JPS6323629U - - Google Patents
Info
- Publication number
- JPS6323629U JPS6323629U JP11784986U JP11784986U JPS6323629U JP S6323629 U JPS6323629 U JP S6323629U JP 11784986 U JP11784986 U JP 11784986U JP 11784986 U JP11784986 U JP 11784986U JP S6323629 U JPS6323629 U JP S6323629U
- Authority
- JP
- Japan
- Prior art keywords
- detection circuit
- output
- discharge
- circuit
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims description 11
- 238000005259 measurement Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11784986U JPS6323629U (cs) | 1986-07-30 | 1986-07-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11784986U JPS6323629U (cs) | 1986-07-30 | 1986-07-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6323629U true JPS6323629U (cs) | 1988-02-16 |
Family
ID=31003749
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11784986U Pending JPS6323629U (cs) | 1986-07-30 | 1986-07-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6323629U (cs) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2020052013A (ja) * | 2018-09-28 | 2020-04-02 | 株式会社島津製作所 | 真空度検出装置、及び電子線照射システム |
-
1986
- 1986-07-30 JP JP11784986U patent/JPS6323629U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2020052013A (ja) * | 2018-09-28 | 2020-04-02 | 株式会社島津製作所 | 真空度検出装置、及び電子線照射システム |
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