JPS6327035U - - Google Patents
Info
- Publication number
- JPS6327035U JPS6327035U JP12178886U JP12178886U JPS6327035U JP S6327035 U JPS6327035 U JP S6327035U JP 12178886 U JP12178886 U JP 12178886U JP 12178886 U JP12178886 U JP 12178886U JP S6327035 U JPS6327035 U JP S6327035U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- dry etching
- etching process
- etching apparatus
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001312 dry etching Methods 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 claims description 3
- 238000005530 etching Methods 0.000 claims 2
- 238000000034 method Methods 0.000 claims 2
- 239000011810 insulating material Substances 0.000 description 1
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12178886U JPS6327035U (pt) | 1986-08-07 | 1986-08-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12178886U JPS6327035U (pt) | 1986-08-07 | 1986-08-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6327035U true JPS6327035U (pt) | 1988-02-22 |
Family
ID=31011380
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12178886U Pending JPS6327035U (pt) | 1986-08-07 | 1986-08-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6327035U (pt) |
-
1986
- 1986-08-07 JP JP12178886U patent/JPS6327035U/ja active Pending
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