JPS632583A - High energy beam machine - Google Patents

Abstract

PURPOSE:To prevent the blowing of a gas, dust, etc. to the lower side of a work by standing a lot of supporting columns of a work on the upper part plate provided with a work table, providing a lot of the upper and lower through holes on the above upper part plate and connecting an exhaust chamber to a suction device. CONSTITUTION:A work piece W is placed on a work table 7, a laser beam is led to a work head 9 and the laser beam machining of the work piece W is performed. The supporting columns for supporting the work piece W are provided numerously on a plate 25. The filter member 29 composed of a non- combustible material(glass fiber, etc.) is laid on the upper part plate 25 and the upper and lower through holes 31 are numerously pierced on the upper part plate 25. In this way, the gas and dust spouted from the exhaust chamber 33 and exhaust port 38 are sucked at the machining time of the work piece W. consequently, the work table is protected from a high temp. dross, etc. and the contamination onto the surrounding work environment can be prevented.

Description

[Detailed Description of the Invention] [Technical Field of the Invention] The present invention relates to a processing device, such as a laser processing device or a plasma processing device, which processes a workpiece by irradiating the workpiece with a high-energy beam. More specifically, the present invention relates to a beam processing device capable of efficiently suctioning and removing harmful gases, dust, etc. generated during processing.

[Technical background of the invention and its problems] Conventionally, as a device for cutting a plate-shaped workpiece, a high-energy beam is irradiated onto the workpiece, such as a laser processing device or a plasma beam (plasma jet) processing device. Equipment for processing has been developed. for example,
There are various types of laser processing equipment, such as a fixed optical axis method, an optical scanning method, and a combined method. In a type in which a processing head that irradiates a heavy beam moves relative to a workpiece, a suction device is generally provided on the side of the processing head.

That is, in the above-mentioned type of laser processing apparatus, harmful gas layer dust and the like generated during processing are removed by suction using a suction device provided on the side of the processing head. Therefore, gas, dust, etc. blown out to the bottom of the workpiece cannot be removed, resulting in problems such as contamination of the surrounding working environment.

[Object of the Invention] The present invention has been made in view of the above-mentioned conventional problems, and its purpose is to efficiently remove gas, dust, etc. blown out to the lower side of a workpiece. It is an object of the present invention to provide a beam processing device equipped with a novel work table that can be used.

[Summary of the Invention] - In order to achieve the object as described in F, in the present invention, a work table supporting the work piece is disposed below the processing head for irradiating the work piece heavy beam. A number of support pillars for supporting the workpiece are erected on an upper plate provided on the work table, and a nonflammable filter member is laid down, and a number of upper and lower through holes are formed in the upper plate. In addition, an exhaust chamber formed at the bottom of the upper plate is connected to a suction device.

[Embodiment 1 of the Invention The embodiments of the present invention described below with reference to the drawings will be explained in the case of a laser processing device as the beam processing device. The present invention can also be implemented in other processing equipment such as the following.

Referring to FIG. 1, a laser processing apparatus 1 exemplified as an example of a beam processing apparatus includes a laser oscillation section 5 on one side of a base 3. A work table 7 for supporting a plate-shaped workpiece W is provided on the base 3, and a processing head 9 for irradiating a laser beam onto the workpiece W is located above the work table 7. It is provided so as to be movable in the front, rear, left and right directions.

More specifically, a guide rail 11 extending in the front-rear direction (X-axis direction) is provided on the base 3, and this guide rail 11 has a workpiece extending in the left-right direction (Y-axis direction). Beam member 13 located above the table 7
is supported so as to be movable in the front and rear directions. The processing head 9 is supported on the beam member 13 so as to be movable in the left-right direction. The movement mechanism for the back and forth movement of the beam member 13 and the left and right movement of the processing head 9 is constituted by, for example, a linear pulse motor or an appropriate servo drive mechanism using a ball screw, and the movement is performed by known means. Therefore, detailed explanation of the moving mechanism will be omitted.

The laser oscillation unit 5 is provided at one end of the beam member 13.
A beam bender device M15 is provided to bend the laser beam from the processing head 9 in the direction of the processing head 9. A telescopic beam conduit 17 is provided between the beam bender device 15 and the laser oscillation section 5. The processing head 9 includes a second beam bender device that vertically bends the laser beam from the beam bender device 15, and a condensing lens 19 for condensing the laser beam. It is being A second beam conduit 21 is extendably provided between the beam bender 15 and the processing head 9. Although detailed illustrations are omitted,
The processing head 9 is equipped with a nozzle 23 for injecting assist gas.

In the above configuration, the workpiece W is supported on the worktable 7, the laser beam from the laser oscillation unit 5 is guided to the processing head 9, and the condensing lens 19 of the processing head 9 focuses the laser beam on the workpiece W. By irradiating the area and injecting assist gas from the nozzle 23,
Laser processing is performed on the workpiece W. Then, while moving the beam member 13 back and forth appropriately, the processing head 9
by moving left and right along the beam member 13.

It will be appreciated that the workpiece W can be cut to any desired shape.

The work table 7 is formed into a box shape as schematically shown in FIG. It is a standing structure. Also, upper plate 2
A filter member 29 made of a suitable non-combustible material such as glass mm1 is disposed on the upper plate 25, and a large number of upper and lower through holes 31 are formed in the upper plate 25. Upper plate 2 in the work table 7
An exhaust chamber 33 is formed in the lower part of the exhaust chamber 3.
The exhaust port 35 provided in 3 is connected to an appropriate suction device such as a concentrated imaging device.

Therefore, when processing the workpiece W as described above, the exhaust chamber 33 of the work table 7 is maintained at negative pressure by the action of the suction device, so that the gas, dust, etc. spouted downward from the workpiece W is discharged from the exhaust chamber 33. 33, and will not contaminate the surrounding working environment.

As mentioned above, dust etc. are exhausted! 33, relatively large dust particles are filtered by the filter member 29, so that a secondary filtering action is performed.
In a dust collector or the like, it is only necessary to filter small dust particles, etc., and the life of the filter in the tJn device is extended. In addition, high-temperature dross generated during processing is collected by two non-flammable filter members, so
The upper plate 25 of the work table 7 can be protected.

[Effects of the Invention] As can be understood from the above description of the embodiments, the gist of the present invention is as described in the claims. It is possible to suction and remove gas, dust, etc. ejected from the underside of the workpiece while protecting the workpiece from contamination of the surrounding working environment.

Note that the present invention is not limited to the above-described embodiments, but can be implemented in other embodiments by making appropriate changes.

[Brief explanation of the drawing]

The drawings show one embodiment of the present invention, and FIG. 1 is a perspective view of a laser processing device implementing the present invention, and FIG. 2 is a conceptual cross-sectional view of the main parts shown in FIG. 1. FIG. 9... Processing head 7... Work table 25
...Top plate 27...Support column 29...Fill member 31...Through hole 33...Exhaust chamber Agent Patent attorney Yasuo Miyoshi Figure 1 Figure 2

Claims (1)

[Claims] A work table for supporting the work piece is disposed below the processing head for irradiating the beam onto the work piece, and a support column for supporting the work piece is provided on an upper plate provided on the work table. A large number of erected and nonflammable filter members are installed, and a large number of upper and lower through holes are formed in the upper plate, and
A high-energy beam processing device characterized in that an exhaust chamber formed at the bottom of an upper plate is connected to a suction device.