JPS6327246U - - Google Patents
Info
- Publication number
- JPS6327246U JPS6327246U JP11843086U JP11843086U JPS6327246U JP S6327246 U JPS6327246 U JP S6327246U JP 11843086 U JP11843086 U JP 11843086U JP 11843086 U JP11843086 U JP 11843086U JP S6327246 U JPS6327246 U JP S6327246U
- Authority
- JP
- Japan
- Prior art keywords
- workpiece
- conduit hole
- chuck
- main shaft
- compressed air
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002184 metal Substances 0.000 claims description 4
- 210000000078 claw Anatomy 0.000 claims description 2
- 238000001514 detection method Methods 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Machine Tool Sensing Apparatuses (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11843086U JPS6327246U (hr) | 1986-07-31 | 1986-07-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11843086U JPS6327246U (hr) | 1986-07-31 | 1986-07-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6327246U true JPS6327246U (hr) | 1988-02-23 |
Family
ID=31004873
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11843086U Pending JPS6327246U (hr) | 1986-07-31 | 1986-07-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6327246U (hr) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6037239U (ja) * | 1983-08-19 | 1985-03-14 | ロ−ム株式会社 | 半導体ウエハ |
-
1986
- 1986-07-31 JP JP11843086U patent/JPS6327246U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6037239U (ja) * | 1983-08-19 | 1985-03-14 | ロ−ム株式会社 | 半導体ウエハ |