JPS6323368Y2 - - Google Patents
Info
- Publication number
- JPS6323368Y2 JPS6323368Y2 JP1979126632U JP12663279U JPS6323368Y2 JP S6323368 Y2 JPS6323368 Y2 JP S6323368Y2 JP 1979126632 U JP1979126632 U JP 1979126632U JP 12663279 U JP12663279 U JP 12663279U JP S6323368 Y2 JPS6323368 Y2 JP S6323368Y2
- Authority
- JP
- Japan
- Prior art keywords
- stopper
- article
- box
- proximity switch
- detection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Special Conveying (AREA)
- Control Of Conveyors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1979126632U JPS6323368Y2 (en:Method) | 1979-09-13 | 1979-09-13 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1979126632U JPS6323368Y2 (en:Method) | 1979-09-13 | 1979-09-13 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5643821U JPS5643821U (en:Method) | 1981-04-21 |
JPS6323368Y2 true JPS6323368Y2 (en:Method) | 1988-06-27 |
Family
ID=29358526
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1979126632U Expired JPS6323368Y2 (en:Method) | 1979-09-13 | 1979-09-13 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6323368Y2 (en:Method) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0638019Y2 (ja) * | 1986-09-30 | 1994-10-05 | 大日本スクリ−ン製造株式会社 | 基板処理装置における基板搬送装置 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5234670Y2 (en:Method) * | 1972-05-13 | 1977-08-08 |
-
1979
- 1979-09-13 JP JP1979126632U patent/JPS6323368Y2/ja not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPS5643821U (en:Method) | 1981-04-21 |
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