JPS63253680A - Metal vapor laser device - Google Patents

Abstract

PURPOSE:To improve the temperature-rise efficiency of a core tube and laser- oscillation efficiency and to increase an output from a laser device by forming a heat-insulating layer holding discharge heat on the outer circumference of the core tube with an electrode and an electrode support flange and forming a large number of protrusions on the electrode. CONSTITUTION:A positive electrode 3 and a negative electrode 4 are set up oppositely at both end sections of a core tube 2 generating plasma as a laser medium. The positive electrode 3 and the negative electrode 4 are supported and fixed respectively by electrode support flanges 5a, 6a. A large number of protrusions 24 are shaped to the inner circumferential surfaces of the cylindrically formed positive electrode 3 and negative electrode 4. The electrode support flanges 5a, 6a are formed to a tapered shape so as to have inclined planes 25 spreading toward the outside of the core tube and be opposed to the edge faces 9a of a heat-insulating layer 9. Insulators 26 are interposed among the electrode support flanges 5a, 6a and the edge faces 9a of the heat-insulating layer 9. Consequently, discharge is easy to be generated among the tips of the protrusions 24, and discharge on the outside of the core tube is reduced. Accordingly, discharge energy is concentrated effectively into the core tube.

Description

[Detailed description of the invention] (Object of the invention) (Industrial application field) The present invention is a metal vapor laser i! ! In particular, the present invention relates to a metal vapor laser 1A device that prevents discharge outside the furnace core tube, utilizes the discharge energy in the right direction, and oscillates and burns high-output laser light with high efficiency.

(Prior Art) The Sea 11 device is used in a wide range of fields such as material cutting, optical communication, medical technology, and the nuclear industry.

Particularly in the raw squid industry, a specific 1IJ1 tope is selectively excited from a mixture of multiple uranium isotopes. This is the core of uranium isotope enrichment technology using the laser method.

As a metal vapor radar device used for enriching uranium isotopes, a copper vapor laser device is generally employed because it can provide a laser with high efficiency and high jd output. This device is configured to apply discharge energy to metal copper, heat it to a high temperature to form metal vapor, and simultaneously generate plasma, which serves as a laser medium, to oscillate laser light at a predetermined wavelength.

Nos. 51 and 21 are cross-sectional views of the conventional metal vapor laser device of this scale. A core tube 2 serving as a discharge tube with high heat resistance is accommodated in the center of the oscillation tube body 1.

At both ends of this furnace core tube 2, a positive electrode 3 and a negative electrode 4 are disposed facing each other, and these electrodes 3.4 are each supported by an electrode support flange 5.6, and between these electrodes A pulsed bipolar discharge occurs in the discharge space 7 formed in the discharge space 7 . At the inner bottom of the furnace core tube 2, a metal vapor source 8, such as copper grains, for generating metal vapor is arranged.

Further, a heat insulating layer 9 made of a material such as aluminum fiber is formed on the outer periphery of the furnace core tube 2, and in order to fix and protect the heat insulating layer 9 in a predetermined position, a protective tube 10 made of quartz or the like is heat insulated. It is provided on the outer periphery of layer 9. A vacuum insulation chamber 12 is formed between the protection tube 10 and an external vacuum container 11 disposed outside of the protection tube 10. The vacuum insulation chamber 12 and the discharge space 7 in the furnace core tube 2 are connected to an exhaust device 13, and the inside thereof is maintained in a vacuum state.

Further, in order to insulate the positive electrode 3 and the negative electrode 4 and obtain good discharge, a break tube 14 made of an insulating material such as ceramic or glass is installed between the external vacuum vessel 11 and the electrode support flange 6. It has been intervened.

To oscillate the laser beam, first operate the exhaust device 13 to exhaust the inside of the vacuum insulation chamber 12 and the space 7,
Subsequently, N is supplied into the discharge space 7 from the buffer gas supply source 15.
A buff 7 gas such as e is introduced to maintain a constant pressure inside.

When the high voltage power source 16, pulse circuit 17, and pulse drive power source 18 are started in this state, a pulsed high electric current is applied between the positive electrode 443 and the negative electrode 4, and discharge plasma is generated in the discharge space 7. Rir. The floating metal vapor collides with the free electrons in this tllTi plasma to excite the metal vapor, and when the excited metal vapor transitions to a lower energy unit, a laser beam of a predetermined wavelength is generated. The Rede light generated in the discharge space 7 passes through the Brewster window 19, 20, and further passes through the output mirror 2 constituting the laser beam resonator 21.
2 and the total reflection mirror 23, its amplitude increases, and the output mirror 22 oscillates.

(Problems to be Solved by the Invention) In the metal vapor laser device of the conventional structure as described above, a discharge plasma is generated in the discharge space by applying a pulsed high voltage between the two electrodes. However, this discharge phenomenon does not occur only between the tips of the two electrodes, as illustrated in Figure 6 (Δ), but actually occurs between the core tube and the core tube, as illustrated in Figure 6 (B). 6 occurs outside of.

In particular, since the outermost periphery of the electrode support flange faces the end face of the heat insulating layer closely, discharge is likely to occur between them.
Insulation layer 9 and protection: J! ! In some cases, the discharge current i flows through the gap between the tube 10 and the tube 10 as shown by the arrow, or directly passes through the inside of the heat insulating layer 9 and is discharged. If this discharge outside the furnace core tube occurs frequently, the discharge energy is not applied to the inside of the furnace core tube but is dissipated outside the casing, reducing the temperature raising efficiency of the furnace core tube and the operating efficiency of the device. Also, furnace 2. There is a case where the discharge energy to excite the metal vapor in the ffi is insufficient, and the oscillation of the sea 11 becomes difficult.

Further, since the discharge current i flows through the heat insulating layer 9, the deterioration of the fllJi heating material is accelerated, causing problems in terms of maintenance and management, such as the need for frequent replacement.

The present invention has been made in order to solve the above problems, and is configured to prevent the discharge energy from escaping outside the core tube and to be used for the c'# effect. The purpose of this invention is to provide a metal vapor laser device that can emit high-efficiency, high-output laser light by improving back-heating efficiency and increasing the excitation rate of the metal vapor filling the furnace core tube. .

[Structure of the Invention] (Means for Solving the Problems) The metal vapor laser device according to the present invention has a furnace core that generates plasma, which becomes a ray IF medium, by applying discharge energy to a metal. A tube and a tube installed opposite to each other at both ends of the furnace core tube to generate a pulse discharge inside the furnace core tube.
441, an electric support flange for supporting the electrode, and a heat insulating layer formed on the outer periphery of the furnace core tube to retain discharge heat within the furnace core tube, and a large number of protrusions are formed on the electrode. and 16゜(Function) According to the gold fIX steam-If device having the above configuration, a large number of protrusions are formed on the ゛electrodes arranged at both ends of the furnace core tube, so that the contact between the positive 71iNI and the negative electrode is Discharge between the parts is likely to occur.

In IJ, the tip of the protrusion provided on the positive electrode and the tip of the protrusion provided on the li2 electrode face each other across a discharge space, so the discharge between the tips is f! 1 is easy. Therefore, formation of a discharge bus from the electrode support flange through the inside of the heat insulating layer or through the gap between the heat insulating layer and the protective tube is relatively suppressed, and the furnace core tube is released 11! decreases significantly.

However, by concentrating hk electric energy into 41 effects in the furnace core tube, 'f(thermal efficiency, ray IF) of the furnace core tube
The optical imaging efficiency is improved and the output of the laser can be increased. , L/This, since there is little deterioration of the insulation material due to the insulation outside the furnace core tube, the maintenance work required for replacing the insulation I, etc. is greatly simplified.

(Embodiments) Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings.

FIG. 1 is a cross-sectional view showing one embodiment of a metal vapor sheath 11; νi according to the present invention. J3, the metal vapor radar device according to the present invention is characterized by the structure of the electrode and the electrode support flange, and other parts are the same as the components of the conventional example shown in FIG. are denoted by the same reference numerals, and detailed explanation thereof will be omitted.

The metal vapor laser device of this embodiment, which is not shown in FIG. A positive electrode 3 and a negative electrode 4 are provided facing each other. The positive electrode 3 and the negative electrode 4 are supported and fixed by electrode support flanges 5a, 5a, respectively. A large number of protrusions 24 are formed on the inner peripheral surfaces of the positive electrode 4Ii3 and the negative electrode 4, which are formed in a cylindrical shape.

This protrusion 24 is, for example, as shown in FIG.
A large number of protruding elements 24a forming the right tip of the electrode 3.4 can be formed on the inner peripheral surface of the electrode 3.4, or the side surface of the electrode 3.4 can be cut into a triangular shape and the cut piece can be bent toward the center of the electrode. Formed with a protruding pointed end. Further, as illustrated in FIG. 2(B), the continuous protrusion 24 can be formed by cutting the peripheral portion of the tip end of the electrode 3.4 into a saw blade shape.

Alternatively, the electrode surface may be partially corroded and dissolved by electrolysis using a so-called etching process to form irregularities to form protrusions.

Electrical Ij3.1 having the projection 24 formed thereon. /I are integrally joined to electrode support flanges 5a and 6a, respectively, and are supported and fixed at predetermined positions within the oscillation tube body 1. Here, the electrode support flanges 5a, 5a are heat insulated w! It is formed in a tapered shape so as to have an inclined surface 25 facing the end surface 9a of J9 and expanding outward from the furnace core tube.

Further, an insulator 26 is interposed between the electrode support flanges 5a, 6a and the end surface 9a of the heat insulating WJ9.

The insulator 26 is made of an insulating material such as ceramic, quartz, or glass.

According to the metal vapor laser device of this embodiment, a large number of protrusions 2 are provided on the electrodes 3.4 which are arranged facing each other across the discharge space 7.
4 is formed (therefore, C discharge is likely to occur between the tips of the protrusions 24. Therefore, the electrode support flange 5a,
The ratio of discharge from 6a through the heat insulating layer 9 or discharge outside the core tube is reduced, and the discharge energy is effectively utilized.

Further, the electrode supporting flanges 5a and 6a, which serve as a shed for flowing discharge current to the 'tr1 poles 3 and 4, face the end surface 9a of the heat insulating layer 9, and are tapered so as to extend outwardly from the inclined surface 25. Since the electrode support flanges 5a and 6a are formed in a shape, the distance between the heat insulating layer end face 9a and the electrode support flanges 5a and 6a increases as the distance from the outer periphery of the contact portion with the cold electrodes 3 and 4 increases in the diametrical direction. When the discharge resistance is n, the discharge outside the furnace core tube decreases.

Furthermore, the electrode support flanges 5a, 5a and the heat insulating layer end face 9a
By interposing the insulator 26 between both -I! i
It is possible to more effectively prevent discharge between the two. Therefore, the discharge energy applied to the 3 and 4 poles is effectively concentrated within the core tube 2, which improves the gastric efficiency and oscillation efficiency of the furnace core tube 2, and reduces the amount of radiation. It is possible to increase the output.

In addition, there is no discharge force outside the furnace core tube inside the heat insulating layer 9,
Since the heat insulation H is less likely to change, the maintenance and management of insulation material adjustment and replacement is more easily integrated into the MI system. Refer to Figure 4-
(This will be explained. In the embodiment shown in FIG. 3, the electrode support flange 6b that supports the electrode 4 is formed integrally with the electrode 4,
The end portion is curved outward, and the curved portion 27 is formed into a head 28.
The electrode 4 is supported and fixed by being fitted onto the inner surface of the electrode.

In this case, the curved portion 27 and the heat insulating layer end portion 9a are separated (
Therefore, there are few discharges between the two provinces. Also, compared to the conventional disk-shaped electrode support flange 6, the electrode support flange 6b of this embodiment is formed in the same body as the electrode 4, and is fixed by fitting into the head 28 with brackets. Since the diameter is C, attachment and detachment of the electrode part is easy. In addition, in the embodiment shown in FIG. 4, the electrode support flange 6C supporting the electrode 144 is formed integrally with the electrode 4, and its end is expanded outward, and the expanded 1m portion 29 is formed integrally with the electrode 4.
is fitted onto the inner surface of the head 28, and an insulator 26a is interposed between the inner surface of the head 28 and the electrode support flange 6G.

In this case, since the first part 29 and the end part 9a of the heat insulating layer are separated from each other, the discharge interval between the two parts is small.

Furthermore, since the insulator 26a is interposed between the two,
Discharge is more effectively prevented. In addition, the conventional disk-shaped electrode support flange cannot be used, and the electrode 4 can be fixed simply by fitting the expanded portion 29 formed integrally with the electrode 4 into the head 28. , maintenance and management of the electrode section becomes easy.

[Efficacy of invention Song Dynasty]

As explained above, according to the metal vapor laser device according to the present invention, since a large number of protrusions are formed on the IC"l1lf electrode arranged at both ends of the furnace core tube, the tip of the protrusion of the l!g electrode Discharge is likely to occur in the discharge space between the electrode support flange and the tip of the protrusion of the cathode.Therefore, the discharge from the electrode support flange passes through the inside of the heat insulating layer, and the , the formation of a discharge path is relatively suppressed v1,
Lightning outside the core tube is significantly reduced.

Therefore, since the discharge energy is effectively supplied into the furnace core tube, the 5vi efficiency and the 1F' oscillation efficiency of the furnace core tube are improved, and the output of the RADE device can be increased. In addition, since there is little electrical discharge in the heat insulating layer, maintenance work such as replacing the heat insulating material is greatly simplified.

[Brief explanation of drawings]

FIG. 1 shows a first embodiment of a metal vapor laser device related to unexploded Ill? jrgi side view, Fig. 2 (A>, (B)G;L
FIG. 3 is a partially sectional view showing the second embodiment of the present invention, FIG. 4 is a partially sectional view showing the third embodiment of the present invention, and FIG. 5 is a perspective view showing the shape of the electrode tip, respectively. Cross-sectional views showing the configuration of a conventional metal-gas laser device, FIGS. 6(A) and 6(B)
are sectional views showing the discharge state between the electrodes, respectively. DESCRIPTION OF SYMBOLS 1... Oscillation tube main body, 2... Furnace core tube, 3... Positive electrode, 4... Negative ff1t4i, 5.5a, 6, 6a, 6b
, 6cm... Electrode support flange, 7... Discharge space, 8
... Metal vapor source, 9... Heat insulating layer, 9a... End face of heat insulating layer, 10... Protection tube, 11... External vacuum container,
12... Vacuum insulation chamber, 13... Exhaust device, 1/l.
...Break pipe, 15...Buffer 1 gas supply source, 16
...High voltage power supply, 17...Pulse circuit 1.18...
・Pulse drive power supply, 19.20... Brewster window, 21... Laser light resonator, 22... Output mirror, 23... Total reflection mirror, 2/I... Protrusion, 24a
... Projection element, 25 ... Inclined surface, 26.26a ...
- Insulator, 27... Curved part, 28... Head, 29
. . . Expanded portion, i . . . Discharge current. Applicant's agent Hisashi Hatano (A)
(B) Figure 2 Figure 3 Figure 4

Claims (1)

[Scope of Claims] 1. A furnace core tube that generates plasma to serve as a laser medium by applying discharge energy to metal, and a pulse discharge device provided at opposite ends of the furnace core tube to generate plasma as a laser medium. an electric support flange for supporting the electrode; and a heat insulating layer formed on the outer periphery of the furnace core tube to retain discharge heat within the furnace core tube, and a large number of protrusions are formed on the electrode. A metal vapor laser device featuring: 2. The metal vapor laser device according to claim 1, wherein the electrode support flange is formed in a tapered shape so as to have an inclined surface facing the end face of the heat insulating layer and expanding outward from the furnace core tube. 3. The metal vapor laser device according to claim 1, wherein the electrode support flange includes an insulator interposed between the electrode support flange and the end face of the heat insulating layer.