JPS63253551A - Conducting film in optical disk mastering process - Google Patents

Abstract

PURPOSE:To eliminate the need for a surface film treatment of a master by a K2Cr2O7 soln. and to prevent deterioration in the electrical characteristics and appearance quality of a mother by foreign matter by forming two layers; a silver layer and NiCr alloy layer atop a resist and glass master disk. CONSTITUTION:The conducting films consisting of the two layers; the silver layer 3 and the NiCr alloy layer 4 are formed on the resist 2 formed with information signal patterns and the glass master disk 1. An electrocasting Ni layer 6 is formed on such layer 4. The master is then stripped from the disk 1 and is subjected to working on the inside and outside diameters, polishing on the rear face, stripping of the resist, cleaning and silver etching. As a result, the master 6 surface constitutes the surface of the NiCr alloy conductor film 4. The master 6 is then directly electrocast with Ni without treatments by which the master 6 and the mother 7 transferred with the patterns thereof are adhered and integrally obtd. A metallic plate or the like is the inserted into the boundary faces therebetween by which the mother 7 is easily parted and obtd. The mother 7 is thus obtd. without using the treatment by a K2Cr2O7 soln. and the stages are rationalized. The deterioration in the quality, appearance, etc., by the foreign matter, dust, etc., associated to the K2Cr2O7 treatment is prevented.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to conductorization processing in an optical disk mastering process.

[Summary of the invention]

In the conductorization process of the optical disc mastering process, the present invention forms two layers, a silver layer and a nickel-chromium alloy layer, on the top surface of a nonconductor resist and a glass master, and then nickel electroforming is applied to the conductorization film. In the process of transferring and replicating the mother from the master formed by
Streamlining the work of treating the surface of the master with a mold release agent and master and mother II! ! This is aimed at improving sexual performance.

[Conventional technology]

The composition of conventional conductive films is silver or nickel.

(Figure 2) When silver is used for the conductive film 5, tin is etched and removed from the master surface, and the master surface becomes a nickel surface, and when nickel is used for the conductive film 5, 4 NiFkels are etched. After applying a master surface coating treatment using a potassium chromate solution to a master surface composed of a chemical film, a mother was manufactured by transferring and duplicating the master.

[Problem that the invention seeks to solve]

However, with the above-mentioned conventional technology, when transferring and duplicating the mother from the master, it is necessary to treat the surface of the master with a potassium dichromate solution, and the equipment and
It is necessary to prepare, manage, and maintain chemicals, solutions, etc. In addition, in the mold release treatment using this in-potassium chromate solution, m! In addition, foreign matter, dust, etc. during processing may extend to the master surface, causing problems such as deterioration of the electrical signal characteristic quality and appearance quality of the mother produced by transferring and duplicating it. have

SUMMARY OF THE INVENTION The present invention aims to solve these problems, and its purpose is to provide a four-piece membrane that can streamline the master surface coating process.

[Means for solving problems]

The present invention is characterized in that the structure on the resist 1 and the glass master disk consists of two layers of silver and a nickel-chromium alloy.

In detail, the 4-layer film is made by forming a silver conductor film as the first layer on the top surface of the resist and glass master disk, which are non-conductors, and then forming a nickel-chromium alloy 4-layer film on the top surface as the second layer. It has a two-layer structure.

〔Example〕

The conductive film of the present invention has the configuration shown in FIG.

First, the development and
In the glass master disk 1 on which the resist pattern 2 has been formed, which has been completed up to the boss baking process, a sputtering method is applied to the upper surface of the glass master disk 1, from which the exposure Φ of the resist 2 on which the information signal pattern has been formed and the resist in the information signal portion has been removed. Using this method, a conductive film 3 having a composition of silver is formed as a first layer. Next, a nickel-chromium alloy quartet 1124 is continuously formed on the silver conductive film 3 as a second ffl.

If the first layer, ie, the silver conductive film 3, is not formed, problems arise in that when the master is separated from the glass master disk 1, the quality of the electrical signal characteristics of the master deteriorates and the quality of the appearance deteriorates. To prevent this, the first T! 1 as 11
10-body l123 is formed into a film.

The sputtering conditions are: sputtering power supply DC, initial vacuum degree 5X.
10-@Torr1 sputter 7 k go/pressure 3X10
-' Torr1 sputtering power is 3OOOW, and the sputtering rate is silver 500λ/mlns nickel chromium alloy 150 people/min. The thickness of the sputtered film is 1
1500λ~1000 people, nickel chromium alloy 400
~700 people. The composition of the nickel-chromium alloy is nickel/chromium = 65/35 to 9515, but when forming a nickel electroformed layer on the nickel-chromium alloy conductive film B4, increasing the chromium ratio results in a nickel-chromium alloy conductive film 4. It is desirable that the ratio of chromium be lower, since the nickel electroformed layer and the bonding strength will be lowered.

Next, a nickel electroformed layer is formed on the nickel chromium alloy tetramer film 4. At this time, the nickel chromium alloy 4-body film 4
Since the front gate is oxidized in the atmosphere and forms a passive film, the anode and cand are reversed and a reverse current is applied before electroforming starts, and the nickel-chromium alloy tetramer film 4 is lightly etched (after etching). It is possible to improve the adhesion of the difluorochromium alloy conductor 1124 and the nickel electroformed layer by electroforming or by forming an electroprotective layer while etching using an alternating current at the beginning of electroforming. is necessary.

Next, after nickel electroforming is completed, the master is removed from the glass master disk.
II [L, Perform inner and outer diameter processing, back surface polishing, resist removal cleaning, and silver etching. The resulting master surface is
There are four nickel-chromium alloy four-layer films. This master is directly set in an electroforming device without treatment, and nickel electroforming is performed to form an electroformed layer with a thickness of about 300 μm. Then the third
As shown in the figure, electroforming is completed in a state where the master 6 and the mother 7 to which the pattern has been transferred and copied are essentially integrated. Master 6 and mother 7 can be easily inserted into the interface between master 6 and mother 7 using a thin metal plate from the outer periphery.
Mother 7 is released from the mold.

〔Effect of the invention〕

As mentioned above, the m1FJ-1llX body IK of the present invention
, 1ff2ff nickel chromium alloy conductive film 2
According to the a-structure tetramer membrane, it is possible to eliminate the work of treating the surface of the master with a potassium dichromate solution, thereby a) eliminating the need for equipment, supplies, and chemicals for the treatment of the master surface, thereby reducing costs; It can be reduced. Moreover, the management and maintenance of the potassium orthochromate solution becomes unnecessary. In other words, it is possible to rationalize the process. 2) Preventing the deterioration of the electrical signal characteristic quality of the motherboard and the deterioration of the appearance quality caused by foreign matter, dust, etc. in the potassium dichromate solution.
Determine the effect of the point.

[Brief explanation of drawings]

Figure 1 shows a cross-section of a resist pattern subjected to tetramerization treatment using a two-layered tetramerization film of the present invention: the first layer is a silver tetramerization film, and the second layer is a nickel-chromium alloy conductive film. Figure 2 is a cross-sectional view of the resist pattern 7 that has been subjected to quaternization treatment using a conventional nickel tetramer film or silver tetramer film. Cross-sectional view when duplicating 1 Glass master 2 Resist 3 4-metal silver film 4 4-nickel chromium alloy film 5 Side conductor film or nickel conductor film 6 Master 7 Mother and above

Claims (1)

[Claims] A conductive film in an optical disc mastering process characterized by a structure on the register and on the glass master disc consisting of two layers of silver and nickel carom alloy.