JPS6328124U - - Google Patents
Info
- Publication number
- JPS6328124U JPS6328124U JP11937486U JP11937486U JPS6328124U JP S6328124 U JPS6328124 U JP S6328124U JP 11937486 U JP11937486 U JP 11937486U JP 11937486 U JP11937486 U JP 11937486U JP S6328124 U JPS6328124 U JP S6328124U
- Authority
- JP
- Japan
- Prior art keywords
- silicon wafers
- chemical vapor
- chemical
- vapor generator
- view
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims description 12
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 9
- 229910052710 silicon Inorganic materials 0.000 claims description 9
- 239000010703 silicon Substances 0.000 claims description 9
- 239000000126 substance Substances 0.000 claims description 9
- 238000012993 chemical processing Methods 0.000 claims description 3
- 238000012545 processing Methods 0.000 claims description 3
- 238000000034 method Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 238000001035 drying Methods 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Physical Or Chemical Processes And Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11937486U JPS6328124U (ko) | 1986-08-05 | 1986-08-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11937486U JPS6328124U (ko) | 1986-08-05 | 1986-08-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6328124U true JPS6328124U (ko) | 1988-02-24 |
Family
ID=31006687
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11937486U Pending JPS6328124U (ko) | 1986-08-05 | 1986-08-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6328124U (ko) |
-
1986
- 1986-08-05 JP JP11937486U patent/JPS6328124U/ja active Pending
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