JPS63250568A - Prober device - Google Patents

Abstract

PURPOSE:To easily bring a probe pin into excellent contact with a transparent electrode pattern by holding a probe pin group, an edge sensor, and a position sensor pin on the substrate of a probe card. CONSTITUTION:A hole 3 is formed in the substrate 2 of the probe card 1. The probe pin group 4 having the same pitch with stripe electrodes 12 is held on the substrate 2 so that tips are led out to the lower part in this hole 3. Sensors 5 provided on both sides of the pin group 4 detect the contact pressure of the pin group 4 to the electrodes 2 by the separation of the sensors from one side between two sensor pins to the other side by bending when they are pressed against an inspection substrate 11 together with the pin groups 4. Further, two position sensor pins 6 are held on the substrate 2 and respective tips are provided in front of the tips of the probe pins 4a at both ends to detect whether or not the sensor pins 6 and pins 4a on both ends short-circuit, thereby judging whether or not the pin group 4 contacts the electrodes 12 excellently.

Description

DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a glover device for inspecting electrode patterns, and particularly to improvements in probe cards.

(Prior Art) Conventionally, a probe card in a groper device for inspecting an electrode's main turn is comprised of an edge sensor for determining the contact pressure of the probe pins and a group of probe pins that actually contact the electrodes. is common. This is the same in, for example, a 7-way inspection of striped electrodes, and a probe card is constituted by a group of probe pins arranged at the same pitch as the electrode pitch and edge sensors provided on both sides of the probe pins.

(Problem to be Solved by the Invention) However, with the conventional probe card as described above, it is not possible to determine the contact pressure using an edge sensor, for example, when inspecting a mother turn of a transparent electrode formed on a transparent substrate. However, it is difficult to see the nine turns of the transparent electrode on the transparent substrate with the stereo microscope attached to the prober device, so it is difficult to judge whether the probe pin is in good contact with the specified transparent electrode. , there was a problem that the inspection took a long time.

It is an object of the present invention to solve the above-mentioned conventional problems and to provide a prober device having an excellent probe card that can easily bring a probe pin into good contact with a transparent electrode. .

(Means for Solving the Problems) The present invention provides a probe card for a prober device, in which, in addition to a group of probe pins and two sensors, a position sensor pin is provided which is short-circuited with the probe pin through an electrode pattern to be tested that the probe pin contacts. It is provided for a predetermined probe pin.

(Function) In the probe card as described above, if the probe pin group is currently in contact with the electrode/setan to be tested, for a given probe pin, the probe pin and the position sensor pin are short-circuited through the electrode pattern to be tested. Ru. Therefore, by detecting whether or not a predetermined probe pin and position sensor pin are in a short-circuit state, it is possible to determine whether or not the probe pin group is in good contact with the electrode/setan to be tested.

(Embodiment) An embodiment of the present invention will be described below with reference to the drawings. FIG. 1 is a perspective view of an embodiment of the present invention. In this figure, 1 is a probe card, 11 is a board on which electrode testing is performed with this probe card 1, and stripe electrodes 12
is formed.

The probe card 1 has a substrate 2 in which a large hole 3 is formed. Then, the stripe electrode 12 is arranged so that its tip is led out below the hole 3.
A group of probe pins 4 having an equal pitch are held on the substrate 2. Further, two-pin sensors 5 are similarly provided on both sides of the probe pin group 40, and when the two-pin sensor 5 is pressed against the test board 11 together with the probe pin group 4, the two sensor pins are The contact pressure of the probe pin group 4 against the stripe electrode 12 is detected by bending one side and separating it from the other side with a predetermined pressure. In addition to this sensor 5 and the probe pin group 4, two position sensor pins 6 are held on the substrate 2, and the tips of the position sensor pins 6 are connected to the probe pins 4a at both ends of the probe pin group 4. It is located at the front of the tip. and,
These probe pin groups 4. The two-piece sensor 5 and the position sensor pin 6 are connected to a terminal 8 at the end of the board 2 via a wiring 7 on the board 2.

In the probe card 1 configured as described above, when the group of probe pins 4 is brought into contact with the striped electrode 12, the contact pressure can be detected and determined by the sensor 5, and the position sensor pin 6 can be used to detect the probe It can be determined whether the pin group 4 is in good contact with the striped electrode 12 or not. That is, when the probe pin group 4 is brought into contact with the stripe electrode 12, and the positions are aligned and the contact is good, the probe pins 4a at both ends are placed in the front position through the stripe electrode 12 that the probe pins 4a contact. Short circuit with sensor pin 6. Therefore, by detecting whether or not there is a short circuit between the position sensor pin 6 and the globe pins 4a at both ends, it is possible to determine whether or not the probe pin group 4 is in good contact with the stripe electrode 12. If not (if not in contact), by moving the substrate 11 (stripe electrode 12) so that it is short-circuited, it is possible to bring the stripe electrode 12 into accurate contact with the probe pin group 41. . Since this method is not a visual inspection method, even if the stripe electrode 12 is a transparent electrode,
This allows for easy and good positioning. In addition,
In the above embodiment, the position sensor pin 6 is provided for each of the probe pins 4a at both ends, but this makes it possible to accurately detect a positional deviation even for a deviation of one pitch of the striped electrode 12. It's for a reason. That is,
Now, the probe pin group 4 is attached to the stripe electrode 1 on the right side of the drawing.
Assume that there is a difference of one pitch of 2.

Then, even if there is such a misalignment, the probe pin 4a on the left side and the position sensor pin 6 are short-circuited at the second stripe electrode 12 from the left side, and it is detected that the alignment is good. In this case, positional deviation can be detected only by the right probe pin 4a and the position sensor pin 6. On the other hand, when the probe pin group 4 is shifted one pitch to the left in the drawing, the opposite is true, and the position shift can be detected only by the left position sensor pin 6 and the probe pin 4a.

Therefore, accurate discrimination is possible by detecting both the left and right sides.

Next, the actual short-circuit inspection of the striped electrode 12 using the probe card 1 as described above will be explained with reference to the schematic diagram of the entire prober device shown in FIG. 2 and the flowchart shown in FIG. 3.

The terminal 8 of the probe card 1 is connected to the scanner 21. Furthermore, the output of two terminals of the terminal 8 is connected from the scanner 21 to the multimeter 22. Further, the scanner 21 and the multimeter 22 are connected to the controller 2.
3.

On the other hand, the substrate 11 on which the striped electrodes 12 are formed is set on the stage of a prober device, and aligned with the probe card 1 using a stereoscopic microscope. Furthermore, the output from the Esso sensor 5 is input to the controller 23 through the scanner 21, and the probe pin group 4 includes the stripe 'r! It is brought into contact with the L pole 12, and from the point where it touches the L pole 12, it is brought into contact with a strong pressure. After that, the outputs of the two position sensor pins 6 and the two probe pins 4a are measured,
If it is smaller than a certain value (for example, about 100Ω), it can be seen that the probe pin group 4 is in good contact with the striped electrode 12 to be inspected. On the other hand, if the output value is more than one foot value (in this case, it is usually more than MΩ), it means that the probe pin group 4 and the stripe electrode 12 are not in good contact with each other, so align them again. , globe bin group 4 in the same manner as above.
and determine whether the stripe electrodes 12 are aligned,
When it matches, move on to short circuit inspection. The short circuit test is performed by sequentially obtaining the outputs of two adjacent stripe electrodes 12 and checking the resistance value. In this short circuit test, if the number of lines of the stripe electrode 12 to be tested is large, after testing with the probe pin group 4,
The stage on which the substrate 11 is mounted is scanned so that the probe pin group 4 can be moved and inspected, and the contact pressure adjustment is returned to.Then, the same process is continued.

(Effects of the Invention) As described above in detail, according to the probe card of the apparatus of the present invention, a position sensor pin is provided which is short-circuited to the probe pin through the test electrode pattern with which the probe pin comes into contact, so that the short-circuit occurs. Since it is possible to determine whether or not the Fuji rope pin group is in good contact with the electrode pattern to be inspected, even if the electrode pattern to be inspected is a transparent electrode pattern on a transparent substrate, the electrode pattern to be inspected is The probe pin can be easily brought into good contact with the probe pin, and the inspection time can be shortened.

[Brief explanation of the drawing]

FIG. 1 is a perspective view for explaining one embodiment of the prober device of the present invention, FIG. 2 is a schematic diagram of the entire blower device, and FIG. 3 is a flowchart for short-circuit inspection. DESCRIPTION OF SYMBOLS 1... Probe card, 2... Board, 4... Probe pin group, 4a... Probe pins at both ends, 5...
Esso sensor, 6...position sensor pin, 12...stripe electrode. Shaku! , -υ Follow IY-, Figure 2

Claims (1)

[Scope of Claims] A group of probe pins arranged at a pitch equal to the pitch of the electrode pattern to be inspected, an edge sensor for determining the contact pressure of the group of probe pins to the electrode pattern to be inspected, and the object to be contacted by the probe pins. A prober device comprising a probe card in which a substrate holds a position sensor pin provided for a predetermined probe pin so as to be short-circuited with the probe pin through a test electrode pattern.