JPS63251928A - Production of magnetic recording medium - Google Patents

Abstract

PURPOSE:To improve high-density magnetic recording and reproducing characteristics and to improve practicable reliability by subjecting a high- polymer film to diagonal vapor deposition and to sputtering vapor deposition by an endless target deposited with part of the other vapor flow. CONSTITUTION:The target of the endless belt type to be used for the sputtering vapor deposition by part 22 of the vapor flow is provided in addition to the vapor flow 20 to be used for the diagonal vapor deposition of the vapor flow from a vapor source 19. The high-polymer film 15 moving along a rotary support 18 is subjected to the diagonal vapor deposition and is subjected simultaneously to the sputtering vapor deposition by the endless target 21 deposited with part 22 of the vapor flow except the flow used for the diagonal vapor deposition. The vapor deposited film is thereby formed of the finer particles, by which the C/N and durability are improved and the practicable reliability is improved.

Description

DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to a method of manufacturing a magnetic recording medium having a magnetic recording layer made of a ferromagnetic metal thin film suitable for high-density magnetic recording.

Conventional technology Magnetic recording media with ferromagnetic metal thin films as the magnetic recording layer have large short-wavelength output, so they are positioned as an indispensable medium for high-density magnetic recording, which is expected to advance further in the future, and are being developed. There is [foreign journal, ieeeeee]
Tractions on Magnetex (IEEE
TRANSACTIONS ONMAGNETIC3
) vol, MAG-21, p, p, 1217-1220
(1985): ]. In general, magnetic recording media with such a configuration are made by winding a polymer film along a cylindrical can, and applying a method such as sputtering, electric field evaporation, ion blating, or electron beam evaporation to deposit a ferromagnetic metal thin film onto the polymer film. A magnetic recording layer is obtained by forming a magnetic recording layer [JP-A-53-42010. Institute of Electronics and Communication Engineers, Magnetic Recording Research Group Materials, MR8l-2 (1981), JP-A-61-
186475].

FIG. 2 is a block diagram of the main parts of a winding vapor deposition apparatus used for manufacturing magnetic recording media by an oblique vapor deposition method. In Figure 2, 1 is a polymer film such as polyethylene terephthalate or polyimide, 2 is an unwinding shaft, 3 is a winding shaft, 4 is a chill drum, 6 is an evaporation source, 6 is an electron beam generator, and 7
is a focused high-energy electron beam, 8 is a shutter, 9 is a heat shield, 10 is a vacuum container, 11 is a vacuum partition,
12 and 13 are exhaust holes, and 14 is a rotating roller.

Using the device shown in Figure 2, various efforts were made to increase the evaporation efficiency by reducing the minimum incident angle by adjusting the position of the evaporation source and the energy of the electron beam while introducing oxygen from the outside, and it was put into practical use. It's getting closer [Unexamined Japanese Patent Publication No. 55-12
547. Tokuko Sho 67-19493, Tokuko Sho 67-23
931. Special Publication Showa 67-29770. Japanese Patent Publication No. 59-124
Publication No. 037].

- Control of the surface topography of the blade polymer film was also found to improve the durability of the magnetic recording layer, with granular protrusions.

Earthworm-like protuberances, combinations thereof, etc. are considered promising, and many experiments have been repeated to optimize the material, protrusion height, protrusion density, etc. [JP-A-68-100221; 92427. 69-223932, 69
-207422, Publication No. 61-74139].

Problems to be Solved by the Invention However, with the above configuration, as the recording density increases, durability and an excellent signal-to-noise ratio (C/N
), the uniformity of error rates in digital recording, and the difficulty of achieving practicality over large areas, so improvements have been desired. The present invention has been made in view of the above-mentioned circumstances, and it is an object of the present invention to provide a magnetic recording medium with good high-density magnetic recording and reproduction characteristics and excellent practical reliability.

Means for Solving the Problems In order to solve the above-mentioned problems, the method for manufacturing a magnetic recording medium of the present invention involves performing oblique vapor deposition on a polymer film that moves along a rotating support. Sputter deposition is performed using an endless target on which a portion of the vapor flow other than the target is deposited.

Effects According to the present invention, with the above-described configuration, the deposited film is made into fine particles, and practical reliability is improved by improving C/N and durability.

EXAMPLE Hereinafter, a method for manufacturing a magnetic recording medium according to an example of the present invention will be described in detail with reference to the drawings.

FIG. 1 is a diagram showing the main part of a vapor deposition apparatus used to obtain a magnetic recording medium by performing a manufacturing method according to an embodiment of the present invention. In Figure 1, 16 is polyethylene terephthalate and polyphenylene sulfide.

Polymer film such as polysulfone, 16 is an unwinding shaft,
17 is a winding shaft, 1 is a rotating support, 19 is an evaporation source, 2
0 is a part of the vapor flow that is used for oblique deposition, 21 is an endless belt type target, and 22 is a part of the vapor flow that is used for sputter deposition. 23 is a vacuum chamber, 24 is a vacuum exhaust system, 25 is a gas introduction boat, 26 is a mask that determines the minimum angle of incidence for oblique deposition, 27 is a rotating roller, 28 is insulated by a tension roller, and high frequency waves are applied to 21. It shall be configured as follows. 29
3o is a magnetic field generator, which has the function of localizing discharge in order to increase the sputtering speed, and 3o is a free roller. .

In Fig. 1, the diameter of the rotating support is 60ctn, the center of the evaporation surface of the electron beam evaporation source is A, and the positions shown are B-G. AB: 30c1n, minimum incident angle 23 degrees, AC= s2cm, AD=60m.

ED=EF=237 m, EG=15 cTn, and the tip of the gas introduction port was placed at a position of 17 crn directly above point D.

The strength of the magnetic field generator is 160 (○e) on the target surface.
.

A high frequency power source of 13.56 (lv...z)3 (KW) was used.

13 pieces/(μm)2 of 3102 fine particles with a diameter of 10 μm on a polyethylene terephthalate film with a thickness of 10 μm
Co-Ni (Ni: 20wt%)
was subjected to electron beam evaporation and sputter deposition while introducing 0.15 ji/sjx oxygen.

In the comparative example, only electron beam evaporation was performed without sputter deposition. The ferromagnetic metal thin film of the example has a thickness of 0.13 μm, the comparative example has a thickness of 0.11 μm, and the coercive force of the example is 11 μm.
oo(5e)t Comparative example 1t950(5e), the squareness ratio of the example is 0.81. The comparative example was 0.7. In both cases, perfluorooctanoic acid was applied with a vacuum lid by about 60 people, and then 8
Millimeter-wide magnetic tape is manufactured and commercially available 8mm video (v
X-s o 1. Comparing the C/N of the material (manufactured by Matsushita Electric), the example was 3.4 (dB) better than the comparative example, which means that the noise due to atomization was lower, the magnetic properties were improved, and the frequency characteristics were also improved. This is a combination of the effects of both.

It should be noted that the present invention is not limited to the above-mentioned embodiments, and may be configured such that an oxide of the same type is sputter-deposited as an overcoat after the oblique vapor deposition is completed.

Another effect that cannot be overlooked is that the utilization efficiency of steam flow increases.

Effects of the Invention As described above, according to the present invention, there is an excellent effect that a magnetic recording medium with improved C/N can be efficiently obtained.

[Brief explanation of the drawing]

FIG. 1 is a block diagram showing a vapor deposition apparatus used in an embodiment of the present invention, and FIG. 2 is a block diagram of main parts of a conventional vapor deposition apparatus. 15... Polymer film, 1 day... Rotating support, 19... Evaporation source, 21...
Endless Target, 25... Gas introduction boat.

Claims (1)

[Claims] A magnetic recording medium characterized in that diagonal vapor deposition is performed on a polymer film moving along a rotating support, and sputter deposition is performed using an endless target on which a part of the vapor flow other than that used for the oblique deposition is deposited. Production method.