JPS6328243U - - Google Patents
Info
- Publication number
- JPS6328243U JPS6328243U JP12237786U JP12237786U JPS6328243U JP S6328243 U JPS6328243 U JP S6328243U JP 12237786 U JP12237786 U JP 12237786U JP 12237786 U JP12237786 U JP 12237786U JP S6328243 U JPS6328243 U JP S6328243U
- Authority
- JP
- Japan
- Prior art keywords
- arc chamber
- electric field
- ion source
- extraction electrode
- electrode system
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005684 electric field Effects 0.000 claims description 3
- 238000000605 extraction Methods 0.000 claims description 3
- 150000002500 ions Chemical class 0.000 claims 3
- 230000007935 neutral effect Effects 0.000 claims 2
- 238000010884 ion-beam technique Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12237786U JPS6328243U (ko) | 1986-08-08 | 1986-08-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12237786U JPS6328243U (ko) | 1986-08-08 | 1986-08-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6328243U true JPS6328243U (ko) | 1988-02-24 |
Family
ID=31012507
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12237786U Pending JPS6328243U (ko) | 1986-08-08 | 1986-08-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6328243U (ko) |
-
1986
- 1986-08-08 JP JP12237786U patent/JPS6328243U/ja active Pending