JPS63276703A - Magnetic head - Google Patents
Magnetic headInfo
- Publication number
- JPS63276703A JPS63276703A JP62110516A JP11051687A JPS63276703A JP S63276703 A JPS63276703 A JP S63276703A JP 62110516 A JP62110516 A JP 62110516A JP 11051687 A JP11051687 A JP 11051687A JP S63276703 A JPS63276703 A JP S63276703A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic
- superconductor
- film
- magnetic pole
- magnetic head
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002887 superconductor Substances 0.000 claims abstract description 52
- 239000004020 conductor Substances 0.000 claims abstract description 7
- 229910052802 copper Inorganic materials 0.000 claims description 3
- 230000001681 protective effect Effects 0.000 claims description 2
- 230000001939 inductive effect Effects 0.000 claims 1
- 230000004907 flux Effects 0.000 abstract description 11
- 229920001721 polyimide Polymers 0.000 abstract description 7
- 239000009719 polyimide resin Substances 0.000 abstract description 7
- 238000004544 sputter deposition Methods 0.000 abstract description 7
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 abstract description 5
- 229910052593 corundum Inorganic materials 0.000 abstract description 5
- 239000000758 substrate Substances 0.000 abstract description 5
- 229910001845 yogo sapphire Inorganic materials 0.000 abstract description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract description 4
- 229910003271 Ni-Fe Inorganic materials 0.000 abstract description 3
- 239000011248 coating agent Substances 0.000 abstract description 2
- 238000000576 coating method Methods 0.000 abstract description 2
- 229910052681 coesite Inorganic materials 0.000 abstract description 2
- 239000012141 concentrate Substances 0.000 abstract description 2
- 229910052906 cristobalite Inorganic materials 0.000 abstract description 2
- 239000000377 silicon dioxide Substances 0.000 abstract description 2
- 235000012239 silicon dioxide Nutrition 0.000 abstract description 2
- 229910052682 stishovite Inorganic materials 0.000 abstract description 2
- 229910052905 tridymite Inorganic materials 0.000 abstract description 2
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Inorganic materials [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 abstract 1
- 239000010408 film Substances 0.000 description 42
- 239000010409 thin film Substances 0.000 description 14
- 229910045601 alloy Inorganic materials 0.000 description 8
- 239000000956 alloy Substances 0.000 description 8
- 229910000859 α-Fe Inorganic materials 0.000 description 8
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 6
- 238000004804 winding Methods 0.000 description 6
- 239000002131 composite material Substances 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 229910017112 Fe—C Inorganic materials 0.000 description 3
- 150000001875 compounds Chemical class 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000000696 magnetic material Substances 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 229910020018 Nb Zr Inorganic materials 0.000 description 2
- 239000004840 adhesive resin Substances 0.000 description 2
- 229920006223 adhesive resin Polymers 0.000 description 2
- 230000006378 damage Effects 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 229910001092 metal group alloy Inorganic materials 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 229910000889 permalloy Inorganic materials 0.000 description 2
- 229910000702 sendust Inorganic materials 0.000 description 2
- 229910018605 Ni—Zn Inorganic materials 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Landscapes
- Measuring Magnetic Variables (AREA)
- Magnetic Heads (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、高密度磁気記録に適する磁気ヘッドに係り、
特に記録能力がすぐれ、高線記録密度が達成できる磁気
ヘッドに関する。[Detailed Description of the Invention] [Field of Industrial Application] The present invention relates to a magnetic head suitable for high-density magnetic recording,
In particular, the present invention relates to a magnetic head that has excellent recording ability and can achieve high linear recording density.
近年の磁気記録の高密度化、高性能化は著しい。 In recent years, the density and performance of magnetic recording has increased significantly.
ｍ位ビットあたりの面積の減少に伴って、記録再生に使
われる磁気ヘッドの寸法の縮小化が図られてきている。As the area per m-bit decreases, efforts are being made to reduce the size of magnetic heads used for recording and reproduction.
第６図に、高密度磁気記録に適用される薄膜磁気ヘッド
ａ−例を示す。薄膜磁気ヘッドは、ＺｒＯ２，Ａｌ２０
３．ＴｉＣ等の非磁性基板上６１に、Ｎ ｉ −Ｆ ｅ
、 ＣｏＴａ Ｚｒ非質膜等の下部磁極６２を形成し
、ＳｉＯ□、Ａｌ２２０３のギャップ層６３、Ｃｕ ｇ
Ａ Ｑ等の導体コイル６４゜ＰＩＱ（日立化成社製ポ
リイミド系樹脂の商標名）等のポリイミド系樹脂からな
る有機絶縁層６５Ｎ １−Ｆｅ、ＣｏＴａＺｒ非晶質膜
等の上部磁極からなっている。磁気ヘッドでは、高トラ
ツク密度化に対して、トラック幅の縮小化、高線記録密
度化に対し磁極のボール長の縮小化で対応してきている
。FIG. 6 shows an example of a thin film magnetic head applied to high-density magnetic recording. The thin film magnetic head is made of ZrO2, Al20
3. On a non-magnetic substrate 61 such as TiC, N i -F e
, a lower magnetic pole 62 such as a CoTa Zr non-quality film is formed, a gap layer 63 of SiO□, Al2203, Cu g
A conductor coil 64° such as AQ; an organic insulating layer 65N made of polyimide resin such as PIQ (trade name of polyimide resin manufactured by Hitachi Chemical Co., Ltd.); and an upper magnetic pole made of 1-Fe, CoTaZr amorphous film, etc. In magnetic heads, the track width has been reduced to accommodate higher track densities, and the ball length of the magnetic pole has been reduced to accommodate higher linear recording densities.
このように、磁極の体積が小さくな、ると、磁極の全体
積に対する表面積の割合が大きくなり、磁極先端以外か
ら磁束がもれやす＜、（１）磁極先端部で効率的に磁束
が集中せず磁気ヘッドの記録能力が低下するという問題
があった。In this way, when the volume of the magnetic pole becomes smaller, the ratio of the surface area to the total area of the magnetic pole increases, and magnetic flux tends to leak from areas other than the magnetic pole tip. (1) Magnetic flux is efficiently concentrated at the magnetic pole tip. However, there was a problem in that the recording ability of the magnetic head deteriorated.
本発明の目的は、磁極先端以外からの磁束のもれを防ぎ
磁極先端に磁束を集中させ、記録能力がすぐれた磁気ヘ
ッドを提供することにある。An object of the present invention is to provide a magnetic head that prevents leakage of magnetic flux from sources other than the tip of the magnetic pole, concentrates the magnetic flux at the tip of the magnetic pole, and has excellent recording performance.
上記目的は、磁気ヘッドの磁極コアの媒体対向面を除く
、少くとも一部の面を超伝導体膜で被覆することにより
、達成される。The above object is achieved by coating at least a part of the surface of the magnetic pole core of the magnetic head, excluding the medium facing surface, with a superconductor film.
磁極の一部を被覆した超伝導体膜は、磁束を磁極内部に
閉じ込めるように動作する。それによって、磁束は磁極
先端に効率よく集中することができる。The superconductor film covering part of the magnetic pole operates to confine the magnetic flux inside the magnetic pole. Thereby, magnetic flux can be efficiently concentrated at the tip of the magnetic pole.
以下、本発明を実施により詳細に説明する。 Hereinafter, the present invention will be explained in detail by implementation.
実施例１゜
第１図に、本発明による薄膜磁気ヘッドの断面図を示す
。本発明の薄膜磁気ヘッドは、ＺｒＯ２゜Ａｌ２０３
ＴｉＣ等の非磁性基板１１上に、Ｂａ（１，Ｂ Ｙｏ
、４ＣｕＯ３。Embodiment 1 FIG. 1 shows a sectional view of a thin film magnetic head according to the present invention. The thin film magnetic head of the present invention is made of ZrO2゜Al203
Ba (1, B Yo
, 4CuO3.
（Ｂａ□、Ｂ Ｙ。、 ４ ） ｓ Ｃｕ ２０７ ｙ
（Ｓｒｏ、 Ｏ７５Ｌａ□、 ｇ ２ Ｓ）、！１ Ｃ
ｕＯ４等の超伝導体膜１２をスパッタリング法によって
形成し。(Ba□, B Y., 4) s Cu 207 y
(Sro, O75La□, g 2 S),! 1C
A superconductor film 12 of uO4 or the like is formed by sputtering.
Ｎｉ−Ｆｅ、ＣｏＴａＺｒ非晶質膜等の下部磁極１３を
形成する。下部磁極の上にＳｉｎ、ＳｉＯ□。A lower magnetic pole 13 of Ni--Fe, CoTaZr amorphous film, etc. is formed. Sin, SiO□ on the bottom magnetic pole.
Ａ Ｑ ２０３等からなる絶縁膜１４を形成する。さら
に、Ｃｕ、Ａｌ等からなる導体コイル１５、ＰＩＱ （
日立化成社製ポリイミド系樹脂の商標名）等のポリイミ
ド系樹脂からなる有機絶縁層１６、Ｎ ｉ −Ｆ ｅ
、 ＣｏＴａ Ｚｒ非晶質膜等の上部磁極１７を形成す
る。さらにその上に、
（Ｂａｏ、 Ｂ Ｙ□、 ４ ） ＣｕＯ３゜（Ｂａａ
、 ｅ Ｙｏ、 ａ ） ｓ Ｃｕ ２０７ ｖ（Ｓｒ
□、 ０７６ Ｌａｏ、 ｓ ２ ｓＬ ＣｕＯ４等の
超伝導体膜１８をスパッタリング法によって形成した。An insulating film 14 made of AQ 203 or the like is formed. Furthermore, a conductor coil 15 made of Cu, Al, etc., PIQ (
An organic insulating layer 16 made of polyimide resin (trade name of polyimide resin manufactured by Hitachi Chemical Co., Ltd.), N i -F e
, an upper magnetic pole 17 made of a CoTaZr amorphous film or the like is formed. Furthermore, on top of that, (Bao, B Y□, 4) CuO3゜(Baa
, e Yo, a ) s Cu 207 v (Sr
A superconductor film 18 made of □, 076 Lao, s 2 sL CuO4, etc. was formed by a sputtering method.
薄膜ヘッドの作製は、スパッタリング法、蒸着法で膜形
成を行ない、バターニングは、公知のホトリソグラフィ
技術を用いておこなった。なお、下部磁極１３と超伝導
体膜１２との間、および上部磁極１７と超伝導体膜１８
との間に、Ａｌ２０３゜５ｉ０２．Ｓｉｎ、Ａｌ２．Ｃ
ｕ等からなる非磁性膜を膜厚３ｎｍ以上１１００ｎ以下
形成することは、磁極磁性体と超伝導体とが直接接触せ
ず、超伝導体膜の超伝導性が全く破壊されないために、
より望ましい。超伝導体膜の膜厚は、１１００ｎ以上あ
れば充分である。The thin film head was manufactured by forming a film by sputtering or vapor deposition, and patterning was performed by using a known photolithography technique. Note that between the lower magnetic pole 13 and the superconductor film 12 and between the upper magnetic pole 17 and the superconductor film 18
Between Al203°5i02. Sin, Al2. C
Forming a non-magnetic film made of u, etc. with a thickness of 3 nm or more and 1100 nm or less is because the pole magnetic material and the superconductor do not come into direct contact and the superconductivity of the superconductor film is not destroyed at all.
More desirable. It is sufficient that the thickness of the superconductor film is 1100 nm or more.
本発明のヘッドを液体窒素温度に冷却して記録再生特性
を測定した。第３図に示した薄膜磁気ヘッドと比較した
時、ＣＯ−γＦｅ２Ｏ３の塗布媒体（保磁力５０００ａ
、膜厚０．８μｍ）では０／Ｗ特性で１本発明のヘッド
は８ｄＢの向上を示しており記録能力の向上が図れるこ
とを確認した。The head of the present invention was cooled to liquid nitrogen temperature and its recording and reproducing characteristics were measured. When compared with the thin film magnetic head shown in FIG.
, a film thickness of 0.8 μm), the head of the present invention showed an improvement of 8 dB in O/W characteristics, confirming that the recording performance could be improved.
実施例２゜
第２図に、本発明による薄膜磁気ヘッドの別の実施例を
示す。本発明による薄膜磁気ヘッドは、ＺｒＯ２，Ａｌ
２０３−ＴｉＣ等の非磁性体基板２１上に、超伝導体膜
２２をスパッタリング法によって形成し、Ｎｉ−Ｆｅ、
ＣｏＴａＺｒ非晶質膜等の下部磁極２３を形成する。さ
らに、ギャップ層を超伝導膜２４で形成する。また、Ｃ
ｕ 、 Ａ Ｑ等からなる導体コイル２５、ＰＩＱ （
日立化成社製ポリイミド系樹脂の商標名）等のポリイミ
ド系樹脂からなる有機絶縁層２６を形成した後、超伝導
体膜２７によって磁気シールドを形成する。さらに、上
部磁極２８を形成した後、超伝導体膜２８による保思膜
を形成する。超伝導体膜は、Ｂａ□、Ｂ Ｙｏ、４ Ｃ
ｕＯ３Ｉ
（Ｂａｏ、 ａ Ｙｏ、 ４ ） ３ Ｃｕ ２０７゜
（ＳｒＯ，Ｏ？ ５ Ｌａｏ、 ９２６）２ ＣｕＯ４
等の化合物をスパッタリング法によって形成した。また
、超伝導体膜２２と下部磁極２３、下部磁極２３と超伝
導体膜２４、超伝導体膜２７と上部磁極２８、上部磁極
２８と超伝導体膜２９との間には、超伝導体膜の超伝導
性を破壊しないことを目的として、Ａｌ２０３．ＳｉＯ
，ＳｉＯ２、Ａ Ｑ ｔ Ｃｕ等からなる非磁性体膜を
膜厚３ｎｍ以上、１１００ｎ以下形成することが望まし
い。本ヘッドにおいても。Embodiment 2 FIG. 2 shows another embodiment of the thin film magnetic head according to the present invention. The thin film magnetic head according to the present invention uses ZrO2, Al
A superconductor film 22 is formed on a non-magnetic substrate 21 such as 203-TiC by sputtering, and
A lower magnetic pole 23 such as a CoTaZr amorphous film is formed. Furthermore, a gap layer is formed using a superconducting film 24. Also, C
A conductor coil 25 consisting of u, AQ, etc., PIQ (
After forming an organic insulating layer 26 made of polyimide resin (trade name of polyimide resin manufactured by Hitachi Chemical Co., Ltd.), a magnetic shield is formed with a superconductor film 27. Furthermore, after forming the upper magnetic pole 28, a protective film made of the superconductor film 28 is formed. The superconductor film consists of Ba□, B Yo, 4 C
uO3I (Bao, a Yo, 4) 3 Cu 207° (SrO, O? 5 Lao, 926) 2 CuO4
These compounds were formed by sputtering method. Furthermore, there are superconductors between the superconductor film 22 and the lower magnetic pole 23, between the lower magnetic pole 23 and the superconductor film 24, between the superconductor film 27 and the upper magnetic pole 28, and between the upper magnetic pole 28 and the superconductor film 29. For the purpose of not destroying the superconductivity of the film, Al203. SiO
, SiO2, A Q t Cu, etc., with a thickness of 3 nm or more and 1100 nm or less. Even in this head.
実施例１のヘッドと同等の効果があった。The head of Example 1 had the same effect.
実施例３゜
第３図に、本発明による単磁極型垂直磁気記録用ヘッド
の実施例を示す、単磁極型垂直磁気記録用ヘッドの基本
構造は、第７回日本応用磁気学会講演概要集Ｐ、１０９
に記述されているように、公知のものである。本発明の
ヘッドでは、Ｇ ｏ −Ｚｒ非晶質膜、Ｆｅ−ＣとＮ
ｉ −Ｆ ｅ多層膜からなる主磁極３と、Ｍ ｎ −Ｚ
ｎフェライトから成る補助磁極３２、主磁極の一部を
挟み込む構造の超伝導体３３、Ｍ ｎ −Ｚ ｎフェラ
イトからなる主磁極補助部３４９巻線コイル３５、主磁
極３１と主磁極補助部３６を固定するための接着樹脂層
３６から成っている。本ヘッドにおいても、実施例１と
同様の記録能力の向上をはかることができた。Embodiment 3 FIG. 3 shows an example of a single-pole perpendicular magnetic recording head according to the present invention. , 109
This is a well-known method as described in . In the head of the present invention, G o -Zr amorphous film, Fe-C and N
A main magnetic pole 3 made of an i-F e multilayer film, and a M n-Z
An auxiliary magnetic pole 32 made of n-ferrite, a superconductor 33 having a structure that sandwiches a part of the main magnetic pole, a main magnetic pole auxiliary part 349 made of Mn-Zn ferrite, a winding coil 35, a main magnetic pole 31 and a main magnetic pole auxiliary part 36. It consists of an adhesive resin layer 36 for fixing. In this head as well, it was possible to improve the recording performance similar to that in Example 1.
実施例４゜
第４図に、本発明による複合型磁気ヘッドの構造を示し
ている。この複合型磁気ヘッドの基本構造は特開昭５８
−１５５５１３に示されたもので、公知である。本発明
による複合型磁気ヘッドは磁路をＭｎ−Ｚｎフェライト
、Ｎｉ−Ｚｎフェライト等のフェライト４４で構成し、
フェライトよりも飽和磁束密度の高い金属磁性体膜によ
って磁気コア４１を形成した。金属磁性体としては、Ｆ
ｅ−３ｉ （Ｓ ｉ ６．５重量％） 、Ｆａ−Ａｌ
−８ｉ合金（センダスト）、Ｎｉ−Ｆｅ合金（パーマロ
イ）、Ｆｅ−Ｃ等で代表される結晶質合金であり、非晶
質合金としては、Ｃｏ−Ｎｂ−Ｚｒ、Ｇｏ −Ｔａ−Ｚ
ｒ等のメタル−メタル系合金が用いられる。さらに、超
伝導体４３によって、磁気コア４１の一部を被覆する。Embodiment 4 FIG. 4 shows the structure of a composite magnetic head according to the present invention. The basic structure of this composite magnetic head was published in Japanese Unexamined Patent Publication No. 58
-155513 and is publicly known. The composite magnetic head according to the present invention has a magnetic path made of ferrite 44 such as Mn-Zn ferrite or Ni-Zn ferrite,
The magnetic core 41 was formed of a metal magnetic film having a higher saturation magnetic flux density than ferrite. As a metal magnetic material, F
e-3i (S i 6.5% by weight), Fa-Al
-8i alloy (sendust), Ni-Fe alloy (permalloy), Fe-C, etc. are crystalline alloys, and amorphous alloys include Co-Nb-Zr, Go-Ta-Z
A metal-metal alloy such as r is used. Further, a part of the magnetic core 41 is covered with a superconductor 43.
ギャップ４２は、５ｉ０２．Ａｌ２０３等の絶縁膜で形
成してもよいが、超伝導体膜で形成した方がより望まし
い。The gap 42 is 5i02. Although it may be formed with an insulating film such as Al203, it is more desirable to form it with a superconductor film.
超伝導体としては、（Ｂａ□、ａ Ｙｏ、 ４）ＣｕＯ
３。As superconductors, (Ba□, a Yo, 4) CuO
3.
（ＢａＯ，１１Ｙｏ、４）３Ｃｕ２０ ？ ？（Ｓｒ□
、 。７６ Ｌａｐ、 ９２６） ２ ＣｕＯ４等の化
合物が使われる。また、磁気コア４１と超伝導体４３と
の間に、Ａ Ｑ ２０３＋ Ｓ １０２１ Ｓ １０
ｐ Ａ １２ ｔＣｕ等の非磁性薄膜を介在させること
によって、超伝導体の超伝導性の破壊を防ぐことができ
る。(BaO, 11Yo, 4)3Cu20? ? (Sr□
, . 76 Lap, 926) 2 CuO4 and other compounds are used. Moreover, between the magnetic core 41 and the superconductor 43, A Q 203+ S 1021 S 10
By interposing a nonmagnetic thin film such as p A 12 tCu, destruction of the superconductivity of the superconductor can be prevented.
信号の入出力は巻線窓４５に巻いたコイルにより行なう
。本発明ヘッドは、超伝導体４３の部分がガラスで構成
された同一構造のヘッドに比較して、実施例１と同様、
記録特性が優れていることを確認した。Signal input/output is performed by a coil wound around the winding window 45. Similar to the first embodiment, the head of the present invention has the same structure as the head in which the superconductor 43 is made of glass.
It was confirmed that the recording characteristics were excellent.
実施例５゜
第５図に、本発明による磁気ヘッドの別の例を示す。本
発明の基本構造は、特開昭５９−１４２７１６に示され
ており公知である。本発明による磁気ヘッドは、飽和磁
束密度の高い金属磁性体膜によって磁気コア５１を形成
した。金属磁性体としては、Ｆ ｅ−８ｉ （Ｓ ｉ
６．５重量％）、Ｆ ｅ −Ａ Ｑ −Ｓ ｉ合金（
センダスト）、Ｎ ｉ −Ｆ ｅ合金（パーマロイ）、
Ｆｅ−Ｃ等で代表される結晶質合金であり、非晶質合金
としては、Ｃｏ −Ｎ ｂ −Ｚ ｒ 、 Ｇ ｏ −
Ｔ ａ −Ｚ ｒ等のメタル−メタル系合金が用いられ
る。磁気コアの支持体を、超伝導体５３．５５によって
形成する。ギャツブ５２は、Ａｌ２０３，５ｉＯｚ等の
絶縁層で形成してもよいが、超伝導体膜で形成した方が
より望ましい。超伝導体としては、
（Ｂ ａｏ、 ｅ Ｙ ０．４ ）ＣｕＯ３ｔ（Ｂａａ
、 ａ Ｙｏ、 ４ ） ａ Ｃｕ ２０ ？ ｙ（Ｓ
ｒｏ、０７５Ｌａ□、ｇ ２６）２ＣｕＯ４等ノ化合物
が使われる。また、磁気コア５１と超伝導体５３゜５５
との間には、Ａ Ｑ ２０ ｇ 、 ＳｊＯ２、ＳｉＯ
。Embodiment 5 FIG. 5 shows another example of the magnetic head according to the present invention. The basic structure of the present invention is disclosed in Japanese Unexamined Patent Publication No. 59-142716 and is well known. In the magnetic head according to the present invention, the magnetic core 51 is formed of a metal magnetic film with high saturation magnetic flux density. As the metal magnetic material, Fe-8i (S i
6.5% by weight), Fe-AQ-S i alloy (
sendust), Ni-Fe alloy (permalloy),
It is a crystalline alloy represented by Fe-C, etc., and amorphous alloys include Co-Nb-Zr, Go-
A metal-metal alloy such as Ta-Zr is used. The support of the magnetic core is formed by a superconductor 53.55. The grab 52 may be formed of an insulating layer such as Al203, 5iOz, but it is more desirable to form it of a superconductor film. As a superconductor, (Bao, e Y 0.4 )CuO3t(Baa
, a Yo, 4) a Cu 20? y(S
Compounds such as ro, 075La□, g 26) 2CuO4 are used. In addition, the magnetic core 51 and the superconductor 53°55
Between A Q 20 g, SjO2, SiO
.
Ａｌ、Ｃｕ等の非磁性薄膜を介在させることによって、
超伝導体の超伝湛性の破壊を防ぐことができる。信号の
入出力は１巻線窓５４に巻いたコイルによって行なう。By interposing a non-magnetic thin film such as Al or Cu,
Destruction of the superconductivity of superconductors can be prevented. Signal input/output is performed by a coil wound around the first winding window 54.
本発明のヘッドは、超伝導体５３の部分が充填ガラス、
超伝導体５５が非磁性フェライトの同一構造のヘッドに
比較して、実施例１と同様に記録特性が優れていること
を確認した。In the head of the present invention, the superconductor 53 is filled with glass.
It was confirmed that the superconductor 55 had superior recording characteristics as in Example 1 compared to a head of the same structure made of non-magnetic ferrite.
本発明によれば、磁気ヘッドの磁極を通る磁束線を効率
的に磁極先端に集中させることができるため、記録能力
のすぐれた磁気ヘッドを得ることができる。また、再生
に際して、磁極先端以外で信号の読みとりすることがな
いので、分解能が従来よりも向上する効果がある。According to the present invention, the magnetic flux lines passing through the magnetic pole of the magnetic head can be efficiently concentrated at the tip of the magnetic pole, so that a magnetic head with excellent recording performance can be obtained. Furthermore, during reproduction, since signals are not read at any point other than the tip of the magnetic pole, the resolution is improved compared to the conventional method.
第１図は、本発明の一実施例の薄膜磁気ヘッドの断面図
、第２図は、本発明の別の実施例の薄膜磁気ヘッドの断
面図、第３図は、本発明の一実施例の単磁極型垂直磁気
ヘッドの斜視図、第４図は、本発明の一実施例の複合型
磁気ヘッドの斜視図、第５図は、本発明の一実施例の磁
気ヘッドの斜視図、第６図は、従来例の薄膜磁気ヘッド
の断面図である。
１１・・・非磁性基板、１２・・・超伝導体膜、１３・
・・下部磁極、１４・・・絶縁膜、１５・・・導体コイ
ル、１６・・・絶縁層、１７・・・上部磁極、１８・・
・超伝導体膜、２１・・・非磁性基板、２２・・・超伝
導体膜。
２３・・・下部磁極、２４・・・超伝導体膜１．２５・
・・導体コイル、２６・・・絶縁層、２７・・・超伝導
体膜。
２８・・・上部磁極、２９・・・超伝導体膜、３Ｉ・・
・主磁極、３２・・・補助磁極、３３・・・超伝導体、
３４・・・主磁極補助部、３５・・・巻線コイル、３６
・・・接着樹脂４１・・・磁気コア、４２・・・ギャッ
プ、４３・・・超伝導体、４４・・・フェライト、４５
・・・巻線窓、５１・・・磁気コア、５２・・・ギャッ
プ、５３・・・超伝導体、５４・・・巻線窓、５５・・
・超伝導体。FIG. 1 is a cross-sectional view of a thin-film magnetic head according to an embodiment of the present invention, FIG. 2 is a cross-sectional view of a thin-film magnetic head according to another embodiment of the present invention, and FIG. 3 is a cross-sectional view of a thin-film magnetic head according to another embodiment of the present invention. FIG. 4 is a perspective view of a composite magnetic head according to an embodiment of the present invention, and FIG. 5 is a perspective view of a magnetic head according to an embodiment of the present invention. FIG. 6 is a sectional view of a conventional thin film magnetic head. 11... Nonmagnetic substrate, 12... Superconductor film, 13.
...Lower magnetic pole, 14...Insulating film, 15...Conductor coil, 16...Insulating layer, 17...Top magnetic pole, 18...
- Superconductor film, 21... Nonmagnetic substrate, 22... Superconductor film. 23... Lower magnetic pole, 24... Superconductor film 1.25.
...Conductor coil, 26...Insulating layer, 27...Superconductor film. 28...Top magnetic pole, 29...Superconductor film, 3I...
・Main magnetic pole, 32... Auxiliary magnetic pole, 33... Superconductor,
34... Main magnetic pole auxiliary part, 35... Winding coil, 36
... Adhesive resin 41 ... Magnetic core, 42 ... Gap, 43 ... Superconductor, 44 ... Ferrite, 45
... Winding window, 51... Magnetic core, 52... Gap, 53... Superconductor, 54... Winding window, 55...
・Superconductor.
Claims (1)
磁気記録媒体対向面を除く、少くとも一部の面を超伝導
体で被覆したことを特徴とする磁気ヘッド。 ２、特許請求の範囲第１項記載の磁気ヘッドにおいて、
磁極コアの磁気記録媒体対向面を除くすべての面を超伝
導体で被覆したことを特徴とする磁気ヘッド。 ３、前記超伝導体が、Ｂａ＿０＿．＿６Ｙ＿０＿．＿４
ＣｕＯ＿３、（Ｂａ＿０＿．＿６Ｙ＿０＿．＿４）＿３
Ｃｕ＿２Ｏ＿７、（Ｓｒ＿０＿．＿０＿７＿５Ｌａ＿０
＿．＿９＿２＿５）＿２ＣｕＯ＿４であることを特徴と
する特許請求の範囲第１項又は第２項記載の磁気ヘッド
。 ４、前記磁極コアと超伝導体との間に、ＳｉＯ＿２、Ｓ
ｉＯ、Ａｌ＿２Ｏ＿３、Ｃｕ、Ａｌ等の非磁性膜を設け
ることを特徴とする特許請求の範囲第１項ないし第３項
のいずれかに記載の磁気ヘッド。 ５、前記非磁性の膜厚が３ｎｍ以上１０ｎｍ以下である
ことを特徴とする、特許請求の範囲第１項ないし第４項
のいずれかに記載の磁気ヘッド。 ６、磁極コア及び磁気ギャップからなる磁気回路と、信
号の入出力用の導体コイルを有する誘導型磁気ヘッドで
あって、磁気ギャップを超伝導体で形成し、かつ磁気ギ
ャップ以外で磁極コアと接触する磁極保護膜の少くとも
一部を超伝導体で形成したことを特徴とする特許請求の
範囲第１項ないし第５項のいずれかに記載の磁気ヘッド
。 ７、磁極コアが、主磁極と補助磁極から成る単磁極型垂
直磁気記録用ヘッドであって、主磁極の磁気記録媒体向
面を除くすべての面を超伝導体で被覆したことを特徴と
する特許請求の範囲第１項ないし第５項のいずれかに記
載の磁気ヘッド。[Scope of Claims] 1. A magnetic head having a magnetic pole core, characterized in that at least a part of the surface of the magnetic pole core, excluding the surface facing a magnetic recording medium, is coated with a superconductor. 2. In the magnetic head according to claim 1,
A magnetic head characterized in that all surfaces of the magnetic pole core except for the surface facing a magnetic recording medium are coated with a superconductor. 3. The superconductor is Ba_0_. _6Y_0_. ＿４
CuO_3, (Ba_0_._6Y_0_._4)_3
Cu_2O_7, (Sr_0_._0_7_5La_0
＿． _9_2_5)_2CuO_4 The magnetic head according to claim 1 or 2, characterized in that the magnetic head is made of _9_2_5)_2CuO_4. 4. Between the magnetic pole core and the superconductor, SiO_2, S
A magnetic head according to any one of claims 1 to 3, characterized in that a nonmagnetic film of iO, Al_2O_3, Cu, Al, etc. is provided. 5. The magnetic head according to any one of claims 1 to 4, wherein the nonmagnetic film has a thickness of 3 nm or more and 10 nm or less. 6. An inductive magnetic head having a magnetic circuit consisting of a magnetic pole core and a magnetic gap, and a conductor coil for signal input/output, the magnetic gap being formed of a superconductor, and contacting the magnetic pole core at a point other than the magnetic gap. 6. The magnetic head according to claim 1, wherein at least a part of the magnetic pole protective film is made of a superconductor. 7. A single-pole perpendicular magnetic recording head in which the magnetic pole core consists of a main pole and an auxiliary pole, characterized in that all surfaces of the main pole except for the surface facing the magnetic recording medium are coated with a superconductor. A magnetic head according to any one of claims 1 to 5.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62110516A JPS63276703A (en) | 1987-05-08 | 1987-05-08 | Magnetic head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62110516A JPS63276703A (en) | 1987-05-08 | 1987-05-08 | Magnetic head |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63276703A true JPS63276703A (en) | 1988-11-15 |
Family
ID=14537775
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62110516A Pending JPS63276703A (en) | 1987-05-08 | 1987-05-08 | Magnetic head |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63276703A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6459180A (en) * | 1987-08-31 | 1989-03-06 | Shimadzu Corp | Flux transmitting wire |
| EP0389222A2 (en) * | 1989-03-20 | 1990-09-26 | Hitachi, Ltd. | Magnetic head and magnetic recording apparatus |
-
1987
- 1987-05-08 JP JP62110516A patent/JPS63276703A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6459180A (en) * | 1987-08-31 | 1989-03-06 | Shimadzu Corp | Flux transmitting wire |
| EP0389222A2 (en) * | 1989-03-20 | 1990-09-26 | Hitachi, Ltd. | Magnetic head and magnetic recording apparatus |
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