−６１＼−。Effects of the Invention According to the present invention, by using the electrode of the drive bimorph element as the signal line of the detection piezoelectric bimorph element,
Risk of lead wire breakage -61\-.
ド線の接着という煩雑な作業がなくなり、又信号線とし
て用いる電極の有効面積を等しくすることで、耐ノイズ
性も向上し、更に接合部材に導電体を設けることで前記
検知用圧電バイモルフ素子の電極と前記信号線の電気的
な結合が容易となり、廉価な角速度センサを供給するこ
とができ、その効果は大なるものである。The troublesome work of bonding wires is eliminated, and by making the effective area of the electrodes used as signal wires equal, noise resistance is improved.Furthermore, by providing a conductor in the bonding member, the piezoelectric bimorph element for detection is Electrical coupling between the electrode and the signal line becomes easy, and an inexpensive angular velocity sensor can be provided, which has a great effect.
第１図は本発明の一実施例における角速度センサの斜視
図、第２図及び第３図は従来の角速度センサの斜視図で
ある。
１・・・・・・検知用圧電バイモルフ素子、３・・・・
・・導電体、４・・・・・・駆動用バイモルフ素子、５
ａ 、 ６ｋｌ 。
６Ｃ・・・・・・信号線。
代理人の氏名 弁理士 中 尾 敏 男 ほか１名第２
図
ｚｌ ２２ 卒に
□ １
□FIG. 1 is a perspective view of an angular velocity sensor according to an embodiment of the present invention, and FIGS. 2 and 3 are perspective views of a conventional angular velocity sensor. 1...Piezoelectric bimorph element for detection, 3...
...Conductor, 4...Bimorph element for drive, 5
a, 6kl. 6C...Signal line. Name of agent: Patent attorney Toshio Nakao and 1 other person 2nd
Figure zl 22 Graduation □ 1 □
Claims (1)
子を有し、上記駆動用バイモルフ素子の電極の一部が上
記検知用圧電バイモルフ素子の信号線として用いられる
ことを特徴とする角速度センサ。An angular velocity sensor comprising a driving piezoelectric bimorph element and a sensing piezoelectric bimorph element, wherein a part of the electrode of the driving bimorph element is used as a signal line of the sensing piezoelectric bimorph element.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12620687A JPH0613971B2 (en) | 1987-05-22 | 1987-05-22 | Angular velocity sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12620687A JPH0613971B2 (en) | 1987-05-22 | 1987-05-22 | Angular velocity sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63290911A true JPS63290911A (en) | 1988-11-28 |
| JPH0613971B2 JPH0613971B2 (en) | 1994-02-23 |
Family
ID=14929339
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12620687A Expired - Fee Related JPH0613971B2 (en) | 1987-05-22 | 1987-05-22 | Angular velocity sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0613971B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02272317A (en) * | 1989-04-14 | 1990-11-07 | Matsushita Electric Ind Co Ltd | Angular velocity sensor |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6215410A (en) * | 1985-07-12 | 1987-01-23 | Nippon Denso Co Ltd | Vibration type angular velocity detecting instrument |
-
1987
- 1987-05-22 JP JP12620687A patent/JPH0613971B2/en not_active Expired - Fee Related
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6215410A (en) * | 1985-07-12 | 1987-01-23 | Nippon Denso Co Ltd | Vibration type angular velocity detecting instrument |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02272317A (en) * | 1989-04-14 | 1990-11-07 | Matsushita Electric Ind Co Ltd | Angular velocity sensor |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0613971B2 (en) | 1994-02-23 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |