JPS63243726A - Photodiode array detector - Google Patents
Photodiode array detectorInfo
- Publication number
- JPS63243726A JPS63243726A JP7927987A JP7927987A JPS63243726A JP S63243726 A JPS63243726 A JP S63243726A JP 7927987 A JP7927987 A JP 7927987A JP 7927987 A JP7927987 A JP 7927987A JP S63243726 A JPS63243726 A JP S63243726A
- Authority
- JP
- Japan
- Prior art keywords
- photodiode array
- region
- visible region
- coating
- ultraviolet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims description 4
- 230000000903 blocking effect Effects 0.000 claims description 3
- 239000011248 coating agent Substances 0.000 abstract description 10
- 238000000576 coating method Methods 0.000 abstract description 10
- 239000000463 material Substances 0.000 abstract description 9
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract description 6
- 238000000034 method Methods 0.000 abstract description 4
- 235000012239 silicon dioxide Nutrition 0.000 abstract description 4
- 238000000411 transmission spectrum Methods 0.000 abstract description 4
- 238000000862 absorption spectrum Methods 0.000 abstract description 3
- 229910052681 coesite Inorganic materials 0.000 abstract description 2
- 229910052906 cristobalite Inorganic materials 0.000 abstract description 2
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 abstract description 2
- 239000000377 silicon dioxide Substances 0.000 abstract description 2
- 229910052682 stishovite Inorganic materials 0.000 abstract description 2
- 229910052905 tridymite Inorganic materials 0.000 abstract description 2
- 238000007740 vapor deposition Methods 0.000 abstract description 2
- 229910001928 zirconium oxide Inorganic materials 0.000 abstract description 2
- YZCKVEUIGOORGS-OUBTZVSYSA-N Deuterium Chemical compound [2H] YZCKVEUIGOORGS-OUBTZVSYSA-N 0.000 description 6
- 229910052805 deuterium Inorganic materials 0.000 description 5
- 238000005259 measurement Methods 0.000 description 5
- 230000003287 optical effect Effects 0.000 description 4
- 238000001228 spectrum Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000004811 liquid chromatography Methods 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- 238000002835 absorbance Methods 0.000 description 1
- 238000011481 absorbance measurement Methods 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 229910052724 xenon Inorganic materials 0.000 description 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
- G01J3/0229—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using masks, aperture plates, spatial light modulators or spatial filters, e.g. reflective filters
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/2803—Investigating the spectrum using photoelectric array detector
Abstract
Description
【発明の詳細な説明】
（産業上の利用分野）
本発明は液体クロマトグラフ用検出器として用いられる
フォトダイオードアレイ検出器や、分光光度計の分光器
の出口位置に設けられたフォトダイオードアレイを備え
たフォトダイオードアレイ検出器に関するものである。Detailed Description of the Invention (Field of Industrial Application) The present invention relates to a photodiode array detector used as a detector for liquid chromatography, and a photodiode array provided at the exit position of a spectrometer in a spectrophotometer. The present invention relates to a photodiode array detector equipped with a photodiode array.
（従来の技術）
第３図にフォトダイオードアレイ検出器の光学系を示す
。(Prior Art) FIG. 3 shows the optical system of a photodiode array detector.
２は光源、４は試料を流すフローセル、６は光源２から
の光を集光してフローセル４に導く集光系、８は分光器
の入口スリット、ｌＯは分光器の回折格子、１２は分光
器の出口位置に設けられるフォトダイオードアレイであ
る。１４はフォトダイオードアレイ１２の検出信号を処
理する信号処理回路である。2 is a light source, 4 is a flow cell through which the sample flows, 6 is a focusing system that collects the light from the light source 2 and guides it to the flow cell 4, 8 is an entrance slit of the spectrometer, IO is a diffraction grating of the spectrometer, 12 is a spectrometer This is a photodiode array installed at the outlet of the device. 14 is a signal processing circuit that processes the detection signal of the photodiode array 12.
光源２としては通常１重水素（Ｄ２）ランプが用いられ
る。フォトダイオードアレイ検出器は全波長の吸収を同
時に検出することを特徴とする。As the light source 2, a single deuterium (D2) lamp is usually used. A photodiode array detector is characterized by detecting absorption of all wavelengths simultaneously.
（発明が解決しようとする問題点）
分光器の分光素子としては通常、回折格子が使用される
が、紫外域から可視域に渡る全領域の吸収スペクトルを
フォトダイオードアレイ１２で同時に測定しようとすれ
ば、可視域において紫外線の二次光が混入してくるため
正常な測定ができなくなる問題がある。(Problem to be solved by the invention) A diffraction grating is normally used as a spectroscopic element in a spectrometer, but it is difficult to simultaneously measure the absorption spectrum in the entire range from the ultraviolet region to the visible region using the photodiode array 12. For example, there is a problem in that normal measurements cannot be performed because secondary ultraviolet light in the visible range gets mixed in.
第４図に重水素ランプのスペクトルを示す。フォトダイ
オードアレイ１２の窓材の材質にもよるが、このスペク
トルは通常は１８０ｎｍで立ち上るため、３６０ｎｍよ
り長波長側では二次光が混入する。Figure 4 shows the spectrum of a deuterium lamp. Although it depends on the material of the window material of the photodiode array 12, this spectrum usually rises at 180 nm, so secondary light is mixed in at wavelengths longer than 360 nm.
フォトダイオードアレイ１２の測定波長範囲を２００〜
６００ｎｍとすると、結局１８０〜３００ｎｍの紫外光
が二次光として３６０〜６００ｎｍに混入することにな
る。The measurement wavelength range of the photodiode array 12 is set to 200~
If the wavelength is 600 nm, ultraviolet light of 180 to 300 nm will eventually be mixed into the wavelength of 360 to 600 nm as secondary light.
そこで、従来のフォトダイオードアレイ検出器では、光
路に紫外光を遮蔽するフィルタ１６を着脱可能に挿入す
る。測定方法としては、まずフィルタ１６を挿入しない
で紫外域の測定を行ない。Therefore, in the conventional photodiode array detector, a filter 16 that blocks ultraviolet light is removably inserted in the optical path. As a measurement method, first, measurement in the ultraviolet region is performed without inserting the filter 16.
次に、フィルタ１６を光路に挿入して可視域の測定を行
なっている。このように紫外域と可視域とを別々に測定
しなければならないという煩雑さがある。Next, a filter 16 is inserted into the optical path to perform measurements in the visible range. As described above, there is the complexity of having to measure the ultraviolet region and the visible region separately.
本発明は可視域での紫外線の二次光の混入を防ぎ、紫外
域から可視域の全域に渡る吸収スペクトルを同時に測定
することを可能にするフォトダイオードアレイ検出器を
提供することを目的とするものである。An object of the present invention is to provide a photodiode array detector that prevents the contamination of secondary ultraviolet light in the visible range and makes it possible to simultaneously measure absorption spectra spanning the entire range from the ultraviolet to the visible range. It is something.
（問題点を解決するための手段） 本発明のフォトダイオードアレイ検出器では。(Means for solving problems) In the photodiode array detector of the present invention.
フォトダイオードアレイの受光素子のうち可視域検出用
素子の前面に紫外光を遮蔽するフィルタを設けた。A filter for blocking ultraviolet light was provided in front of the visible range detection element among the light receiving elements of the photodiode array.
（実施例）
第１図は一実施例におけるフォトダイオードアレイを示
す。(Embodiment) FIG. 1 shows a photodiode array in one embodiment.
１２はフォトダイオードアレイ、２０はフォトダイオー
ドアレイ１２の窓材である。１２ａはダイオードアレイ
１２の紫外域に使用する素子の部分であり、１２ｂは可
視域に相当する部分である。12 is a photodiode array, and 20 is a window material of the photodiode array 12. 12a is a portion of the diode array 12 used for the ultraviolet region, and 12b is a portion corresponding to the visible region.
部分１２ａと部分１２ｂの境界が３５０〜３６０ｎｍの
光を受光する素子の部分にくるようにする。The boundary between the portion 12a and the portion 12b is made to be located at a portion of the element that receives light of 350 to 360 nm.
窓材２０の表面のうち、可視域側の素子に相当する部分
に、第２図に示されるような透過スペクトルをもつコー
ティング１８を施している。このコーティング１８の透
過スペクトルは３００ｎｍより短波長の光を遮蔽し、３
５０ｎｍより長波長の光を十分透過させる特性をもった
ものである。A coating 18 having a transmission spectrum as shown in FIG. 2 is applied to a portion of the surface of the window material 20 corresponding to the elements in the visible range. The transmission spectrum of this coating 18 is such that it blocks light with wavelengths shorter than 300 nm, and
It has the property of sufficiently transmitting light with a wavelength longer than 50 nm.
このようなコーティング１８は５例えば酸化ジルコニウ
ムやＳｉＯ２などの誘電体多層膜を、例えば蒸着法によ
って形成することにより実現することができる。Such a coating 18 can be realized by forming a dielectric multilayer film of, for example, zirconium oxide or SiO2 by, for example, a vapor deposition method.
コーティング１８は、実施例では窓材２０の表面に直接
形成されているが、別の石英板の一部分にコーティング
１８を形成しておき、そのコーティング１８が形成され
た石英板をフォトダイオードアレイ１２の窓材２０の可
視域部分にくるように張りつけてもよい。In the embodiment, the coating 18 is formed directly on the surface of the window material 20, but the coating 18 is formed on a portion of another quartz plate, and the quartz plate on which the coating 18 is formed is attached to the photodiode array 12. The window material 20 may be pasted so as to be in the visible region.
実施例は本考案を液体クロマトグラフのフォトダイオー
ドアレイ検出器に適用した例を示しているが１本考案は
例えばフォトダイオードアレイを用いた分光光度計にお
いても同様に適用することができる。Although the embodiment shows an example in which the present invention is applied to a photodiode array detector of a liquid chromatograph, the present invention can be similarly applied to, for example, a spectrophotometer using a photodiode array.
光源としては重水素ランプに限らず、例えばキセノン（
Ｘｅ）ランプ、フラッシュＸｅランプ、又はＨｇ−Ｘｅ
ランプなど、紫外域から可視域にわたってスペクトルを
もつランプであれば、光源として利用することができる
。また、重水素ランプとタングステン（Ｗ）ランプの２
つのランプを光源として備えた光学系に対しても適用す
ることができる。Light sources are not limited to deuterium lamps; for example, xenon (
Xe) lamp, flash Xe lamp, or Hg-Xe
Any lamp, such as a lamp, that has a spectrum ranging from the ultraviolet region to the visible region can be used as a light source. In addition, there are two types of lamps: deuterium lamp and tungsten (W) lamp.
The present invention can also be applied to an optical system equipped with one lamp as a light source.
（発明の効果）
本発明のフォトダイオード検出器では、フォトダイオー
ドアレイの受光素子のうち可視域検出用素子の前面に紫
外光を遮蔽するフィルタを設けたので、紫外域から可視
域にわたる吸光度の測定を同時に行なうことができる。(Effects of the Invention) In the photodiode detector of the present invention, a filter for blocking ultraviolet light is provided in front of the visible range detection element among the light receiving elements of the photodiode array, so that absorbance measurement from the ultraviolet to the visible range is possible. can be done at the same time.
また、ベースラインの安定性のために測定したい波長と
は別の波長でリファレンスを取ることが多い。特にグラ
ジェントで分析する場合には屈折率効果除去のためにリ
ファレンスをとる必要がある。その場合、二次光の除去
がなされていないときは測定したい波長の近辺の波長で
リファレンスをとらなければならないが、本発明では二
次光が除去されているので任意の波長でリファレンスを
取ることができるようになり、測定波長とリファレンス
波長間の吸光度差を最大に取ることができるようになる
。Furthermore, in order to stabilize the baseline, a reference is often taken at a wavelength different from the wavelength to be measured. Especially when performing gradient analysis, it is necessary to take a reference to remove refractive index effects. In that case, if secondary light is not removed, a reference must be taken at a wavelength near the wavelength to be measured, but in the present invention, since secondary light is removed, a reference can be taken at any wavelength. This makes it possible to maximize the absorbance difference between the measurement wavelength and the reference wavelength.
第１図は一実施例におけるフォトダイオードアレイを示
す平面図、第２図は一実施例で用いられる紫外光遮蔽フ
ィルタの特性を示す波形図、第３図は本発明が適用され
る一例としての液体クロマトグラフ用フォトダイオード
アレイ検出器を示す概略図、第４図は光源としての重水
素ランプのスペクトルを示す波形図である。
１２・・・・・・フォトダイオードアレイ、１２ａ・・
・・・・フォトダイオードアレイの紫外域、１２ｂ・・
・・・・フォトダイオードアレイの可視域、１８・・・
・・・紫外光遮蔽フィルタ用コーティング、２０・・・
・・・フォトダイオードアレイの窓材。FIG. 1 is a plan view showing a photodiode array in one embodiment, FIG. 2 is a waveform diagram showing characteristics of an ultraviolet light shielding filter used in one embodiment, and FIG. 3 is a plan view showing a photodiode array as an example to which the present invention is applied. A schematic diagram showing a photodiode array detector for liquid chromatography, and FIG. 4 is a waveform diagram showing the spectrum of a deuterium lamp as a light source. 12...Photodiode array, 12a...
...UV range of photodiode array, 12b...
...Visible range of photodiode array, 18...
...Coating for ultraviolet light shielding filter, 20...
...Window material for photodiode array.
Claims (1)
レイの受光素子のうち、可視域検出用素子の前面に紫外
光を遮蔽するフィルタを設けたフォトダイオードアレイ
検出器。(1) A photodiode array detector in which a filter for blocking ultraviolet light is provided in front of a visible range detection element among the light receiving elements of the photodiode array provided at the exit position of the spectrometer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7927987A JPS63243726A (en) | 1987-03-30 | 1987-03-30 | Photodiode array detector |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7927987A JPS63243726A (en) | 1987-03-30 | 1987-03-30 | Photodiode array detector |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63243726A true JPS63243726A (en) | 1988-10-11 |
Family
ID=13685426
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7927987A Pending JPS63243726A (en) | 1987-03-30 | 1987-03-30 | Photodiode array detector |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63243726A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01316309A (en) * | 1988-06-15 | 1989-12-21 | Sunstar Inc | Detergent composition |
| JPH0579451U (en) * | 1992-03-30 | 1993-10-29 | 株式会社島津製作所 | Spectrophotometer |
| US7196842B2 (en) | 2001-05-22 | 2007-03-27 | Carl Zeiss Smt Ag | Attenuating filter for ultraviolet light |
| JP2011058953A (en) * | 2009-09-10 | 2011-03-24 | Olympus Corp | Detector, optical apparatus with the same |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59135332A (en) * | 1983-01-21 | 1984-08-03 | Union Gijutsu:Kk | Spectroscopic light measuring apparatus |
-
1987
- 1987-03-30 JP JP7927987A patent/JPS63243726A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59135332A (en) * | 1983-01-21 | 1984-08-03 | Union Gijutsu:Kk | Spectroscopic light measuring apparatus |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01316309A (en) * | 1988-06-15 | 1989-12-21 | Sunstar Inc | Detergent composition |
| JPH0579451U (en) * | 1992-03-30 | 1993-10-29 | 株式会社島津製作所 | Spectrophotometer |
| US7196842B2 (en) | 2001-05-22 | 2007-03-27 | Carl Zeiss Smt Ag | Attenuating filter for ultraviolet light |
| JP2011058953A (en) * | 2009-09-10 | 2011-03-24 | Olympus Corp | Detector, optical apparatus with the same |
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