JPS63237209A - Perpendicular magnetic recording medium - Google Patents
Perpendicular magnetic recording mediumInfo
- Publication number
- JPS63237209A JPS63237209A JP6810287A JP6810287A JPS63237209A JP S63237209 A JPS63237209 A JP S63237209A JP 6810287 A JP6810287 A JP 6810287A JP 6810287 A JP6810287 A JP 6810287A JP S63237209 A JPS63237209 A JP S63237209A
- Authority
- JP
- Japan
- Prior art keywords
- film
- magnetic recording
- perpendicular magnetic
- recording medium
- alloy
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229910001339 C alloy Inorganic materials 0.000 claims abstract description 14
- 239000000758 substrate Substances 0.000 claims abstract description 8
- 229920000642 polymer Polymers 0.000 claims abstract description 6
- 238000004544 sputter deposition Methods 0.000 abstract description 7
- 229920001721 polyimide Polymers 0.000 abstract description 3
- 239000004642 Polyimide Substances 0.000 abstract description 2
- 229920000728 polyester Polymers 0.000 abstract description 2
- 238000000465 moulding Methods 0.000 abstract 3
- 229910001080 W alloy Inorganic materials 0.000 abstract 1
- 230000007797 corrosion Effects 0.000 description 4
- 238000005260 corrosion Methods 0.000 description 4
- 229910045601 alloy Inorganic materials 0.000 description 3
- 239000000956 alloy Substances 0.000 description 3
- 229910000599 Cr alloy Inorganic materials 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 238000007738 vacuum evaporation Methods 0.000 description 2
- 239000002253 acid Substances 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 230000005415 magnetization Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
Landscapes
- Compositions Of Macromolecular Compounds (AREA)
- Magnetic Record Carriers (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は垂直磁気特性に優れ、かつ耐久性に優れたＣｏ
−Ｃｒ膜とＣｏ−Ｃｒ−Ｗ−Ｃ合金膜との積層構造を有
する垂直磁気記録媒体に関するものである。[Detailed Description of the Invention] [Industrial Application Field] The present invention utilizes Co, which has excellent perpendicular magnetic properties and excellent durability.
The present invention relates to a perpendicular magnetic recording medium having a laminated structure of a -Cr film and a Co-Cr-W-C alloy film.
高密度磁気記録媒体として、Ｃｏ−Ｃｒ系合金をスパッ
タリングした垂直磁気記録媒体が優れていることが知ら
れている。しかし、磁気記録媒体としてＣｏ−Ｃｒ系合
金層を使用した場合、磁気ヘッドとの摩擦砥抗が大きい
ため、摩耗や損傷を受は易く、耐久性に欠け、あるいは
潤滑性に劣り、実用化に対する最も大きな問題点の一つ
となっている。また、Ｃｏ−Ｃｒ膜は耐蝕性においても
問題があり、高温高湿度等の環境における長時間の使用
または保存に耐える膜は得られていない。It is known that perpendicular magnetic recording media made of sputtered Co-Cr alloys are excellent as high-density magnetic recording media. However, when a Co-Cr alloy layer is used as a magnetic recording medium, it is susceptible to wear and damage due to the large frictional resistance against the magnetic head, lacks durability, and has poor lubricity, making it difficult to put into practical use. This is one of the biggest problems. Further, Co--Cr films also have problems in corrosion resistance, and no film has been obtained that can withstand long-term use or storage in environments such as high temperature and high humidity.
このような問題を解決するために、耐摩耗性と耐蝕性に
優れた合金膜としてＣｏ−Ｃｒ−Ｗ−Ｃ合金膜が見出さ
れ、垂直磁気記録用膜として有望であることが確かめら
れている。このＣｏ−Ｃｒ−Ｗ−Ｃ合金膜は極めて耐摩
耗性と耐蝕性に優れ、かつ垂直磁気特性にも優れた膜で
あるが、飽和磁化がＣｏ−ＣｒＦ１膜に比べて若干小さ
く、また抗磁力も若干小さいという問題がある。To solve these problems, a Co-Cr-W-C alloy film was discovered as an alloy film with excellent wear resistance and corrosion resistance, and it has been confirmed that it is promising as a film for perpendicular magnetic recording. There is. This Co-Cr-W-C alloy film has extremely excellent wear resistance and corrosion resistance, and also has excellent perpendicular magnetic properties, but its saturation magnetization is slightly smaller than that of the Co-CrF1 film, and its coercive force is There is also the problem that it is a little small.
本発明は上記事情に鑑みなされたもので、耐摩耗性及び
耐蝕性等の耐久性に優れ、かつ垂直磁気特性に優れた記
録媒体を提供することを特徴とする。The present invention has been made in view of the above circumstances, and is characterized by providing a recording medium that has excellent durability such as wear resistance and corrosion resistance, and excellent perpendicular magnetic properties.
本発明の垂直磁気記録媒体は、高分子成形物からなる基
板上にＣｏ−Ｃｒ膜が形成されており、酸膜の上にＣｏ
−Ｃｒ−Ｗ−Ｃ合金膜を形成されている。In the perpendicular magnetic recording medium of the present invention, a Co-Cr film is formed on a substrate made of a polymer molded product, and a Co-Cr film is formed on an acid film.
-Cr-W-C alloy film is formed.
本発明で基板として使用される高分子成形物としては、
特に限定されずポリイミド、ポリエステル等を挙げるこ
とができる。The polymer molded product used as a substrate in the present invention includes:
There are no particular limitations, and examples include polyimide and polyester.
本発明で使用されるＣｏ−Ｃｒ膜は、スパッタリング法
により得られる垂直配向膜が好ましいが、真空蒸着法に
より得られる膜でもよい。Ｃｏ−Ｃｒ膜の組成は、好ま
しくはＣｏ含有量が７０〜９０原子％、Ｃｒ含有量が１
０〜３０原子％である。The Co--Cr film used in the present invention is preferably a vertically aligned film obtained by sputtering, but may also be a film obtained by vacuum evaporation. The composition of the Co-Cr film is preferably such that the Co content is 70 to 90 at% and the Cr content is 1
It is 0 to 30 at%.
本発明のＣｏ−Ｃｒ膜の上に形成されるＣｏ−Ｃｒ−Ｗ
−Ｃ合金膜はスパッタリング法によりｃｏ−Ｃｒ−Ｗ−
Ｃの合金ターゲットもしくは各元素のターゲットを組み
合わせた複合ターゲットを用いて作成するのが好ましい
。しかし、真空蒸着法等の他の方法で作成した膜であっ
てもよいことは勿論である。Ｃｏ−Ｃｒ−Ｗ−Ｃ合金膜
の組成は、好ましくはＣｏ含有量が４０〜７５原子％、
Ｃｒ含有量が２５〜３５原子％、Ｗ含有量が１〜１０原
子％、Ｃ含有量が０．５〜１５原子％である。Co-Cr-W formed on the Co-Cr film of the present invention
-C alloy film is co-Cr-W- by sputtering method.
It is preferable to use a C alloy target or a composite target combining targets of each element. However, it goes without saying that a film formed by other methods such as vacuum evaporation may also be used. The composition of the Co-Cr-W-C alloy film preferably has a Co content of 40 to 75 at%,
The Cr content is 25 to 35 at%, the W content is 1 to 10 at%, and the C content is 0.5 to 15 at%.
Ｃｏ−Ｃｒ−Ｗ−Ｃ合金膜をＣｏ−Ｃｒ膜上に形成した
場合、両者の接着は極めて良好であるが、Ｃｏ−Ｃｒ膜
を形成したのち大気中にさらさずに同一真空槽内でＣｏ
−Ｃｒ−Ｗ−Ｃ合金膜をＣ。When a Co-Cr-W-C alloy film is formed on a Co-Cr film, the adhesion between the two is extremely good.
-Cr-W-C alloy film.
−Ｃｒ膜上に形成することが望ましい。- It is desirable to form it on the Cr film.
Ｃｏ−Ｃｒ膜の膜厚は、１００〜５００ ｎｍ。The thickness of the Co-Cr film is 100 to 500 nm.
Ｃｏ−Ｃｒ−Ｗ−Ｃ合金膜の膜厚は１０〜１１００ｎが
好ましい。また両膜の厚み比（Ｃｏ−Ｃｒ膜／Ｃｏ−Ｃ
ｒ −Ｗ−Ｃ膜）は２〜１０が好ましい。The thickness of the Co-Cr-W-C alloy film is preferably 10 to 1100 nm. Also, the thickness ratio of both films (Co-Cr film/Co-C
r-W-C film) is preferably 2 to 10.
以下に実施例及び比較例を示し、本発明を更に詳しく説
明する。EXAMPLES The present invention will be explained in more detail by showing Examples and Comparative Examples below.
実施例１
スパッタリング装置はマグネトロン式高周波二極スパッ
タリング装置を用いた。Example 1 A magnetron type high frequency two-pole sputtering device was used as a sputtering device.
基板には厚さ約５０μｍのポリイミドフィルムを用いた
。フィルムは直径約２０ＣＩＤの金属性の支持枠に固定
した。これを基板電極上に固定したのち真空槽内を真空
に排気し、基板を３５０°Ｃ１時間加熱して脱ガス処理
した。スパッタリング前に真空槽内をｌＸｌ０−’Ｐａ
以下に排気したのち、純度９９．９９９５％のＡｒガス
を導入して系内を０、５ Ｐ ａとしてスパッタリング
を行った。A polyimide film with a thickness of about 50 μm was used as the substrate. The film was fixed to a metal support frame with a diameter of about 20 CID. After this was fixed on the substrate electrode, the inside of the vacuum chamber was evacuated, and the substrate was heated at 350° C. for 1 hour to degas it. Before sputtering, the inside of the vacuum chamber is heated to lXl0-'Pa.
After evacuating to the following temperature, Ar gas with a purity of 99.9995% was introduced to perform sputtering at a pressure of 0.5 Pa in the system.
Ｃｏ−Ｃｒ膜はＣｏ−Ｃｒ（原子比７８：２２）の合金
ターゲットを用いて作成した。また、Ｃｏ−Ｃｒ−Ｗ−
Ｃ合金膜はＣｏ−Ｃｒ−Ｗ−Ｃ（原子比６７：２８：２
：３）から成る合金ターゲットを用いて作成した。ター
ゲットは直径６インチ、厚さ５ｍの大きさのものを用い
た。膜作成の条件を第１表に、得られた膜の特性を第２
表に示す。The Co--Cr film was created using a Co--Cr (atomic ratio 78:22) alloy target. Also, Co-Cr-W-
The C alloy film is Co-Cr-W-C (atomic ratio 67:28:2
:3) was made using an alloy target consisting of: The target used had a diameter of 6 inches and a thickness of 5 m. The conditions for film preparation are shown in Table 1, and the properties of the obtained film are shown in Table 2.
Shown in the table.
磁気特性は振動試料型磁力計（ＶＳＭ）により測定した
。Δθ、。は（００２）回折のロッキング曲線の半値巾
より求めた。The magnetic properties were measured using a vibrating sample magnetometer (VSM). Δθ,. was determined from the half width of the rocking curve of (002) diffraction.
磁気ヘッドに対する耐摩耗性は試料をフロッピーディス
クに加工したのち、フロッピーディスク°′定装置にか
けリング型のダミーヘッドを２０万回接触させたときの
出力の低下により測定した。The wear resistance of the magnetic head was measured by the decrease in output when a ring-shaped dummy head was brought into contact with the floppy disk 200,000 times in a floppy disk measuring device after processing the sample into a floppy disk.
第１表
第２表
〔発明の効果〕
第１表及び第２表より明らかなように、本発明の垂直磁
気記録媒体は、磁気特性及び垂直配向性に優れ、かつ耐
摩耗性に優れている。Table 1 Table 2 [Effects of the Invention] As is clear from Tables 1 and 2, the perpendicular magnetic recording medium of the present invention has excellent magnetic properties and perpendicular alignment, as well as excellent wear resistance. .
Claims (1)
ており、該膜の上にＣｏ−Ｃｒ−Ｗ−Ｃ合金膜が形成さ
れていることを特徴とする垂直磁気記録媒体。A perpendicular magnetic recording medium characterized in that a Co--Cr film is formed on a substrate made of a polymer molded product, and a Co--Cr-W-C alloy film is formed on the film.
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6810287A JPS63237209A (en) | 1987-03-24 | 1987-03-24 | Perpendicular magnetic recording medium |
| EP88104762A EP0284073A3 (en) | 1987-03-24 | 1988-03-24 | Vertical magnetic recording medium and method of manufacturing the same |
| US07/173,247 US4814239A (en) | 1987-03-24 | 1988-03-24 | Vertical magnetic recording medium and method of manufacturing the same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6810287A JPS63237209A (en) | 1987-03-24 | 1987-03-24 | Perpendicular magnetic recording medium |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63237209A true JPS63237209A (en) | 1988-10-03 |
Family
ID=13364040
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6810287A Pending JPS63237209A (en) | 1987-03-24 | 1987-03-24 | Perpendicular magnetic recording medium |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63237209A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01303624A (en) * | 1988-05-31 | 1989-12-07 | Mitsubishi Kasei Corp | Magnetic recording medium |
-
1987
- 1987-03-24 JP JP6810287A patent/JPS63237209A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01303624A (en) * | 1988-05-31 | 1989-12-07 | Mitsubishi Kasei Corp | Magnetic recording medium |
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