JPS6323368Y2 - - Google Patents

Info

Publication number
JPS6323368Y2
JPS6323368Y2 JP1979126632U JP12663279U JPS6323368Y2 JP S6323368 Y2 JPS6323368 Y2 JP S6323368Y2 JP 1979126632 U JP1979126632 U JP 1979126632U JP 12663279 U JP12663279 U JP 12663279U JP S6323368 Y2 JPS6323368 Y2 JP S6323368Y2
Authority
JP
Japan
Prior art keywords
stopper
article
box
proximity switch
detection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1979126632U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5643821U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1979126632U priority Critical patent/JPS6323368Y2/ja
Publication of JPS5643821U publication Critical patent/JPS5643821U/ja
Application granted granted Critical
Publication of JPS6323368Y2 publication Critical patent/JPS6323368Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Special Conveying (AREA)
  • Control Of Conveyors (AREA)
JP1979126632U 1979-09-13 1979-09-13 Expired JPS6323368Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1979126632U JPS6323368Y2 (enrdf_load_stackoverflow) 1979-09-13 1979-09-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1979126632U JPS6323368Y2 (enrdf_load_stackoverflow) 1979-09-13 1979-09-13

Publications (2)

Publication Number Publication Date
JPS5643821U JPS5643821U (enrdf_load_stackoverflow) 1981-04-21
JPS6323368Y2 true JPS6323368Y2 (enrdf_load_stackoverflow) 1988-06-27

Family

ID=29358526

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1979126632U Expired JPS6323368Y2 (enrdf_load_stackoverflow) 1979-09-13 1979-09-13

Country Status (1)

Country Link
JP (1) JPS6323368Y2 (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0638019Y2 (ja) * 1986-09-30 1994-10-05 大日本スクリ−ン製造株式会社 基板処理装置における基板搬送装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5234670Y2 (enrdf_load_stackoverflow) * 1972-05-13 1977-08-08

Also Published As

Publication number Publication date
JPS5643821U (enrdf_load_stackoverflow) 1981-04-21

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