JPS6324828U - - Google Patents
Info
- Publication number
- JPS6324828U JPS6324828U JP11834186U JP11834186U JPS6324828U JP S6324828 U JPS6324828 U JP S6324828U JP 11834186 U JP11834186 U JP 11834186U JP 11834186 U JP11834186 U JP 11834186U JP S6324828 U JPS6324828 U JP S6324828U
- Authority
- JP
- Japan
- Prior art keywords
- processing tank
- liquid processing
- flow path
- chemical solution
- circulation flow
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 claims description 5
- 239000007788 liquid Substances 0.000 claims description 4
- 238000004519 manufacturing process Methods 0.000 claims description 3
- 239000000126 substance Substances 0.000 claims 2
- 235000012431 wafers Nutrition 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Weting (AREA)
- Measurement Of Levels Of Liquids Or Fluent Solid Materials (AREA)
- Cleaning By Liquid Or Steam (AREA)
- ing And Chemical Polishing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11834186U JPH0316279Y2 (ro) | 1986-07-31 | 1986-07-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11834186U JPH0316279Y2 (ro) | 1986-07-31 | 1986-07-31 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6324828U true JPS6324828U (ro) | 1988-02-18 |
| JPH0316279Y2 JPH0316279Y2 (ro) | 1991-04-08 |
Family
ID=31004706
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11834186U Expired JPH0316279Y2 (ro) | 1986-07-31 | 1986-07-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0316279Y2 (ro) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001262383A (ja) * | 2000-01-12 | 2001-09-26 | Nippon Paint Co Ltd | アルミニウム缶ボディーの酸洗浄方法 |
-
1986
- 1986-07-31 JP JP11834186U patent/JPH0316279Y2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001262383A (ja) * | 2000-01-12 | 2001-09-26 | Nippon Paint Co Ltd | アルミニウム缶ボディーの酸洗浄方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0316279Y2 (ro) | 1991-04-08 |