JPS6215410A - Vibration type angular velocity detecting instrument - Google Patents
Vibration type angular velocity detecting instrumentInfo
- Publication number
- JPS6215410A JPS6215410A JP60154474A JP15447485A JPS6215410A JP S6215410 A JPS6215410 A JP S6215410A JP 60154474 A JP60154474 A JP 60154474A JP 15447485 A JP15447485 A JP 15447485A JP S6215410 A JPS6215410 A JP S6215410A
- Authority
- JP
- Japan
- Prior art keywords
- vibration
- vibrating
- vibrating piece
- angular velocity
- piece
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
Description
【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、振動型角速度検出装置に関する。[Detailed description of the invention] [Industrial application field] The present invention relates to a vibration type angular velocity detection device.
従来、この種の振動型角速度検出装置としては、例えば
、特開昭59−217166号公報に開示されているよ
うに、移動体、回転体等の可動体の振動方向に振動する
第1振動片とこの第1振動片から延出して前記可動体に
角速度が生じたとき前記第1振動片とは直角方向に振動
する第2振動片とを有する振動体と、前記可動体との振
動方向に振動する第3振動片とこの第3振動片から前記
第2振動片に平行に延出して前記可動体に角速度が生し
たとき前記第3振動片とは直角方向に振動する第4振動
片とを有する振動体と、前記第1振動片にその振動方向
に歪むように固着されて圧電変換作用を行う第1圧電素
子と、前記第2振動片にその振動方向に歪むように固着
されて圧電変換作用を行う第2圧電素子と、前記第1振
動片の振動方向とは逆位相方向に歪むように前記第3振
動片に固着されて圧電変換作用を行う第3圧電素子と、
前記第4振動片にその振動方向に歪むように固着されて
圧電変換作用を行う第4圧電素子とを設けるようにした
ものがある。Conventionally, this type of vibration type angular velocity detection device uses a first vibrating piece that vibrates in the vibration direction of a movable body such as a moving body or a rotating body, as disclosed in Japanese Patent Laid-Open No. 59-217166, for example. and a second vibrating piece that extends from the first vibrating piece and vibrates in a direction perpendicular to the first vibrating piece when an angular velocity is generated in the movable body; A third vibrating piece that vibrates, and a fourth vibrating piece that extends from the third vibrating piece in parallel to the second vibrating piece and vibrates in a right angle direction when an angular velocity is generated in the movable body. a first piezoelectric element that is fixed to the first vibrating piece so as to be distorted in the vibration direction thereof and performs a piezoelectric conversion action; and a first piezoelectric element that is fixed to the second vibrating piece so as to be distorted in the vibration direction and performs a piezoelectric conversion action. a third piezoelectric element fixed to the third vibrating piece so as to be distorted in a phase direction opposite to the vibration direction of the first vibrating piece and performing a piezoelectric conversion action;
There is a device that is provided with a fourth piezoelectric element that is fixed to the fourth vibrating piece so as to be distorted in the vibration direction and performs a piezoelectric conversion action.
しかしながら、このような構成においては、前記第1と
第3の振動片を前記可動体に取付けるにあたり、同可動
体の一部に固着した金属基体に前記第1と第3の振動片
の各基端部をそれぞれ溶接、半田付等により固着するよ
うにしであるため、かかる固着作業が面倒となりしかも
この固着積度にバラツキ・低下を生じ、角速度検出装置
の検出特性の悪化を招という不具合がある。また、」二
連の金属基体が複数の部品からなるため、前記固着作業
が複雑となり上述のような不具合をより一層促進させる
という問題もある。However, in such a configuration, when attaching the first and third vibrating pieces to the movable body, each base of the first and third vibrating pieces is attached to a metal base fixed to a part of the movable body. Since the ends are fixed by welding, soldering, etc., the fixing work is troublesome, and the degree of fixation varies and decreases, leading to deterioration of the detection characteristics of the angular velocity detection device. . Furthermore, since the two series of metal bases are made up of a plurality of parts, there is a problem in that the fixing work becomes complicated, further accelerating the above-mentioned problems.
そこで、本発明は、これらのことに対処すべく、上述の
ような振動型角速度検出装置において、その両派動体の
可動体に対する取付構造を簡単にしようとするものであ
る。Therefore, in order to cope with these problems, the present invention attempts to simplify the mounting structure of both derivative bodies to the movable body in the vibration type angular velocity detection device as described above.
かかる問題の解決にあたり、本発明の構成上の特徴は、
可動体の振動方向に振動する第1振動片とこの第1振動
片から延出して前記可動体に角速度が生したとき前記第
1振動片とは直角方向に振動する第2振動片とを有する
振動体と、前記可動体の振動方向に振動する第3振動片
とこの第3振動片から前記第2振動片に平行に延出して
前記可動体に角速度が生じたとき前記第3振動片とは直
゛角方向に振動する第4振動片とを有する
振動体と、前記第1振動片にその振動方向に歪むように
固着されて圧電変換作用を行う第1圧電素子と、前記第
2振動片にその振動方向に歪むように固着されて圧電変
換作用を行う第2圧電素子と、前記第1振動片の振動方
向とは逆位相方向に歪むように前記第3振動片に固着さ
れて圧電変換作用を行う第3圧電素子と、前記第4振動
片にその振動方向に歪むように固着されて圧電変換作用
を行う第4圧電素子とを備えた角速度検出装置において
、前記第1と第3の振動片を単一の振動片により形成し
、この単一の振動片の中央部を弾性ピンにより前記可動
体の一部に支持し、かつ前記第1と第3の圧電素子を前
記単一の振動片にその中央部の両側にて固着するように
したことにある。In solving this problem, the structural features of the present invention are as follows:
It has a first vibrating piece that vibrates in the vibration direction of the movable body, and a second vibrating piece that extends from the first vibrating piece and vibrates in a direction perpendicular to the first vibrating piece when an angular velocity is generated in the movable body. a vibrating body; a third vibrating piece that vibrates in the vibration direction of the movable body; and a third vibrating piece that extends from the third vibrating piece in parallel to the second vibrating piece, and when an angular velocity is generated in the movable body, the third vibrating piece vibrates. a vibrating body having a fourth vibrating piece that vibrates in the orthogonal direction; a first piezoelectric element that is fixed to the first vibrating piece so as to be distorted in the vibration direction thereof and performs a piezoelectric conversion action; and the second vibrating piece. a second piezoelectric element that is fixed to be distorted in the vibration direction thereof and performs a piezoelectric conversion action; and a second piezoelectric element that is fixed to the third vibrating element so as to be distorted in a phase direction opposite to the vibration direction of the first vibration piece and performs a piezoelectric conversion action. and a fourth piezoelectric element that is fixed to the fourth vibrating piece so as to be distorted in the vibration direction thereof and performs a piezoelectric conversion action. The single vibrating piece is formed by a single vibrating piece, the central part of the single vibrating piece is supported by a part of the movable body by an elastic pin, and the first and third piezoelectric elements are attached to the single vibrating piece. The reason is that it is fixed on both sides of the central part.
しかして、このように本発明を構成したことにより、前
記第1.と第3の振動片に代わる前記単一の振動片をそ
の中央部にて前記弾性ピンにより前記可動体の一部に支
持するのみでよいので、この種角速度検出装置の構造、
前記可動体軒対する取付構造及び取付作業が著しく簡単
となる。By configuring the present invention in this way, the above-mentioned first. The structure of this kind of angular velocity detection device is
The mounting structure and the mounting work for the movable body eave are significantly simplified.
以下、本発明の第1実施例を図面により説明すると、第
1図は本発明に係る振動型角速度振動検出装置の一例を
示している。この角速度検出装置は、車両の車体の一部
に鉛直状に固着した金属基板10と、この金属基板10
に組付けた振動機構20とを備えており、振動機構20
は、金属ピン21と、三枚の振動板22,23.24と
、四箇の圧電素子25.26,27.28により構成さ
れている。金属ピン21はその基端部にて金属基板10
の中央部に溶接、半田付等により嵌着されて同金属基F
j、10から水平状に当該車両の後方に向けて延出して
いる。Hereinafter, a first embodiment of the present invention will be described with reference to the drawings. FIG. 1 shows an example of a vibration type angular velocity vibration detection device according to the present invention. This angular velocity detection device includes a metal substrate 10 vertically fixed to a part of a vehicle body, and a metal substrate 10 fixed to a part of a vehicle body.
The vibration mechanism 20 is equipped with a vibration mechanism 20 assembled to the vibration mechanism 20.
is composed of a metal pin 21, three diaphragms 22, 23, 24, and four piezoelectric elements 25, 26, 27, 28. The metal pin 21 is connected to the metal substrate 10 at its base end.
The same metal base F is fitted by welding, soldering, etc. to the center part of
j, extends horizontally from 10 toward the rear of the vehicle.
振動板22は、基部22aと、この基部22aの両端か
らこれらに直角に互いに対向して平行に延出する両派動
部22b、22cとを有するように、帯状の金属板をコ
字状に屈曲して形成されている。かかる場合、両派動部
22b、22cが上下に位置して当該車両の後方に向け
て水平状に延出するように、基部・22aがその中央部
分にて金属ピン22aの先端部に鉛直状に溶接、半田付
等により嵌着されており、両派動部22b、22c。The diaphragm 22 is made by bending a band-shaped metal plate into a U-shape so that it has a base 22a and two derivative parts 22b and 22c extending in parallel from both ends of the base 22a and facing each other at right angles to the base 22a. It is formed as follows. In such a case, the base 22a is attached vertically to the tip of the metal pin 22a at its central portion so that both the derivative parts 22b and 22c are located vertically and extend horizontally toward the rear of the vehicle. Both driving parts 22b and 22c are fitted by welding, soldering, etc.
の各上下表面は水平となっている。The top and bottom surfaces of are horizontal.
円振動板23.24ば短II状の金属板により形成して
なるもので、これら各振動板23.24の各基部中央に
は各振動板23.24の長平方向に沿って切欠溝23a
、24aがそれぞれ穿設されている。しかして、振動板
23は、その左右両表面を振動板22の振動部22bの
上下両表面に直交させて振動部22bと同一方向に延出
するように、切欠溝23aにて振動部22bの先端部分
に溶接、半田付等により嵌着されており、一方、振動板
24ば、その左右両表面を振動板22の振動部22Cの
上下両表面に直交させて振動板23と平行に延出するよ
うに、切欠溝24aにて振動部22cの先端中央部分に
溶接、半田付等により嵌着されている。かかる場合、円
振動板23.24は共に同一鉛直面内に位置している。The circular diaphragms 23 and 24 are formed from short II-shaped metal plates, and a cutout groove 23a is provided at the center of each base of each of these diaphragms 23 and 24 along the longitudinal direction of each diaphragm 23 and 24.
, 24a are drilled in each case. Thus, the diaphragm 23 has a cutout groove 23a so that the diaphragm 23 extends in the same direction as the oscillating section 22b with its left and right surfaces perpendicular to both the upper and lower surfaces of the oscillating section 22b of the diaphragm 22. The diaphragm 24 is attached to the tip by welding, soldering, etc., and the diaphragm 24 extends parallel to the diaphragm 23 with its left and right surfaces perpendicular to the top and bottom surfaces of the vibrating portion 22C of the diaphragm 22. The notch groove 24a is fitted into the central portion of the tip of the vibrating portion 22c by welding, soldering, or the like. In such a case, the circular diaphragms 23, 24 are both located in the same vertical plane.
圧電素子25は、その−側電極にて、振動板22の振動
部22bの上側表面に貼着されて、その圧電変換作用に
より振動片22bを上下方向(即ち、X方向)に所定共
振周波数にて振動させ、一方、圧電素子26は、その−
側電極にて、振動板22の振動部22cの下側表面に貼
着されて、その圧電変換作用により振動部22Cを上下
方向(即ち、X方向)に所定共振周波数にて振動させる
。The piezoelectric element 25 is attached to the upper surface of the vibrating part 22b of the diaphragm 22 with its negative electrode, and its piezoelectric conversion action causes the vibrating piece 22b to reach a predetermined resonance frequency in the vertical direction (i.e., the X direction). While the piezoelectric element 26 is vibrated, the -
The side electrode is attached to the lower surface of the vibrating part 22c of the diaphragm 22, and its piezoelectric conversion action causes the vibrating part 22C to vibrate in the vertical direction (ie, the X direction) at a predetermined resonance frequency.
また、両圧電素子27,28ばその各−側電極にて各振
り3片23.24の右(11+l 111面にそれぞれ
貼着されている。しかして、各圧電素子25.26の圧
電変換作用に基く各振動部22b、22CのX方向の振
動のもとに円振動板23.24が当該車両の角速度ωに
応じてコリオリの力のもとにY方向に振動し各圧電素子
27.28に圧電変換作用を行わせて角速度ωを検出す
る。なお、第1図にて、各符号#I、#2. β3.
14は各圧電素子25.26.27.28の接続導線を
それぞれ示す。また、符号10aD才両接続導線β1,
12の案内管を示し、−・方符号101)は再接続導線
A3゜n4の案内管を示す。In addition, the negative side electrodes of both piezoelectric elements 27 and 28 are attached to the right (11+l) 111 side of each of the three swing pieces 23.24.Thus, the piezoelectric conversion effect of each piezoelectric element 25.26 Under the vibration of each vibrating part 22b, 22C in the X direction based on The angular velocity ω is detected by performing a piezoelectric conversion action on the angular velocity ω.In FIG. 1, each symbol #I, #2.β3.
Reference numeral 14 indicates the connecting wires of each piezoelectric element 25, 26, 27, and 28, respectively. In addition, code 10aD connecting conductor β1,
12 guide tubes are shown, and the --- arrow mark 101) shows the guide tube of the reconnection conducting wire A3゜n4.
以」二のように構成した本実施例において、本発明装置
を当該車両の車体の一部に組付けるにあたっては、単一
の金属板をコ字状に屈曲して形成した振動板22をその
基板22aの中央部分Qこて金属ビン21により金属基
板10を介し車体の一部に支持するのみでよいので、こ
の種角速度検出装置の車体に対する組付作業を最小限の
工数にて容易に精度よく行うことができ、その結果、角
速度検出装置の検出精度を取付誤差を伴うことなく高く
維持し得る。かかる場合、再振動部22b、22Cが上
述のごとく単一の金属板を屈曲させて形成しであるので
、振動機構20の構造が従来の場合に比べてより一層簡
単になる。In this embodiment configured as described above, in order to assemble the device of the present invention to a part of the body of the vehicle, the diaphragm 22, which is formed by bending a single metal plate into a U-shape, is attached to the diaphragm 22. Since it is only necessary to support a part of the vehicle body via the metal substrate 10 using the central Q trowel metal pin 21 of the substrate 22a, this type of angular velocity detection device can be easily assembled to the vehicle body with minimum man-hours and accuracy. As a result, the detection accuracy of the angular velocity detection device can be maintained at a high level without any installation errors. In this case, since the re-vibrating parts 22b and 22C are formed by bending a single metal plate as described above, the structure of the vibrating mechanism 20 becomes much simpler than in the conventional case.
次に、前記第1実施例の変形例について第2図を参照し
て説明すると、この変形例においては、前記第1実施例
にて述べた振動機構20に代えて振動機構30を採用し
たことにその構成上の特徴がある。振動機構30は、前
記第1実施例にて述べた三枚の振動Fj、22,23.
24に対応する単一の振動板31 (第2図及び第3図
参照)ををすしており、この振動板31は、前記第1実
施例にて述べた基部22a9両振動部22b、22c及
び円振動板23’、24にそれぞれ対応する基部3Ia
、再振動部31b、31C及び再振動部31d、31e
を一体的に設けてなるように、第3図に示すごとき形状
に打抜いた屈曲帯状の単一の金属板を第2図に示すごと
く屈曲して形成されている。なお、その他の構成は前記
第1実施例と同様である。Next, a modification of the first embodiment will be explained with reference to FIG. 2. In this modification, a vibration mechanism 30 is adopted in place of the vibration mechanism 20 described in the first embodiment. has its compositional characteristics. The vibration mechanism 30 includes three vibration plates Fj, 22, 23 .
24 (see FIGS. 2 and 3), this diaphragm 31 has a base 22a, both vibrating parts 22b, 22c and Base portion 3Ia corresponding to circular diaphragms 23' and 24, respectively
, re-vibration parts 31b, 31C and re-vibration parts 31d, 31e
It is formed by bending a single metal plate in the form of a bent belt punched into the shape shown in FIG. 3 and bent as shown in FIG. Note that the other configurations are the same as those of the first embodiment.
しかして、このように構成した本変形例においては、第
3図に示すごとく打抜いた金属板を第2図に示すごとき
形状に屈曲して形成した単一の振動板31により、金属
ピン21に固着される基部31a9両振動部22b、2
2Cにそれぞれ対応する再振動部31b、31C及び円
振動板23゜24にそれぞれ対応する再振動部31d、
31eを一体的に構成できるので、前記第1実施例にお
けるような各振動部22b、22bに対する各振動板2
3.24の嵌着作業が不要となり、その結果、この種角
速度検出装置の振動機構の製作作業が容易に精度よく行
える。Therefore, in this modified example configured in this way, the metal pin 21 is formed by a single diaphragm 31 formed by bending a punched metal plate into the shape shown in FIG. 2 as shown in FIG. The base 31a9 is fixed to both vibrating parts 22b, 2
Re-vibration portions 31b and 31C corresponding to 2C, respectively, and re-vibration portion 31d corresponding to circular diaphragm 23°24, respectively;
31e can be integrally configured, each vibration plate 2 for each vibration part 22b, 22b as in the first embodiment
The fitting work of 3.24 becomes unnecessary, and as a result, the work of manufacturing the vibration mechanism of this type of angular velocity detection device can be easily and accurately performed.
第4図は本発明の第2実施例を示しており、本実施例に
おける角速度検出装置は、車両の車体の一部に鉛直状に
固着した金属基板40と、この金属基板40に組付けた
振動機構50とを備えている。振動機構50は、金属ピ
ン51と、一枚の振動板52と、前記第1実施例にて述
べた各圧電素子25,26,27.28とにより構成さ
れており、金属ピン51はその基端部にて金属基板40
の中央部に溶接、半田付等により嵌着されて同金属板4
0から水平状に当該車両の後方に向けて延出している。FIG. 4 shows a second embodiment of the present invention, and the angular velocity detection device in this embodiment includes a metal substrate 40 vertically fixed to a part of the body of a vehicle, and a metal substrate 40 assembled to the metal substrate 40. A vibration mechanism 50 is provided. The vibration mechanism 50 is composed of a metal pin 51, a vibrating plate 52, and each of the piezoelectric elements 25, 26, 27, and 28 described in the first embodiment. Metal substrate 40 at the end
The metal plate 4 is fitted by welding, soldering, etc. to the center of the metal plate 4.
0 and extends horizontally toward the rear of the vehicle.
振動板52は、第5図に示すごときコ形状に打抜いた帯
状の金属板を、第4図に示すごとき形状に屈曲形成して
なるもので、基部52aからこの基部52aと同一平面
内にて互いに反対方向に対称的に延在する再振動部52
b、52Cと、これら各振動部52b、52Cの一側外
端部分からこれらに直角方向に一体的に延在する各振動
部52d、52eとにより構成されている。かかる場合
、再振動部52d、52eが上下に位置して当該車両の
後方に向けて水平状に延出するように再振動部52 b
、’ 52 Cをその長手方向にて鉛直状に配置させる
べく振動板52の基部52aがその中央部分にて金属ピ
ン51の先端部に溶接、半田付等により嵌着されており
、再振動部52d、52eは共に同一鉛直面内にある。The diaphragm 52 is formed by bending a band-shaped metal plate punched into a U-shape as shown in FIG. 5 into the shape shown in FIG. The re-vibration portions 52 extend symmetrically in opposite directions.
b, 52C, and vibrating portions 52d, 52e integrally extending from one outer end portion of each vibrating portion 52b, 52C in a direction perpendicular thereto. In such a case, the re-vibrating portion 52 b is arranged such that the re-vibrating portions 52 d and 52 e are located above and below and extend horizontally toward the rear of the vehicle.
, '52C is arranged vertically in its longitudinal direction, the base 52a of the diaphragm 52 is fitted to the tip of the metal pin 51 at its center by welding, soldering, etc. Both 52d and 52e are in the same vertical plane.
圧電素子25は、その−側電極にて、振動板52の振動
部52bの一表面に貼着されて、その圧電変換作用によ
り振動部52bを金属ピン51の先端部を基準として前
後方向(第6図にてZ方向)に所定共振周波数にて振動
する。一方、圧電素子26は、その−側電極にて、振動
板52の振動部52Cの一表面に貼着されて、その圧電
変換作用により振動部52cを金属ピン51の先端部を
基準として振動部52.bと対称的に前後方向(第6図
にてZ方向)に所定共振周波数にて振動させる。The piezoelectric element 25 is attached to one surface of the vibrating part 52b of the diaphragm 52 with its negative electrode, and its piezoelectric conversion action causes the vibrating part 52b to move in the front-back direction (first direction) with the tip of the metal pin 51 as a reference. It vibrates at a predetermined resonance frequency in the Z direction in Figure 6). On the other hand, the piezoelectric element 26 is attached to one surface of the vibrating part 52C of the diaphragm 52 with its negative electrode, and its piezoelectric conversion action causes the vibrating part 52c to move into the vibrating part with the tip of the metal pin 51 as a reference. 52. It is vibrated at a predetermined resonance frequency in the front-rear direction (Z direction in FIG. 6) symmetrically with b.
また、両圧電素子27.28はその各−側電極にて各振
動部52d、52eの右側側面にそれぞれ貼着されてい
る。しかして、各圧電素子25゜26の圧電変換作用に
基く各振動部52b、52CのZ方向の振動のもとに再
振動部52d、5’2eが当該車両の角速度ωに応じて
コリオリの力のもとにY方向に振動し各圧電素子27.
28に圧電変換作用を行なわせて角速度ωを検出する。Moreover, both piezoelectric elements 27 and 28 are respectively attached to the right side surface of each vibrating part 52d and 52e with their negative side electrodes. Therefore, under the Z-direction vibration of each vibrating part 52b, 52C based on the piezoelectric conversion action of each piezoelectric element 25, 26, the re-vibrating part 52d, 5'2e generates a Coriolis force according to the angular velocity ω of the vehicle. Each piezoelectric element 27. vibrates in the Y direction under the .
28 performs a piezoelectric conversion action to detect the angular velocity ω.
なお、第4図にて、符号40aは両接続導線11゜12
の案内管を示し、符号40bは接続導線13の案内管を
示し、また符号40cは接続導線p4の案内管を示す。In addition, in FIG. 4, the symbol 40a indicates both connecting conductors 11°12
Reference numeral 40b indicates a guide tube for the connecting conductor 13, and reference numeral 40c indicates a guide tube for the connecting conductor p4.
以上のように構成したこの第2実施例において、本発明
装置を当該車両の車体の一部に組付けるにあたっては、
単一の金属板を屈曲して形成した振動板52をその基部
52aの中央部分にて金属ピン51により金属基板40
を介し車体の一部に支持するのみでよいので、この種角
速度検出装置の車体に対する組付作業を最小限の工数に
て容易に精度よく行うことができ、その結果、角速度検
出装置の検出精度を取付誤差を伴うことな(高く維持し
得る。かかる場合、各振動部52b、52c。In this second embodiment configured as described above, when assembling the device of the present invention to a part of the vehicle body of the vehicle, the following steps are taken:
A diaphragm 52 formed by bending a single metal plate is attached to the metal substrate 40 by a metal pin 51 at the center of its base 52a.
Because it only needs to be supported on a part of the vehicle body through the can be maintained at a high level without any installation error. In such a case, each vibrating portion 52b, 52c.
52d、52eが上述のごとく単一の金属板を屈曲させ
て一体的に形成しであるので、振動機構50の構造が従
来の場合に比べでより一層簡単になる。Since 52d and 52e are integrally formed by bending a single metal plate as described above, the structure of the vibration mechanism 50 is simpler than in the conventional case.
なお、前記実施例においては、コ形状に打抜いた単一の
金属板により振動板52を屈曲形成する例について説明
したが、これに限らず、第8図に示すごとくクランク形
状に打抜いて形成した帯状の金属板を第7図に示すごと
き形状に屈曲形成した振動板53を、振動板52に代え
て採用して実施しても、前記第2実施例と実質的に同様
の作用効果を達成し得る。かかる場合、振動板53の基
部53a、各振動部53.b、53C及び各振動部53
d、53eが振すI板52の基部52a、各振動部52
b、52C及び各振動部52d、52eにそれぞれ対応
し、各振動部53d、53eが金属ピン51の先端部を
基準として点対称に各振動部53b、53cから直角に
延出し、かつ各圧電素子27.28が各振動部53d、
53eの対向表面側に貼着されている点が前記第2実施
例と異なるのみである。In the above embodiment, an example was explained in which the diaphragm 52 is formed by bending a single metal plate punched into a U-shape. Even if a diaphragm 53 formed by bending the formed band-shaped metal plate into the shape shown in FIG. 7 is used in place of the diaphragm 52, the effect is substantially the same as that of the second embodiment. can be achieved. In such a case, the base 53a of the diaphragm 53, each vibrating part 53. b, 53C and each vibrating part 53
d, 53e shake the base 52a of the I plate 52, each vibrating part 52
b, 52C and each vibrating part 52d, 52e, each vibrating part 53d, 53e extends perpendicularly from each vibrating part 53b, 53c point-symmetrically with respect to the tip of the metal pin 51, and each piezoelectric element 27.28 is each vibrating part 53d,
The only difference from the second embodiment is that it is attached to the opposite surface side of 53e.
また、前記第2実施例においては、各振動部52b、5
2c、52d、52eを単一の金属板からなる振動板5
2により一体的に形成した例について説明したが、これ
に限らず、第9図に示すごとく、三枚の振動板54..
55.56を振動板52に代えて採用し、振動板54の
両派動部54.1)。Furthermore, in the second embodiment, each vibrating section 52b, 5
2c, 52d, and 52e are a diaphragm 5 made of a single metal plate.
Although an example has been described in which three diaphragms 54. ..
55.56 is adopted in place of the diaphragm 52, and both driving parts 54.1) of the diaphragm 54 are used.
54、 cの各外端中央に穿設した切欠溝54d、54
eに各振動板55.56の基端部を第9図に示すごとく
直交して溶接、半Fn (=J等によりそれぞれ嵌着し
て実施しても前記第2実施例と実質的に同様の作用効果
を達成しiMる。Notch grooves 54d and 54 bored at the center of each outer end of 54 and c.
Even if the proximal ends of the diaphragms 55 and 56 are welded orthogonally to e as shown in FIG. Achieve the effect of iM.
また、前記各実施例及び変形例においては、本発明装置
が車両の角速度検出に適用された例について説明したが
、これに代えて、各種移動体、回転体等の可動体の角速
度検出にあたり本発明装置を適用して実施してもよい。Furthermore, in each of the embodiments and modifications described above, an example in which the device of the present invention is applied to detecting the angular velocity of a vehicle has been described. The invention may also be implemented by applying the invention device.
第1図は本発明の第1実施例を示す斜視図、第2図は前
記第2実施例の変形例を示す斜視図、第3図は第2図に
おける振動板の展開図、第4図は本発明の第2実施例を
示す斜視図、第5図は第4図における振動板の展開図、
第6図は第4図における振動板の振動状態説明図、第7
図は前記第2実施例の変形例を示す斜視図、第8図は第
7図における振動板の展開図、及び第9図は前記第2実
施例の他の変形例を示す斜視図である。
符号の説明
10.4.0・・・金属基板、20.30.50・・・
振動機構、21.51 ・・・金属ピン、22゜23、
24.3]、 52.53.54.、55.56・・・
振動板、22 b、 22 c、 3 l b、
31c、 52b、 52c、 52d、 52e、
53b。
53c、 53d、 53e、 54b、 54c・・
−振動部、25,26,27.28・・・圧電素子。FIG. 1 is a perspective view showing a first embodiment of the present invention, FIG. 2 is a perspective view showing a modification of the second embodiment, FIG. 3 is a developed view of the diaphragm in FIG. 2, and FIG. is a perspective view showing the second embodiment of the present invention, FIG. 5 is a developed view of the diaphragm in FIG. 4,
Figure 6 is an explanatory diagram of the vibration state of the diaphragm in Figure 4;
The figure is a perspective view showing a modification of the second embodiment, FIG. 8 is a developed view of the diaphragm in FIG. 7, and FIG. 9 is a perspective view showing another modification of the second embodiment. . Explanation of symbols 10.4.0...Metal substrate, 20.30.50...
Vibration mechanism, 21.51 ... Metal pin, 22°23,
24.3], 52.53.54. , 55.56...
Vibration plate, 22 b, 22 c, 3 l b,
31c, 52b, 52c, 52d, 52e,
53b. 53c, 53d, 53e, 54b, 54c...
- Vibration part, 25, 26, 27.28... piezoelectric element.
Claims (1)
動片から延出して前記可動体に角速度が生じたとき前記
第1振動片とは直角方向に振動する第2振動片とを有す
る振動体と、前記可動体の振動方向に振動する第3振動
片とこの第3振動片から前記第2振動片に平行に延出し
て前記可動体に角速度が生じたとき前記第3振動片とは
直角方向に振動する第4振動片とを有する振動体と、前
記第1振動片にその振動方向に歪むように固着されて圧
電変換作用を行う第1圧電素子と、前記第2振動片にそ
の振動方向に歪むように固着されて圧電変換作用を行う
第2圧電素子と、前記第1振動片の振動方向とは逆位相
方向に歪むように前記第3振動片に固着されて圧電変換
作用を行う第3圧電素子と、前記第4振動片にその振動
方向に歪むように固着されて圧電変換作用を行う第4圧
電素子とを備えた角速度検出装置において、前記1第と
第3の振動片を単一の振動片により形成し、この単一の
振動片の中央部を弾性ピンにより前記可動体の一部に支
持し、かつ前記第1と第3の圧電素子を前記単一の振動
片にその中央部の両側にて固着するようにしたことを特
徴とする振動型角速度検出装置。It has a first vibrating piece that vibrates in the vibration direction of the movable body, and a second vibrating piece that extends from the first vibrating piece and vibrates in a direction perpendicular to the first vibrating piece when an angular velocity is generated in the movable body. a vibrating body; a third vibrating piece that vibrates in the vibration direction of the movable body; and a third vibrating piece that extends from the third vibrating piece in parallel to the second vibrating piece, and when an angular velocity is generated in the movable body, the third vibrating piece vibrates. a vibrating body having a fourth vibrating piece that vibrates in the right angle direction; a first piezoelectric element that is fixed to the first vibrating piece so as to be distorted in the vibration direction thereof and performs a piezoelectric conversion action; a second piezoelectric element that is fixed to be distorted in the vibration direction and performs a piezoelectric conversion action; and a second piezoelectric element that is fixed to the third vibrating piece and performs a piezoelectric conversion action so as to be distorted in a phase direction opposite to the vibration direction of the first vibration piece. In the angular velocity detection device comprising three piezoelectric elements and a fourth piezoelectric element that is fixed to the fourth vibrating piece so as to be distorted in the vibration direction thereof and performs a piezoelectric conversion action, the first and third vibrating pieces are integrated into a single piece. The central part of the single vibrating piece is supported by an elastic pin on a part of the movable body, and the first and third piezoelectric elements are attached to the single vibrating piece at the center thereof. A vibration type angular velocity detection device characterized by being fixed on both sides of the part.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15447485A JPH07101176B2 (en) | 1985-07-12 | 1985-07-12 | Vibration type angular velocity detector |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15447485A JPH07101176B2 (en) | 1985-07-12 | 1985-07-12 | Vibration type angular velocity detector |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6215410A true JPS6215410A (en) | 1987-01-23 |
JPH07101176B2 JPH07101176B2 (en) | 1995-11-01 |
Family
ID=15585040
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15447485A Expired - Lifetime JPH07101176B2 (en) | 1985-07-12 | 1985-07-12 | Vibration type angular velocity detector |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH07101176B2 (en) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63181911U (en) * | 1987-05-15 | 1988-11-24 | ||
JPS63290911A (en) * | 1987-05-22 | 1988-11-28 | Matsushita Electric Ind Co Ltd | Angular speed sensor |
US5445025A (en) * | 1993-02-03 | 1995-08-29 | Matsushita Electric Industrial Co., Ltd. | Angular velocity sensor having a balanced tuning fork structure and the method of manufacture |
US5447066A (en) * | 1993-09-01 | 1995-09-05 | Matsushita Electric Industrial Co. Ltd. | Angular velocity sensor having a tuning fork construction and its method of manufacture |
GB2335771A (en) * | 1997-11-10 | 1999-09-29 | Mitsubishi Electric Corp | Control system using sequence control apparatus,sequence control apparatus,and method of controlling transmission and reception of signals by control system |
JP2007318996A (en) * | 2001-01-18 | 2007-12-06 | Ngk Insulators Ltd | Piezoelectric/electrostrictive device and method for producing same |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58174854A (en) * | 1982-01-21 | 1983-10-13 | ワトソン・インダストリ−ズ・インコ−ポレ−テツド | Angle rate sensor device |
JPS6047913A (en) * | 1983-08-26 | 1985-03-15 | Yokogawa Hokushin Electric Corp | Measuring apparatus of angular velocity and acceleration |
JPS6049215A (en) * | 1983-08-30 | 1985-03-18 | Jeco Co Ltd | Angular velocity sensor |
-
1985
- 1985-07-12 JP JP15447485A patent/JPH07101176B2/en not_active Expired - Lifetime
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58174854A (en) * | 1982-01-21 | 1983-10-13 | ワトソン・インダストリ−ズ・インコ−ポレ−テツド | Angle rate sensor device |
JPS6047913A (en) * | 1983-08-26 | 1985-03-15 | Yokogawa Hokushin Electric Corp | Measuring apparatus of angular velocity and acceleration |
JPS6049215A (en) * | 1983-08-30 | 1985-03-18 | Jeco Co Ltd | Angular velocity sensor |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63181911U (en) * | 1987-05-15 | 1988-11-24 | ||
JPS63290911A (en) * | 1987-05-22 | 1988-11-28 | Matsushita Electric Ind Co Ltd | Angular speed sensor |
JPH0613971B2 (en) * | 1987-05-22 | 1994-02-23 | 松下電器産業株式会社 | Angular velocity sensor |
US5445025A (en) * | 1993-02-03 | 1995-08-29 | Matsushita Electric Industrial Co., Ltd. | Angular velocity sensor having a balanced tuning fork structure and the method of manufacture |
US5447066A (en) * | 1993-09-01 | 1995-09-05 | Matsushita Electric Industrial Co. Ltd. | Angular velocity sensor having a tuning fork construction and its method of manufacture |
GB2335771A (en) * | 1997-11-10 | 1999-09-29 | Mitsubishi Electric Corp | Control system using sequence control apparatus,sequence control apparatus,and method of controlling transmission and reception of signals by control system |
JP2007318996A (en) * | 2001-01-18 | 2007-12-06 | Ngk Insulators Ltd | Piezoelectric/electrostrictive device and method for producing same |
Also Published As
Publication number | Publication date |
---|---|
JPH07101176B2 (en) | 1995-11-01 |
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