JPS63267878A - Argon purifying method recovering argon and hydrogen in purified argon tower waste gas - Google Patents
Argon purifying method recovering argon and hydrogen in purified argon tower waste gasInfo
- Publication number
- JPS63267878A JPS63267878A JP62099800A JP9980087A JPS63267878A JP S63267878 A JPS63267878 A JP S63267878A JP 62099800 A JP62099800 A JP 62099800A JP 9980087 A JP9980087 A JP 9980087A JP S63267878 A JPS63267878 A JP S63267878A
- Authority
- JP
- Japan
- Prior art keywords
- argon
- gas
- purified
- hydrogen
- conduit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 title claims description 202
- 229910052786 argon Inorganic materials 0.000 title claims description 102
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 title claims description 20
- 239000001257 hydrogen Substances 0.000 title claims description 17
- 229910052739 hydrogen Inorganic materials 0.000 title claims description 17
- 239000002912 waste gas Substances 0.000 title claims description 8
- 238000000034 method Methods 0.000 title claims description 4
- 239000007789 gas Substances 0.000 claims description 34
- 238000001179 sorption measurement Methods 0.000 claims description 26
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 16
- 238000000746 purification Methods 0.000 claims description 10
- 230000008929 regeneration Effects 0.000 claims description 10
- 238000011069 regeneration method Methods 0.000 claims description 10
- 229910052757 nitrogen Inorganic materials 0.000 claims description 7
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 4
- 239000001301 oxygen Substances 0.000 claims description 4
- 229910052760 oxygen Inorganic materials 0.000 claims description 4
- 238000006555 catalytic reaction Methods 0.000 claims description 3
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 12
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 9
- 239000003054 catalyst Substances 0.000 description 7
- 229910052763 palladium Inorganic materials 0.000 description 6
- 229910001873 dinitrogen Inorganic materials 0.000 description 5
- 239000007788 liquid Substances 0.000 description 5
- 238000010586 diagram Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000003463 adsorbent Substances 0.000 description 2
- 238000000605 extraction Methods 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 239000002250 absorbent Substances 0.000 description 1
- 230000002745 absorbent Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000005345 coagulation Methods 0.000 description 1
- 230000015271 coagulation Effects 0.000 description 1
- 150000002431 hydrogen Chemical class 0.000 description 1
- 238000005984 hydrogenation reaction Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 150000002829 nitrogen Chemical class 0.000 description 1
- 230000001172 regenerating effect Effects 0.000 description 1
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P20/00—Technologies relating to chemical industry
- Y02P20/10—Process efficiency
- Y02P20/129—Energy recovery, e.g. by cogeneration, H2recovery or pressure recovery turbines
Landscapes
- Separation Of Gases By Adsorption (AREA)
- Separation By Low-Temperature Treatments (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本分明は、高純度アルゴンを採取するアルゴン採取方法
に係り、特に高収率アルゴン採取に好適なアルゴン精製
方法に関するものである。DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to an argon extraction method for extracting high-purity argon, and particularly to an argon purification method suitable for high-yield argon extraction.
従来技術によるアルゴン精＊＊＊を１３２図により説明
する。粗アルゴン塔１から採取さｎた粗アルゴンガスは
導管１１を経てアルゴン熱交換器２で温度回復した後、
導管校でアルゴンブロワ−３に供給される。ここで粗ア
ルゴンガスな精製アルゴン塔８へ供給するのに必要な圧
力まで昇圧さｎた後、途中導管４より水素ガスを添加さ
れ、導管１３よりパラクラム触媒槽４へ供給される。パ
ラジウム触媒槽４内では、徂アルゴンガス中の酸素とパ
ラジウム触媒槽４人口で添加さｎた水素ガスが触ンガス
は、導管１４を経てアルゴン冷却器５で冷却さｎ、ここ
で凝縮した水と粗アルゴンガスは導管１５を経て水滴分
離器６へ供給さｎ、粗アルゴンと凝縮水な気液分離する
。水滴分離ａ６を出た水蒸気を含んだ租アルゴンガスは
、導管１６を経て吸着塔７へ供給され、この吸着塔７内
にｉ填さｎた吸７剤により、粗アルゴンガス中の水分が
吸着除去さｎる。なお、吸着塔７は２基以上設置さｎ、
一定周期で切替使用さｎる。即ち、一方の吸着塔７が吸
着に使用されている場合、他方の吸着塔７は再生加熱器
９で昇温さｎ、導管ｎを経て吸着塔７へ供給さｎる窒素
ガスにより再生さｎる。吸着塔７を出た粗アルゴンガス
は、導管１７を経てアルゴン熱交換器２に供給され、液
化点近くまで冷却された後、導管１８を経て精製アルゴ
ン塔８へ供給される。しかして、精製アルゴン塔８で気
液接触により精留分離さｎ、底部から導管１９により精
製アルゴンが採取さｎる。また、頂部からはアルゴン。Argon spirit *** according to the prior art will be explained with reference to Fig. 132. The crude argon gas collected from the crude argon column 1 passes through the conduit 11, and after its temperature is recovered in the argon heat exchanger 2,
It is supplied to argon blower 3 at the conduit. After the crude argon gas is pressurized to the pressure necessary for supplying it to the purified argon column 8, hydrogen gas is added through the conduit 4, and the crude argon gas is supplied to the paracrum catalyst tank 4 through the conduit 13. In the palladium catalyst tank 4, the oxygen in the argon gas and the hydrogen gas added in the palladium catalyst tank 4 are in contact with each other. The crude argon gas is supplied to the water droplet separator 6 through a conduit 15, and the crude argon and condensed water are separated into gas and liquid. The fresh argon gas containing water vapor that has come out of the water droplet separation a6 is supplied to the adsorption tower 7 through the conduit 16, and the moisture in the crude argon gas is adsorbed by the absorbent packed in the adsorption tower 7. It will be removed. Note that two or more adsorption towers 7 are installed,
It is switched and used at regular intervals. That is, when one adsorption tower 7 is used for adsorption, the other adsorption tower 7 is heated by a regeneration heater 9 and regenerated by nitrogen gas supplied to the adsorption tower 7 via a conduit. Ru. The crude argon gas leaving the adsorption tower 7 is supplied to the argon heat exchanger 2 via a conduit 17, cooled to near the liquefaction point, and then supplied to the purified argon column 8 via a conduit 18. Then, purified argon is subjected to rectification separation by gas-liquid contact in the purified argon column 8, and purified argon is collected from the bottom through a conduit 19. Also, argon is released from the top.
水素の混合ガスが導管（９）より抜き出さｎ、アルゴン
熱交換器２でｉｆｉ度回復した後、大気放出さｎる。The mixed gas of hydrogen is extracted from the conduit (9), and after being recovered to a certain degree in the argon heat exchanger 2, it is released into the atmosphere.
なお、この種の装置として関達す仝ものには１例えば特
開昭５５−１０５１７７号等が挙げらｎる。Incidentally, examples of devices of this kind that have been reported include, for example, Japanese Patent Application Laid-open No. 55-105177.
上記従来技術は、アルゴン精製ｉｔの吸着塔の再生に窒
素ガスを昇虐させて使用するため、窒素の消費量および
昇温するための蒸気消費量、又は昇温するための電力消
費型の点に配慮がされておらず、窒素ガス、蒸気、ＭＥ
力の消費量が大きいという問題があった。The above-mentioned conventional technology uses elevated nitrogen gas to regenerate the adsorption tower of argon purification IT. Nitrogen gas, steam, ME
There was a problem that the amount of power consumed was large.
１だ、精製アルゴン塔頂部からアルゴン、水素を含んだ
混合ガスを廃ガスとして大気放出しているために、アル
ゴンの収率および水素添加量の点について考慮されてお
らず、低アルゴン収率および水素添加量の増大という問
題があ−た。1. Because the mixed gas containing argon and hydrogen is released into the atmosphere as waste gas from the top of the purified argon column, the yield of argon and the amount of hydrogen added are not taken into account, resulting in low argon yield and There was a problem of an increase in the amount of hydrogen added.
本発明の目的は、アルゴン精製装置の低電力化。An object of the present invention is to reduce the power consumption of an argon purification device.
高アルゴン収率、水素添加僅の減少にある。High argon yield, with slight reduction in hydrogenation.
上記目的は、粗アルゴンガスに水素を添加して触媒反応
により酸素弁を除去し、水分および窒素分を吸着除去し
た後冷却して精製アルゴン塔に供給し、該精製アルゴン
塔頂部からの廃ガスを曲記徂アルゴンガスに合流させる
ことにより、達成さｎる。The above purpose is to add hydrogen to crude argon gas, remove the oxygen valve through a catalytic reaction, adsorb and remove moisture and nitrogen, cool it and supply it to a purified argon column, and waste gas from the top of the purified argon column. This is achieved by merging the argon gas into the argon gas.
アルゴン精製装置の吸着塔は２基以上設置さｎ、一定周
期で切替使用さｎる。即ち、一方の吸着塔で粗アルゴン
中の水分を吸着除去し、他方の吸着塔では減圧すること
により吸着剤を再生することができる。Two or more adsorption towers are installed in the argon purification device, and the adsorption towers are switched at regular intervals. That is, the adsorbent can be regenerated by adsorbing and removing moisture in the crude argon in one adsorption tower and reducing the pressure in the other adsorption tower.
また、精製アルゴン塔頂部の廃ガスは、粗アルゴンガス
と合流してアルゴン精製装置へ供給さｎる。Further, the waste gas at the top of the purified argon column is combined with the crude argon gas and supplied to the argon purification device.
この場合、粗アルゴンガス中の窒素分は外部へ放出され
ないので、アルゴン精製装置内で濃縮するが、この窒素
分は上記吸着塔で吸着除去さｎる。In this case, the nitrogen content in the crude argon gas is not released to the outside, so it is concentrated in the argon purifier, but this nitrogen content is removed by adsorption in the adsorption tower.
以下１本発明の一実施例を第１図により説明する。粗ア
ルゴン塔１から採取さｎた粗アルゴンガスは、導管１１
を経てアルゴン熱交換器２で温度回復した後導管認で１
ルゴンブロワ−３に供給される。ここで、粗アルゴンガ
スな精製アルゴン塔８へ供給するのに必要な圧力まで昇
圧された後、途中導管はより水素ガスを添加さｎ、導管
１３よりパラジウム触媒槽４へ供給さｎる。パラジウム
触媒槽４内では、粗アルゴンガス中の酸素とパラジウム
触媒槽４人口で添加さｎた水素ガスが触媒反応して水に
変化し、また１反応熱により温度が上昇する。高温とな
り水蒸気を含んだ粗アルゴンガスは、導管１４を経てア
ルゴン冷却器５で冷却さｎ、ここで凝縮した水と粗アル
ゴンガスは導管１５を経て水滴分離器６へ供給され、粗
アルゴンガスと凝７へ供給され、この吸着塔７内に充填
さｎた吸着剤により、粗アルゴンガス中の水分、窒素分
が吸着除去さｎる。なお、吸着塔７は２基以上設置され
、一定周期で切替使用さｎる。即ち、一方の吸着塔７が
吸着に便用さｎている場合、他方吸着塔７は真空ポンプ
ｌＯで導管ｎを経て減圧再生さｎる。An embodiment of the present invention will be described below with reference to FIG. The crude argon gas collected from the crude argon column 1 is passed through the conduit 11.
After the temperature was recovered in argon heat exchanger 2, the pipe was confirmed as 1.
It is supplied to Rougon blower 3. Here, after the crude argon gas is pressurized to the pressure necessary for supplying it to the purified argon column 8, hydrogen gas is added to the intermediate conduit, and the crude argon gas is supplied to the palladium catalyst tank 4 through the conduit 13. In the palladium catalyst tank 4, the oxygen in the crude argon gas and the hydrogen gas added to the palladium catalyst tank 4 undergo a catalytic reaction and change to water, and the temperature rises due to the heat of reaction. The crude argon gas, which has become high in temperature and contains water vapor, passes through a conduit 14 and is cooled by an argon cooler 5.The water condensed here and the crude argon gas are supplied to a water droplet separator 6 via a conduit 15, where they are separated into crude argon gas. The moisture and nitrogen in the crude argon gas are adsorbed and removed by the adsorbent that is supplied to the coagulation column 7 and filled in the adsorption tower 7. Note that two or more adsorption towers 7 are installed, and are switched and used at regular intervals. That is, when one adsorption tower 7 is used for adsorption, the other adsorption tower 7 is regenerated under reduced pressure by means of a vacuum pump IO via a conduit n.
吸着塔７を出た粗アルゴンガスは、導管１７を経てアル
ゴン熱交換器２に供給さｎ、液化点近くまで冷却さｎた
後、導管１８を経て精製アルゴン塔８へ供給さｎる。し
かして、精製アルゴン塔８で気液接触により精留分離さ
れ、底部から導管１９により精製アルゴンが採取される
。また、頂部からはアルゴン、水素の混合ガスが導管茄
より抜き出さｎ、アルゴン熱交換器２で温度回復した後
、導管冴を経て導管１１からの粗アルゴンガスに合流す
る。The crude argon gas leaving the adsorption tower 7 is supplied to the argon heat exchanger 2 via a conduit 17, cooled to near the liquefaction point, and then supplied to the purified argon column 8 via a conduit 18. Then, it is rectified and separated by gas-liquid contact in the purified argon column 8, and purified argon is collected from the bottom through a conduit 19. Further, from the top, a mixed gas of argon and hydrogen is extracted from a conduit, and after its temperature is recovered in the argon heat exchanger 2, it joins the crude argon gas from the conduit 11 through the conduit.
従って本実施例によｎば、精製アルゴン塔８頂部からの
アルゴンを含む混合ガスを回収することができるため、
製品アルゴン量の増加および水素添加量の減少の効果が
ある。Therefore, according to this embodiment, the mixed gas containing argon from the top of the purified argon column 8 can be recovered.
This has the effect of increasing the amount of argon in the product and reducing the amount of hydrogen added.
本発明によｎば、つぎのたうな効果がある。 The present invention has the following effects.
（１）精製アルゴン塔のブローガス中のアルゴン、水素
を有効に回収できるため、製品アルゴン量の増加、水素
添加量の節約の効果がある。(1) Since argon and hydrogen in the blow gas of the purified argon column can be effectively recovered, the amount of argon product can be increased and the amount of hydrogen added can be reduced.
例えば、粗アルゴン塔から供給さｎる粗アルゴンの量お
よび純度を１１０５ＯＮ’／Ｈ，９７チＡｒ、２チ０２
１ １％Ｎｚ、精製アルゴン塔へ供給さｎる脱酸素アル
ゴンガス中の水素濃度を１チ、精製アルゴン塔下部から
の製品液体アルゴン量を１００ＯＮｒｒＩ／Ｈとすると
、精製アルゴン塔頂部から放出さｎる鷹ガスは４ｏＮｒ
ｒｌ／Ｈで約５０％Ａｒ、 ２５ ％Ｈ２，２５％Ｎ
２（Ｄ（Ｄ組成となる。従って、この廃ガス中のアルゴ
ンおよび水素が回収できるため、アルゴン量で２ＯＮｒ
ｒ／／Ｈ増加、水素添加量でｌ０ＮＪ／Ｈ節約できるこ
とになる。For example, if the amount and purity of crude argon supplied from the crude argon column is 1105ON'/H, 97mm Ar, 2mm
1 1% Nz, the hydrogen concentration in the deoxygenated argon gas supplied to the purified argon column is 1.0%, and the amount of product liquid argon from the bottom of the purified argon column is 100ONrrI/H, then the amount of hydrogen released from the top of the purified argon column is The hawk gas is 4oNr
Approximately 50% Ar, 25% H2, 25% N at rl/H
2(D(D composition). Therefore, since argon and hydrogen in this waste gas can be recovered, the amount of argon is 2ONr
By increasing r//H and adding hydrogen, 10NJ/H can be saved.
（２）従来吸着塔の再生は窒素ガスを再生加熱器で昇温
しており、これを真空ポンプで減圧再生することにより
、動力費の低減および窒素ガスの不要という効果がある
。(2) Conventionally, adsorption towers are regenerated by raising the temperature of nitrogen gas with a regeneration heater, and by regenerating it under reduced pressure with a vacuum pump, it is effective to reduce power costs and eliminate the need for nitrogen gas.
例えば、液体アルゴン量１１００ＯＮ’／Ｈのｇｔ置の
場合、温度再生で吸着塔の切替周期を１日とすると、再
生加熱器容量９０に冒、再生加熱器使用時間６Ｈｒとな
るので。For example, in the case of a gt system with a liquid argon amount of 1100 ON'/H, if the adsorption tower switching cycle is set to 1 day for temperature regeneration, the regeneration heater capacity will be 90 and the regeneration heater usage time will be 6 hours.
９０Ｘ６−５４０にＷＨ／ｄａｙ となる。90X6-540 WH/day becomes.
一方、減圧再生で吸着塔の切替周期を同じ（１日とする
と、真空ポンプ容量１５にＷｌ真空ポンプ稼働時間２４
Ｈｒとなるので、
１５Ｘ２４＝３６０ＫＷＨ／ｄａｙ
となる。On the other hand, in vacuum regeneration, if the adsorption tower switching period is the same (one day), the vacuum pump capacity is 15 and the Wl vacuum pump operating time is 24.
Hr, so 15X24=360KWH/day.
従って、 ５４０−３６０＝１８０ＫＷＨ／ｄａｙの
電力量低減となる。Therefore, the power consumption is reduced by 540-360=180KWH/day.
また、温度再生に必要な望素ガス１００ＯＮｄ／Ｈが、
減圧再生の場合不要となる。In addition, the desired gas 100ONd/H required for temperature regeneration is
Not required for reduced pressure regeneration.
ｉｆ図は本発明の一実施例を示すアルゴン精製装置の系
統図、第２図は従来のアルゴン精製装置の系統図である
。
１・・・・・・粗アルゴン塔、２・・・・・・アルゴン
熱交換器。
３・・・・・・アルゴンブロワ−１４・・・・・・パラ
ジウム触媒槽、５・・・・・・アルゴン冷却器、６・・
・・・・水滴分離器、７・・・・・・吸着塔、８・・・
・・・精製アルゴン塔、９・・・・・・再生加熱器、１
０・・・・・・真空ポンプ、１１〜２４・・・・・・導
管４１図
第２ｒＡIF diagram is a system diagram of an argon purification apparatus showing an embodiment of the present invention, and FIG. 2 is a system diagram of a conventional argon purification apparatus. 1... Crude argon column, 2... Argon heat exchanger. 3... Argon blower 14... Palladium catalyst tank, 5... Argon cooler, 6...
... Water droplet separator, 7 ... Adsorption tower, 8 ...
... Purification argon column, 9 ... Regeneration heater, 1
0...Vacuum pump, 11-24...Conduit 41 Figure 2rA
Claims (1)
素分を除去し、水分および窒素分を吸着除去した後冷却
して精製アルゴン塔に供給し、該精製アルゴン塔頂部か
らの廃ガスを前記粗アルゴンガスに合流させることを特
徴とする精製アルゴン塔廃ガス中のアルゴン・水素を回
収するアルゴン精製方法。 ２、減圧再生式吸着塔により水分および窒素分を吸着除
去する特許請求の範囲第１項記載の精製アルゴン塔廃ガ
ス中のアルゴン・水素を回収するアルゴン精製方法。[Claims] 1. Hydrogen is added to crude argon gas, oxygen is removed by a catalytic reaction, moisture and nitrogen are adsorbed and removed, and then cooled and supplied to a purified argon column, and the top of the purified argon column is An argon purification method for recovering argon and hydrogen in purified argon tower waste gas, characterized in that waste gas from a purified argon tower is combined with the crude argon gas. 2. An argon purification method for recovering argon and hydrogen from purified argon tower waste gas as set forth in claim 1, wherein moisture and nitrogen are adsorbed and removed by a vacuum regeneration type adsorption tower.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62099800A JPS63267878A (en) | 1987-04-24 | 1987-04-24 | Argon purifying method recovering argon and hydrogen in purified argon tower waste gas |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62099800A JPS63267878A (en) | 1987-04-24 | 1987-04-24 | Argon purifying method recovering argon and hydrogen in purified argon tower waste gas |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63267878A true JPS63267878A (en) | 1988-11-04 |
Family
ID=14256968
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62099800A Pending JPS63267878A (en) | 1987-04-24 | 1987-04-24 | Argon purifying method recovering argon and hydrogen in purified argon tower waste gas |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63267878A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0318492U (en) * | 1989-06-27 | 1991-02-22 | ||
| FR2675567A1 (en) * | 1991-04-16 | 1992-10-23 | Air Liquide | PROCESS AND PLANT FOR THE PRODUCTION OF ARGON. |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5384891A (en) * | 1976-12-30 | 1978-07-26 | Nippon Oxygen Co Ltd | Method of recovering argon |
| JPS5461092A (en) * | 1977-10-24 | 1979-05-17 | Hokusan Kk | Argon purification method |
| JPS55105177A (en) * | 1979-02-07 | 1980-08-12 | Hitachi Ltd | Method of controlling argon refining equipment |
-
1987
- 1987-04-24 JP JP62099800A patent/JPS63267878A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5384891A (en) * | 1976-12-30 | 1978-07-26 | Nippon Oxygen Co Ltd | Method of recovering argon |
| JPS5461092A (en) * | 1977-10-24 | 1979-05-17 | Hokusan Kk | Argon purification method |
| JPS55105177A (en) * | 1979-02-07 | 1980-08-12 | Hitachi Ltd | Method of controlling argon refining equipment |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0318492U (en) * | 1989-06-27 | 1991-02-22 | ||
| FR2675567A1 (en) * | 1991-04-16 | 1992-10-23 | Air Liquide | PROCESS AND PLANT FOR THE PRODUCTION OF ARGON. |
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