JPS63279418A - Magnetic recording medium - Google Patents
Magnetic recording mediumInfo
- Publication number
- JPS63279418A JPS63279418A JP62115050A JP11505087A JPS63279418A JP S63279418 A JPS63279418 A JP S63279418A JP 62115050 A JP62115050 A JP 62115050A JP 11505087 A JP11505087 A JP 11505087A JP S63279418 A JPS63279418 A JP S63279418A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic
- thin film
- medium
- recording medium
- magnetic recording
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005291 magnetic effect Effects 0.000 title claims abstract description 42
- 239000010409 thin film Substances 0.000 claims abstract description 25
- 239000000696 magnetic material Substances 0.000 claims abstract description 16
- 229910001567 cementite Inorganic materials 0.000 claims abstract description 9
- 239000010936 titanium Substances 0.000 claims abstract description 8
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims abstract description 5
- 229910052719 titanium Inorganic materials 0.000 claims abstract description 5
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims abstract 3
- 229910052804 chromium Inorganic materials 0.000 claims abstract 3
- 239000011651 chromium Substances 0.000 claims abstract 3
- KSOKAHYVTMZFBJ-UHFFFAOYSA-N iron;methane Chemical compound C.[Fe].[Fe].[Fe] KSOKAHYVTMZFBJ-UHFFFAOYSA-N 0.000 claims abstract 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims abstract 2
- 229910052721 tungsten Inorganic materials 0.000 claims abstract 2
- 239000010937 tungsten Substances 0.000 claims abstract 2
- 239000003302 ferromagnetic material Substances 0.000 claims description 9
- 150000001875 compounds Chemical class 0.000 claims description 6
- 230000004907 flux Effects 0.000 abstract description 8
- 239000000758 substrate Substances 0.000 abstract description 8
- 230000005415 magnetization Effects 0.000 abstract description 6
- 239000011521 glass Substances 0.000 abstract description 5
- 238000004544 sputter deposition Methods 0.000 abstract description 3
- 230000005294 ferromagnetic effect Effects 0.000 abstract 4
- 239000010408 film Substances 0.000 abstract 1
- 239000010410 layer Substances 0.000 description 6
- 239000007769 metal material Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- UQSXHKLRYXJYBZ-UHFFFAOYSA-N Iron oxide Chemical compound [Fe]=O UQSXHKLRYXJYBZ-UHFFFAOYSA-N 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 229910001337 iron nitride Inorganic materials 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 238000000927 vapour-phase epitaxy Methods 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000018109 developmental process Effects 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 239000002023 wood Substances 0.000 description 1
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
そもそも磁気記録媒体は、その磁性層の形態により塗布
型媒体と薄膜型媒体とに大別できる。また磁性層のｉＡ
！磁性素材の面から見て、金属系磁性材からなるものと
化合物系磁性材からなるものとに分けられる。DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application Magnetic recording media can be broadly classified into coated media and thin film media depending on the form of their magnetic layers. Also, iA of the magnetic layer
! In terms of magnetic materials, they can be divided into those made of metal-based magnetic materials and those made of compound-based magnetic materials.
本発明は、化合物系磁性材からなる薄膜型の磁性層を持
つるｎ気記録媒体に関するものである。The present invention relates to an n-air recording medium having a thin film type magnetic layer made of a compound magnetic material.
従来の技術
近年に限らず磁気記録媒体の発展とはすなわち記録密度
の向上、信頼性の向上および低価格化である。さてまず
磁性層の形態については、記録密度の点で薄膜型媒体の
方が塗布型媒体より有利であるとされている。したがっ
て薄膜型媒体での塗布型媒体と同程度かそれ以上の耐久
性と低価格の実現が、強く望まれている６次に強磁性素
材については、金属系素材は一般的に磁気特性の面で酸
化物系素材より優れているが、大気中では徐々に酸化さ
れて劣化してゆく欠点を持つ。しかるに化学的に安定で
ある窒化鉄や炭化鉄は金属系素材と同程度の磁気特性を
持つとされており、しかも金属系素材よりも安価である
。そこで近年、窒化鉄や炭化鉄で薄膜型の記録媒体を実
現しようとする試みがなされている〔炭化鉄については
例えば、「化学と工業」第３８巻第７号５２７〜５３１
日シ特願昭６１−１０７９１５号 ；特願昭６２−１
９２０２号 〕。BACKGROUND OF THE INVENTION Developments in magnetic recording media, not just in recent years, have meant improved recording density, improved reliability, and lower prices. First, regarding the form of the magnetic layer, thin film media are said to be more advantageous than coated media in terms of recording density. Therefore, when it comes to sixth-order ferromagnetic materials, which are strongly desired to have durability comparable to or better than coated media at a low price, metallic materials generally have poor magnetic properties. Although it is superior to oxide materials, it has the disadvantage that it gradually oxidizes and deteriorates in the atmosphere. However, iron nitride and iron carbide, which are chemically stable, are said to have magnetic properties comparable to those of metal-based materials, and are also cheaper than metal-based materials. Therefore, in recent years, attempts have been made to realize thin-film recording media using iron nitride or iron carbide.
Japanese Patent Application No. 1983-107915; Japanese Patent Application No. 1982-1
No. 9202].
発明が解決しようとする問題点
上記のように従来の酸化鉄を主体とする塗布型媒体では
高記録密度に適せず、また金属系素材を用いた薄膜型媒
体では保護層を設ける等の特別の加工を施さなければ、
充分な信軌性を保証できるだけの耐久性がないという問
題点を有していた。Problems to be Solved by the Invention As mentioned above, conventional coated media mainly made of iron oxide are not suitable for high recording densities, and thin film media made of metallic materials require special treatment such as the provision of a protective layer. If no processing is performed,
The problem was that it was not durable enough to guarantee sufficient reliability.
本発明は上記問題点に鑑み、化学的に安定な化合物系磁
性材を用いて、より高い記録密度を備えた薄膜型磁気記
録媒体を提供するものである。In view of the above problems, the present invention provides a thin film magnetic recording medium with higher recording density using a chemically stable compound-based magnetic material.
問題点を解決するための手段
上記問題点を解決するために本発明の磁気記録媒体は、
強磁性素材として化合物系磁性材を用いた薄膜型媒体に
、下地層を設けるという構成を備えたものである。Means for Solving the Problems In order to solve the above problems, the magnetic recording medium of the present invention comprises:
This is a thin film medium using a compound magnetic material as a ferromagnetic material, and is provided with an underlayer.
作用
本発明は上記した構成によって、磁性層中の磁性体の磁
化容易方向を特定の向きに揃えて、媒体の角形比〔飽和
磁束に対する残留磁束の比〕を向上させ、媒体の記録密
度を高めることとなる。Effect of the Invention With the above-described configuration, the present invention aligns the easy magnetization direction of the magnetic material in the magnetic layer in a specific direction, improves the squareness ratio (ratio of residual magnetic flux to saturation magnetic flux) of the medium, and increases the recording density of the medium. It happens.
実施例
以下、本発明の第一の一実施例の磁気記録媒体について
表を参照しながら説明する。EXAMPLE Hereinafter, a magnetic recording medium according to a first example of the present invention will be described with reference to the table.
第 １ 表
第１表は本発明の第一の実施例における磁気記録媒体の
磁気特性を、従来の磁気記録媒体のそれと比較したもの
である。Table 1 Table 1 compares the magnetic properties of the magnetic recording medium according to the first embodiment of the present invention with those of a conventional magnetic recording medium.
従来例は、高周波プラズマ気相成長装置を用いてガラス
基板上に炭化鉄薄膜を作製したもの６本実施例は、高周
波スパッタ装置を用いてあらかじめ１０００人程度０ク
ロム薄膜を従来例とおなしガラス基板上に形成した基板
を使用したこと以外、従来例と同一の条件で作製したも
のである。In the conventional example, an iron carbide thin film was fabricated on a glass substrate using a high frequency plasma vapor phase epitaxy device.6 This example is the same as the conventional example, in which an iron carbide thin film was formed on a glass substrate using a high frequency sputtering device. It was manufactured under the same conditions as the conventional example except that the substrate formed above was used.
また本実施例の磁性薄膜を、銅のにα１（１，５４０５
１人〕線の反射強度を用いて格子定数を測定した結果が
第１図であり、従来例の測定結果が第２図である。第１
図において１のピークは、ＦｅａＣの（１２０）面、２
のピークはＣｒの（１１０）面であり、第２図において
３のピークはＦ ｅ 、Ｃの（１２１）面である。なお
第１、第２図とも、図中に示しである以外の角度での反
射強度のピークは認められなかった。In addition, the magnetic thin film of this example was coated with α1 (1,5405
FIG. 1 shows the results of measuring the lattice constant using the reflection intensity of the [one person] line, and FIG. 2 shows the measurement results of the conventional example. 1st
In the figure, peak 1 is the (120) plane of FeaC, 2
The peak 3 is the (110) plane of Cr, and the peak 3 in FIG. 2 is the (121) plane of Fe, C. In both Figures 1 and 2, no peaks of reflection intensity were observed at angles other than those shown in the figures.
以上のように本実施例によれば、強磁性素材としてＦ
ｅ ３Ｃを用いた薄膜型媒体に、下地層を設けることに
より、磁性体の結晶の磁化容易軸が薄膜の面に平行な方
向に向きを変え、角形比向上させることができる。As described above, according to this embodiment, F is used as the ferromagnetic material.
By providing an underlayer in a thin film type medium using e3C, the axis of easy magnetization of the crystal of the magnetic material changes direction in a direction parallel to the plane of the thin film, and the squareness ratio can be improved.
以下、本発明の第二の実施例の磁気記録媒体について表
を参照しながら説明する。A magnetic recording medium according to a second embodiment of the present invention will be described below with reference to the table.
第２表は本発明の第二の実施例における磁気記録媒体の
磁気特性を、従来の磁気記録媒体のそれと比較したもの
である。Table 2 compares the magnetic properties of the magnetic recording medium according to the second embodiment of the present invention with those of a conventional magnetic recording medium.
第２表
従来例は、高周波プラズマ気相成長装置を用いてガラス
基板上に炭化鉄薄膜を作製したもの。木実施例は、高周
波スパッタ装置を用いてあらかじめ１０００人程度０チ
タン薄膜を従来例と同しガラス基板上に形成した基板を
使用したこと以外、従来例と同一の条件で作製したもの
である。In the conventional example in Table 2, an iron carbide thin film was produced on a glass substrate using a high-frequency plasma vapor phase epitaxy apparatus. The wood example was produced under the same conditions as the conventional example, except that a substrate on which a titanium thin film of about 1000 titanium was previously formed on the same glass substrate as in the conventional example was used using a high-frequency sputtering device.
また、本実施例の磁性薄膜を、銅のにα１（１，５４０
５１人〕線の反射強度を用いて格子定数を測定した結果
が第３図であり、従来例の測定結果が第４図である。第
３図において６．７のピークは、それぞれＦｅａＣの（
１２０）面および（１２１）面、また４、５のピークは
それぞれＴｉの（０１０）面および（ＯＯ２）面であり
、第４図において８のピークはＦ ｅ ａ Ｃの（１２
１）面である。なお第３．第４図とも、図中に示しであ
る以外の角度での反射強度のピークは認められなかった
。Further, the magnetic thin film of this example was coated with α1 (1,540
Figure 3 shows the results of measuring the lattice constant using the reflection intensity of the [51 people] line, and Figure 4 shows the measurement results of the conventional example. In Fig. 3, the peak of 6.7 is the peak of FeaC (
120) plane and (121) plane, and the peaks 4 and 5 are the (010) plane and (OO2) plane of Ti, respectively, and the peak 8 in Fig. 4 is the (12
1) It is a surface. In addition, 3rd. In both FIG. 4, no peaks of reflection intensity were observed at angles other than those shown in the figure.
以上のように本実施例によれば、強磁性素材としてＦ
ｅ ａ Ｃを用いた薄膜型媒体に、下地層を設けること
により、磁性体の結晶の磁化容易軸が薄膜の面に平行な
方向に向きを変え、角形比向上させることができる。As described above, according to this embodiment, F is used as the ferromagnetic material.
By providing an underlayer in a thin film type medium using e a C, the axis of easy magnetization of the crystal of the magnetic material changes direction in a direction parallel to the plane of the thin film, and the squareness ratio can be improved.
なお、上記二つの実施例において強（ｎ性材料はＦｅ５
Ｃとしたが、強磁性材料はＦｅ５Ｃ２等の他の炭化鉄と
しても、はぼ同様の結果が得られている。In addition, in the above two examples, the strong (n-type material is Fe5
Although C was used as the ferromagnetic material, similar results have been obtained using other iron carbide such as Fe5C2.
発明の効果
以上のように本発明は、強磁性素材として化合物系磁性
材を用いた薄膜型媒体に、下地層を設けることにより、
磁性層中の磁性体の磁化容易方向を特定の向きに揃えて
、媒体の角形比〔飽和磁束に対する残留磁束の比〕を向
上させ、媒体の記録密度を高めることができる。Effects of the Invention As described above, the present invention provides a thin film medium using a compound magnetic material as a ferromagnetic material by providing an underlayer.
By aligning the easy magnetization direction of the magnetic material in the magnetic layer to a specific direction, the squareness ratio (ratio of residual magnetic flux to saturation magnetic flux) of the medium can be improved, and the recording density of the medium can be increased.
第１図は本発明の第一の実施例における磁性薄膜の格子
定数を測定した結果を示す強度図、第３図は本発明の第
二の実施例における磁性薄膜の格子定数を測定した結果
を示す強度図、第２図、第４図は従来の磁性薄膜の格子
定数を測定した結果を示す強度図である。
■・・・・・・Ｆｅ５Ｃの（１２０）面、２・・・・・
・Ｃｒの（１１０）面、３・・・・・・Ｆｅ３゜Ｃの（
１２１）面、４・・・・・・Ｔｉの（０１０）面、５・
・・・・・Ｔｉの（ＯＯ２）面、６・・・・・・Ｆｅ５
Ｃの（１２０）面、７・・・・・・Ｆｅ５Ｃの（１２１
）面、８−−−・Ｆｅ５Ｃの（１２１）面。
代理人の氏名 弁理士 中尾敏男 はが１名第１１！１FIG. 1 is an intensity diagram showing the results of measuring the lattice constant of the magnetic thin film in the first embodiment of the present invention, and FIG. 3 shows the results of measuring the lattice constant of the magnetic thin film in the second embodiment of the present invention. The intensity diagrams shown in FIGS. 2 and 4 are intensity diagrams showing the results of measuring the lattice constants of conventional magnetic thin films. ■・・・・・・(120) plane of Fe5C, 2・・・・・・
・(110) plane of Cr, 3...Fe3°C (
121) plane, 4... Ti (010) plane, 5.
...Ti (OO2) plane, 6...Fe5
(120) plane of C, 7... (121) of Fe5C
) plane, (121) plane of 8----Fe5C. Name of agent: Patent attorney Toshio Nakao Haga 1 person No. 11!1
Claims (6)
媒体に、下地層を設けたことを特徴とする磁気記録媒体
。(1) A magnetic recording medium characterized in that a thin film type medium using a compound magnetic material as a ferromagnetic material is provided with an underlayer.
特徴とする特許請求の範囲第（１）項記載の磁気記録媒
体。(2) The magnetic recording medium according to claim (1), wherein the ferromagnetic material is iron carbide [Fe_3C].
とを特徴とする特許請求の範囲第（１）項記載の磁気記
録媒体。(3) The magnetic recording medium according to claim (1), wherein the ferromagnetic material is iron carbide [Fe_5C_2].
の範囲第（１）項記載の磁気記録媒体。(4) The magnetic recording medium according to claim (1), wherein the underlayer is made of chromium.
の範囲第（１）項記載の磁気記録媒体。(5) The magnetic recording medium according to claim (1), wherein the underlayer is made of titanium.
許請求の範囲第（１）項記載の磁気記録媒体。(6) The magnetic recording medium according to claim (1), wherein the underlayer is made of tungsten.
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62115050A JPS63279418A (en) | 1987-05-12 | 1987-05-12 | Magnetic recording medium |
| KR1019880005455A KR920008222B1 (en) | 1987-05-12 | 1988-05-11 | Iron carbide thin film magnetic recording medium |
| US07/193,278 US5006395A (en) | 1987-05-12 | 1988-05-11 | Iron carbide thin film magnetic recording medium |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62115050A JPS63279418A (en) | 1987-05-12 | 1987-05-12 | Magnetic recording medium |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63279418A true JPS63279418A (en) | 1988-11-16 |
Family
ID=14652941
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62115050A Pending JPS63279418A (en) | 1987-05-12 | 1987-05-12 | Magnetic recording medium |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63279418A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6460814A (en) * | 1987-08-31 | 1989-03-07 | Nec Corp | Magnetic memory body |
-
1987
- 1987-05-12 JP JP62115050A patent/JPS63279418A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6460814A (en) * | 1987-08-31 | 1989-03-07 | Nec Corp | Magnetic memory body |
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