JPS63241342A - 欠陥検査装置 - Google Patents

欠陥検査装置

Info

Publication number
JPS63241342A
JPS63241342A JP63039614A JP3961488A JPS63241342A JP S63241342 A JPS63241342 A JP S63241342A JP 63039614 A JP63039614 A JP 63039614A JP 3961488 A JP3961488 A JP 3961488A JP S63241342 A JPS63241342 A JP S63241342A
Authority
JP
Japan
Prior art keywords
light
light receiving
scattered light
photoelectric
signal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP63039614A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0335617B2 (enrdf_load_stackoverflow
Inventor
Shoichi Tanimoto
昭一 谷元
Kazunori Imamura
今村　和則
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Priority to JP63039614A priority Critical patent/JPS63241342A/ja
Publication of JPS63241342A publication Critical patent/JPS63241342A/ja
Publication of JPH0335617B2 publication Critical patent/JPH0335617B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP63039614A 1988-02-24 1988-02-24 欠陥検査装置 Granted JPS63241342A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP63039614A JPS63241342A (ja) 1988-02-24 1988-02-24 欠陥検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63039614A JPS63241342A (ja) 1988-02-24 1988-02-24 欠陥検査装置

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP16144181A Division JPS5862544A (ja) 1981-02-04 1981-10-09 欠陥検査装置

Publications (2)

Publication Number Publication Date
JPS63241342A true JPS63241342A (ja) 1988-10-06
JPH0335617B2 JPH0335617B2 (enrdf_load_stackoverflow) 1991-05-28

Family

ID=12557985

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63039614A Granted JPS63241342A (ja) 1988-02-24 1988-02-24 欠陥検査装置

Country Status (1)

Country Link
JP (1) JPS63241342A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63185077A (ja) * 1987-01-27 1988-07-30 Matsushita Electric Ind Co Ltd 青色発光ダイオ−ド

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63185077A (ja) * 1987-01-27 1988-07-30 Matsushita Electric Ind Co Ltd 青色発光ダイオ−ド

Also Published As

Publication number Publication date
JPH0335617B2 (enrdf_load_stackoverflow) 1991-05-28

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