JPS6328615Y2 - - Google Patents
Info
- Publication number
- JPS6328615Y2 JPS6328615Y2 JP5362787U JP5362787U JPS6328615Y2 JP S6328615 Y2 JPS6328615 Y2 JP S6328615Y2 JP 5362787 U JP5362787 U JP 5362787U JP 5362787 U JP5362787 U JP 5362787U JP S6328615 Y2 JPS6328615 Y2 JP S6328615Y2
- Authority
- JP
- Japan
- Prior art keywords
- diode
- semiconductor substrate
- type
- pair
- bridge circuit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000758 substrate Substances 0.000 claims description 21
- 239000004065 semiconductor Substances 0.000 claims description 11
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 8
- 229910052710 silicon Inorganic materials 0.000 description 8
- 239000010703 silicon Substances 0.000 description 8
- 238000009529 body temperature measurement Methods 0.000 description 4
- 238000006073 displacement reaction Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 238000001727 in vivo Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
Landscapes
- Pressure Sensors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5362787U JPS6328615Y2 (ru) | 1987-04-09 | 1987-04-09 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5362787U JPS6328615Y2 (ru) | 1987-04-09 | 1987-04-09 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS62180964U JPS62180964U (ru) | 1987-11-17 |
JPS6328615Y2 true JPS6328615Y2 (ru) | 1988-08-02 |
Family
ID=30879868
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5362787U Expired JPS6328615Y2 (ru) | 1987-04-09 | 1987-04-09 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6328615Y2 (ru) |
-
1987
- 1987-04-09 JP JP5362787U patent/JPS6328615Y2/ja not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPS62180964U (ru) | 1987-11-17 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
KR100741520B1 (ko) | 다이어프램을 갖는 반도체 압력 센서 | |
EP1785711A2 (en) | Pressure and Temperature Sensing Element | |
RU167464U1 (ru) | Интегральный чувствительный элемент преобразователя давления с датчиком температуры | |
ATE434192T1 (de) | Dünnfilm-magnetfeldsensor | |
KR910001842B1 (ko) | 반도체압력센서의 브리지회로 조정방법 | |
RU174159U1 (ru) | Интегральный чувствительный элемент преобразователя давления на основе биполярного транзистора | |
US4205556A (en) | Circuitry for strain sensitive apparatus | |
JP4045979B2 (ja) | 圧力検出装置 | |
JPS6328615Y2 (ru) | ||
RU187760U1 (ru) | Интегральный высокочувствительный элемент преобразователя давления на основе биполярного транзистора | |
US4654621A (en) | Semiconductor strain measuring apparatus | |
JP2789291B2 (ja) | 圧力センサ | |
JPH041472Y2 (ru) | ||
JP2573535Y2 (ja) | 圧力センサ | |
JPH0648421Y2 (ja) | 半導体加速度センサ | |
JPS60239644A (ja) | 半導体圧力センサ | |
JPH0426051B2 (ru) | ||
JPH0560672B2 (ru) | ||
JPH0533017Y2 (ru) | ||
JPH0526774Y2 (ru) | ||
JPS60100026A (ja) | 半導体圧力センサ | |
JPH0620117Y2 (ja) | 温度検出回路 | |
JPH07117485B2 (ja) | 湿度検出装置 | |
SU1668881A1 (ru) | Устройство дл измерени давлени | |
JPH0526775Y2 (ru) |