JPH03239884A - Ultra-high vacuum gate valve - Google Patents
Ultra-high vacuum gate valveInfo
- Publication number
- JPH03239884A JPH03239884A JP3379990A JP3379990A JPH03239884A JP H03239884 A JPH03239884 A JP H03239884A JP 3379990 A JP3379990 A JP 3379990A JP 3379990 A JP3379990 A JP 3379990A JP H03239884 A JPH03239884 A JP H03239884A
- Authority
- JP
- Japan
- Prior art keywords
- valve
- valve plate
- plate
- seat
- box
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012530 fluid Substances 0.000 abstract description 19
- 238000004519 manufacturing process Methods 0.000 abstract description 5
- 239000004065 semiconductor Substances 0.000 abstract description 4
- 238000000926 separation method Methods 0.000 abstract 1
- 238000000034 method Methods 0.000 description 3
- 238000004891 communication Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
Landscapes
- Sliding Valves (AREA)
- Details Of Valves (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は超高真空ゲート弁、特に半導体製造装置に用い
られる超高真空ゲート弁に関するものである。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to an ultra-high vacuum gate valve, and particularly to an ultra-high vacuum gate valve used in semiconductor manufacturing equipment.
従来半導体製造装置に用いられている超高真空ゲート弁
は通常弁箱と、この弁箱に形成した弁座と、この弁座に
離、接して流体通路を開閉する弁板と、この弁板を開閉
操作するため上記弁箱内に設けた弁板駆動機構とより戒
っている。Ultra-high vacuum gate valves conventionally used in semiconductor manufacturing equipment usually consist of a valve box, a valve seat formed in the valve box, a valve plate that opens and closes a fluid passage in contact with and apart from the valve seat, and this valve plate. The valve plate drive mechanism installed inside the valve box is used to open and close the valve.
然しなから上記従来の超高真空ゲート弁においては弁箱
内において上記弁板駆動機構が占めるスペース（デッド
スペース〉が上記流体通路に常時連通しており、上記流
体通路に処理ガスを導入した場合この処理ガスが上記デ
ッドスペース内にも入り込み、吸着現象等により上記弁
板駆動機構の外表面及びデ・ノドスペース部分を形成す
る弁箱内壁に付着し、集積回路の高密度化を達成するた
めに流体通路部分を１０−”）−ル程度の超高真空に排
気する場合、−旦吸着した上記付着した処理ガスの除去
が極めて困難であった。However, in the conventional ultra-high vacuum gate valve, the space (dead space) occupied by the valve plate drive mechanism inside the valve box is always in communication with the fluid passage, and when a process gas is introduced into the fluid passage, This processing gas also enters the dead space and adheres to the outer surface of the valve plate drive mechanism and the inner wall of the valve box forming the de-nod space due to adsorption phenomena, thereby achieving higher density of the integrated circuit. When the fluid passage portion is evacuated to an ultra-high vacuum of about 10"), it is extremely difficult to remove the adhering processing gas that has been adsorbed.
本発明は上記の欠点を除くようにしたものである。The present invention seeks to eliminate the above-mentioned drawbacks.
（課題を解決するための手段〕
本発明の超高真空ゲート弁は弁箱と、弁座と、開口を有
する弁板と、この弁仮に連結した弁棒と、弁棒駆動機構
と、弁板押えと、上記弁箱と上記弁座及び弁板押え間に
介挿連結された伸縮自在なベローズとより成り、上記弁
板の開、閉位置では上記弁板が常時上記弁座及び上記弁
板押えに対接し、上記弁棒駆動機構が占める上記弁箱内
のデッドスペースが閉塞されることを特徴とする。(Means for Solving the Problems) The ultra-high vacuum gate valve of the present invention includes a valve box, a valve seat, a valve plate having an opening, a valve stem temporarily connected to the valve, a valve stem drive mechanism, and a valve plate. and a retractable bellows inserted and connected between the valve box, the valve seat, and the valve plate holder, and when the valve plate is in the open or closed position, the valve plate is always in contact with the valve seat and the valve plate. A dead space in the valve box which is in contact with the presser foot and which is occupied by the valve stem drive mechanism is closed.
又本発明の超高真空ゲート弁は弁箱と、弁座と、弁板と
、この弁板に連結した弁棒と、弁棒駆動機構と、弁板押
えと、上記弁箱と上記弁板押え間に連結介挿された伸縮
自在なベローズとより戒り、上記弁板の閉位置では上記
弁板が常時上記弁座及び弁板押えに対接し、上記弁板の
閉位置では上記弁板押えが常時上記弁座に対接して、上
記弁棒駆動機構が占める上記弁箱内のデッドスペースが
閉塞されることを特徴とする。Further, the ultra-high vacuum gate valve of the present invention includes a valve box, a valve seat, a valve plate, a valve stem connected to the valve plate, a valve stem drive mechanism, a valve plate holder, the valve box and the valve plate. Due to the telescopic bellows connected and inserted between the retainers, when the valve plate is in the closed position, the valve plate always faces the valve seat and the valve plate retainer, and when the valve plate is in the closed position, the valve plate The presser foot is always in contact with the valve seat to close off a dead space in the valve body occupied by the valve stem drive mechanism.
本発明の超高真空ゲート弁においては超高真空ゲート弁
が開、閉されて処理ガスが導入される状態では自動的に
弁板押えが弁板又は弁座に協同してプントスペースを閉
じるようになる。In the ultra-high vacuum gate valve of the present invention, when the ultra-high vacuum gate valve is opened and closed and processing gas is introduced, the valve plate holder automatically cooperates with the valve plate or valve seat to close the punt space. become.
以下図面によって本発明の第１の実施例を説明する。 A first embodiment of the present invention will be described below with reference to the drawings.
第１図〜第３図において１は弁箱、２は弁座、３は流体
通路、４は上記弁座２に離、接して上記流体通路３を開
閉する弁板、５はこの弁板４をこれに設けた開口４ａが
上記流体通路３に合致する位置と上記弁板４の他の部分
４ｂが上記流体通路３を塞ぐ位置間に揺動せしめるため
の弁棒、６はこの弁棒５の外端に固定した保持板、７は
この保持板６と上記弁箱１の外面間に上記弁棒５を揺動
自在に且つ弁箱ｌの外部に対して気密に保持するため連
結介挿した伸縮自在なベローズ、８は上記保持板６を上
記弁Ｎ１に対し揺動自在に支持するための枢支部、９は
上記弁棒５の駆動ピストン機構を示し、本発明において
は上記弁板４を介して上記弁座２に対向する位置で弁板
押え１０を配置し、上記弁箱ｌと上記弁座２間に軸方向
に伸縮自在なリング状ベローズ１１を介挿し、このベロ
ーズ１１の両端面を夫々弁箱ｌと弁座２に固定し、同様
にして上記弁箱１と上記弁板押え１０間に軸方向に伸縮
自在なリング状のベローズ１２を介挿し、このベローズ
１２の両端面を夫々弁箱１と弁板押えＩＯに固定せしめ
る。In FIGS. 1 to 3, 1 is a valve box, 2 is a valve seat, 3 is a fluid passage, 4 is a valve plate that is separated from and in contact with the valve seat 2 to open and close the fluid passage 3, and 5 is this valve plate 4. Reference numeral 6 denotes a valve stem 5 for swinging between a position where the opening 4a provided therein matches the fluid passage 3 and a position where the other portion 4b of the valve plate 4 closes the fluid passage 3. A retaining plate 7 fixed to the outer end of the valve housing 1 is connected and inserted between the retaining plate 6 and the outer surface of the valve housing 1 in order to hold the valve stem 5 swingably and airtight with respect to the outside of the valve housing 1. 8 is a pivot portion for swingably supporting the holding plate 6 with respect to the valve N1; 9 is a driving piston mechanism for the valve rod 5; in the present invention, the valve plate 4 A valve plate holder 10 is disposed at a position facing the valve seat 2 through The surfaces of the bellows 12 are fixed to the valve box 1 and the valve seat 2, respectively, and a ring-shaped bellows 12 that is expandable and contractible in the axial direction is inserted between the valve box 1 and the valve plate holder 10 in the same manner. are fixed to the valve box 1 and valve plate holder IO, respectively.
又上記ベローズ１１．１２に夫々上記弁箱ｌに設けた加
圧通路１３．１４を介して加圧流体を導入出来るように
すると共に、上記各ベローズ１１゜１２内には上記ベロ
ーズ１１．１２を常時圧縮状態ならしめるための引張ス
プリング１５．１６を設け、常時は上記弁板４と弁座２
及び弁板押え１０間に隙間（図示せず〉が形成されるよ
うにする。Further, pressurized fluid can be introduced into the bellows 11.12 through pressurized passages 13.14 provided in the valve body l, and the bellows 11.12 can be introduced into each of the bellows 11.12. Tension springs 15 and 16 are provided to keep the valve in a compressed state at all times, and the valve plate 4 and valve seat 2 are always in a compressed state.
A gap (not shown) is formed between the valve plate holder 10 and the valve plate holder 10.
向上記ベローズ１１．１２が常時その復元力によって縮
小される構成のものであれば上記引張スプリング１５．
１６は不要である。If the above-mentioned bellows 11.12 is configured such that it is always contracted by its restoring force, the above-mentioned tension spring 15.
16 is unnecessary.
本発明の超高真空ゲート弁は上記のような構成でるから
駆動ピストン機構９によって弁板４を揺動し、例えば第
２図、第３図に示すように流体通路３を夫々開、閉した
状態では上記加圧通路１３゜１４を介して上記ベローズ
１１．１２内に加圧流体を導入すれば、弁座２及び弁板
押え１０が夫々ベローズ１１．１２によって押され弁板
４に対接されるため弁板駆動機構を含むデッドスペース
１７が流体通路３から完全に遮断されるようになる。Since the ultra-high vacuum gate valve of the present invention has the above-described configuration, the valve plate 4 is swung by the driving piston mechanism 9 to open and close the fluid passage 3, respectively, as shown in FIGS. 2 and 3, for example. In this state, when pressurized fluid is introduced into the bellows 11.12 through the pressure passage 13.14, the valve seat 2 and the valve plate retainer 10 are pushed by the bellows 11.12, respectively, and come into contact with the valve plate 4. Therefore, the dead space 17 containing the valve plate drive mechanism is completely cut off from the fluid passage 3.
従ってこの状態で処理ガスを流体通路３内に導入しても
これがデッドスペース１７内に入り込むことは全く無い
。Therefore, even if the processing gas is introduced into the fluid passage 3 in this state, it will never enter the dead space 17.
向上記ベローズ１１．１２内に加圧流体を導入しなけれ
ば、弁板４と弁座２及び弁板押え１０間には上記引張ス
プリング１５．１６の作用によって隙間が形成されてお
り、弁板４の移動は容易であり、又流体通路３内を排気
する場合には上記デッドスペース１７内も同時に排気さ
れる。If pressurized fluid is not introduced into the bellows 11.12, a gap is formed between the valve plate 4, the valve seat 2, and the valve plate retainer 10 by the action of the tension spring 15.16, and the valve plate 4 is easy to move, and when the inside of the fluid passage 3 is evacuated, the inside of the dead space 17 is also evacuated at the same time.
本発明の第２の実施例においては第４図〜第６図に示す
ように弁板４として開口４ａを有しない円板状のものを
用い、この円板状弁板４が上記流体通路３に合致したと
きこれが閉じられ、離脱したとき開くようにすると共に
、この開いている状態ではベローズ１２の作用で弁板押
えｌＯが直接弁座２に対接されるようにする。In the second embodiment of the present invention, as shown in FIGS. 4 to 6, a disc-shaped valve plate 4 having no opening 4a is used, and this disc-shaped valve plate 4 is connected to the fluid passage 3. It is closed when the bellows 12 is in agreement with the bellows 12, and opened when the bellows 12 is released.
尚この実施例においては弁板４を弁棒５に固定せず互い
に分離せしめ、常時はスプリング１８によって両者が結
合しているが、上記弁板はその閉位置では上記弁板押え
１０によってスプリング１８に抗して弁棒５から弁座２
の方向に若干偏位可能ならしめる。このようにすれば弁
座側のベローズ１１を省略せしめることが出来る。In this embodiment, the valve plate 4 is not fixed to the valve stem 5 but separated from each other, and the two are normally connected by a spring 18. However, in the closed position, the valve plate 4 is held by the spring 18 by the valve plate retainer 10. from the valve stem 5 to the valve seat 2 against the
It is possible to deviate slightly in the direction of . In this way, the bellows 11 on the valve seat side can be omitted.
又上記実施例においては弁板４を弁棒５によって揺動す
る型のものを示したが、弁棒５によって水平方向に移動
する型としても良い。Further, in the above embodiment, a type in which the valve plate 4 is swung by the valve stem 5 is shown, but a type in which the valve plate 4 is moved horizontally by the valve stem 5 may also be used.
上記のように本発明の超高真空ゲート弁によれば極めて
簡単な構成によってゲート弁が開又は閉状態で処理ガス
導入時処理ガスがデッドスペース内に入り込むことがな
く高密度の半導体製造装置に安全に用いることが出来る
大きな利益がある。As described above, the ultra-high vacuum gate valve of the present invention has an extremely simple configuration, and when the process gas is introduced when the gate valve is open or closed, the process gas does not enter the dead space, making it suitable for high-density semiconductor manufacturing equipment. It has great benefits and can be used safely.
第１図は本発明の超高真空ゲート弁の縦断正面図、第２
図、第３図は夫々その動作状態説明用縦断側面図、第４
図は本発明の他の実施例の縦断正面図、第５図、第６図
は夫々その動作状態説明用縦断側面図である。
１・・・弁箱、２・・・弁座、３・・・流体通路、４・
・・弁板、４ａ・・・開口、４ｂ・・・部分、５・・・
弁棒、６・・・保持板、７，１１゜１２・・・ベローズ
、８・・・枢支部、９・・・駆動ピストン機構、１ｏ・
・・弁板押え、１３゜１４・・・加圧通路、１５．１６
・・・引張スプリング、１７
・デッドスペース、
１８ ・
スプリング。
２
図
島
図
あ
慟Fig. 1 is a longitudinal sectional front view of the ultra-high vacuum gate valve of the present invention, Fig.
Figure 3 is a vertical cross-sectional side view for explaining the operating state, and Figure 4 is a longitudinal side view for explaining the operating state.
The figure is a longitudinal sectional front view of another embodiment of the present invention, and FIGS. 5 and 6 are longitudinal sectional side views for explaining its operating state. 1...Valve box, 2...Valve seat, 3...Fluid passage, 4...
...Valve plate, 4a...opening, 4b...part, 5...
Valve stem, 6... Holding plate, 7, 11° 12... Bellows, 8... Piston support, 9... Drive piston mechanism, 1o.
...Valve plate holder, 13゜14...Pressure passage, 15.16
...Tension spring, 17. Dead space, 18. Spring. 2. Figure of Islands
Claims (2)
に連結した弁棒と、弁棒駆動機構と、弁板押えと、上記
弁箱と上記弁座及び弁板押え間に介挿連結された伸縮自
在なベローズとより成り、上記弁板の開、閉位置では上
記弁板が常時上記弁座及び上記弁板押えに対接し、上記
弁棒駆動機構が占める上記弁箱内のデッドスペースが閉
塞されることを特徴とする超高真空ゲート弁。(1) A valve box, a valve seat, a valve plate having an opening, a valve stem connected to the valve plate, a valve stem drive mechanism, a valve plate holder, the valve box, the valve seat, and the valve plate holder. The valve comprises a retractable bellows inserted and connected therebetween, and in the open and closed positions of the valve plate, the valve plate always faces the valve seat and the valve plate retainer, and the valve stem is occupied by the valve stem drive mechanism. An ultra-high vacuum gate valve that is characterized by closing off the dead space inside the box.
棒と、弁棒駆動機構と、弁板押えと、上記弁箱と上記弁
板押え間に連結介挿された伸縮自在なベローズとより成
り、上記弁板の閉位置では上記弁板が常時上記弁座及び
弁板押えに対接し、上記弁板の開位置では上記弁板押え
が常時上記弁座に対接して、上記弁棒駆動機構が占める
上記弁箱内のデッドスペースが閉塞されることを特徴と
する超高真空ゲート弁。(2) A valve box, a valve seat, a valve plate, a valve stem connected to the valve plate, a valve stem drive mechanism, a valve plate holder, and a connection interposed between the valve box and the valve plate holder. When the valve plate is in the closed position, the valve plate is always in contact with the valve seat and the valve plate retainer, and in the open position of the valve plate, the valve plate retainer is always in contact with the valve seat. An ultra-high vacuum gate valve characterized in that a dead space in the valve body occupied by the valve stem drive mechanism is closed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3379990A JPH03239884A (en) | 1990-02-16 | 1990-02-16 | Ultra-high vacuum gate valve |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3379990A JPH03239884A (en) | 1990-02-16 | 1990-02-16 | Ultra-high vacuum gate valve |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03239884A true JPH03239884A (en) | 1991-10-25 |
Family
ID=12396523
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3379990A Pending JPH03239884A (en) | 1990-02-16 | 1990-02-16 | Ultra-high vacuum gate valve |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03239884A (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004286131A (en) * | 2003-03-24 | 2004-10-14 | Smc Corp | Gate valve |
| US8448917B2 (en) | 2007-11-02 | 2013-05-28 | V-Tex Corporation | Vacuum gate valve and a method of opening and closing gate using the same |
| KR101317164B1 (en) * | 2012-02-10 | 2013-10-11 | (주)시스콤 | Fast driving pendulum gate valve equipped with negative pressure structure |
| KR101425811B1 (en) * | 2013-02-15 | 2014-08-05 | (주)시스콤 | High speed pressure controled and particles minimized structure pendulum gate valve enable negative pressure |
| AT14677U1 (en) * | 2014-11-26 | 2016-04-15 | Vat Holding Ag | closure device |
| CN107524821A (en) * | 2017-09-21 | 2017-12-29 | 安徽荣达阀门有限公司 | A kind of water-impervious current limliting valve |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61127987A (en) * | 1984-11-26 | 1986-06-16 | Fuji Seiko Kk | Sealing device for vacuum valve |
| JPS6221180U (en) * | 1985-07-19 | 1987-02-07 | ||
| JPS63254275A (en) * | 1987-04-10 | 1988-10-20 | Irie Koken Kk | Sliding-free gate valve for high vacuum |
-
1990
- 1990-02-16 JP JP3379990A patent/JPH03239884A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61127987A (en) * | 1984-11-26 | 1986-06-16 | Fuji Seiko Kk | Sealing device for vacuum valve |
| JPS6221180U (en) * | 1985-07-19 | 1987-02-07 | ||
| JPS63254275A (en) * | 1987-04-10 | 1988-10-20 | Irie Koken Kk | Sliding-free gate valve for high vacuum |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004286131A (en) * | 2003-03-24 | 2004-10-14 | Smc Corp | Gate valve |
| US8448917B2 (en) | 2007-11-02 | 2013-05-28 | V-Tex Corporation | Vacuum gate valve and a method of opening and closing gate using the same |
| KR101317164B1 (en) * | 2012-02-10 | 2013-10-11 | (주)시스콤 | Fast driving pendulum gate valve equipped with negative pressure structure |
| KR101425811B1 (en) * | 2013-02-15 | 2014-08-05 | (주)시스콤 | High speed pressure controled and particles minimized structure pendulum gate valve enable negative pressure |
| AT14677U1 (en) * | 2014-11-26 | 2016-04-15 | Vat Holding Ag | closure device |
| CN107524821A (en) * | 2017-09-21 | 2017-12-29 | 安徽荣达阀门有限公司 | A kind of water-impervious current limliting valve |
| CN107524821B (en) * | 2017-09-21 | 2019-04-05 | 安徽荣达阀门有限公司 | A kind of water-impervious current limliting valve |
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