JPS6328616A - Molding equipment - Google Patents

Molding equipment

Info

Publication number
JPS6328616A
JPS6328616A JP17167086A JP17167086A JPS6328616A JP S6328616 A JPS6328616 A JP S6328616A JP 17167086 A JP17167086 A JP 17167086A JP 17167086 A JP17167086 A JP 17167086A JP S6328616 A JPS6328616 A JP S6328616A
Authority
JP
Japan
Prior art keywords
resin
pots
pot
cavities
another
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17167086A
Other languages
Japanese (ja)
Other versions
JPH0729326B2 (en
Inventor
Akihiko Kameoka
昭彦 亀岡
Fujio Ito
富士夫 伊藤
Kunihiko Nishi
邦彦 西
Katsutada Tabata
田畑 克糺
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Microcomputer System Ltd
Hitachi Ltd
Original Assignee
Hitachi Ltd
Hitachi Microcomputer Engineering Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd, Hitachi Microcomputer Engineering Ltd filed Critical Hitachi Ltd
Priority to JP61171670A priority Critical patent/JPH0729326B2/en
Publication of JPS6328616A publication Critical patent/JPS6328616A/en
Publication of JPH0729326B2 publication Critical patent/JPH0729326B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C45/00Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
    • B29C45/02Transfer moulding, i.e. transferring the required volume of moulding material by a plunger from a "shot" cavity into a mould cavity
    • B29C45/021Plunger drives; Pressure equalizing means for a plurality of transfer plungers

Abstract

PURPOSE:To uniformize the quality of molded products by uniformize the pressure of resin sent under pressure from pots to respective cavities by a method wherein a plurality of pots are connected to one another by communicating passages. CONSTITUTION:The cylinders 6, 6... of a plurality of pots 4, 4... are connected to one another by communicating passages 10. Resin tablets R are charged in the pots 4, 4... and respective plungers 7, 7... are simultaneously driven by a driving mechanism 8. The resin tablet R in each pot 4 is pressed by the plunger 7 and sent under pressure through a runner 5 to each cavity 3. In this time, because the interiors of the cylinders 6, 6... of a plurality of the pots 4, 4... are connected to one another by the communicating passage 10, the resins in the respective pots 4 uniformly flow through the communicating passages 10, even if the weights of the respective resin tablets R and the pressing force applied to the tablets differ from one another, resulting in uniformizing the resin in the respective cavities 3 and consequently obtaining molded products having uniform quality.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は成形装置に関し、特に複数個のタブレット押圧
用のポ・ノドを有するトランスファモールド装置に適用
して好適な成形装置に関するものである。
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a molding device, and particularly to a molding device suitable for application to a transfer molding device having a plurality of tablet pressing ports.

〔従来の技術〕[Conventional technology]

一般に半導体装置のパッケージとしてレジンモールド構
造が採用されており、このパッケージはトランスファモ
ールド装置等を用いた成形方法によって形成されている
。従来、この種のモールド装置では、複数個のキャビテ
ィにランナを通して連通する単一のポットを設け、この
ポット内にレジンタブレットを投入してこれをプランジ
ャで押圧し、レジンをランナを通して各キャビティに圧
送する構成がとられている。
Generally, a resin mold structure is adopted as a package for a semiconductor device, and this package is formed by a molding method using a transfer molding device or the like. Conventionally, this type of molding equipment has a single pot that communicates with multiple cavities through a runner, and a resin tablet is placed in this pot and pressed with a plunger, and the resin is forced through the runner and into each cavity. The system is configured to do this.

しかしながら、この成形装置では、ポットから各キャビ
ティに到るランナが長くなり、このランナに停留したレ
ジンが無駄になってレジンの歩留を低下させ、半導体装
置のコスト高を招(原因になっている。
However, in this molding equipment, the runners from the pot to each cavity are long, and the resin that remains on these runners is wasted, reducing the resin yield and causing an increase in the cost of semiconductor devices. There is.

このため、近年では一の成形装置に複数個のポットを配
設してこれらポットで担当するキャビテイ数を低減し、
各キャビティと各ポットとを連通ずるランナの長さを短
か(してレジンの無駄を低減するようにした成形装置が
提案されるに到っている。
For this reason, in recent years, multiple pots have been installed in one molding device to reduce the number of cavities handled by these pots.
Molding apparatuses have been proposed in which the length of the runner that communicates between each cavity and each pot is shortened (by which the waste of resin is reduced).

〔発明が解決しようとする問題点〕[Problem that the invention seeks to solve]

前述した複数個のポットを有する成形装置では、構造の
簡易化を図るために複数個のポットに対応して設けたプ
ランジャ゛を同一の機構で押圧駆動させる構成が採られ
ている。すなわち、各ポット内に投入されたレジンを各
プランジャにおいて同時に押圧して各キャビティへのレ
ジンの圧送を行っている。
In order to simplify the structure of the above-mentioned molding apparatus having a plurality of pots, a configuration is adopted in which the plungers provided corresponding to the plurality of pots are pressed and driven by the same mechanism. That is, the resin put into each pot is simultaneously pressed by each plunger to force-feed the resin to each cavity.

このため、各ポットに投入するレジンタブレフトに重量
(体積)の差があると、各ポット内でのレジンタブレッ
トの圧縮率が相違され、これが各ポットにおいて押圧す
るレジン圧力の差になって現れる。
For this reason, if there is a difference in weight (volume) of the resin tablets put into each pot, the compression ratio of the resin tablets in each pot will be different, and this will appear as a difference in the pressure of the resin pressed in each pot. .

したがって、同じ成形装置でも各キャビティにおけるレ
ジンモールド圧力が相違され、モールド製品の品質のバ
ラツキを生じたり、場合によっては一部にモールド不良
が発生する等の不具合が生じることになる。
Therefore, even in the same molding apparatus, the resin mold pressure in each cavity is different, leading to variations in the quality of molded products and, depending on the case, problems such as mold defects occurring in some parts.

なお、複数個のレジンタブレットの重量が全て均一とな
るように製造やその管理を行うことは不可能に近いのが
実情である。
The reality is that it is almost impossible to manufacture and manage a plurality of resin tablets so that they all have the same weight.

本発明の目的は、各キャビティにおけるレジン圧力の均
一化を図り、モールド製品の品質の均−化及びその向上
を行うことのできる成形装置を提供することにある。
SUMMARY OF THE INVENTION An object of the present invention is to provide a molding apparatus that can equalize the resin pressure in each cavity and can equalize and improve the quality of molded products.

本発明の前記ならびにそのほかの目的と新規な特徴は、
本明細書の記述および添付図面からあきらかになるであ
ろう。
The above and other objects and novel features of the present invention include:
It will become clear from the description of this specification and the accompanying drawings.

〔問題点を解決するための手段〕[Means for solving problems]

本願において開示される発明のうち代表的なものの概要
を簡単に説明すれば、下記のとおりである。
A brief overview of typical inventions disclosed in this application is as follows.

すなわち、複数個のキャビティにランナで接続した複数
個のポットにこれらポットを相互に連通ずる連通路を開
設し、各ポットにおいて押圧されるレジンがこの連通路
を通して相互に連通されるような構成としたものである
That is, a plurality of pots connected to a plurality of cavities with runners are provided with a communication path that communicates these pots with each other, and the resin pressed in each pot is communicated with each other through this communication path. This is what I did.

〔作用〕[Effect]

上記した手段によれば、各ポットにおいて押圧されたレ
ジンは、連通路を通して相互に連通されるため、各レジ
ンの押圧力はこの連通路を通して平均化され、各ポット
から夫々が担当するキャビティに圧送されるレジンの圧
力の均一化を図ることができる。
According to the above-mentioned means, the resins pressed in each pot are communicated with each other through the communication path, so the pressing force of each resin is averaged through the communication path, and the resin is pumped from each pot to the cavity it is in charge of. The pressure of the resin applied can be made uniform.

〔実施例〕〔Example〕

第1図及び第2図は本発明の一実施例の平面図及びその
■■線に沿う断面図である。
FIGS. 1 and 2 are a plan view and a sectional view taken along line 1 and 2 of an embodiment of the present invention.

これらの図において、成形装置は、下型1と上型2とで
構成しており、これら上型1と下型2の界面には多数個
のキャビティ3を形成している。
In these figures, the molding apparatus is composed of a lower mold 1 and an upper mold 2, and a large number of cavities 3 are formed at the interface between the upper mold 1 and the lower mold 2.

また、前記下型1にはこれらキャビティ3を複数のグル
ープに分け、各グループには夫々ポット4を配設し、各
ポット4が夫々所定数のキャビティ3を担当するように
構成している。そして、前記各グループ毎に複数個のキ
ャビティ3とポット4とを夫々ランナ5で連通し、ポッ
ト4で押圧されたレジンがランナ5を通して各キャビテ
ィ3に圧送されるように構成していることは言うまでも
ない。
Further, the cavities 3 are divided into a plurality of groups in the lower mold 1, and each group is provided with a pot 4, so that each pot 4 is in charge of a predetermined number of cavities 3. The plurality of cavities 3 and pots 4 for each group are communicated with each other by runners 5, and the resin pressed by the pots 4 is force-fed to each cavity 3 through the runners 5. Needless to say.

前記ポット4は、内部にレジンタブレットを投入可能な
シリンダ6と、このシリンダ6内で押圧動作されるプラ
ンジャ7とで構成している。そして、各プランジャ7は
詳細を省略する駆動機構8に夫々連結し、この駆動機構
8の動作によって全てのプランジャ7が同時に押圧動作
されるように構成している。そして、前記複数のポット
4のシリンダ6には側壁一部に開口9を設け、これら開
口9に連通ずる連通路10によって前記各ポット4のシ
リンダ6内を相互に連通させている。
The pot 4 is composed of a cylinder 6 into which a resin tablet can be placed, and a plunger 7 that is pressed inside the cylinder 6. Each plunger 7 is connected to a drive mechanism 8 (details of which will be omitted), and the structure is such that all the plungers 7 are simultaneously pressed by the operation of the drive mechanism 8. Openings 9 are provided in part of the side walls of the cylinders 6 of the plurality of pots 4, and the insides of the cylinders 6 of the respective pots 4 are communicated with each other through communication passages 10 communicating with these openings 9.

この構成によれば、各ポット4にレジンタブレソI−R
を投入し、駆動機構8によって各プランジャ7を同時に
駆動させることにより、各ポット4内ではレジンタブレ
ットRがプランジャ7によって押圧され、レジンはラン
ナ5を通して各キャビティ3に圧送される。
According to this configuration, each pot 4 has a resin tab I-R.
, and the plungers 7 are simultaneously driven by the driving mechanism 8, so that the resin tablet R is pressed by the plunger 7 in each pot 4, and the resin is force-fed into each cavity 3 through the runner 5.

このとき、各ポット4のシリンダ6内部は連通路10に
よって相互に連通されているため、各レジンタブレット
Rの重量が相違してプランジャ7による押圧力が相違し
ても、各ポットのレジンは連通路10を通して流動され
各圧力を均一化させる。これにより、各ポット4及びこ
れに連通するランナ5におけるレジン圧力が全て均一化
されて各キャビティ3に圧送され、所定のモールドを実
行することになる。したがって、各キャビティ3でのレ
ジン圧力が均一化され、モールド製品の品質の均−化及
び向上を図ることができる。
At this time, since the insides of the cylinders 6 of each pot 4 are communicated with each other by the communication path 10, even if the weight of each resin tablet R is different and the pressing force by the plunger 7 is different, the resin of each pot is communicated with each other. It flows through the passage 10 to equalize each pressure. As a result, the resin pressure in each pot 4 and the runner 5 communicating therewith is all equalized, and the resin is fed under pressure to each cavity 3 to perform a predetermined molding. Therefore, the resin pressure in each cavity 3 is equalized, and the quality of the molded product can be equalized and improved.

上記した実施例によれば次の効果を得ることができる。According to the embodiment described above, the following effects can be obtained.

(1)複数個のポットを連通路を用いて相互に連通して
いるので、各ポットにおけるレジン押圧力を均一化し、
これに連通ずるランナやキャビティにおけるレジン圧力
を均一化でき、モールド製品の品質の均−化及び品質の
向上を達成できる。
(1) Since multiple pots are connected to each other using a communication path, the resin pressing force in each pot is equalized,
The resin pressure in the runners and cavities communicating with this can be made uniform, and the quality of molded products can be made uniform and improved.

(2)複数個のポットを設け、多数個のキャビティをこ
れらポットで分けてI旦当させているので、ポットとキ
ャビティを連通ずるランナを短くでき、レジンの無駄を
低減できる。
(2) Since a plurality of pots are provided and a large number of cavities are divided between these pots and used for each injection, the runner that communicates the pots and cavities can be shortened, and waste of resin can be reduced.

(3)複数個のポットにおけるプランジャを一の駆動機
構で動作してもレジン圧力を均一化でき、成形装置の構
造の簡易化を図ることができる。
(3) Even if the plungers in a plurality of pots are operated by one drive mechanism, the resin pressure can be made uniform, and the structure of the molding apparatus can be simplified.

以上本発明者によってなされた発明を実施例にもとづき
具体的に説明したが、本発明は上記実施例に限定される
ものではな(、その要旨を逸脱しない範囲で種々変更可
能であることはいうまでもない。例えば、ポットの数や
配設位置は任意に変更でき、また連通路の配設パターン
も任意に変更できる。
Although the invention made by the present inventor has been specifically explained above based on examples, the present invention is not limited to the above-mentioned examples (although it is possible to make various changes without departing from the gist of the invention). Needless to say, for example, the number of pots and their arrangement positions can be changed arbitrarily, and the arrangement pattern of communication passages can also be changed arbitrarily.

以上の説明では主として本発明者によってなされた発明
をその背景となった利用分野である半導体素子のパッケ
ージを形成するためのレジンモールドの成形装置に適用
した場合について説明したが、それに限定されるもので
はなく、種々の電子部品をモールドする場合や、通常の
モールド製品の成形の全てに通用できる。
In the above description, the invention made by the present inventor was mainly applied to a molding apparatus for a resin mold for forming a package for a semiconductor element, which is the field of application in which the invention was made, but the present invention is not limited thereto. Rather, it can be used for molding various electronic parts and for molding ordinary molded products.

〔発明の効果〕〔Effect of the invention〕

本願において開示される発明のうち代表的なものによっ
て得られる効果を簡単に説明すれば、下記のとおりであ
る。
A brief explanation of the effects obtained by typical inventions disclosed in this application is as follows.

すなわち、複数個のキャビティにランチで連通これる複
数個のポットにこれらポットを相互に連通ずる連通路を
開設し、この連通路を通して各ポットにおいて押圧され
るレジンが相互に連通されるように構成しているので、
各ポットにおいて押圧されたレジンは、連通路を通して
相互に連通されてその押圧力はこの連通路を通して平均
化され、各キャビティに圧送されるレジンの圧力の均一
化を図り、モールド製品の品質の均−化及び品質の向上
を図ることができる。
That is, a plurality of pots that can communicate with a plurality of cavities by lunch are provided with a communication path that communicates these pots with each other, and the resin pressed in each pot is configured to communicate with each other through this communication path. Because I am doing
The pressed resin in each pot is communicated with each other through a communication path, and the pressing force is averaged through this communication path, which equalizes the pressure of the resin pumped into each cavity and improves the quality of the molded product. - and improve quality.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明の一実施例の平面図、 第2図はその■■線に沿う断面図である。 l・・・下型、2・・・上型、3・・・キャビティ、4
・・・ポット、5・・・ランナ、6・・・シリンダ、7
・・・プランジャ、8・・・駆動機構、9・・・開口、
10・・・連通路、R・・・レジンタブレット。 第  1  図 第  2  図
FIG. 1 is a plan view of an embodiment of the present invention, and FIG. 2 is a cross-sectional view taken along line ■■■. l...lower mold, 2...upper mold, 3...cavity, 4
...Pot, 5...Runner, 6...Cylinder, 7
... Plunger, 8... Drive mechanism, 9... Opening,
10...Communication path, R...Resin tablet. Figure 1 Figure 2

Claims (1)

【特許請求の範囲】 1、複数のキャビティに対して複数個のポットを配設し
、前記各キャビティをグループ分けして夫々を前記異な
るポットにランナで接続してなる成形装置において、前
記各ポットを相互に連通する連通路を開設し、各ポット
において押圧されるレジンがこの連通路を通して相互に
連通されるように構成したことを特徴とする成形装置。 2、ポットのシリンダ側壁一部を開口し、この開口を通
して連通路を接続してなる特許請求の範囲第1項記載の
成形装置。 3、各ポットのプランジャを一の駆動機構で同時に動作
し得るように構成してなる特許請求の範囲第2項記載の
成形装置。
[Scope of Claims] 1. A molding device in which a plurality of pots are arranged for a plurality of cavities, each of the cavities is divided into groups, and each of the cavities is connected to the different pots by a runner, A molding device characterized in that a communication path is established to communicate with each other, and the resin pressed in each pot is communicated with each other through this communication path. 2. The molding device according to claim 1, wherein a part of the cylinder side wall of the pot is opened, and a communicating path is connected through this opening. 3. The molding device according to claim 2, wherein the plungers of each pot are configured to be operated simultaneously by one drive mechanism.
JP61171670A 1986-07-23 1986-07-23 Molding equipment Expired - Fee Related JPH0729326B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61171670A JPH0729326B2 (en) 1986-07-23 1986-07-23 Molding equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61171670A JPH0729326B2 (en) 1986-07-23 1986-07-23 Molding equipment

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP9981496A Division JPH08267497A (en) 1996-04-22 1996-04-22 Molding method for semiconductor device

Publications (2)

Publication Number Publication Date
JPS6328616A true JPS6328616A (en) 1988-02-06
JPH0729326B2 JPH0729326B2 (en) 1995-04-05

Family

ID=15927514

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61171670A Expired - Fee Related JPH0729326B2 (en) 1986-07-23 1986-07-23 Molding equipment

Country Status (1)

Country Link
JP (1) JPH0729326B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5366368A (en) * 1991-11-14 1994-11-22 Goldstar Electron Co., Ltd. Multi-plunger manual transfer mold die

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61292330A (en) * 1985-06-20 1986-12-23 Toshiba Corp Semiconductor resin sealing device

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61292330A (en) * 1985-06-20 1986-12-23 Toshiba Corp Semiconductor resin sealing device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5366368A (en) * 1991-11-14 1994-11-22 Goldstar Electron Co., Ltd. Multi-plunger manual transfer mold die

Also Published As

Publication number Publication date
JPH0729326B2 (en) 1995-04-05

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