JPS63238492A - Ｘ−ｙ−ｚ移動機構 - Google Patents
Ｘ−ｙ−ｚ移動機構Info
- Publication number
- JPS63238492A JPS63238492A JP62071387A JP7138787A JPS63238492A JP S63238492 A JPS63238492 A JP S63238492A JP 62071387 A JP62071387 A JP 62071387A JP 7138787 A JP7138787 A JP 7138787A JP S63238492 A JPS63238492 A JP S63238492A
- Authority
- JP
- Japan
- Prior art keywords
- hole
- axis direction
- block body
- axis
- piezoelectric actuator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000007246 mechanism Effects 0.000 title claims description 35
- 239000000523 sample Substances 0.000 claims description 14
- 230000005641 tunneling Effects 0.000 claims description 5
- 238000006073 displacement reaction Methods 0.000 description 7
- 230000000694 effects Effects 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 239000000853 adhesive Substances 0.000 description 3
- 230000001070 adhesive effect Effects 0.000 description 3
- 230000002093 peripheral effect Effects 0.000 description 3
- 230000007423 decrease Effects 0.000 description 2
- 230000004323 axial length Effects 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000011800 void material Substances 0.000 description 1
Landscapes
- Details Of Measuring And Other Instruments (AREA)
- Control Of Position Or Direction (AREA)
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62071387A JPS63238492A (ja) | 1987-03-27 | 1987-03-27 | Ｘ−ｙ−ｚ移動機構 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62071387A JPS63238492A (ja) | 1987-03-27 | 1987-03-27 | Ｘ−ｙ−ｚ移動機構 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63238492A true JPS63238492A (ja) | 1988-10-04 |
| JPH04557B2 JPH04557B2 (enrdf_load_stackoverflow) | 1992-01-07 |
Family
ID=13459047
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62071387A Granted JPS63238492A (ja) | 1987-03-27 | 1987-03-27 | Ｘ−ｙ−ｚ移動機構 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63238492A (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111458959B (zh) * | 2020-04-28 | 2025-05-27 | 深圳市锐丽珑精密光学有限公司 | 一种滤镜安装结构 |
-
1987
- 1987-03-27 JP JP62071387A patent/JPS63238492A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH04557B2 (enrdf_load_stackoverflow) | 1992-01-07 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |