JPS63263453A - Film inspecting device for glass substrate - Google Patents
Film inspecting device for glass substrateInfo
- Publication number
- JPS63263453A JPS63263453A JP9749087A JP9749087A JPS63263453A JP S63263453 A JPS63263453 A JP S63263453A JP 9749087 A JP9749087 A JP 9749087A JP 9749087 A JP9749087 A JP 9749087A JP S63263453 A JPS63263453 A JP S63263453A
- Authority
- JP
- Japan
- Prior art keywords
- light
- coating
- glass substrate
- transmitted
- reflected light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 title claims abstract description 26
- 239000011521 glass Substances 0.000 title claims abstract description 19
- 238000001514 detection method Methods 0.000 claims abstract description 27
- 238000007689 inspection Methods 0.000 claims abstract description 24
- 230000007547 defect Effects 0.000 claims abstract description 9
- 230000003287 optical effect Effects 0.000 claims abstract description 8
- 238000000576 coating method Methods 0.000 claims description 29
- 239000011248 coating agent Substances 0.000 claims description 26
- 239000005357 flat glass Substances 0.000 claims description 2
- 230000001788 irregular Effects 0.000 abstract 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 6
- 238000000034 method Methods 0.000 description 4
- 229910052804 chromium Inorganic materials 0.000 description 3
- 239000011651 chromium Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 2
- 230000005856 abnormality Effects 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/958—Inspecting transparent materials or objects, e.g. windscreens
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Surface Treatment Of Glass (AREA)
Abstract
Description
【発明の詳細な説明】
〔発明の目的〕
（産業上の利用分野）
本発明は、ガラス基板く形成された導電被膜などの検査
に好適なガラス基板の被膜検査装置に関する。DETAILED DESCRIPTION OF THE INVENTION [Object of the Invention] (Industrial Application Field) The present invention relates to a glass substrate coating inspection apparatus suitable for inspecting a conductive coating formed on a glass substrate.
（従来の技術）
ガラス基板に各種の絶縁被膜や導電被膜を設けることは
、各分野で広く行なわれている。例えば液晶ディスプレ
イの製造プロセスにおいては、ガラス基板にりｐムやア
ルミニウムなどの導電被膜およびＳＩＮや８１０！など
の絶縁被膜を形成する。(Prior Art) Providing various insulating coatings and conductive coatings on glass substrates is widely practiced in various fields. For example, in the manufacturing process of liquid crystal displays, conductive coatings such as PM and aluminum are applied to glass substrates, and SIN and 810! Forms an insulating film such as
この成膜プロセスで発生するピンホール欠陥の検査には
顕微鏡観察や、基板表面にハロゲン光などのスポット光
を暗視野照射して観察するなどの方法がとられている。Methods such as microscopic observation and dark-field irradiation of spot light such as halogen light onto the substrate surface are used to inspect pinhole defects that occur during this film-forming process.
しかるに、顕微鏡観察の方法は、表面全域を検査するの
に長時間かかる不都合があり、またスポット光による方
法は、欠陥の大小など定量チェックができないという不
都合があった。However, the method of microscopic observation has the disadvantage that it takes a long time to inspect the entire surface, and the method using spot light has the disadvantage of not being able to quantitatively check the size of defects.
（発明が解決しようとする問題点）
上述しえように、従来の顕微鏡観察の検査は時間がかか
り、能率が悪く、またスポット光による検査ではピンホ
ールなどの大きさを定量チェックすることができないと
いう不都合がある。(Problems to be Solved by the Invention) As mentioned above, conventional microscopic inspections are time consuming and inefficient, and spot light inspections cannot quantitatively check the size of pinholes, etc. There is this inconvenience.
本発明は、上述の不都合を除去するためになされたもの
で、能率よく、シかもピンホールなどの大きさを定量チ
ェックできるガラス基板の被膜検査装置を提供すること
を目的とする。The present invention has been made to eliminate the above-mentioned disadvantages, and an object of the present invention is to provide a coating inspection device for glass substrates that can efficiently and quantitatively check the size of pinholes and the like.
゛〔発明の構成〕
（問題点を解決するための手段と作用）本発明は、被膜
を設けた平板状のガラス基板を上記被膜を表側にして載
置する検査テーブルと、集光光学系を有し単色光光源ま
たはレーザ発振器からの検出光を上記集光光学系により
上記被膜上にスポット状に集光する投光体と、
上記検出光の上記被膜上での正反射光の光路から外れた
位置に設けられて上記被膜の欠陥による乱反射光を受光
しこれの強度に対応した信号を送出する乱反射光検出体
と、
上記ガラス基板の裏側に設けられて上記検出光の透過光
を受光しこれの強度に対応した信号を送透過光検出体か
らなる検出手段と上記検査テーブルとのうちの少なくと
もいずれか一方を移動させて上記検出光で上記被膜上を
走査する走査手段とを具備したことを特徴とするガラス
基板の被膜検査装置である。[Structure of the Invention] (Means and Effects for Solving Problems) The present invention comprises an inspection table on which a flat glass substrate provided with a coating is placed with the coating on the front side, and a condensing optical system. a light projector that focuses detection light from a monochromatic light source or laser oscillator into a spot on the coating using the focusing optical system; a diffusely reflected light detector, which is provided at a position where the diffused reflected light is received by the defects in the coating and sends a signal corresponding to the intensity of the diffusely reflected light, and which is provided on the back side of the glass substrate, which receives the transmitted light of the detected light. The present invention further comprises: a detection means comprising a transmitting light detector that transmits a signal corresponding to the intensity of the transmitted light; and a scanning means for moving at least one of the inspection table and scanning the coating with the detection light. This is a coating inspection device for glass substrates, which is characterized by:
すなわち、検査されるガラス基板に対して検出光を相対
移動させて被膜の表面を走査するようＫして能率を向上
させ、微小スポットに鮮明に絞れる単色光またはレーザ
光を検出光として用いることにより微細なピンホールや
異物も確実に検出し、また、乱反射光検出体と透過光検
出体とを受光強度に対応し良信号を送出するようにして
、ピンホールの大きさに応じた信号が得られるようにし
たものである。In other words, efficiency is improved by moving the detection light relative to the glass substrate being inspected to scan the surface of the coating, and by using monochromatic light or laser light that can be clearly focused on a minute spot as the detection light. It is possible to reliably detect minute pinholes and foreign objects, and to send out a good signal according to the received light intensity between the diffused reflection light detector and the transmitted light detector, so that a signal corresponding to the size of the pinhole can be obtained. It was designed so that
（実施例）
以下、本発明の詳細を第１図ないし第３図に示す一実施
例により説明する。本実施例における被検査体（３）は
第４図に示す様におよそ３００ｉｍＸ ３００ｕ＋−の
ガラス基板（１）に被検査対象膜であるクロム被膜（２
）を形成したものである。(Example) The details of the present invention will be explained below with reference to an example shown in FIGS. 1 to 3. The object to be inspected (3) in this example is a glass substrate (1) of approximately 300im x 300u+- as shown in FIG.
).
本装置は、検査テーブルａυと、走査手段ａりと、検出
手段Ｑ３とから構成されている。This apparatus is composed of an inspection table aυ, a scanning means a, and a detection means Q3.
検査テーブル（１１）は四角盤状のテーブル本体蝶９と
、これに取付けられた回転テーブルαＱとからなってい
て、テーブル本体ａ！９は、上面が平坦な取付は面にな
っており、これに平行で、かつ互に平行な送りねじ孔α
Ｄ、軸受孔（ＩＬα樽が貫通している。また、回転テー
ブルａのはテーブル本体住９に固定された軸受部Ｑｌと
、これに上下方向を回転軸線■として回転自在に支持さ
れた回転テーブル部圓とからなっていて、この回転テー
ブル部（２υにクロム被膜（２）付き基板（１）からな
る被検査体（３）が取付けられる。The inspection table (11) consists of a square plate-shaped table body butterfly 9 and a rotary table αQ attached to it. 9 is a mounting surface with a flat top surface, and the feed screw holes α are parallel to this and parallel to each other.
D, bearing hole (ILα barrel passes through it. Also, the rotary table a has a bearing part Ql fixed to the table main body 9, and a rotary table rotatably supported by this with the vertical direction as the rotation axis ■) An object to be inspected (3) consisting of a substrate (1) with a chrome coating (2) is attached to this rotary table part (2υ).
さらにまた、回転テーブル部なりの外周側面には駆動の
ためのベルト溝のが形成されている。Furthermore, a belt groove for driving is formed on the outer peripheral side surface of the rotary table portion.
次に走査手段ａのにつき説明する。これは基台（ハ）上
に互に離間して取付けられた一対の軸受はブラケット（
ハ）、＠と、これらに取付けられた送りねじ（ハ）、支
持軸−，（至）、送りねじ（ハ）を回転させる送り用モ
ータ０υおよび送りねじ（ハ）の回転位置を検出するエ
ンコーダ（至）などからなる送り駆動体（ハ）と１、回
転テーブルＯＱを回転させる回転用モータ（財）、これ
と回転テーブル部（２］）の間に張られたベルト（ハ）
および回転テーブル部３υの回転位蓋を検出するエンコ
ーダ（至）などからなる回転駆動体Ｃ３７）とを具えて
いて、支持軸（至）、（至）により移動自在に支持され
た検査テ−プル（１］）を、送り用モータＯυにより送
りねじ（ハ）を回転させて左右方向に送り、回転用モー
タ（ロ）により回転テーブル部■υを回転させるように
構成されている。Next, the scanning means a will be explained. This is a pair of bearings mounted spaced apart on the base (c) and a bracket (c).
C), @, the feed screw (C) attached to these, the support shaft -, (to), the feed motor 0υ that rotates the feed screw (C), and the encoder that detects the rotational position of the feed screw (C). A feed drive body (c) consisting of (1), a rotation motor (goods) that rotates the rotary table OQ, and a belt (c) stretched between this and the rotary table part (2])
and a rotary drive body C37) consisting of an encoder (to) for detecting the rotational position of the rotary table portion 3υ, and an inspection table movably supported by support shafts (to), (to). (1)) is configured to be sent in the left-right direction by rotating a feed screw (c) by a feed motor Oυ, and to rotate a rotary table part ■υ by a rotation motor (b).
次に検出手段（１３）につき述べると、これは以下のよ
うに構成されている。すなわち、軸受ブラケット（３）
に一端が固定された支持ブラケット（４１）の他端に、
反射簗ｉ器（４２が取付けられている。これはその内面
が回転テーブル部Ｃυ上面と上述の回転軸線■との交点
近傍を中心とする半球体状の反射面に形成されていて、
レーザ発振器＠Ｊと集光光学系としての集束レンズ（４
４Ｊからなる投光体（４９と、光電変換素子をもった乱
反射光検出体−とが取付けられており、また検出光（４
′０であるレーザ光（４７ａ）の被検査体（３１からの
正反射光器の方向にはこれを逃がけられていて、被検査
体（３）の表面の異物とか、傷などによる乱反射光を主
として受光するようになっており、その受光の強弱に応
じた強さの電気信号を送出する。Next, the detection means (13) is constructed as follows. That is, the bearing bracket (3)
At the other end of the support bracket (41), one end of which is fixed to the
A reflector (42) is attached, the inner surface of which is formed into a hemispherical reflective surface centered near the intersection of the upper surface of the rotary table section Cυ and the above-mentioned rotational axis (■).
Laser oscillator @J and focusing lens (4) as a focusing optical system
A light projector (49) consisting of 4J and a diffusely reflected light detector with a photoelectric conversion element are attached, and a detection light (49) is attached.
The laser beam (47a) which is '0' is emitted from the object to be inspected (31) in the direction of the specular reflector, and the diffusely reflected light is caused by foreign matter or scratches on the surface of the object to be inspected (3). It mainly receives light, and sends out an electrical signal with a strength corresponding to the strength of the received light.
さらにまた、基台（ハ）上にはスタンド６υが立設され
ていて、とれには半球状の反射内面をもった透過集光器
（５３が取付けら□れており、これには、光電変換素子
をもった透過光検出体１５３が取付けられている。これ
は検出光Ｑ？）が被検査体（３）のピンホールを通って
来た透過光５４）上に設けられていて、ピンホールによ
る透過光の変化を検出して、その強弱に応じた電気信号
を送出する。Furthermore, a stand 6υ is erected on the base (c), and a transmission condenser (53) with a hemispherical reflective inner surface is attached to the stand. A transmitted light detector 153 having a conversion element is attached.This is installed on the transmitted light 54) that detects the detection light Q?) that has passed through the pinhole of the object to be inspected (3). It detects changes in the light transmitted by the hole and sends out electrical signals depending on its strength.
本実施例は上述のように構成されているが、次に作用に
つき説明する。まず、回転テーブル部間上にクロム被膜
（２）を設けた基板（１）からなる被検査体（３）をそ
のクロム被膜（２）を上にして取付ける。次に送りねじ
（ハ）を逆回転させて検査テーブルαυを第１図におい
て左端に位置させる。次にレーザ光からなる検出光（４
？）を照射し、被検査体（３）上に焦点を結ばせた後、
回転用モータ（ロ）を始動させて回転テーブル部Ｑυを
回転させ、同時に送り用モータＯυを始動させて、送り
ねじ（２）を正回転させ、検査テーブルＩを第１図右方
に移動させる。これにより被検査体（３）は例えば矢印
−のように回転しながら、矢印Ｉ５９の方向に定速で移
動させられるので、始動時に被検査体（３）の中心に検
出光１７）の焦点を合わせて始動すれば、検出光顛によ
り被検査体（３）は全面を検出光（４７）の、例えば直
径５０マイクロメータのスポットで走査されることにな
る。Although the present embodiment is constructed as described above, the operation will be explained next. First, an object to be inspected (3) consisting of a substrate (1) with a chrome coating (2) provided between the rotary table parts is mounted with the chrome coating (2) facing upward. Next, the feed screw (C) is rotated in the opposite direction to position the inspection table αυ at the left end in FIG. Next, the detection light (4
? ) and focus it on the object to be inspected (3),
Start the rotation motor (B) to rotate the rotary table part Qυ, and at the same time start the feed motor Oυ to rotate the feed screw (2) forward and move the inspection table I to the right in Figure 1. . As a result, the object to be inspected (3) is moved at a constant speed in the direction of arrow I59 while rotating as shown by the arrow -, so that the focus of the detection light 17) is set at the center of the object to be inspected (3) at the time of startup. If started at the same time, the entire surface of the object to be inspected (3) will be scanned by the detection light (47) with a spot of, for example, 50 micrometers in diameter.
さて、走査中異状がない場合は、検出光１？）の大部分
は正反射して開口（ハ）から出て行くが、クロム被膜（
２）上に突出した異物とか、傷があった場合には、検出
光（４？）は、そこで散乱反射し、その一部は書り
−１反射光検出体ｈｂ＋に入射し、その傷や異物の大き
さに応じた電気信号を送出し、これはエンコーダ０３゜
（至）の位置信号とともに記録される。また、ピンホー
ルがあった場合は、検出光μηはクロム被膜（２）がエ
ツチングにより除去されているので、多量に透過して、
その大部分が透過光検出体（へ）に入射するうそしてそ
の強弱に応じた電気信号が送出され、これもエンコーダ
Ｃ３３，Ｃ３６）の位置信号とともに記録される。Now, if there is no abnormality during scanning, is the detection light 1? ) is specularly reflected and exits from the aperture (c), but the chromium coating (
2) If there is a foreign object or scratch that protrudes on the top, the detection light (4?) will be scattered and reflected there, and a part of it will be incident on the writing-1 reflected light detector hb+, and the scratch or An electrical signal corresponding to the size of the foreign object is sent out, and this is recorded together with the position signal of the encoder 03° (to). In addition, if there is a pinhole, a large amount of the detection light μη will be transmitted through the chromium film (2) because it has been removed by etching.
Most of the transmitted light is incident on the transmitted light detector (to), and an electrical signal corresponding to its strength is sent out, which is also recorded together with the position signals of the encoders C33 and C36).
上述のようにして検査が終ると、検出された傷や異物や
ピンホールの位置、大きさを考慮して良否の判定がなさ
れる。When the inspection is completed as described above, a pass/fail judgment is made in consideration of the positions and sizes of the detected flaws, foreign objects, and pinholes.
なお、本実施例においては、クロム被膜ガラス基板の場
合につき検査したが、これに限定されず、ガラス基板に
被膜を設けたものならよい。また、検出光はレーザに限
らず、要は直径を１００マイクロメータ位に絞った場合
に鮮明に焦点を結べばよく、例えば単色光のものならよ
い。さらにまた、走査手段も本実施例に限らず、互に直
角２方向の移動を組合わせた手段を用いてもよい。In this example, a chromium-coated glass substrate was tested, but the present invention is not limited to this, and any glass substrate provided with a coating may be used. Further, the detection light is not limited to a laser, but only needs to be clearly focused when the diameter is narrowed down to about 100 micrometers, for example, monochromatic light. Furthermore, the scanning means is not limited to this embodiment, and a means that combines movement in two directions perpendicular to each other may be used.
以上詳述したように、本発明のガラス基板の被膜検査装
置は、検出光として単色光またはレーザ光を用いたので
、径小で鮮明なスポット照射が得られるから、微小な欠
陥も確実に検出でき、ま射光検出体と透過光検出体とを
設け、その欠陥の大きさに対応した電気信号を送出する
ようにしたので、欠陥の大きさを定量的に検出できるな
どの効果を奏するものである。As detailed above, the glass substrate coating inspection device of the present invention uses monochromatic light or laser light as the detection light, so it is possible to obtain clear spot irradiation with a small diameter, so even minute defects can be detected reliably. Since it is equipped with an incident light detector and a transmitted light detector and sends an electrical signal corresponding to the size of the defect, it has the effect of being able to quantitatively detect the size of the defect. be.
第１図は本発明の一実施例の平面図、第２図は同じく正
面図、第３図は同じく要部拡大図、第４図は上記実施例
の被検査体の一例を示す拡大正面図である。
（１）ニガラス基板、 （２）：被 膜、αυ：
検査テーブル、 ａ４：走査手段、負３：検出手段
、 （至）：送り駆動体、（７）二回転駆動体、
（ハ）：レーザ発振器、（４４：集光光学系、
（４！１９：投光体、（ハ）：乱反射光検出体
、１４７）：検出光、咽：正反射光、 （５３）
：透過光検出体、（ロ）：透過光。
代理人 弁理士 則 近 憲 佑
同 松山光速
第１図
第２ｒ！！ＩFIG. 1 is a plan view of an embodiment of the present invention, FIG. 2 is a front view, FIG. 3 is an enlarged view of the main parts, and FIG. 4 is an enlarged front view showing an example of the object to be inspected according to the above embodiment. It is. (1) Niglass substrate, (2): Coating, αυ:
Inspection table, a4: scanning means, negative 3: detection means, (to): feeding drive body, (7) two-rotation drive body,
(c): Laser oscillator, (44: Condensing optical system,
(4!19: Emitter, (c): Diffuse reflected light detector, 147): Detection light, Throat: Regularly reflected light, (53)
: Transmitted light detector, (b): Transmitted light. Agent: Patent Attorney Noriyuki Ken Yudo Matsuyama Light Speed Diagram 1 2r! ! I
Claims (3)
側にして載置する検査テーブルと、 集光光学系を有し単色光光源またはレーザ発振器からの
検出光を上記集光光学系により上記被膜上にスポット状
に集光する投光体と、 上記検出光の上記被膜上での正反射光の光路から外れた
位置に設けられて上記被膜の欠陥による乱反射光を受光
しこれの強度に対応した信号を送出する乱反射光検出体
と、 上記ガラス基板の裏側に設けられて上記検出光の透過光
を受光しこれの強度に対応した信号を送出する透過光検
出体と、 上記投光体および上記乱反射光検出体および上記透過光
検出体からなる検出手段と上記検査テーブルとのうちの
少なくともいずれか一方を移動させて上記検出光で上記
被膜上を走査する走査手段とを具備したことを特徴とす
るガラス基板の被膜検査装置。(1) An inspection table on which a flat glass substrate provided with a coating is placed with the coating on the front side, and a condensing optical system that collects detected light from a monochromatic light source or a laser oscillator using the condensing optical system. a light projector that focuses light into a spot on the coating; and a light projector installed at a position away from the optical path of the specularly reflected light of the detection light on the coating to receive the diffusely reflected light due to defects in the coating, and the intensity of the reflected light. a diffusely reflected light detector that sends out a signal corresponding to the intensity of the transmitted light; a transmitted light detector that is provided on the back side of the glass substrate and receives the transmitted light of the detection light and sends out a signal corresponding to the intensity of the transmitted light; scanning means for scanning the coating with the detection light by moving at least one of the inspection table and detection means comprising the body, the diffusely reflected light detector and the transmitted light detector; A glass substrate coating inspection device characterized by:
求の範囲第１項記載のガラス基板の被膜検査装置。(2) A coating inspection device for a glass substrate according to claim 1, wherein the detection light is a laser beam.
位置を検出する回転駆動体と、上記検査テーブルを直線
移動させかつ移動位置を検出する送り駆動体とを有する
ことを特徴とする特許請求の範囲第１項または第２項記
載のガラス基板の被膜検査装置。(3) The scanning means has a rotary drive body that rotates the inspection table and detects the rotational position, and a feed drive body that linearly moves the inspection table and detects the movement position. A coating inspection device for a glass substrate according to item 1 or 2.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9749087A JPS63263453A (en) | 1987-04-22 | 1987-04-22 | Film inspecting device for glass substrate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9749087A JPS63263453A (en) | 1987-04-22 | 1987-04-22 | Film inspecting device for glass substrate |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63263453A true JPS63263453A (en) | 1988-10-31 |
Family
ID=14193714
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9749087A Pending JPS63263453A (en) | 1987-04-22 | 1987-04-22 | Film inspecting device for glass substrate |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63263453A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02268257A (en) * | 1989-04-10 | 1990-11-01 | Nippon Telegr & Teleph Corp <Ntt> | Method and apparatus for inspecting lightguide film |
| US5157543A (en) * | 1989-12-08 | 1992-10-20 | International Business Machines Corporation | Optical beam deflector |
| CN106198569A (en) * | 2016-08-03 | 2016-12-07 | 广东工业大学 | A kind of LTPS/IGZO glass substrate broken hole method for quick |
-
1987
- 1987-04-22 JP JP9749087A patent/JPS63263453A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02268257A (en) * | 1989-04-10 | 1990-11-01 | Nippon Telegr & Teleph Corp <Ntt> | Method and apparatus for inspecting lightguide film |
| US5157543A (en) * | 1989-12-08 | 1992-10-20 | International Business Machines Corporation | Optical beam deflector |
| CN106198569A (en) * | 2016-08-03 | 2016-12-07 | 广东工业大学 | A kind of LTPS/IGZO glass substrate broken hole method for quick |
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