JPS6325736Y2 - - Google Patents
Info
- Publication number
- JPS6325736Y2 JPS6325736Y2 JP13669383U JP13669383U JPS6325736Y2 JP S6325736 Y2 JPS6325736 Y2 JP S6325736Y2 JP 13669383 U JP13669383 U JP 13669383U JP 13669383 U JP13669383 U JP 13669383U JP S6325736 Y2 JPS6325736 Y2 JP S6325736Y2
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- diameter
- shaped
- disc
- thin plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000004065 semiconductor Substances 0.000 claims description 11
- 235000012431 wafers Nutrition 0.000 description 60
- 238000005468 ion implantation Methods 0.000 description 10
- 238000000034 method Methods 0.000 description 7
- 150000002500 ions Chemical class 0.000 description 6
- 210000000078 claw Anatomy 0.000 description 2
- 229910001423 beryllium ion Inorganic materials 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13669383U JPS6045437U (ja) | 1983-09-05 | 1983-09-05 | 半導体ウエ−ハホルダ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13669383U JPS6045437U (ja) | 1983-09-05 | 1983-09-05 | 半導体ウエ−ハホルダ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6045437U JPS6045437U (ja) | 1985-03-30 |
| JPS6325736Y2 true JPS6325736Y2 (es) | 1988-07-13 |
Family
ID=30307269
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13669383U Granted JPS6045437U (ja) | 1983-09-05 | 1983-09-05 | 半導体ウエ−ハホルダ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6045437U (es) |
-
1983
- 1983-09-05 JP JP13669383U patent/JPS6045437U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6045437U (ja) | 1985-03-30 |
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