JPS63254275A - Sliding-free gate valve for high vacuum - Google Patents

Abstract

PURPOSE:To permit the high speed operation and reduce the weight and dimension by sealing and connecting a valve plate and a counter plate by a metal bellows and introducing the compressed air into the sealed space. CONSTITUTION:A valve body 2 is constituted of a valve plate 11, counter plate 12, and a metal belows 13 prepared by sealing and connecting the both plates 11 and 12, and the compressed air can be supplied into a sealed space 16 formed by the both plates 11 and 12 and the metal bellows 13 through the air passage 70 of a rod 7. Therefore, the opening/closing operation of the valve body 12 can be carried out in sliding-free state by discharging the compressed air from the sealed space 16, and the opening/closing speed can be increased, and the weight and dimension can be reduced.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a sliding gate valve that is used in a high vacuum.

Conventionally, this type of gate valve generally includes a valve box and a valve that is movably or pivotably attached to the valve box to open and close the valve opening provided therein. The valve body consists of a valve plate arranged parallel to each other and a counter plate, and the valve plate is pressed against the valve seat surrounding the valve opening, thereby opening the valve opening. Closed type gate valves are known. In this type of gate valve, a link mechanism, a sliding mechanism using a taper block, a mechanism using balls or rollers, etc. are used to press the valve plate against the valve seat and perform a sealing action. ing. However, in all of these mechanisms, such as rotating parts and sliding parts,
Since the valve has parts that move relatively, galling may occur between the parts that move relatively during use in a high vacuum, making it impossible to open and close the valve. In addition, it is common that there are problems such as it is impossible to open and close at high speeds, or various obstacles occur due to dust generated due to wear due to mutual movement. It is a well-known place.

Gate valves that use metal bellows or diaphragms in the sealing mechanism have already been proposed in order to solve some of these problems, but these have a valve seat that faces the valve plate. Two types are known: one in which a double bellows is arranged concentrically on the side, and the other in which a metal bellows is arranged between the valve plate and the counter plate. Among these, the former type has a metal bellows placed on the valve seat side, so the structure is complicated, and compared to the latter type, the valve has the disadvantage of being thicker and heavier. have. In addition, the latter type requires a guiding mechanism such as a steady rest because the weight of the valve plate part where the metal bellows is arranged is large, and for this purpose it is necessary to provide a sliding part in a high vacuum. There are drawbacks.

As described above, it is clear that the high vacuum gate valves that have already been proposed have various problems in their construction.

As time goes on, the present invention solves the problems or drawbacks of gate valves of this type, including those for which improvements have already been proposed, and is of a free-flowing type. The object of the present invention is to obtain a non-sliding gate valve for high vacuum use that is capable of high-speed operation, is lightweight and compact, and has high reliability.

In order to achieve this object, in the present invention for a valve opening, a valve plate and a counter plate made of circular metal plates are connected to each other in a sealed manner by a metal bellows, and
Each valve plate and counter plate 1 have a central portion made of a pressure-resistant thin metal plate, and each valve plate, counter plate, and metal bellows define a sealed space between them. By introducing compressed air from the outside into the sealed space,
The metal bellows is stretched against its elasticity, thereby pressing the valve plate against the valve seat, thereby closing the valve opening.In order to open the valve opening from this state, the valve opening is opened from within this sealed space. By releasing compressed air, the metal bellows is contracted due to its elasticity, thereby separating the valve plate from the valve seat and opening the valve opening. In this case, when the valve plate presses the valve seat, the counter plate contacts the inner wall of the valve body facing the valve seat, thereby reducing the reaction force generated by the valve plate pressing the valve seat. Uke, like taking, is something that takes action.

Hereinafter, the present invention will be described with reference to the first and second drawings of the attached drawings, which show embodiments thereof.
This will be explained in detail based on the figures.

First, as shown in FIG. 1, the gate valve according to the present invention includes a thin hollow box-shaped valve body 1 having a circular front profile, and a valve body 1 disposed inside the valve body 1. The valve body 2 is composed of a disk-shaped valve body 2, and the valve body 2 has a valve opening 1 formed in the valve body 1 in the axial direction. It is designed to open and close. Also, on the outside of the valve body 1, a pair of brackets 41.4□ are vertically fixed to the upper surface 3 at intervals in the longitudinal direction (see FIG. 2), and these brackets 4.4. ．． 42
In the spacing between the inverted U-shaped bearings is arranged a member 5, each of its leg portions 5. ．． 52 to each opposing bracket 4. ．． 42, is rotatably mounted by respective pivot bearings 63, 6□ fixed to the member 5, and a hollow bar-shaped rod 7 is fixed to the center of the central web portion 53 of the member 5 near its upper end. Leave it there,
A valve body 2 is fixed in the radial direction to its lower end. Furthermore, an air cylinder 8 is installed on the top surface of the valve box 1.
At the end of the piston rod, it is rotatably mounted so that its axis is perpendicular to the longitudinal axis of the valve body 1 (see Figure 1).
, the end of the piston rod is pivotably attached to a rod 7 near the upper end of the rod 7 above the member 5 in an inverted U-shaped bearing. In this way, when the air cylinder 8 is operated so that its piston rod expands and contracts,
The rod 7 has a bearing fixed to it together with the member 5 a pivot bearing 6. ．． A bracket (+) fixed to the valve body 1 around 62, pivots relative to 42 and thus connects the rod 7
In FIG. 1, the valve body 2 fixed to the lower end of the valve body 2 is shown in an open state in which its pivoted position to the right is indicated by a broken line, and in its pivoted position to the left, which is similarly indicated by a broken line. This makes it possible to selectively take the closed state.

In this embodiment, there is a gap between the bracket 4□ on the right side in FIG. A compression coil spring 9 is arranged, and due to the action of this compression coil spring 9, the bearing always pushes the member 5 to the left side as seen in FIG. 2, and the other leg portion 51 presses against the left bracket 41. It is intended to be done. Further, the inverted U-shaped bearing is connected to the lower surface of the web 53 of the member 5 and the upper surface 3 of the valve body 1.
A metal bellows 3° is disposed surrounding the rod 7 in order to seal it from the outside.
Its upper and lower ends are sealed and fixed to each other.

Next, the configuration of the valve body 2 itself will be explained in detail.

As shown in FIG. 2, this valve body 2 has a vertical valve plate 11 made of a circular metal material, and a circular metal material of approximately the same size extending coaxially with the vertical valve plate 11 and parallel to the valve plate 11 at a distance. It consists of a vertical counter plate 12 made of wood and a metal bellows 13 which seals and firmly welds both plates 11, 12 to each other near their opposing outer circumferential surfaces. . In this embodiment, the valve plate 10 and the counter plate 11 are actually annular ring members 1.0. ．． 11. and pressure-resistant thin metal plates 14 and 1.5 in the shape of a mirror plate formed by molding a thin metal plate into a spherical shape, arranged inside the same.
These pressure-resistant metal plates 14, 15 face each other so that their spherical tops approach each other, and their outer peripheries are connected to the annular ring member 101. In the inner periphery of the IL,
Sealed and fixed. In this way, the annular ring member 10. ．． 11. and pressure-resistant metal sheet 14.15
A valve plate 11 and a counter plate 1 consisting of
2 and metal bellows 13 have a sealed space 1 between them.
6. Also, this closed space 1
An air passage 7° is opened in the valve body 6 and is formed by penetrating a rod 7 connected to the valve body 2 in the axial direction thereof. Therefore, the valve body 2 is connected via the rod 7 to the pivot bearing 6. ．． 6
2 around the valve opening 1 of valve wi1. When the rod 7 is rotated to the closed position, the rod 7 is inserted into the closed space 16.
When compressed air is supplied through the air passage 7° of the metal bellows 13, it is stretched against its elasticity, and the valve plate 10 is moved by its annular member 10. However, counter plate 1
The annular member 111 of the valve body 1 is pressed toward the valve seat 17 installed around the valve opening 1 of the valve body 1 . In this state, when the pressure of the compressed air in the sealed space 16 further increases, the inverted U-shaped bearing fixed to the rod 7 will cause one leg member 52 of the member 5 to move toward the pivot shaft 6 □. The compression coil springs 9 arranged around the counter plates 1 to 11 are moved to the right as viewed in FIG. The support is pressed against the seat 18, and as a result, the annular member 10 of the valve plate 10 is strongly pressed against the valve seat j7, which causes the annular member 101 of the valve plate 10 to be The annular sealing material 19 is pressed against the valve seat 17 and completely seals and closes the valve opening 11.

On the other hand, in order to bring the valve plate 10 from the closed state of the valve opening 11 to the open state, compressed air can be discharged from the sealed space 16 to the outside through the air passage 4° of the rod 4. . That is, in this way, the sealed space 16
When compressed air is discharged from inside, the valve plate 10 comes to separate from the valve seat 17 due to the elastic contraction of the metal bellows 13.
In order to quickly remove the valve plate 10,
A tension spring 20 is appropriately arranged outside the metal bellows 13 to connect the counter brakes 1 to 11, and the tension force of the spring 20 causes the valve of the valve plate 10 to I will have the seat 17 assist in the escape. At the same time, the bracket 4□ and the bearing are connected to one leg portion 5 of the member 5. Due to the action of the compression coil spring 9 disposed between the valve body 2 and
As a whole, the counter plate 11 moves to the left as viewed in FIG. At the same time, the annular members io, , IL of both plates 10, 11 can be removed from the valve seat 17 and the valve seat 18, respectively.

In addition, in this state, the operation of the air cylinder 8 causes the valve body 2 to pivot around the pivots 6□, 62 via the rod 7 and the inverted U-shaped bearing 5, thereby completely opening the valve opening 11. It becomes possible to make it into an open state.

It should be noted that in this case the annular members 10, . 11. Since the valve seat 17 and the receiver of the valve body 1 are completely separated from the seat 18, they do not come into contact with the inner wall surface of the valve body 1 during the pivoting movement of the valve body 2.

121 The present invention has the above-described structure and operation, but
Here, one example will be specifically explained as follows.

When the inner diameter of the valve opening 11 is 100 tnm, the thickness of the valve body 2 is 761 mm, and this value is similar to that of a conventional high vacuum gate valve. Further, the metal bellows 13 had a double plate thickness of 0.35 m + a, and had five ridges. Furthermore, a mirror plate 1 made of a pressure-resistant metal thin plate
4.15, the plate thickness was 2 mm. The lifespan of this metal bellows has been confirmed in advance to pass an expansion and contraction test of 350,000 times.

As a result of the test, the sealing performance of this example was as follows. It was confirmed that by applying additional pressure, it was possible to seal with a compressed air pressure of about 172 mm compared to the conventional one. Further, the rod 7 and the bearing of the valve body 2 are pivot bearings via the member 5, and when turning around 6□, the valve body 2 moves without contacting any part of the inner wall of the valve body 1, Moreover, the turning time for opening and closing was less than 1 second, and the operation could be performed without any problems.

11 to 1 and the present invention has the above-described structure and operation, so that the opening and closing operations of the valve can be performed in a swaying state, and therefore, the relative movement of members that is likely to occur in a high vacuum can be avoided. There are no malfunctions due to galling during operation, and no dust generation due to wear. In addition, although the opening and closing speed of the valve body is higher than that of conventional valve bodies, its weight and
The dimensions are the same or smaller, and can exhibit excellent effects.

[Brief explanation of drawings]

FIG. 1 is a partially cutaway front view showing one embodiment of the present invention, and FIG. 2 is a longitudinal sectional view thereof. 1... Valve box, 2... Valve body, 4. ．． 42... Bracket, 5... Bearing is member, 6. ．． 62...Pivot bearing, 7...Rod, 8...Air cylinder, 9...
・Compression coil spring, 10...Valve plate, 11・
...Counter play 1~. 10. , IL... Annular member, 14.15... End plate, 16... Sealed space, 1
7...Valve seat, 19...Tension spring member.

Claims (1)

[Claims] 1. A non-sliding gate valve for high vacuum consisting of a valve box having a valve seat surrounding the valve opening and a valve body for opening and closing the valve seat, in which the valve body is made of a circular metal A valve plate consisting of a plate, a counter plate consisting of a circular metal plate having approximately the same outer diameter arranged parallel to the valve plate, and a metal bellows that connects both plates by sealing them together at their outer peripheries. This forms a sealed space bounded by the valve plate, counter plate, and metal bellows, and pressurized gas is supplied from the outside into this sealed space, or pressurized gas is supplied from this sealed space. By discharging the metal bellows to the outside, the metal bellows expands and contracts, thereby pressing the valve plate against the valve seat against the elasticity of the metal bellows, or contracting due to the elasticity of the metal bellows, thereby causing the valve plate to press against the valve seat. A non-sliding gate valve for high vacuum, which is characterized by being moved away from the seat. 2. A patent claim in which a valve plate and a counter plate made of metal plates each consist of an annular metal disc and a circular pressure-resistant metal thin plate whose outer periphery is sealed and fixed to the inner periphery of the annular metal disk. A sliding gate valve without high vacuum use as described in item 1. 3. The non-swinging gate valve for high vacuum use according to claim 2, wherein each of the circular pressure-resistant thin metal plates is formed into a spherical shape, and the tops thereof are arranged close to each other. 4. The valve plate and the counter plate are interconnected by a tension spring member on the outside of the metal bellows interconnecting them. Yu-motion gate valve. 5. A rod extending radially in the direction of the surfaces of the valve plate and counter plate is fixed to the valve body at its lower end, and this rod is rotatably attached to the outside of the valve body near its upper end to open the valve. 5. A high-vacuum non-swivel gate according to any one of claims 1 to 4, wherein the valve body is pivoted to a position transverse to the valve opening in the valve box when the gate is opened. valve. 6. Fix a pair of vertical brackets at intervals on the outer surface of the upper part of the valve body, place an inverted U-shaped bearing member between them, and connect each leg portion to each bracket via a pivot bearing. In addition, the upper end of the rod is fixed to the center member of the inverted U-shaped bearing member, and the inverted U-shaped bearing member is attached to the upper outer surface of the valve body in a freely pivotable manner. 6. The non-swinging gate valve for high vacuum according to claim 5, wherein the piston rod end of the attached air cylinder is rotatably attached. 7. A patent claim in which a space is provided between one bracket and one leg portion of an inverted U-shaped bearing member facing the bracket, and a compression spring is arranged around the pivot shaft within this space. A non-sliding gate valve for high vacuum according to item 5 or 6.