JPS63230527A - Magneto-optical element - Google Patents
Magneto-optical elementInfo
- Publication number
- JPS63230527A JPS63230527A JP6154387A JP6154387A JPS63230527A JP S63230527 A JPS63230527 A JP S63230527A JP 6154387 A JP6154387 A JP 6154387A JP 6154387 A JP6154387 A JP 6154387A JP S63230527 A JPS63230527 A JP S63230527A
- Authority
- JP
- Japan
- Prior art keywords
- magneto
- optical element
- rare earth
- garnet
- iron garnet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims abstract description 22
- 239000002223 garnet Substances 0.000 claims abstract description 18
- 229910052761 rare earth metal Inorganic materials 0.000 claims abstract description 16
- 150000002910 rare earth metals Chemical class 0.000 claims abstract description 16
- 239000013078 crystal Substances 0.000 claims abstract description 12
- 229910052742 iron Inorganic materials 0.000 claims abstract description 11
- 239000000758 substrate Substances 0.000 claims abstract description 9
- 230000005291 magnetic effect Effects 0.000 abstract description 16
- 230000035945 sensitivity Effects 0.000 abstract description 12
- 230000000694 effects Effects 0.000 abstract description 7
- 229910052765 Lutetium Inorganic materials 0.000 abstract description 4
- 229910052727 yttrium Inorganic materials 0.000 abstract description 3
- 229910052746 lanthanum Inorganic materials 0.000 abstract description 2
- 206010037660 Pyrexia Diseases 0.000 abstract 1
- 229910052760 oxygen Inorganic materials 0.000 abstract 1
- 230000003287 optical effect Effects 0.000 description 6
- 238000000034 method Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 230000005415 magnetization Effects 0.000 description 3
- 241001125929 Trisopterus luscus Species 0.000 description 2
- 230000010287 polarization Effects 0.000 description 2
- 238000006467 substitution reaction Methods 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 1
- 229910052797 bismuth Inorganic materials 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 239000002889 diamagnetic material Substances 0.000 description 1
- 230000005674 electromagnetic induction Effects 0.000 description 1
- 239000003302 ferromagnetic material Substances 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 238000007716 flux method Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 150000002505 iron Chemical class 0.000 description 1
- 239000007791 liquid phase Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
Landscapes
- Compounds Of Iron (AREA)
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
本発明は、ファラデー効果を利用した光応用磁界センサ
光応用電流センナ、光変調器等に用いられる磁気光学素
子に関し、特にそれに用いるガーネット結晶に関するも
のである。DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to a magneto-optical element used in optical magnetic field sensors, optical current sensors, optical modulators, etc. that utilize the Faraday effect, and particularly relates to garnet crystals used therein. be.
従来の技術
最近、磁界強度を光を用いて測定する方法として、磁気
光学効果を利用する方法が提案されている。例えば、入
間らによる文献アイイーイーイー（ＩＥＩＥＩりＱＫ−
１ｓ、１６１９ （１９８２）７５（ある０
特に電流が流れている導体の周りの磁界強度を測定して
電流を検知する方法は、光を媒体とするために絶縁性が
良好である。電磁誘導ノイズを受けないなどの特徴を持
つ。第２図にファラデー効果を用いた磁界の測定方法の
原理図を示す。第２図において磁界Ｈ中に磁気光学素子
１１が配置されている。この磁気光学素子の両端に、互
いに直線偏光の最大透過偏光方向が４６度傾けられた偏
光子１２と検光子１３が配置されである。ファラデー効
果により偏光面は磁界強度Ｈに比例して回転を受ける。BACKGROUND OF THE INVENTION Recently, a method using magneto-optic effect has been proposed as a method for measuring magnetic field strength using light. For example, Iruma et al.
1s, 1619 (1982) 75 (certain 0) In particular, the method of detecting current by measuring the magnetic field strength around a conductor through which current flows uses light as a medium and has good insulation. Electromagnetic induction noise Figure 2 shows a principle diagram of a magnetic field measurement method using the Faraday effect. In Figure 2, a magneto-optical element 11 is placed in a magnetic field H. This magneto-optical element A polarizer 12 and an analyzer 13 are arranged at both ends of the polarizer 12, in which the directions of maximum transmission polarization of linearly polarized light are tilted by 46 degrees.The plane of polarization is rotated in proportion to the magnetic field strength H due to the Faraday effect.
回転を受けた偏光は、検光子３を透過後回転角θは光量
変化に変換される。その時の光出力は次式で示される。After the rotated polarized light passes through the analyzer 3, the rotation angle θ is converted into a change in light amount. The optical output at that time is expressed by the following equation.
Ｐｏｕｔ＝Ｋ（１＋５ｉｎ２θ）・・・・・・・・・（
１）ここで、θ＝ＶＨ１、Ｐｏｕｔは光出力、には比例
定数、θはファラデー回転角〔度〕、ｖはヴエルデ定数
と呼ばれるもので単位は〔度／ｃＩＩ＆・Ｏｅ ］であ
り、磁気光学素子の感度を示すものである。Pout=K(1+5in2θ)・・・・・・・・・(
1) Here, θ=VH1, Pout is the optical output, is a proportionality constant, θ is the Faraday rotation angle [degrees], and v is the Weerde constant, whose unit is [degrees/cII&・Oe]. It shows the sensitivity of the element.
発明が解決しようとする問題点
従来、磁界センサ用の磁気光学素子には種々のものがあ
る。次表にその代表例を示す。表中にヴエルデ定数とそ
の温度変化を示す。Problems to be Solved by the Invention Conventionally, there are various types of magneto-optical elements for magnetic field sensors. The following table shows typical examples. The table shows Weerde's constant and its temperature change.
なお、表の最下行には、特開昭５５−１２１４２２号公
報に開示された希土類鉄ガーネット結晶の場合も示しで
ある。In addition, the bottom row of the table also shows the case of rare earth iron garnet crystal disclosed in JP-A-55-121422.
この表を一見してわかる様に、１〜４０反磁性体のヴエ
ルデ定数は小さく、高感度なセンサは望めない。As can be seen at a glance from this table, the Weerde constants of 1-40 diamagnetic materials are small, and highly sensitive sensors cannot be expected.
又、６の（’ｒｂ０．１５’ ”ｏ、ａｌ）３ ”５０
１２のヴヱルデ定数の大きなものを用いた磁界センサで
も、最小検出感度は０．０２０６と従来のものに比較し
て一ケタ程度の改善にとどまるという結果が得られてい
る。またその温度変化は±１％と従来通りであシ、また
その製造方法はＦｌｕｘ法によるものであり、生産性が
悪いという閉頭がある。Also, 6's ('rb0.15' ``o, al) 3'' 50
Even with a magnetic field sensor using a large Welde constant of 12, the minimum detection sensitivity is 0.0206, which is an improvement of only about one order of magnitude compared to the conventional sensor. Further, the temperature change is ±1%, which is the same as before, and the manufacturing method is the Flux method, which has the drawback of poor productivity.
本発明は、かかる問題点を鑑みてなされたもので、さら
に感度が大きく、温度変化がさらに少なく、生産性も向
上した磁気光学素子を提供する事を目的としている。The present invention has been made in view of these problems, and an object of the present invention is to provide a magneto-optical element that has greater sensitivity, less temperature change, and improved productivity.
問題点を解決するための手段
本発明は上記問題点を解決するために、一般式％式％
類鉄ガーネット混晶において０≦Ｘ≦０．４又はＱ≦Ｙ
＜−２，ｅ又は０≦２≦２．６トし、がっ０≦Ｘ＋Ｙ＋
Ｚ≦２．６である磁気光学素子を与えるものであり、望
むらくは、希土類ガーネット結晶からなる基板上にエピ
タキシャル成長して得られる磁気光学素子を用いるもの
である。Means for Solving the Problems In order to solve the above-mentioned problems, the present invention solves the above problems by using the general formula % 0≦X≦0.4 or Q≦Y in iron-like garnet mixed crystals.
<-2, e or 0≦2≦2.6, and 0≦X+Y+
The present invention provides a magneto-optical element in which Z≦2.6, and preferably uses a magneto-optical element obtained by epitaxial growth on a substrate made of rare earth garnet crystal.
作用
本発明は感度が大きく、温度変化が少なく、生産性が良
く低コストな磁気光学素子を提供するものであり、その
理由を以下に説明する。Function The present invention provides a magneto-optical element that has high sensitivity, little temperature change, good productivity, and low cost.The reason for this is explained below.
Ｂｉで置換された希土類鉄ガーネットのファラデー回転
能は、第３図に示す様に従来のＢｉを含まないものに比
較して一ケタ程度大きくなる事が報告されている。した
がって、磁界センサ用の磁気光学素子としてＢ１で置換
された希土類鉄ガーネットを用いる事で感度が大きくな
る。しかしながら、その感度の温度特性は明らかにされ
ていない。希土類鉄ガーネットは強磁性体であり、飽和
磁化Ｍｓに相当する外部磁界が印加されると、ファラデ
ー回転も飽和する。これを第４図に示す。磁界センサと
しては、飽和するまでのファラデー回転角が直線的に変
化する部分を用い、感度には、で表わされる。θ、ば、
ファラデー回転能である。It has been reported that the Faraday rotation ability of rare earth iron garnet substituted with Bi is about one order of magnitude larger than that of conventional garnet containing no Bi, as shown in FIG. Therefore, sensitivity is increased by using rare earth iron garnet substituted with B1 as a magneto-optical element for a magnetic field sensor. However, the temperature characteristics of its sensitivity have not been clarified. Rare earth iron garnet is a ferromagnetic material, and when an external magnetic field corresponding to saturation magnetization Ms is applied, Faraday rotation is also saturated. This is shown in FIG. As a magnetic field sensor, a part in which the Faraday rotation angle changes linearly until saturation is used, and the sensitivity is expressed as. θ, b,
Faraday rotation ability.
さらにθ、ば、飽和磁化Ｍｓに依存している。希土類が
非磁性原子、例えば、Ｌｕ、Ｙ、Ｌｕである場合、θｒ
及びＭＳの温度変化は、
θＦ（Ｔ）＝−ムＭ、■＋Ｂ Ｍｂ■ ・・・・
・・（３）Ｍｓ （Ｔ）＝ ｌ ＭＡ（Ｔ） Ｍｔ
＋（Ｔ）ｌ −−（４）で示される。ＭＡ（
１）、 ＭＤ（Ｔ）は、それぞれ、オクタヘドラルサイ
ト、テトラヘドラルサイトの副格子磁化の温度変化を示
す。Furthermore, θ, B, depends on the saturation magnetization Ms. When the rare earth is a nonmagnetic atom, for example, Lu, Y, Lu, θr
And the temperature change of MS is θF(T)=-M,■+B Mb■...
...(3) Ms (T) = l MA (T) Mt
+(T)l --(4). MA(
1) and MD(T) indicate temperature changes in sublattice magnetization of octahedralsite and tetrahedralsite, respectively.
従って、（３） 、 ＠）式を（２）式に代入すると、
となり、ム＝Ｂの条件のもとど、
となり、温度変化を示さない事になる。Therefore, by substituting equation (3), @) into equation (2), we get
Therefore, under the condition of Mu=B, it becomes and shows no temperature change.
Ｂｉ置換鉄ガーネットの場合、希土類が非磁性原子、例
えば、Ｌｕ又はＹ又はＬａであれば、Ｂｉ置換量が０４
以上の時にＡ＝］３の条件が満される。In the case of Bi-substituted iron garnet, if the rare earth is a non-magnetic atom, for example, Lu or Y or La, the amount of Bi substitution is 0.4
In the above case, the condition A=]3 is satisfied.
従って、（Ｂ ｉ３−＜ ｘ＋Ｙ＋２） Ｌ ａ ｘ
ＹＹ Ｌ ｕ ｚ ） Ｆ ｅ ｓ Ｏ１２で、０≦Ｘ
≦ＯＡ、０≦Ｙ≦２．６又は０≦Ｚ≦２．６０の組成を
持つ磁気光学素子は、ム＝Ｂの条件を満たし、その感度
にの温度変化はない。さらに、ＸとＹとＺの値を適当に
選択して、例えばｅｄ３Ｇａ５０．．１ｖ様な希土類ガ
ーネット基板と格子定数を一致させる事によって、生産
性が良く、低コスト化がはかれる。エピタキシャル成長
法でこれらの磁気光学素子を得る事ができる。
゛実施例
第１図に本発明による一実施例を示す。本発明による磁
気光学素子（Ｂ１１．２ ”０．．６６Ｙ＋、６５４）
”５０１２１を、格子定数１２４９６ムを持つ市販のＣ
ａ、Ｍｇ。Therefore, (B i3-< x+Y+2) L a x
YY L u z ) Fe s O12, 0≦X
A magneto-optical element having a composition of ≦OA, 0≦Y≦2.6, or 0≦Z≦2.60 satisfies the condition of Mu=B, and its sensitivity does not change with temperature. Furthermore, by appropriately selecting the values of X, Y, and Z, for example, ed3Ga50. ．． By matching the lattice constant with that of a rare earth garnet substrate such as 1V, productivity can be improved and costs can be reduced. These magneto-optical elements can be obtained by epitaxial growth.
゛Embodiment Fig. 1 shows an embodiment according to the present invention. Magneto-optical element according to the present invention (B11.2"0..66Y+, 654)
``50121 is a commercially available C with a lattice constant of 12496 mm.
a, Mg.
Ｚｒ置換ＧＧＧ基板２上に、ｐｂｏ系Ｆｌｕｘを用いた
液相エピタキシャル成長法で、厚み３００μｍを成長さ
せたものである。It is grown to a thickness of 300 μm on a Zr-substituted GGG substrate 2 by a liquid phase epitaxial growth method using pbo-based Flux.
この磁気光学素子の感度には、Ｋ：１．４度１０ｅ−ｃ
ｓであり、従来の（Ｔｂｏ、１９Ｙｏ、８．）３Ｆｅ５
０１□に比較して、４倍の感度向上を示しており、さら
に−１００〜＋１２０″Ｃの温度範囲において、Ｋの温
度変化は、±０．１％以内となっており、従来の±１％
に比較して一ケタの向上がはかられている。The sensitivity of this magneto-optical element is K: 1.4 degrees 10e-c
s, and the conventional (Tbo, 19Yo, 8.)3Fe5
Compared to 01□, it shows a four-fold improvement in sensitivity, and in the temperature range of -100 to +120''C, the temperature change in K is within ±0.1%, compared to the conventional ±1 %
This is a one-digit improvement compared to .
なお本実施例においては、基板にＣ＆、Ｍｇ、Ｚｒ置換
ＧＧＧ基板を用いたが、本発明による磁気光学素子の格
子定数と一致するならば、Ｇｄ ｓ Ｇａ ｓ ０１２
やＳｍ５Ｓｍ５Ｇ、２の様に、どの様な基板を用いても
良い。In this example, a C&, Mg, Zr substituted GGG substrate was used as the substrate, but if it matches the lattice constant of the magneto-optical element according to the present invention, Gd s Ga s 012
Any type of substrate may be used, such as Sm5Sm5G,2.
なお本発明を磁界センサ用磁気光学素子として説明して
来たが、この素子は、光電流センサ、光変調器用として
も用いられるものである。Although the present invention has been described as a magneto-optical element for a magnetic field sensor, this element can also be used for a photocurrent sensor or an optical modulator.
発明の効果
以上述べてきた様に本発明によれば、磁気光学素子とし
て、感度が大きく、温度変化が無く、生産性に豊んだ素
子を与えるもので、その工業的価値は大きい。Effects of the Invention As described above, the present invention provides a magneto-optical element with high sensitivity, no temperature change, and high productivity, which has great industrial value.
４、簡単な図面の説明
第１図は本発明の一実施例の磁気光学素子を示す断面図
、第２図は磁界センサの基本原理を説明するだめの原理
図、第３図はＢｉ置換量に対するファラデー回転能θｙ
の増加を説明するための特性図、第４図は希土類鉄ガー
ネット結晶の外部磁界に対するファラデー効果を説明す
るだめの特性図である。4. Brief explanation of the drawings Fig. 1 is a cross-sectional view showing a magneto-optical element according to an embodiment of the present invention, Fig. 2 is a principle diagram for explaining the basic principle of a magnetic field sensor, and Fig. 3 shows the amount of Bi substitution. Faraday rotational power θy for
FIG. 4 is a characteristic diagram for explaining the Faraday effect on the external magnetic field of rare earth iron garnet crystals.
１ ””” （Ｂ１１．２ ”０．１６６ ”＋、６３
４ ）Ｆｅ５０＋２．２”””ＧＧ（、基板。1 ””” (B11.2 ”0.166 ”+, 63
4) Fe50+2.2"""GG (, substrate.
代理人の氏名 弁理士 中 尾 敏 男 ほか１名１−
（ｋ＋、ｚ Ｌａ、ｏｍｓ Ｙｔ、ｂ３４ンＦｅ５
Ｏｔｚ／Ｉ−一皿気光隻素子
ｔ？−一偏九子
第２図 １３−務−５ｔ、五
凪界ｈ
第３図
ＢムＩ換１（Ｘ）
第４図
Ｓ
→ タト都λ運気７１（°トＡName of agent: Patent attorney Toshio Nakao and 1 other person1-
(k+, z La, oms Yt, b34n Fe5
Otz/I-One plate Qikosen element t? - One-pate multiplication table 2nd figure 13-mu-5t, Gonagikai h Figure 3 B Mu I exchange 1 (X)
Claims (2)
＿）Ｌａ＿ＸＹ＿ＹＬｕ＿Ｚ）Ｆｅ＿５Ｏ＿１＿２で示
される希土類鉄ガーネット混晶を含み、上記一般式にお
いて０≦Ｘ≦０．４又は０≦Ｙ≦２．６又は０≦Ｚ≦２
．６とし、かつ０≦Ｘ＋Ｙ＋Ｚ≦２．６としてなる磁気
光学素子。(1) General formula (Bi_3_-_(_X_+_Y_+_Z
_) La_XY_YLu_Z) Fe_5O_1_2 Contains a rare earth iron garnet mixed crystal, and in the above general formula, 0≦X≦0.4 or 0≦Y≦2.6 or 0≦Z≦2
．． 6, and 0≦X+Y+Z≦2.6.
晶からなる基板上にエピタキシャル成長して形成する特
許請求の範囲第１項記載の磁気光学素子。(2) The magneto-optical element according to claim 1, wherein the rare earth iron garnet mixed crystal is formed by epitaxial growth on a substrate made of rare earth garnet crystal.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6154387A JPS63230527A (en) | 1987-03-17 | 1987-03-17 | Magneto-optical element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6154387A JPS63230527A (en) | 1987-03-17 | 1987-03-17 | Magneto-optical element |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63230527A true JPS63230527A (en) | 1988-09-27 |
Family
ID=13174136
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6154387A Pending JPS63230527A (en) | 1987-03-17 | 1987-03-17 | Magneto-optical element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63230527A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63291028A (en) * | 1987-05-25 | 1988-11-28 | Furukawa Electric Co Ltd:The | Farady element |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5622699A (en) * | 1979-07-18 | 1981-03-03 | Sperry Rand Corp | Magnetooptical bi1lu2fe5o12 crystal |
| JPS61115259A (en) * | 1984-11-12 | 1986-06-02 | Fujitsu Ltd | Photomagnetic recording medium |
| JPS61179415A (en) * | 1985-02-05 | 1986-08-12 | Matsushita Electric Ind Co Ltd | Magneto-optical element and its production |
| JPS61191598A (en) * | 1985-02-18 | 1986-08-26 | Seiko Epson Corp | Preparation of single crystal |
| JPS6389495A (en) * | 1986-09-30 | 1988-04-20 | Toshiba Corp | Production of garnet ferrite single crystal |
-
1987
- 1987-03-17 JP JP6154387A patent/JPS63230527A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5622699A (en) * | 1979-07-18 | 1981-03-03 | Sperry Rand Corp | Magnetooptical bi1lu2fe5o12 crystal |
| JPS61115259A (en) * | 1984-11-12 | 1986-06-02 | Fujitsu Ltd | Photomagnetic recording medium |
| JPS61179415A (en) * | 1985-02-05 | 1986-08-12 | Matsushita Electric Ind Co Ltd | Magneto-optical element and its production |
| JPS61191598A (en) * | 1985-02-18 | 1986-08-26 | Seiko Epson Corp | Preparation of single crystal |
| JPS6389495A (en) * | 1986-09-30 | 1988-04-20 | Toshiba Corp | Production of garnet ferrite single crystal |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63291028A (en) * | 1987-05-25 | 1988-11-28 | Furukawa Electric Co Ltd:The | Farady element |
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