JPS6326826A - Production of magnetic recording medium - Google Patents

Production of magnetic recording medium

Info

Publication number
JPS6326826A
JPS6326826A JP17009086A JP17009086A JPS6326826A JP S6326826 A JPS6326826 A JP S6326826A JP 17009086 A JP17009086 A JP 17009086A JP 17009086 A JP17009086 A JP 17009086A JP S6326826 A JPS6326826 A JP S6326826A
Authority
JP
Japan
Prior art keywords
film
vapor
hardness
magnetic recording
vapor deposition
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17009086A
Other languages
Japanese (ja)
Inventor
Koichi Shinohara
紘一 篠原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP17009086A priority Critical patent/JPS6326826A/en
Publication of JPS6326826A publication Critical patent/JPS6326826A/en
Pending legal-status Critical Current

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  • Physical Vapour Deposition (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Thin Magnetic Films (AREA)

Abstract

PURPOSE:To eliminate thermal damages in spite of vapor deposition on both faces by executing vapor deposition while a high-polymer film is moved along a rotary support having the hardness lower than the hardness of the vapor deposited film which contacts the rotary support at the time of subjecting another surface of the high-polymer film to the vapor deposition after forming the vapor deposited film on one face thereof. CONSTITUTION:A ferromagnetic metallic layer 2 to be formed as the magnetic recording layer is provided atop the high-polymer film 1 consisting of a polyester film or the like and the magnetic recording layer or nonmagnetic thin film 3 is formed on the bottom surface. Lubricating agent layers 4, 5 are provided on the layers 2, 3. In order to form such medium, a film from an untreated roll 6 is subjected to the vapor deposition with a 2st cooling can 8 by a 1st vapor source 9 through a mask 10 and is then subjected to the vapor deposition at the place of the 2nd cooling can 11 by the vapor flow 15 from a 2nd vapor source 13 through a mask 14. A mounting ring 12 is made of a material having the hardness lower then the hardness of the vapor deposited film formed by the vapor source 9. For example, Cu having 100mum thickness is formed on a cylinder made of a stainless steel and the film having the hardness differing by >=100 in micro-Vickers hardness from the hardness of the vapor deposited film is used.

Description

【発明の詳細な説明】 産業上の利用分野 本発明は、高密度磁気記碌に適する蒸着型の磁気記録層
を有する両面蒸着型の磁気記録媒体の製造方法に関する
DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a method for manufacturing a double-sided vapor-deposited magnetic recording medium having a vapor-deposited magnetic recording layer suitable for high-density magnetic recording.

従来の技術 近年、高密度磁気記録媒体として強磁性金属薄膜を磁気
記録層とする磁気テープ、磁気ディスクの開発が盛んで
ある。かかる型の磁気記録媒体の製造の中核となるのは
巻取り蒸着技術であり、所望の磁気特性をいかに高速で
得るかは継続的課題として認識され改良が重ねられてき
ている。周知のように磁気テープ、フロッピーディスク
等はポリエチレンテレフタレートフィルムがベースフィ
ルムとして用いられる。このフィルムの上に直接或いは
、下地層を介して磁気記録層を電子ビーム蒸着する際フ
ィルムをクーリングキャンに沿わせて冷却すると共に斜
方蒸着を連続的に行うのが普通であり、その時、微量の
酸素を介在させることが重要と考えられている。
2. Description of the Related Art In recent years, there has been active development of magnetic tapes and magnetic disks as high-density magnetic recording media, each of which uses a ferromagnetic metal thin film as a magnetic recording layer. The core of manufacturing this type of magnetic recording medium is the winding deposition technique, and how to obtain desired magnetic properties at high speed is recognized as an ongoing issue and improvements have been made. As is well known, polyethylene terephthalate film is used as a base film for magnetic tapes, floppy disks, etc. When a magnetic recording layer is deposited directly on this film or via an underlayer with an electron beam, it is common to cool the film along a cooling can and perform oblique deposition continuously. It is thought that it is important to intervene with oxygen.

実験的には、高価な耐熱フィルムを用いること〔特開昭
54−138068号公報〕が可能であるものの、実用
化を進める上では、ポリエチレンテレフタレートの熱変
形や熱破損のない冷却条件を確立することが基本で、現
状では鏡面仕上げされた高い硬度の表面を有するクーリ
ングキャンに0℃以下、好ましくは一20℃以下の冷媒
を循環させて、該フィルムの受ける熱を効率良く奪う設
計が工夫されている。
Experimentally, it is possible to use an expensive heat-resistant film [Japanese Unexamined Patent Application Publication No. 138068/1984], but in order to advance practical application, it is necessary to establish cooling conditions that do not cause thermal deformation or thermal damage of polyethylene terephthalate. Currently, a design has been devised in which a refrigerant at a temperature of 0°C or lower, preferably -20°C or lower, is circulated through a cooling can with a mirror-finished, highly hard surface to efficiently remove the heat received by the film. ing.

一方、蒸着型の磁気記録層を有する蒸着テープ(以下M
Eテープと記す)は、薄手化による体積記録密度の向上
が期待されており、テープの変形対策と機械強度の増強
のために両面蒸着型が一部倹討され(特開昭61−50
219.61−85618.61−11o343号公報
)、耐熱フィルムを用いた場合、熱輻射の小さい小規模
蒸発源を用いた場合、厚いポリエステルフィルムを用い
た場合等で一部成功を収めている。
On the other hand, a vapor-deposited tape (hereinafter M
E-tape) is expected to improve the volume recording density by making it thinner, and double-sided vapor-deposited type is being considered in order to prevent tape deformation and increase mechanical strength (Japanese Patent Laid-Open No. 61-50).
219.61-85618.61-11o343), using a heat-resistant film, using a small-scale evaporation source with low thermal radiation, and using a thick polyester film have achieved some success.

発明が解決しようとする問題点 しかしながら、10.t1m以下のポリエステル基板を
用いて、高速で蒸着することで磁気記録媒体を製造する
場合クーリングキャンに循環する冷媒を一30℃〜−4
0℃にしてもポリエステル基板が熱ダメージを受けるこ
とがあり、長尺の媒体を安定に得られないといった問題
があり、改善が望まれている。
Problems to be solved by the inventionHowever, 10. When manufacturing magnetic recording media by high-speed vapor deposition using a polyester substrate with a thickness of t1m or less, the coolant circulating in the cooling can is heated to a temperature of -30°C to -4°C.
Even at 0° C., the polyester substrate may be thermally damaged and long media cannot be stably obtained, which is a problem that is desired to be improved.

本発明は上記した事情に鑑みてなされたもので、熱ダメ
ージのない両面蒸着型の磁気記録媒体の製造方法を提供
するものである。
The present invention has been made in view of the above-mentioned circumstances, and provides a method for manufacturing a double-sided deposition type magnetic recording medium that is free from thermal damage.

問題点を解決するための手段 上記した問題点を解決するため、本発明の磁気記録媒体
の製造方法は、高分子フィルムの一方に蒸着膜を形成し
た後、もう一方の面に蒸着する際、回転支持体に接触す
る蒸着膜硬度よりも低い硬度の回転支持体に沿わせて蒸
着するものである。
Means for Solving the Problems In order to solve the above-mentioned problems, the method for manufacturing a magnetic recording medium of the present invention includes forming a vapor deposited film on one side of a polymer film and then depositing it on the other side. The vapor deposition is carried out along the rotating support whose hardness is lower than that of the vapor-deposited film in contact with the rotating support.

作  用 本発明の磁気記録媒体の製造方法は、上記した構成によ
り、回転支持体と先に蒸着された蒸着膜の実効的な接触
面積の著しい増加により、もう一方の面に蒸着を行った
時の冷却が十分行われることになり熱ダメージなしに高
分子フィルムの両面に蒸着を行えることになるのである
Effect: The method for producing a magnetic recording medium of the present invention has the above-described configuration, and by significantly increasing the effective contact area between the rotating support and the previously deposited film, it is possible to achieve This allows for sufficient cooling of the polymer film, making it possible to perform vapor deposition on both sides of the polymer film without thermal damage.

実施例 以下、図面を参照しながら本発明の実施例について説明
する。
Embodiments Hereinafter, embodiments of the present invention will be described with reference to the drawings.

第1図は本発明により製造される磁気記録媒体の拡大断
面図で、1はポリエステルフィルム等の高分子フィルム
で、2は磁気記録層となる強磁性金属薄膜、3は磁気記
録層又は、非磁性薄膜、4゜5は潤滑剤層である。
FIG. 1 is an enlarged cross-sectional view of a magnetic recording medium manufactured according to the present invention, in which 1 is a polymer film such as a polyester film, 2 is a ferromagnetic metal thin film serving as a magnetic recording layer, and 3 is a magnetic recording layer or a non-magnetic recording layer. 4.5 is a lubricant layer of the magnetic thin film.

第2図は、本発明を実施するのに用いた蒸着装置の内部
構成製図で、6は未処理の高分子フィルムノロール、7
は処理した高分子フィルムのロールである。8は第1ク
ーリングキヤン、9は第1蒸発源、10はマスクである
。11は第2クーリングキヤン、12は装着リング、1
3は第2蒸発源、14はマスク、15は蒸気流、16は
防着板、17はフリーローラーである。
Fig. 2 is a drawing of the internal structure of the vapor deposition apparatus used to carry out the present invention, in which 6 is an untreated polymer film roll, 7 is an untreated polymer film roll;
is a roll of treated polymeric film. 8 is a first cooling can, 9 is a first evaporation source, and 10 is a mask. 11 is the second cooling can, 12 is the mounting ring, 1
3 is a second evaporation source, 14 is a mask, 15 is a vapor flow, 16 is an adhesion prevention plate, and 17 is a free roller.

装着リング12は、蒸発源9の動作により形成した蒸着
膜の硬さよりも、軟かい材料により構成され不必要があ
り、マイクロビッカース硬度で100以上の差があるの
が好ましい0 第2図の装置で、第1クーリングキヤンは直径50−の
硬質クロムメッキのステンレス製で、一方第2クーリン
グキャンは50m直径のステンレス製の円筒の上に、筒
状の厚み10077mの銅を被覆した構成とした0 厚みBpmのポリエチレンテレフタレートフィルム上K
、第1クーリングキヤンに10℃の温媒を循環きせて、
1 ’X 10−’(Torr)の酸素中でシリコンを
蒸着して、シリコンの酸化膜を0.2171m形成し、
引き続き、第2クーリングキヤンにより反対側の面に最
小入射角を43度とし、CoNi(Ni20wt%)を
1×10−’(Torr)の・唆素中で0,16/jm
斜め蒸着した。この時、第2クーリングキヤンには0℃
の冷媒を循環させた0ラインスピードは50 m / 
m t nで長さ4000 mの両面蒸着を、3回実施
した00.75μmの記録波長を記録した再生出力は、
幅方向、長手方向1(dB)以内と均一で、熱ダメージ
は全くなかった。
The mounting ring 12 is unnecessary because it is made of a material that is softer than the hardness of the evaporated film formed by the operation of the evaporation source 9, and it is preferable that the difference in micro-Vickers hardness is 100 or more. The first cooling can was made of hard chrome-plated stainless steel with a diameter of 50 mm, while the second cooling can was a stainless steel cylinder with a diameter of 50 m and coated with copper with a thickness of 10,077 m. On polyethylene terephthalate film with thickness Bpm K
, circulating a 10°C hot medium in the first cooling can,
1' x 10-' (Torr) of oxygen to form a silicon oxide film of 0.2171 m,
Subsequently, CoNi (Ni 20 wt%) was applied to the opposite surface at a minimum incidence angle of 43 degrees in a second cooling can at a temperature of 0.16/jm in 1 × 10-' (Torr).
Diagonally deposited. At this time, the second cooling can is 0°C.
The zero line speed with circulating refrigerant is 50 m/
The reproduction output recorded at a recording wavelength of 00.75 μm obtained by performing double-sided deposition with a length of 4000 m at m t n three times is as follows:
The heat damage was uniform within 1 (dB) in both the width and length directions, and there was no heat damage at all.

比較例として、第2クーリングキヤンを第1クーリング
キヤンと同じ硬質クロムメッキのステンレス製とし、−
26℃の冷媒を循環させて両面蒸着を同じ条件で行った
0その結果、波状のシワが発生した所と、熱ダメージが
大きく溶融した場合とが、4000mの間に13ケ所あ
った。
As a comparative example, the second cooling can was made of the same hard chrome-plated stainless steel as the first cooling can, and -
Double-sided deposition was performed under the same conditions by circulating a coolant at 26° C. As a result, there were 13 locations over a distance of 4000 m where wavy wrinkles occurred and where heat damage caused significant melting.

なお、テープとして比較するために、ステアリン酸から
成る潤滑剤層を約40入ずつ蒸着膜の上に配したものを
用いた0 蒸着膜は、先に磁気記録層を形成してもよいし、両面共
磁気記録層としてもよく、いずれの場合も2番目に蒸着
する場合に回転支持体として用いる表面の硬さを、先に
蒸着で得た蒸着膜の硬さより小さくすることで、冷却効
果を大きく、且つ安定化できる。したがってポリエチレ
ンテレフタレートでも勿論、他の高分子フィルムでも、
冷媒装置を大型化して一30℃以下にする必要なく両面
蒸着できることになる。
In addition, in order to compare the tape, a lubricant layer made of stearic acid was used in which about 40 lubricant layers were placed on the vapor deposited film.For the vapor deposited film, a magnetic recording layer may be formed first, or Both sides may be magnetic recording layers, and in either case, the cooling effect can be improved by making the hardness of the surface used as a rotating support in the second vapor deposition smaller than the hardness of the vapor deposited film obtained in the first vapor deposition. Large and stable. Therefore, not only polyethylene terephthalate but also other polymer films,
This means that double-sided deposition can be performed without the need to increase the size of the refrigerant device and keep the temperature below -30°C.

発明の効果 以上のように本発明によ汎ば、高分子フィルムを薄くし
ても熱ダメージなしに長尺に渡り両面蒸着を実現できる
といったすぐれた効果がある。
Effects of the Invention As described above, according to the present invention, there is an excellent effect that double-sided vapor deposition can be realized over a long length without thermal damage even if the polymer film is made thin.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明に得られる磁気記録媒体の一例の拡大断
面図、第2図は本発明の実施にあたり用いた蒸着装置の
内部構成図である。 1・・・・・高分子フィルム、2,3・・・・・・蒸着
膜、8・・・・・第1クーリングキヤン、11・・・・
・・第2クーリングキヤン、12・・・・・・装着リン
グ。
FIG. 1 is an enlarged sectional view of an example of a magnetic recording medium obtained by the present invention, and FIG. 2 is an internal configuration diagram of a vapor deposition apparatus used in carrying out the present invention. 1... Polymer film, 2, 3... Vapor deposited film, 8... First cooling can, 11...
...Second cooling canister, 12...Mounting ring.

Claims (1)

【特許請求の範囲】[Claims]  高分子フィルムの一方に蒸着膜形成後、もう一方の面
に蒸着する際、回転支持体に接触する蒸着膜硬度よりも
低い硬度の回転支持体に沿わせて蒸着することを特徴と
する磁気記録媒体の製造方法。
Magnetic recording characterized in that after a vapor-deposited film is formed on one side of a polymer film, when it is vapor-deposited on the other side, the film is vapor-deposited along a rotating support whose hardness is lower than that of the vapor-deposited film in contact with the rotating support. Method of manufacturing media.
JP17009086A 1986-07-18 1986-07-18 Production of magnetic recording medium Pending JPS6326826A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17009086A JPS6326826A (en) 1986-07-18 1986-07-18 Production of magnetic recording medium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17009086A JPS6326826A (en) 1986-07-18 1986-07-18 Production of magnetic recording medium

Publications (1)

Publication Number Publication Date
JPS6326826A true JPS6326826A (en) 1988-02-04

Family

ID=15898458

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17009086A Pending JPS6326826A (en) 1986-07-18 1986-07-18 Production of magnetic recording medium

Country Status (1)

Country Link
JP (1) JPS6326826A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0499166A (en) * 1990-08-03 1992-03-31 Matsushita Electric Ind Co Ltd Production of double vacuum-deposited film
JP2007273210A (en) * 2006-03-31 2007-10-18 Sanyo Electric Co Ltd Thin film manufacturing device, and thin film manufacturing method using it

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0499166A (en) * 1990-08-03 1992-03-31 Matsushita Electric Ind Co Ltd Production of double vacuum-deposited film
JP2007273210A (en) * 2006-03-31 2007-10-18 Sanyo Electric Co Ltd Thin film manufacturing device, and thin film manufacturing method using it

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